JPS596000A - Aging control method for electron beam irradiation equipment - Google Patents
Aging control method for electron beam irradiation equipmentInfo
- Publication number
- JPS596000A JPS596000A JP57116078A JP11607882A JPS596000A JP S596000 A JPS596000 A JP S596000A JP 57116078 A JP57116078 A JP 57116078A JP 11607882 A JP11607882 A JP 11607882A JP S596000 A JPS596000 A JP S596000A
- Authority
- JP
- Japan
- Prior art keywords
- beam irradiation
- electron beam
- vacuum
- control
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 17
- 230000032683 aging Effects 0.000 title claims description 11
- 238000000034 method Methods 0.000 title claims description 7
- 230000001133 acceleration Effects 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000001125 extrusion Methods 0.000 claims 1
- 210000003127 knee Anatomy 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
この発り１は、電子線照射装置のエージングを行なう電
子線照射装置のエージング制御力法に関し、電子線照射
装置ｄのエージング全自動的かつ適確に行なえるように
するこさをｌ」的とする。DETAILED DESCRIPTION OF THE INVENTION This starting point 1 relates to an aging control force method for an electron beam irradiation device that performs aging of an electron beam irradiation device. The purpose is "l".
従来、電子線照射装置ハ′のニー／ノブを行なう場合、
゛重子線照射装置１’−＜の加速管および走査管の内部
を真空にし、真草側Ｖこより表示される前記両管内の真
空度を作業者が読ＩＩ！るとともに、読１１ヌられた前
記両管内の真空度に応じ、作業者が前記加速管内におけ
る電子の加速゛電圧および電子を放出するフィラメント
の加熱゛電力をそねぞれ制御Ｉ−てエージングを行なっ
ている。Conventionally, when performing knee/knob using electron beam irradiation equipment,
The interior of the acceleration tube and scanning tube of the deuteron beam irradiation device 1'-< is evacuated, and the operator reads the degree of vacuum inside both tubes displayed from the Makusa side V! At the same time, the operator controls the voltage for accelerating the electrons in the accelerating tube and the electric power for heating the filament that emits electrons, respectively, according to the degree of vacuum in the two tubes read. I am doing it.
しかし、前記の場合、エージングに１日ないし数日の長
時間を要する場合があるとおもに、作業者による真空計
の表示の碑石りの際に読１しり誤差が生じ易く、当該誤
差により前記加速゛電圧等を最適１：ｎにｉ１１制御す
ることができないという不都合が生じる。捷た、作業者
による真空計の表示の胱１１ヌりが常時性なわれず、あ
る時間ごとに行々われるため、作米者が前記加速管およ
び走査管の内部の真空度の低下に気つかず、加速管内で
放電の定生等のトラブルが生じることかある。However, in the above case, aging may take a long time from one day to several days, and an error in reading is likely to occur when the operator marks the display on the vacuum gauge, and this error causes the acceleration of the ``The problem arises that it is not possible to control the voltage, etc. in an optimal 1:n i11 manner. Because the operator does not constantly check the vacuum gauge display, but only at certain intervals, the rice grower is concerned about the decrease in the degree of vacuum inside the acceleration tube and scanning tube. Otherwise, problems such as static discharge may occur within the accelerator tube.
この発明は、＠記の点に留意してなされたものであり、
宙ｒ−線照射装置１゛ｑの加速管内および走査管内の貞
ソ、’ＩＪ ｌｊ：ｉ−を真空度４φ出手段Ｑτより検
出して検出信号を出力し７、’ｌ’ｌ Ｎ（２４φ出信
号を加速電圧制御系に入力して電ｒの加速電圧を制御す
るとともに、前記硬出１舊号を電イ流制側ｉ系に人力し
てフィラメントの加〃（電力を制＋＋ｌｉｌすることを
特徴とする電子線照射４ζ首のエージング制御力法を提
供するものである。This invention was made keeping in mind the points noted in @.
Detection of 'IJ lj:i-' in the acceleration tube and scanning tube of the aerial r-ray irradiation device 1゛q is detected by the vacuum degree 4φ output means Qτ, and a detection signal is outputted. The output signal is input to the accelerating voltage control system to control the accelerating voltage of the electric current r, and the filament is applied manually to the electric current control side i system (to control the electric power). This invention provides an aging control force method for an electron beam irradiation 4ζ neck characterized by the following.
