JPS5985571U - Sample holder for charged particle beam devices, etc. - Google Patents
Sample holder for charged particle beam devices, etc.Info
- Publication number
- JPS5985571U JPS5985571U JP18141482U JP18141482U JPS5985571U JP S5985571 U JPS5985571 U JP S5985571U JP 18141482 U JP18141482 U JP 18141482U JP 18141482 U JP18141482 U JP 18141482U JP S5985571 U JPS5985571 U JP S5985571U
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- particle beam
- charged particle
- sample
- beam devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の欠点を説明するための図、第２図は本考
案の一実施例を示すための図である。
１：イオン源、２：イオンビーム、３：収束レンズ、４
：対物レンズ、５．１２：試料、６：エネルギーフィル
ター、＄ａ、 ５ｂ、 ２２． ２３：開口、７：
質量分析装置、８：検出器、９．１４：熱電子フィラメ
ント、Ａニアノード、１０：本体、１１：試料保持部、
１３：イオン化室、１５ニアノード、１６：折り返し電
極、１７：支持部材、１８：絶縁部材、１９：加熱電源
、２０：電源、２１：イオンエネルギーＷ。FIG. 1 is a diagram for explaining the conventional drawbacks, and FIG. 2 is a diagram for showing an embodiment of the present invention. 1: Ion source, 2: Ion beam, 3: Converging lens, 4
: Objective lens, 5.12: Sample, 6: Energy filter, $a, 5b, 22. 23: Opening, 7:
Mass spectrometer, 8: detector, 9.14: thermionic filament, A near node, 10: main body, 11: sample holder,
13: ionization chamber, 15 near node, 16: folded electrode, 17: support member, 18: insulating member, 19: heating power source, 20: power source, 21: ion energy W.
Claims (1)
るための試料ホルダーにおいて、試料保持部の近傍に試
料室内の残留ガスをイオン化するためのイオン化室を一
体的に取り付けてなる荷電粒子線装置等の試料ホルダー
。In a sample holder for placing a sample to be analyzed on a sample holder and inserting it into a sample chamber, an ionization chamber is integrally attached near the sample holder to ionize residual gas in the sample chamber. Sample holder for particle beam equipment, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18141482U JPS5985571U (en) | 1982-11-30 | 1982-11-30 | Sample holder for charged particle beam devices, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18141482U JPS5985571U (en) | 1982-11-30 | 1982-11-30 | Sample holder for charged particle beam devices, etc. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5985571U true JPS5985571U (en) | 1984-06-09 |
Family
ID=30393120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18141482U Pending JPS5985571U (en) | 1982-11-30 | 1982-11-30 | Sample holder for charged particle beam devices, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5985571U (en) |
-
1982
- 1982-11-30 JP JP18141482U patent/JPS5985571U/en active Pending
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