JPS5990048A - クロロシラン中のほう素不純物の検出法 - Google Patents

クロロシラン中のほう素不純物の検出法

Info

Publication number: JPS5990048A
Authority: JP; Japan
Prior art keywords: boron; residue; analysis; item; chloro
Prior art date: 1982-09-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP58173281A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0548424B2 (2

Inventor

ハロルド・リチヤ−ド・カウルス

ウイリアム・デイビツド・クレイ

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

General Electric Co

Original Assignee

General Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-09-21

Filing date

1983-09-21

Publication date

1984-05-24

1983-09-21 Application filed by General Electric Co filed Critical General Electric Co

1984-05-24 Publication of JPS5990048A publication Critical patent/JPS5990048A/ja

1993-07-21 Publication of JPH0548424B2 publication Critical patent/JPH0548424B2/ja

Status Granted legal-status Critical Current

Links

238000000034 method Methods 0.000 title claims description 34
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims description 30
229910052796 boron Inorganic materials 0.000 title claims description 28
239000012535 impurity Substances 0.000 title claims description 18
239000005046 Chlorosilane Substances 0.000 title claims description 6
KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims description 6
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 15
229910052801 chlorine Inorganic materials 0.000 claims description 14
239000000460 chlorine Substances 0.000 claims description 14
QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 10
238000004458 analytical method Methods 0.000 claims description 9
125000001309 chloro group Chemical group Cl* 0.000 claims description 9
238000012360 testing method Methods 0.000 claims description 9
239000003153 chemical reaction reagent Substances 0.000 claims description 7
238000002798 spectrophotometry method Methods 0.000 claims description 7
150000001875 compounds Chemical class 0.000 claims description 5
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
238000001704 evaporation Methods 0.000 claims description 3
230000008020 evaporation Effects 0.000 claims description 3
238000010926 purge Methods 0.000 claims description 3
ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical group Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 2
239000005052 trichlorosilane Substances 0.000 claims description 2
JZUFKLXOESDKRF-UHFFFAOYSA-N Chlorothiazide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC2=C1NCNS2(=O)=O JZUFKLXOESDKRF-UHFFFAOYSA-N 0.000 claims 3
PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 2
229910052731 fluorine Inorganic materials 0.000 claims 2
239000011737 fluorine Substances 0.000 claims 2
239000013078 crystal Substances 0.000 claims 1
239000000243 solution Substances 0.000 description 12
VFLDPWHFBUODDF-FCXRPNKRSA-N curcumin Chemical compound C1=C(O)C(OC)=CC(\C=C\C(=O)CC(=O)\C=C\C=2C=C(OC)C(O)=CC=2)=C1 VFLDPWHFBUODDF-FCXRPNKRSA-N 0.000 description 8
-1 boronate compound Chemical class 0.000 description 6
ZADPBFCGQRWHPN-UHFFFAOYSA-N boronic acid Chemical compound OBO ZADPBFCGQRWHPN-UHFFFAOYSA-N 0.000 description 6
229910052710 silicon Inorganic materials 0.000 description 6
239000010703 silicon Substances 0.000 description 6
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
238000003556 assay Methods 0.000 description 5
238000001514 detection method Methods 0.000 description 5
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
238000010521 absorption reaction Methods 0.000 description 4
229940109262 curcumin Drugs 0.000 description 4
235000012754 curcumin Nutrition 0.000 description 4
239000004148 curcumin Substances 0.000 description 4
VFLDPWHFBUODDF-UHFFFAOYSA-N diferuloylmethane Natural products C1=C(O)C(OC)=CC(C=CC(=O)CC(=O)C=CC=2C=C(OC)C(O)=CC=2)=C1 VFLDPWHFBUODDF-UHFFFAOYSA-N 0.000 description 4
KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 4
238000005516 engineering process Methods 0.000 description 4
125000000217 alkyl group Chemical group 0.000 description 3
150000001638 boron Chemical class 0.000 description 3
238000006243 chemical reaction Methods 0.000 description 3
239000000126 substance Substances 0.000 description 3
VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
241001474791 Proboscis Species 0.000 description 2
BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
239000012445 acidic reagent Substances 0.000 description 2
238000011088 calibration curve Methods 0.000 description 2
238000004737 colorimetric analysis Methods 0.000 description 2
150000002431 hydrogen Chemical class 0.000 description 2
229910052739 hydrogen Inorganic materials 0.000 description 2
239000001257 hydrogen Substances 0.000 description 2
239000012088 reference solution Substances 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
238000000926 separation method Methods 0.000 description 2
239000005049 silicon tetrachloride Substances 0.000 description 2
MYZIJBJPIHILLG-UHFFFAOYSA-N 1-chloro-9h-fluorene Chemical class C12=CC=CC=C2CC2=C1C=CC=C2Cl MYZIJBJPIHILLG-UHFFFAOYSA-N 0.000 description 1
241001072256 Boraginaceae Species 0.000 description 1