１−たがって、この１ｔ１叫の電子線照射装置のエージ
ング制御力法ＶＣよると、真空度検出手段からの検出信
刊を加速電圧器ｎＬｌｌ糸および電子流器側１系に入力
しで゛電子の加速電圧およびフイラメン；・の加熱電力
を制御するこさにより、電子線照射装置のエージングを
自動的かつ適確に行なうことができる。1- Therefore, according to this aging control force method VC of the electron beam irradiation device, the detection signal from the vacuum degree detection means is input to the accelerating voltage device nLll thread and the electron current device side 1 system. By controlling the accelerating voltage and the heating power of the filament, it is possible to automatically and accurately age the electron beam irradiation device.
つぎＶＣｌこの一定１町を、その１実施例を示した図面
とともに詳卸１にη）１．１利する。Next, VCl 1.1 will be added to the detailed survey 1 along with a drawing showing one embodiment of the VCl.
図面において、（１」は加熱されたフィラメントから放
出さねる′電子を加速する加速管および加速電子流を定
食する走査管等からなる電子線照射装置、ｔ２Ｊ ｋ：
Ｊ’ ＠記加速′Ｈおよび走査管の真空度を使用して横
１」４信号を１４４力する真空度検出手段、（３）は宙
圧制碑信号を出力して前記加速管内に配設さＩｔた電極
への印加電圧、すなわち電子の加速″電圧を制御する加
速′市Ｖ七制薗系、（４）は゛電子漆制御信号を出力１
−で前記フィラメントの加〃（電力を制御し該フィラメ
ントからの電子ｆＭを器側ｊする電子流制御系、（５）
１は第１．第２接点（＋＋＋ 、 （７）がそれぞれ加
速′重圧制御系１３）および電子流制御系（４）の各入
力端に接続さねた切換スイッチであり、切換片（８）が
真空度検出手段ｔｚｌの出力端に接続さねており、真空
度４φ出手段−２）からの検出信号が切換スイッチ（５
）を介して加速電圧制御系１：（Ｊ ｌ電子流制御系（
４）に入力される。In the drawings, (1) is an electron beam irradiation device consisting of an acceleration tube that accelerates electrons emitted from a heated filament, a scanning tube that feeds the accelerated electron flow, etc.
Vacuum level detection means for outputting 144 horizontal 1"4 signals using acceleration 'H and the vacuum level of the scanning tube; (3) outputs an air pressure monument signal and is disposed in the acceleration tube. It is the acceleration system that controls the applied voltage to the electrode, that is, the electron acceleration voltage, (4) outputs the electronic lacquer control signal.
- an electron flow control system that controls the power of the filament and controls the electron fM from the filament; (5)
1 is the first. The second contact (+++, (7) is a changeover switch connected to each input terminal of the acceleration/pressure control system 13) and the electron flow control system (4), and the changeover piece (8) is a vacuum degree detection means. The detection signal from the vacuum degree 4φ output means-2) is connected to the output terminal of the tzl.
) through acceleration voltage control system 1: (J l electron flow control system (
4).
そして、電子線照射装置（υのエージングを行なう場会
、真空ポンプ等により加速管および定食管の内部の空気
圧の低減を開始し、前記両管の内部の真空度を真空度検
出手段（２）により検出を開始し、真空度が定められた
狛より良くなったとき、前記加１ボ管内の電極への電圧
の印加を開始する。このとき、前記加速管内の電極への
電圧の印加開始直後ｄ、加速′α、走査管の内壁に付着
したガスが前記管内に放出さねるため、前記両管内の真
空度が一時低下することがあり、前記真空度の上昇率は
低い。Then, when the electron beam irradiation device (υ) aging is performed, the air pressure inside the accelerator tube and the set meal tube is started to be reduced by a vacuum pump, etc., and the degree of vacuum inside the two tubes is detected by the degree of vacuum detection means (2). When the degree of vacuum becomes better than a predetermined level, the application of voltage to the electrodes in the accelerating tube is started.At this time, immediately after the start of applying the voltage to the electrodes in the accelerating tube. d. Acceleration 'α. Because the gas adhering to the inner wall of the scanning tube is not released into the tube, the degree of vacuum in both tubes may temporarily decrease, and the rate of increase in the degree of vacuum is low.
