JPS599083U - Vapor phase growth equipment - Google Patents

Vapor phase growth equipment

Info

Publication number
JPS599083U
JPS599083U JP10269082U JP10269082U JPS599083U JP S599083 U JPS599083 U JP S599083U JP 10269082 U JP10269082 U JP 10269082U JP 10269082 U JP10269082 U JP 10269082U JP S599083 U JPS599083 U JP S599083U
Authority
JP
Japan
Prior art keywords
metal
vapor phase
phase growth
belljar
growth equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10269082U
Other languages
Japanese (ja)
Other versions
JPS6113562Y2 (en
Inventor
後藤　泰山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP10269082U priority Critical patent/JPS599083U/en
Publication of JPS599083U publication Critical patent/JPS599083U/en
Application granted granted Critical
Publication of JPS6113562Y2 publication Critical patent/JPS6113562Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例における断面図である。 ２・・・石英ガラスベルジャ、３・・・金属ベルジャ、
′　４・・・高周波誘導加熱コイル。The figure is a sectional view of one embodiment of the present invention. 2... Quartz glass bell jar, 3... Metal bell jar,
' 4...High frequency induction heating coil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 内側に石英ガラスベルジャ外側に金属ベルジャそして高
周波誘導加熱コイルを有する気相成長装置において、前
記金属ベルジャの内側表面を鏡面研磨にするか金、銀、
アルミニウム等の光反射率の大きな金属の鍍金或いは前
記金属の単層或いは多層薄膜を被覆した気相成長装置の
金属ベルジャ。In a vapor phase growth apparatus having a quartz glass belljar on the inside, a metal belljar on the outside, and a high-frequency induction heating coil, the inner surface of the metal belljar is mirror-polished or gold, silver, gold, silver, etc.
A metal bell jar for a vapor phase growth apparatus, which is plated with a metal having a high light reflectance such as aluminum, or coated with a single layer or multilayer thin film of the metal.
JP10269082U 1982-07-07 1982-07-07 Vapor phase growth equipment Granted JPS599083U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10269082U JPS599083U (en) 1982-07-07 1982-07-07 Vapor phase growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10269082U JPS599083U (en) 1982-07-07 1982-07-07 Vapor phase growth equipment

Publications (2)

Publication Number Publication Date
JPS599083U true JPS599083U (en) 1984-01-20
JPS6113562Y2 JPS6113562Y2 (en) 1986-04-26

Family

ID=30241927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10269082U Granted JPS599083U (en) 1982-07-07 1982-07-07 Vapor phase growth equipment

Country Status (1)

Country Link
JP (1) JPS599083U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191474U (en) * 1985-05-21 1986-11-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191474U (en) * 1985-05-21 1986-11-28

Also Published As

Publication number Publication date
JPS6113562Y2 (en) 1986-04-26

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