235000007689 Borago officinalis Nutrition 0.000 description 1
BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
241000283690 Bos taurus Species 0.000 description 1
DDXTWDZQFNCVEY-UHFFFAOYSA-N C1C[ClH][ClH]C1 Chemical compound C1C[ClH][ClH]C1 DDXTWDZQFNCVEY-UHFFFAOYSA-N 0.000 description 1
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
FBPFZTCFMRRESA-KVTDHHQDSA-N D-Mannitol Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-KVTDHHQDSA-N 0.000 description 1
238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
229930195725 Mannitol Natural products 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
239000002253 acid Substances 0.000 description 1
230000002378 acidificating effect Effects 0.000 description 1
150000001350 alkyl halides Chemical class 0.000 description 1
239000012736 aqueous medium Substances 0.000 description 1
125000003118 aryl group Chemical group 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
150000001720 carbohydrates Chemical class 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
KVPIFZRDXDYGBA-UHFFFAOYSA-N chlorine(1+) Chemical compound [Cl+] KVPIFZRDXDYGBA-UHFFFAOYSA-N 0.000 description 1
MYSWGUAQZAJSOK-UHFFFAOYSA-N ciprofloxacin Chemical compound C12=CC(N3CCNCC3)=C(F)C=C2C(=O)C(C(=O)O)=CN1C1CC1 MYSWGUAQZAJSOK-UHFFFAOYSA-N 0.000 description 1
239000012141 concentrate Substances 0.000 description 1
229920001577 copolymer Polymers 0.000 description 1
238000002425 crystallisation Methods 0.000 description 1
230000008025 crystallization Effects 0.000 description 1
230000001186 cumulative effect Effects 0.000 description 1
125000004122 cyclic group Chemical group 0.000 description 1
238000011161 development Methods 0.000 description 1
238000004821 distillation Methods 0.000 description 1
238000000605 extraction Methods 0.000 description 1
230000002550 fecal effect Effects 0.000 description 1
210000003608 fece Anatomy 0.000 description 1
238000010304 firing Methods 0.000 description 1
239000012530 fluid Substances 0.000 description 1
238000007429 general method Methods 0.000 description 1
230000005484 gravity Effects 0.000 description 1
229910052736 halogen Inorganic materials 0.000 description 1
150000002367 halogens Chemical class 0.000 description 1
150000004678 hydrides Chemical class 0.000 description 1
229910000041 hydrogen chloride Inorganic materials 0.000 description 1
238000005984 hydrogenation reaction Methods 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
239000007788 liquid Substances 0.000 description 1
229910052748 manganese Inorganic materials 0.000 description 1
239000011572 manganese Substances 0.000 description 1
235000010355 mannitol Nutrition 0.000 description 1
239000000594 mannitol Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
239000000178 monomer Substances 0.000 description 1
125000000962 organic group Chemical group 0.000 description 1
125000005375 organosiloxane group Chemical group 0.000 description 1
230000000704 physical effect Effects 0.000 description 1
238000002360 preparation method Methods 0.000 description 1
238000011002 quantification Methods 0.000 description 1
238000004445 quantitative analysis Methods 0.000 description 1
VBHKTXLEJZIDJF-UHFFFAOYSA-N quinalizarin Chemical compound C1=CC(O)=C2C(=O)C3=C(O)C(O)=CC=C3C(=O)C2=C1O VBHKTXLEJZIDJF-UHFFFAOYSA-N 0.000 description 1
230000005855 radiation Effects 0.000 description 1
238000007670 refining Methods 0.000 description 1
238000007086 side reaction Methods 0.000 description 1
229910000077 silane Inorganic materials 0.000 description 1
239000000779 smoke Substances 0.000 description 1
229910052708 sodium Inorganic materials 0.000 description 1
239000011734 sodium Substances 0.000 description 1
239000007787 solid Substances 0.000 description 1
238000004677 spark ionization mass spectrometry Methods 0.000 description 1
238000004611 spectroscopical analysis Methods 0.000 description 1
239000007858 starting material Substances 0.000 description 1
239000010959 steel Substances 0.000 description 1
238000003786 synthesis reaction Methods 0.000 description 1
238000001429 visible spectrum Methods 0.000 description 1
230000000007 visual effect Effects 0.000 description 1
239000003039 volatile agent Substances 0.000 description 1
239000011701 zinc Substances 0.000 description 1
229910052725 zinc Inorganic materials 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/19—Halogen containing
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
- Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
- Y10T436/255—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.] including use of a solid sorbent, semipermeable membrane, or liquid extraction

Landscapes

Life Sciences & Earth Sciences (AREA)
Health & Medical Sciences (AREA)
Analytical Chemistry (AREA)
Molecular Biology (AREA)
Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Biophysics (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

JP58173281A 1982-09-21 1983-09-21 クロロシラン中のほう素不純物の検出法 Granted JPS5990048A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US420650		1982-09-21
US06/420,650 US4529707A (en)	1982-09-21	1982-09-21	Detection of boron impurities in chlorosilanes

Publications (2)

