JPS6236388B2 - - Google Patents
Info
- Publication number
- JPS6236388B2 JPS6236388B2 JP57168188A JP16818882A JPS6236388B2 JP S6236388 B2 JPS6236388 B2 JP S6236388B2 JP 57168188 A JP57168188 A JP 57168188A JP 16818882 A JP16818882 A JP 16818882A JP S6236388 B2 JPS6236388 B2 JP S6236388B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- probe
- sample holding
- case
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57168188A JPS5957444A (ja) | 1982-09-27 | 1982-09-27 | 半導体基板測定用カセツト式ユニツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57168188A JPS5957444A (ja) | 1982-09-27 | 1982-09-27 | 半導体基板測定用カセツト式ユニツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5957444A JPS5957444A (ja) | 1984-04-03 |
| JPS6236388B2 true JPS6236388B2 (2) | 1987-08-06 |
Family
ID=15863409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57168188A Granted JPS5957444A (ja) | 1982-09-27 | 1982-09-27 | 半導体基板測定用カセツト式ユニツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5957444A (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS639945A (ja) * | 1986-07-01 | 1988-01-16 | Fujitsu Ltd | 真空中の電気特性測定方法 |
| US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
-
1982
- 1982-09-27 JP JP57168188A patent/JPS5957444A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5957444A (ja) | 1984-04-03 |
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