JPS5972004A - Electromagnetic positioning device - Google Patents

Abstract

PURPOSE:To perform three-axis simultaneous positioning on an X and an Y axis and on an axis of rotation by fixing a platen for rotational position fixation to a head part, and making a facing head part rotatable. CONSTITUTION:A platen 1 made of magnetic material has lattice-shaped projections 13 and nonmagnetic resin 14 is charged between the projections. A group of electromagnetic elements for the X and Y axes are embedded in the head part 2 and a current corresponding to a positioning signal is applied to perform the planar positioning between the platen 1 and head part 2. A platen 4 for rotation which is made of magnetic material is fixed to the back of the head part 2 and resin 6 is charged between radial projections 5 on the surface. A shaft 10 and a head part 7 are rotatable and the current corresponding to the positioning signal is supplied to the electromagnetic elements through a cord 13 to perform the rotation-directional positioning between the platen 4 and head part 7.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electromagnetic positioning device that enables rotational positioning of two axes (x, y) on the same plane and six axes of rotation.

Conventional output positioning devices perform positioning on one or two axes, and when used in assembly equipment etc., positioning in the rotational direction is performed using a pulse motor or servo motor.

Alternatively, they had no choice but to use other means such as a solenoid. When these means are used, high-precision positioning is difficult due to looseness, deformation, etc. in the power transmission path to the final positioning part, and the reliability and durability of the device are poor. It had drawbacks.

SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned conventional drawbacks and to provide a three-axis rotating electromagnetic positioning device for X, Y axes, and rotary axes that has high precision and high reliability.

The present invention will be explained in detail below based on one embodiment.

FIG. 1 is a sectional view of an electromagnetic positioning device according to the present invention.

Reference numeral 1 denotes a platen made of magnetic material, which has a lattice-like projection 13 on its surface, and a non-magnetic resin 14 is filled between the projections to form a smooth surface. Reference numeral 2 denotes a first head portion that opposes the platen 1, and includes a group of N magnetic elements for each of the X and Y axes (the surface of each electromagnetic element is formed with a protrusion that opposes the protrusion 13 of the platen 1). There is.

- Not shown) is embedded, and by applying a current corresponding to the positioning signal, it becomes possible to position the platen 1 and the first head part 2 on a plane.

An appropriate distance between the platen 1 and the first head portion 2 is maintained by a hydrostatic air bearing. The current applied to the electromagnetic element and the compressed air forming the air bearing are supplied to the first head section 2vc by the vibe 3VC.

A rotating platen 4 is fixed to the back surface of the first head section 2. FIG. 2 is a view taken along the line A--A in FIG. 1. The rotating platen 4 is made of magnetic material! It has radial protrusions 5 on its surface, and a non-magnetic resin 6 is filled between the protrusions to form a smooth surface. Reference numeral 7 denotes a second head portion that opposes the rotating platen 4, and a rotating electromagnetic element 8 is fixed to the frame 9. The surface of the rotary molding element 8 has protrusions that oppose the radial protrusions 5. Reference numeral 10 denotes a shaft, which is fixed to the first head portion 2 with a key 11. axis 10 and second
The space between the platen 4 and the second head part 7 is rotatable via a bearing 12, and a current corresponding to the positioning signal is supplied to the electromagnetic element 8 through the cord 13, so that the platen 4 and the second head part 7 are connected to each other. It is possible to determine relative rotational position between the two. The bearing mechanism between the platen 4 and the second head portion 7 may be a static pressure electric bearing as described above, or a mechanical bearing structure may be adopted.

Although the detailed explanation has been given above based on FIGS. 1 and 2, it is clear that the same results can be obtained even if the second head section 7 and the rotating platen 4 are in opposite positions. be. In other words, the first head part 2 and the second head part 7 are integrated with each other back to back, and the rotating platen 4 is held with full bearings so as to be rotatable with respect to the integrated head part. Relative positioning in the rotational direction is also possible even if the (Not shown) When the 6-axis rotation positioning device according to the present invention is used in an assembly device or the like, a mechanism (not shown) for attaching and detaching assembly parts etc. to the frame 9 of the second head section 7, which is a rotating section, is provided. All you have to do is install it with screws or the like. Also, in the case where the first and second heads (2, 7)' are integrated with each other back to back, and the platen 4 is positioned so that it can rotate freely, it is possible to install the above-mentioned attachment/detachment mechanism on the platen 4. , similar results are obtained.

As described above, according to the present invention, a platen for rotational positioning is fixed to the head part of an electromagnetic positioning device that performs positioning in two XY axes, and the opposing head part is made rotatable, or By fixing the rotational positioning head part and making the opposing platen part rotatable, positioning in the rotational direction is performed and a three-axis rotating electromagnetic positioning device is made possible.

Therefore, for determining rotational position, pulse motors, servo motors,
Compared to devices that use solenoids and other devices, direct positioning is possible without the need for a power transmission structure, so there is no drop in accuracy due to looseness or deformation in the transmission path, and high-precision positioning is possible. , since the transmission path itself is not required, it has the effect of achieving high reliability (-
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[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a three-axis rotating position adjusting device according to the present invention, and FIG. 2 is a front view of the rotating platen portion in FIG. 1. DESCRIPTION OF SYMBOLS 1...Platen for XY411 2...First head part 4...Rotating platen 7...Second head part 8...Rotating mold can element 9...Frame 10.
...Shaft 12...Bearing and above Applicant Daini Seikosha Co., Ltd. Agent Patent attorney Tsutomu Mogami 6-

Claims (1)

[Claims] (1) Consists of a platen having a plurality of protrusions made of a magnetic material and filling the gaps between the protrusions with a non-extractable substance, and a head in which an electromagnetic element having protrusions opposing the platen is embedded. In the relative positioning device VC, a rotating platen is integrally installed in a first head portion having XY electromagnetic elements for positioning two axes (XY axes) on the same plane, and By rotatably attaching a second head portion having a rotating electromagnetic element opposite to the rotating platen to the rotating platen, rotational positioning of the three axes of X, Y, and rotation axes is made possible. An electromagnetic positioning device characterized by: (2. In claim 1, a second head portion having a rotating electromagnetic element is fixed to the first head portion,
By rotatably attaching a rotating platen opposing the second head to the integrated first and second heads, the rotational position of the three axes of υ, X, Y, and rotational axes can be determined. An electromagnetic positioning device characterized by making it possible to.