Publication Number	Publication Date
JPS5990048A true JPS5990048A (ja)	1984-05-24
JPH0548424B2 JPH0548424B2 (2)	1993-07-21

Family

ID=23667307

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP58173281A Granted JPS5990048A (ja)	1982-09-21	1983-09-21	クロロシラン中のほう素不純物の検出法

Country Status (2)

Country	Link
US (1)	US4529707A (2)
JP (1)	JPS5990048A (2)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5753567A (en) *	1995-08-28	1998-05-19	Memc Electronic Materials, Inc.	Cleaning of metallic contaminants from the surface of polycrystalline silicon with a halogen gas or plasma
US7273588B1 (en) *	2003-07-17	2007-09-25	Air Liquide America L.P.	Methods of sampling halosilanes for metal analytes
FR2915805B1 (fr) *	2007-05-04	2010-02-12	Commissariat Energie Atomique	Procede de detection de composes gazeux halogenes
DE102009056731A1 (de)	2009-12-04	2011-06-09	Rev Renewable Energy Ventures, Inc.	Halogenierte Polysilane und Polygermane
US20130121908A1 (en) *	2010-10-01	2013-05-16	Mitsubishi Materials Corporation	Method for producing trichlorosilane with reduced boron compound impurities
CN117110527B (zh) *	2023-10-25	2023-12-19	是高(北京)智能科技有限公司	氯硅烷杂质元素在线检测分析方法及系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3126248A (en) *		1964-03-24		Process for producing purified
US3403003A (en) *	1966-12-23	1968-09-24	Western Electric Co	Method of removing boron from silicon tetrachloride
DE2558183A1 (de) *	1975-12-23	1977-07-14	Wacker Chemitronic	Verfahren zur bestimmung des borgehaltes von reinen halogensilanen
US4374110A (en) *	1981-06-15	1983-02-15	Motorola, Inc.	Purification of silicon source materials

1982
- 1982-09-21 US US06/420,650 patent/US4529707A/en not_active Expired - Lifetime
1983
- 1983-09-21 JP JP58173281A patent/JPS5990048A/ja active Granted

Also Published As

Publication number	Publication date
US4529707A (en)	1985-07-16
JPH0548424B2 (2)	1993-07-21

Publication	Publication Date	Title
Portmann et al.	1964	Determination of arsenic in sea water, marine plants and silicate and carbonate sediments
Zafiriou	1975	Reaction of methyl halides with seawater and marine aerosols
Treadwell	1919	Analytical chemistry
Safavi et al.	2006	Design and evaluation of a thorium (IV) selective optode
Ward	1963	Analytical Methods Used in Geochemical Exploration by the US Geological Survey: A Compilation of Trace and Semimicroanalytical Methods of Yielding Semiquantitative Data on Geologic Materials Useful in Geochemical Prospecting for Ore Deposits
JPS5990048A (ja)	1984-05-24	クロロシラン中のほう素不純物の検出法
Magnuson et al.	1944	Microdetermination of Arsenic in Biological Materials
Waterbury et al.	1961	Thermogravimetric behavior of plutonium metal, nitrate, sulfate, and oxalate
Lysyj et al.	1959	Spectrophotometric method for the determination of small amounts of sulfur in organic compounds: A semimicro and micro method
Kneebone et al.	1975	Determination of chromium (VI) in industrial atmospheres by a catalytic method
Filer	1971	Fluorometric determination of submicrogram quantities of tin
Noden	1980	The determination of tetraalkyllead compounds and their degradation products in natural water
Isha et al.	2007	Optical fibre chemical sensor for trace vanadium (V) determination based on newly synthesized palm based fatty hydroxamic acid immobilized in polyvinyl chloride membrane
Peterson et al.	1950	Spectrographic microdetermination of beryllium in air dust samples
Troll et al.	1985	Determination of trace amounts of boron in geological samples with carminic acid after extraction with 2-ethylhexane-1, 3-diol
Busev	1964	Some sulphur-containing organic compounds as reagents for the photometric determination of selenium
US20160202221A1 (en)	2016-07-14	Material for detecting phenol derivatives and applications thereof
Rynasiewicz et al.	1954	Boron in sodium metal
Kress	1958	Photometric Determination of Zinc Oxide in Rubber Products. Absorptiometric and Turbidimetric Methods Using Sodium Diethyl Dithiocarbamate
May et al.	1961	Determination of Beryllium in Ores and Rocks by a Dilution-Fluorimetric Method with Morin
Nalini et al.	1996	An indirect method for the spectrofluorimetric determination of trace amounts of germanium after extraction as an ion association complex with rhodamine B in the presence of chromotropic acid
Samchuk et al.	1987	Analytical chemistry of minerals
Malati	1999	Experimental inorganic/physical chemistry: an investigative, integrated approach to practical project work
Codell et al.	1952	Determination of Small Amounts of Chlorides in Titanium Sponge
Skwarzec et al.	1984	Procedure for chemical analysis of suspensions in the Ezcurra Inlet