JPS5957444A - 半導体基板測定用カセツト式ユニツト - Google Patents

半導体基板測定用カセツト式ユニツト

Info

Publication number
JPS5957444A
JPS5957444A JP57168188A JP16818882A JPS5957444A JP S5957444 A JPS5957444 A JP S5957444A JP 57168188 A JP57168188 A JP 57168188A JP 16818882 A JP16818882 A JP 16818882A JP S5957444 A JPS5957444 A JP S5957444A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
probe
sample holding
case
type unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57168188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236388B2 (2
Inventor
Kunio Kouji
高治　邦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPC Electronics Corp
Shimada Rika Kogyo KK
Original Assignee
SPC Electronics Corp
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPC Electronics Corp, Shimada Rika Kogyo KK filed Critical SPC Electronics Corp
Priority to JP57168188A priority Critical patent/JPS5957444A/ja
Publication of JPS5957444A publication Critical patent/JPS5957444A/ja
Publication of JPS6236388B2 publication Critical patent/JPS6236388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57168188A 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト Granted JPS5957444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168188A JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168188A JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Publications (2)

Publication Number Publication Date
JPS5957444A true JPS5957444A (ja) 1984-04-03
JPS6236388B2 JPS6236388B2 (2) 1987-08-06

Family

ID=15863409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168188A Granted JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Country Status (1)

Country Link
JP (1) JPS5957444A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639945A (ja) * 1986-07-01 1988-01-16 Fujitsu Ltd 真空中の電気特性測定方法
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639945A (ja) * 1986-07-01 1988-01-16 Fujitsu Ltd 真空中の電気特性測定方法
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system

Also Published As

Publication number Publication date
JPS6236388B2 (2) 1987-08-06

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