JPS5985916A - 振動センサ - Google Patents
振動センサInfo
- Publication number
- JPS5985916A JPS5985916A JP57195890A JP19589082A JPS5985916A JP S5985916 A JPS5985916 A JP S5985916A JP 57195890 A JP57195890 A JP 57195890A JP 19589082 A JP19589082 A JP 19589082A JP S5985916 A JPS5985916 A JP S5985916A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- vibrating
- vibrating part
- machining
- vibration sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57195890A JPS5985916A (ja) | 1982-11-10 | 1982-11-10 | 振動センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57195890A JPS5985916A (ja) | 1982-11-10 | 1982-11-10 | 振動センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5985916A true JPS5985916A (ja) | 1984-05-18 |
| JPH0132453B2 JPH0132453B2 (de) | 1989-06-30 |
Family
ID=16348683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57195890A Granted JPS5985916A (ja) | 1982-11-10 | 1982-11-10 | 振動センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5985916A (de) |
-
1982
- 1982-11-10 JP JP57195890A patent/JPS5985916A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0132453B2 (de) | 1989-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2278272B1 (de) | Stimmgabelschwinger und Schwingungsgyroskop mit solch einem Stimmgabelschwinger | |
| US4215570A (en) | Miniature quartz resonator force transducer | |
| US4468584A (en) | Unidirectional flexure type tuning fork crystal vibrator | |
| EP1037383A2 (de) | Piezoelektrische Vibratoranordnung und piezoelektrische Resonanzvorrichtung | |
| US4743790A (en) | Force sensing vibrating beam resonator | |
| JPH0221711A (ja) | 圧電振動部品 | |
| JPH0643179A (ja) | 加速度センサ及び該センサの製造方法 | |
| JPS5985916A (ja) | 振動センサ | |
| EP0100501B1 (de) | Schwingungssensor | |
| JPH0414882B2 (de) | ||
| JPS5923223A (ja) | 振動センサ | |
| JPH08114457A (ja) | 圧電ジャイロ及びその製造方法 | |
| JPH0256619B2 (de) | ||
| JPS6016108Y2 (ja) | 音叉型水晶振動子 | |
| JPH11239036A (ja) | 圧電振動子 | |
| US4841609A (en) | A method of manufacturing piezoelectric vibrators | |
| JPS618630A (ja) | 振動センサ | |
| JPS6320185Y2 (de) | ||
| JPH046285B2 (de) | ||
| JPS59212A (ja) | 圧電共振素子とその製造方法 | |
| JPH089935Y2 (ja) | 水晶振動子の電極構造 | |
| JPS5970924A (ja) | 振動センサ | |
| JPH0144047B2 (de) | ||
| GB2041640A (en) | Tuning-fork type piezo-electric vibrator | |
| JPH0362044B2 (de) |