JPS5980461U - 真空装置 - Google Patents

真空装置

Info

Publication number
JPS5980461U
JPS5980461U JP17518882U JP17518882U JPS5980461U JP S5980461 U JPS5980461 U JP S5980461U JP 17518882 U JP17518882 U JP 17518882U JP 17518882 U JP17518882 U JP 17518882U JP S5980461 U JPS5980461 U JP S5980461U
Authority
JP
Japan
Prior art keywords
vacuum equipment
bell jar
vacuum
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17518882U
Other languages
English (en)
Inventor
原田　八十雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP17518882U priority Critical patent/JPS5980461U/ja
Publication of JPS5980461U publication Critical patent/JPS5980461U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は従来例を示す縦断面図であり、第２図は本考案
の一実施例を示す縦断面図である。 １・・・ベルジャ、４・・・通路。

Claims (1)

  1. 【実用新案登録請求の範囲】 １　排気装置に接続されたベルジャの内部に、このベル
    ジャを冷却する装置が備えられた真空装置。 ２　冷却温度が０°Ｃ以下である実用新案登録請求の範
    囲第１項記載の真空装備。 ３　ベルジャの内壁に液体空気若しくは液体窒素を導通
    する通路が形成される実用新案登録請求の範囲第１項若
    しくは第２項記載の真空装置。
JP17518882U 1982-11-18 1982-11-18 真空装置 Pending JPS5980461U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17518882U JPS5980461U (ja) 1982-11-18 1982-11-18 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17518882U JPS5980461U (ja) 1982-11-18 1982-11-18 真空装置

Publications (1)

Publication Number Publication Date
JPS5980461U true JPS5980461U (ja) 1984-05-31

Family

ID=30381201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17518882U Pending JPS5980461U (ja) 1982-11-18 1982-11-18 真空装置

Country Status (1)

Country Link
JP (1) JPS5980461U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612293U (ja) * 1979-07-09 1981-02-02
JPS5741368A (en) * 1980-08-26 1982-03-08 Toshiba Corp Vacuum treatment chamber containing trap member
JPS5785971A (en) * 1980-11-17 1982-05-28 Toshiba Corp Thin film former

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612293U (ja) * 1979-07-09 1981-02-02
JPS5741368A (en) * 1980-08-26 1982-03-08 Toshiba Corp Vacuum treatment chamber containing trap member
JPS5785971A (en) * 1980-11-17 1982-05-28 Toshiba Corp Thin film former

Similar Documents

Publication Publication Date Title
JPS5980461U (ja) 真空装置
JPS59153353U (ja) 高炉等高温雰囲気の軸シ−ル装置
JPS5954155U (ja) 金型冷却用パイプ
JPS6021843U (ja) 排ガス管装置
JPS6134063U (ja) 冷却装置
JPS5940776U (ja) 冷却装置
JPS58172308U (ja) 閉鎖配電盤
JPS5824953U (ja) 超高真空装置
JPS58178643U (ja) 低温保持容器
JPS5855272U (ja) 極低温装置
JPS60119353U (ja) ライスボツクス
JPS5988282U (ja) 真空排気装置用コ−ルドトラツプ
JPS5982658U (ja) 部品取扱い器具
JPS59104423U (ja) 内部冷却電力ケ−ブル
JPS5922972U (ja) 吸排気管装置
JPS59145565U (ja) 真空処理装置
JPS5978115U (ja) 冷房装置用の蒸発器
JPS5811170U (ja) メタル中空オ−リング
JPS6030592U (ja) 電子機器
JPS5862045U (ja) 換気装置
JPS5864977U (ja) 蒸発冷却機器
JPS58153904U (ja) 警報器付ガスコンロ
JPS609294U (ja) 電子機器の放熱装置
JPS5826707U (ja) カ−ステレオ用パツク插入口の照明装置
JPS6085038U (ja) 過電流継電器の保護箱