JPS5975680A - Manufacture of thin film element - Google Patents

Abstract

PURPOSE:To prevent the generation of unsatisfactory cutting on a glass substrate and the breakage of a screen as well as to prevent the deterioration in dampproof property of an element by a method wherein a printing process is performed continuously on a hard passivation resin without separating it for each element, and the glass and the resin are broken simultaneously by giving a flaw on the surface of the glass located on the reverse side. CONSTITUTION:In the case of the solar battery and the photoelectromotive force element wherein morphous silicon is used, a transparent electrode 2 such as indium tin oxide, SnO2 and the like is formed in the thickness of approximately 500-1,500Angstrom on a glass substrate 1 of 0.5-1mm. in thickness by performing an electron beam vapor-deposition or a sputtering, and a semiconductor thin film 3 of approximately 3,500-5,000Angstrom consisting of a P-layer, an i-layer and an N-layer is deposited on said electrode 2. Then, an electrode 4 is formed by vacuum-depositing metals such as aluminum, nickel, chromium, chitanium and the like. Lastly, the above is dried up and hardened after a screen printing has been performed. Cutting is performed by producing a flaw on the glass surfaces 9, 9' opposite side of the surface coated with resin 5 by a cutting machine, and splitting the glass layer 1 and the resin 5 simultaneously.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for producing glass tta-3 thin film elements used in amorphous silicon solar cells.

Structure of the conventional example and its problems In the conventional example, as shown in FIG. 1, a passivation resin 5 is applied on a glass substrate 1 separately for each element. 7 and 8 are electrical terminals. FIG. 2 shows an AA cross section at the center of the element. A thin film 3 of amorphous silicon, chalcogenide compound semiconductor, etc. is deposited on the first electrode 2 formed on the glass substrate 2, and a second electrode 4 is formed thereon. Resin 5 is applied. The passivation resin 5 mainly plays the role of moisture proofing and mechanical protection of the electrodes 2, 4 and the thin film 3, and in the case of solar cells and photovoltaic elements, both the electrode 4 and the resin 5 are transparent, or the electrode 2 is transparent. Must be an electrode. The terminals 7 and 8 of each electrode 2 and 4 are finally connected. The passivation resin 5 is generally applied by screen printing and heated to harden and dry. Using the pattern of the applied resin as a guide, scratch the glass surfaces 6, 6', etc. from which the resin has been separated, vertically and horizontally using a cutting machine with a cutting edge made of diamond or tungsten carbide, and then turn the scratched surface outward. In the case of Figure 1, 12 elements can be separated by applying force and bending the element.

The first drawback of the conventional example is that there are many cases of poor canting. If the edge of the cutting machine touches the resin 6 even slightly, the glass will not be scratched at that part, and when bent, the glass will break into an arbitrary shape, resulting in many defective products.

Passivation resin 6 has a thickness of 2, unlike normal printing.
The thickness is about 0 to 100 μ, and it is difficult to remove pattern blur using screen printing.

The viscosity is temporarily lowered by the heating of the drying pot during hardening and drying, and the slits with a spacing of 0.2 to 0.57 nN in the 6 and 6' portions tend to be partially connected.

A second disadvantage is that the printing press screen is easily damaged during cleaning. Resin 5 for printing can be used for 1 hour or more even at room temperature.
It hardens and dries within 6 hours, so it must be periodically wiped off and cleaned with a solvent.

The printing screen has a small part of the emulsion 11 corresponding to the 0.2 to 0.6 slits of 6 and 6', so the emulsion easily peels off from the mesh when washing the face.

The third drawback is a decrease in moisture resistance reliability due to misalignment between the pattern of the thin film 3 and the pattern of the resin 5. The glass substrate has a large external dimension imbalance, and if the bookmark and passivation resin are misaligned during printing, the edge of the thin film 3 will protrude from the resin 5 and be exposed, reducing moisture resistance reliability.

Purpose of the Invention The present invention solves the above three drawbacks of the conventional example, has almost no defects during glass cutting, extends the lifespan of the NuClean screen printing machine that applies resin by more than three times, and eliminates the problem of printing misalignment. Deterioration of moisture resistance of the element can be prevented.

114th Form of the Invention The present invention prints a hard passivation resin continuously without separating each element, scratches the glass surface opposite to the surface on which the resin is applied, and cuts the glass and resin at the same time. This is a method for sorting thin film elements.

Description of examples An embodiment according to the present invention is shown in FIGS. 3 and 4.

As the resin 3, a hard resin (preferably having a Shore hardness of 8o or more) that is effective in moisture resistance, such as an epoxy resin or a silicone resin, is used. In the case of solar cells and photovoltaic devices that use amorphous silicon, ITO (indium tin oxide) is used for the glass substrate 1 with a thickness of ○-5W ~ 1M.
, 5n02 or the like is formed by about 500 to 1,500 people by electron beam evaporation or sputtering, and a semiconductor thin film 3 consisting of three layers, P layer, 1 layer, and N layer, is formed on it by plasma CVD in silane gas. 35ooλ~5o00 people will accumulate. Next, aluminum, nickel, and chromium.

Electrodes 4 are formed by vacuum evaporating metal such as titanium, and finally hard resin 5 is printed with Nuclean and then hardened and dried.

Cutting is done on the glass surface 9 on the opposite side to which the resin 5 was applied.
By making a scratch on the part 9' with a canting machine, it is possible to break the glass 1 and the hard resin 6 at the same time. Therefore, almost no defects occur. If the resin is soft, it is difficult to break and peeling of the resin is likely to occur. In the case of epoxy resins, the hardness and adhesion J vary depending on the type of pigment, and good results are obtained with amine-based epoxy resins that use iron oxide (red iron oxide) or carbon as pigments, as they have strong adhesion to the substrate and high hardness. was gotten. When using IJ to make scratches on the glass surface opposite to the resin coating as in the present invention, the pattern of the thin film 3 is visible through the glass substrate 1, and the cutter head of the cutting machine is placed in the center of the IJ using a microscope. There is no deterioration in moisture resistance reliability due to canting or misalignment of printing as in conventional examples.

As can be seen from the embodiment shown in FIG. 3, the screen used for Nuclean printing of the resin 5 does not have the narrow emulsion pattern [1], so the emulsion does not peel off during washing. Therefore, the screen lasts about three times longer than the conventional example. Setting conditions for screen printing is also easy unless there is a fine pattern.

Effects of the Invention According to the present invention, cutting defects of the glass substrate do not occur, resin printing is easy, and the life of the screen is long.
The moisture resistance reliability of the element does not deteriorate.

[Brief explanation of the drawing]

Fig. 1 is a plan view of a multi-element forming plate for explaining the prior art, Fig. 2 is a sectional view of Fig. 1, and Fig. 3 is a plan view of the multi-element forming plate for explaining the present invention in detail. , FIG. 4 is a sectional view of FIG. 3. 1... Glass substrate, 2, 4... Electrode,
3...Thin film, 5...Resin, 7,8...
...Electric terminal, 9,9'...Glass surface to be cut. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] A plurality of thin film elements are formed on a glass substrate, a continuous hard passivation resin is applied thereon and cured, and then a surface of the glass substrate opposite to the resin-coated surface is scratched to form the glass substrate. A method for manufacturing thin film elements that simultaneously splits the resin and the resin.