さらに、切萌スイッチ（５）の切換片（３）を第１接点
＋ｆｉｌに恢続［−７，真空度検出手段（２〕により検
出されたに輩度に基ついて員を度検出手段（２）から出
力される検出信号を、り換スイッチ（５）を介して加速
型圧制ｉｌｊ糸＋３）に出力１２、加速電圧制御系（３
）により、前記検出信号による加速管、走査管の内部の
真空度に応じて加速管の′電極への印加電圧を制御する
さともに、電源電圧の変動にも応じて前記印加電圧を制
御１〜つつ、前記印加電圧を所定値になるまで休々に増
加し、前記印加電圧が前記所定値になった時点で該印加
電圧を一定に保持する。Further, the switching piece (3) of the cut-off switch (5) is connected to the first contact +fil [-7], and the vacuum level is adjusted based on the vacuum level detected by the vacuum level detection unit (2). ) is outputted from the acceleration voltage control system (3) via the switching switch (5).
) controls the applied voltage to the 'electrode of the accelerating tube according to the degree of vacuum inside the accelerating tube and scanning tube based on the detection signal, and also controls the applied voltage according to fluctuations in the power supply voltage. At the same time, the applied voltage is increased intermittently until it reaches a predetermined value, and when the applied voltage reaches the predetermined value, the applied voltage is held constant.
つぎに、ＩＪ＋＋速管の’？Ｉ’ｆ極への印加電圧を所
定値に保持する古ともに、切換スイッチ（５）の切換片
（８）を第２接点（７）Ｋ接続Ｌ 、真空度検出手段（
２］からの検ｆｔｌ信号を、切換スイッチ（５）を介し
て電子流制御系：４）に出力し、６り記の加速管の電極
への印加電圧の制御と同様に、前ｉＵ２横川横骨信号る
加速管、走査管の内部の真空度に応じてフィラメントの
加熱電力を所定ｎ＋４ＶＣ制御することにより、電子線
照射装置（υのニー／フグが完ｒする。Next, IJ++ fast tube'? In order to maintain the voltage applied to the I'f pole at a predetermined value, the changeover piece (8) of the changeover switch (5) is connected to the second contact (7) K, and the degree of vacuum detection means (
The detection ftl signal from 2] is output to the electron flow control system: 4) via the changeover switch (5), and in the same way as the control of the voltage applied to the electrodes of the accelerating tube described in 6. By controlling the heating power of the filament to a predetermined value n+4 VC according to the degree of vacuum inside the bone signal accelerating tube and scanning tube, the knee/puffer of the electron beam irradiation device (υ) is completed.
なお、前記の加速管の電極への印加電圧お」：びフィラ
メントの加熱電力の制御は、フィラメントの加熱電力の
ｉｌ制御の場合、たとえば第２図中の曲線Ａ［示すよう
に、時間的に変化する真空度が、予め設定されたレベル
ａ、ｈに対してｉＬ以下＋ １１と１〕すの１川、１）
以上にあるさきに、同図中の曲線Ｂに示すように、フィ
ラメントの加熱電力をそ力。The voltage applied to the electrodes of the accelerating tube and the heating power of the filament can be controlled by controlling the heating power of the filament, for example, by curve A in FIG. The degree of vacuum that changes is less than iL + 11 and 1] with respect to the preset levels a and h, 1)
Before doing the above, the heating power for the filament was removed as shown by curve B in the same figure.
ぞれ増加１保持、減少させ、所定の真空度のもとて前記
加熱゛出力を最終的に所定の値に制御ｉ−１かつ前記印
加電圧も同様の動作により制御する。The heating output is finally controlled to a predetermined value under a predetermined degree of vacuum by increasing, holding and decreasing by 1, respectively, and the applied voltage is also controlled in a similar manner.
したがって、前記実施例によると、真空度検出手段（２
）により電子線照射装ｗ（１）の加速管、走査管の内部
の真空度を１會出するとともに、真空度検出手段（２］
から４チ出信号を加速電圧制御系（３）に出力し、力ロ
速青の電極への印加電圧を前記検出信号に応じ制御して
所定値に保持したのち、切換スイッチ（５）を切候えて
直空１！’！Ｊ 、１分出手段（２）からの検出信号を
電子Ｒｅ １ｌｉｌｌ ｊｉｌｌｌ糸（４）に入力（７
、フィラメントの加熱゛心力を前記Ａ４Ｒ出１バ号に応
、してｆｌ制御することにより、電子線照射装置’？＋
］）のニージンクをＩ」動的に行なうことができ、従来
のように、作業者が常に待機する必要もなく、ニージン
クを適蒲′に行なうことができる。Therefore, according to the embodiment, the degree of vacuum detection means (2
) to generate a degree of vacuum inside the acceleration tube and scanning tube of the electron beam irradiation device w(1), and also to detect the degree of vacuum by detecting the degree of vacuum (2).
After outputting the 4-chi output signal to the acceleration voltage control system (3) and controlling the voltage applied to the power/speed blue electrode according to the detection signal to maintain it at a predetermined value, the changeover switch (5) is turned off. Warate Naozora 1! '! J, the detection signal from the 1 minute output means (2) is input to the electronic Re 1lill jill yarn (4) (7
The electron beam irradiation device'? +
]) knee jink can be performed dynamically, and there is no need for the operator to always stand by as in the past, and the knee jink can be performed at an appropriate time.
なお、真空度の変化率を加味ｌ〜でｉ′ｌＩ記制御全制
御うようにしてもよい。Incidentally, the entire control may be performed by taking into account the rate of change in the degree of vacuum.
４ 図面の１Ｍ雫々説’！ｌＪ
図面に、この発り１の電子線照射装置のエージング器側
１力法の１実施例を示し、第１図はブロック構成図、躬
２図はエーンング制側１におけるフィラメントの加〃（
′重力および真空度と時間との関係図である。4 1M drop theory of drawings'! The drawings show an example of the aging device side 1 force method of this electron beam irradiation device 1, FIG. 1 is a block diagram, and FIG.
'It is a diagram of the relationship between gravity, degree of vacuum, and time.
（１〕・・・電子線照射装置ｄ、（２）・・・真空度検
出手段、１３）・・・加速電圧制御系、（４）・・・電
子流制御系。(1)... Electron beam irradiation device d, (2)... Vacuum degree detection means, 13)... Acceleration voltage control system, (4)... Electron flow control system.
代理人 弁カ１１士 藤田龍太部 第１図 第２図 時Ｍ−Agent: Benka 11, Ryutabe Fujita Figure 1 Figure 2 Time M-
Claims (1)
青管内の真空度を真空度梗１」１手段により便用（−て
硬出信号を出力し、前記＝１４ｊ） ＩＪｊ信号を加速
゛目イ圧制御系に入力して゛電子の力［１速゛市川を制
御すると吉もに、ｉｌｌ配検出イを号を電子ｍ Ｍｊ制
御糸に入力して）１ラメントの加熱電力を１ｆｆｌｌ側
ｊすることを特徴とする電子線照射装置４のエージング
曲制御力法。 （２） 真空ｊＷ傅出手段の使用信号を加速電圧制御
系に入力して加速重圧を所定歯に制御したのち、前記・
助出信号を電子流制御系に入力して電子流を所定イ１ａ
に制御することを特徴とする″電子線照射装置のエージ
ング匍［徊ｊ）ｊ法。[Claims] ■ 'Electron beam irradiation system JJII; The degree of vacuum inside the tube and the red and blue tubes is set to 1'' by means of means (-) and a hard extrusion signal is output, and the above = 14j ) Input the IJj signal to the acceleration control system and control the electronic force [1st speed] Ichikawa, then input the ill distribution detection signal to the electronic mMj control thread) to control the electronic force [1st speed]. An aging curve control force method for an electron beam irradiation device 4, characterized in that the heating power is increased to 1ffll side. (2) After inputting the use signal of the vacuum jW output means to the acceleration voltage control system and controlling the acceleration pressure to a predetermined value,
Input the aid signal to the electron flow control system to control the electron flow to a specified level 1a.
``An aging method for electron beam irradiation equipment, which is characterized by controlling the aging process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57116078A JPS596000A (en) | 1982-07-02 | 1982-07-02 | Aging control method for electron beam irradiation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57116078A JPS596000A (en) | 1982-07-02 | 1982-07-02 | Aging control method for electron beam irradiation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS596000A true JPS596000A (en) | 1984-01-12 |
| JPH0437400B2 JPH0437400B2 (en) | 1992-06-19 |
Family
ID=14678161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57116078A Granted JPS596000A (en) | 1982-07-02 | 1982-07-02 | Aging control method for electron beam irradiation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS596000A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013235706A (en) * | 2012-05-08 | 2013-11-21 | Toshiba Corp | Device of controlling accelerator, and method of controlling accelerator |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53103995U (en) * | 1977-01-27 | 1978-08-22 |
-
1982
- 1982-07-02 JP JP57116078A patent/JPS596000A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53103995U (en) * | 1977-01-27 | 1978-08-22 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013235706A (en) * | 2012-05-08 | 2013-11-21 | Toshiba Corp | Device of controlling accelerator, and method of controlling accelerator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437400B2 (en) | 1992-06-19 |
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