JPS5993810A - Device for solidifying thin molten slag layer - Google Patents

Device for solidifying thin molten slag layer

Info

Publication number
JPS5993810A
JPS5993810A JP57201325A JP20132582A JPS5993810A JP S5993810 A JPS5993810 A JP S5993810A JP 57201325 A JP57201325 A JP 57201325A JP 20132582 A JP20132582 A JP 20132582A JP S5993810 A JPS5993810 A JP S5993810A
Authority
JP
Japan
Prior art keywords
slag
molten slag
drum
drums
pool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57201325A
Other languages
Japanese (ja)
Inventor
Mikio Aoki
幹男 青木
Shuichi Taniguchi
修一 谷口
Shinji Fujino
藤野 信治
Hideaki Omori
英明 大森
Matao Araya
荒谷 復夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP57201325A priority Critical patent/JPS5993810A/en
Publication of JPS5993810A publication Critical patent/JPS5993810A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21BMANUFACTURE OF IRON OR STEEL
    • C21B3/00General features in the manufacture of pig-iron
    • C21B3/04Recovery of by-products, e.g. slag
    • C21B3/06Treatment of liquid slag
    • C21B3/08Cooling slag
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21BMANUFACTURE OF IRON OR STEEL
    • C21B2400/00Treatment of slags originating from iron or steel processes
    • C21B2400/02Physical or chemical treatment of slags
    • C21B2400/022Methods of cooling or quenching molten slag
    • C21B2400/026Methods of cooling or quenching molten slag using air, inert gases or removable conductive bodies
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21BMANUFACTURE OF IRON OR STEEL
    • C21B2400/00Treatment of slags originating from iron or steel processes
    • C21B2400/05Apparatus features
    • C21B2400/052Apparatus features including rotating parts
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21BMANUFACTURE OF IRON OR STEEL
    • C21B2400/00Treatment of slags originating from iron or steel processes
    • C21B2400/05Apparatus features
    • C21B2400/052Apparatus features including rotating parts
    • C21B2400/056Drums whereby slag is poured on or in between

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To provide a titled device for solidifying a thin molten slag layer by a rotary drum system which enables smooth solidification of a thin slag layer on a rotary drum by providing heating elements in the bottom and side wall parts of a slag pool. CONSTITUTION:The molten slag 4 introduced by a slag spout 2 is stored temporarily in the recess formed of two water-cooled rotary drums 6 and the side walls-provided at both ends of the drums 6, whereby a slag pool 16 is formed. A heating element such as a round bar-like carbon electrode 22 is provided along the outside circumference of each drum 6 in the trough part 20 formed by the drums 6 and in the positions where both axial ends of the drum 6 and the side walls 8 contact with each other. The heating element is connected with a power source device 24, and is heated electrically. The temp. of the electrode 22, etc. is maintained at the temp. at which the slag 4 loses its fluidity or above. The sticking of the slag 4 is not observed by the above-mentioned device and there is no slipping phenomenon, whereby the smooth continuation of the operation for depositing the slag on the drums 6 is made possible.

Description

【発明の詳細な説明】 本発明は溶融スラグ薄層固化装置に係り、特に回転ドラ
ム方式によるスラグ付着を安定化した固化装置に関する
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a molten slag thin layer solidification device, and more particularly to a solidification device using a rotating drum type to stabilize slag adhesion.

高炉等から排出される溶融スラグの温度は出銑時の初期
、中期および終期によって多少異なるが、1450〜1
550℃の範囲であり、その数量も出銑量の約1/3に
達するので、その顕熱量は美大である。そのため近時、
省エネルギーの観点から溶融スラグからの顕然回収技術
が重要な問題となっている。
The temperature of molten slag discharged from blast furnaces etc. varies somewhat depending on the initial, middle and final stages of tapping, but it is 1450 to 1
The temperature is in the range of 550°C, and its quantity reaches about 1/3 of the amount of iron tapped, so its sensible heat amount is an art. Therefore, recently,
From the point of view of energy conservation, the technology of explicit recovery from molten slag has become an important issue.

溶融スラグの顕然回収方法については、スラグの熱伝導
性が低いという特性から、溶融スラグを細粒化または薄
層化して比表面積を増加させ熱回収する方法が一般に採
られている。細粒化方法としては、高圧空気を利用する
か、回転テーブル。
Regarding the method of explicitly recovering molten slag, due to the characteristic that slag has low thermal conductivity, a method is generally adopted in which heat is recovered by making the molten slag finer or thinner to increase its specific surface area. The granulation method is to use high-pressure air or a rotary table.

回転ドラムに流下して溶融スラグを飛散させる方法が提
案されており、また薄層板状に成形後破砕工程等を経て
熱回収する技術も提案されている。
A method has been proposed in which the molten slag is scattered by flowing down into a rotating drum, and a technique has also been proposed in which heat is recovered through a crushing process after forming the molten slag into a thin plate shape.

この薄層板状固化スラグを得る方法として米国特許第4
050884号がある。この方法は第1図(5)、(B
)に示す如く、スラグ樋2によって供給された溶融スラ
グ4を上向き方向に互に逆回転する2個の水冷式回転ド
ラム6と、その両端に設けられた側壁8によって形成さ
れた凹部処導き、回転ドラム6を回転させることによっ
てドラム60表面に付着した薄層板状固化スラグ4Aを
スクレーパー10で掻き取る方法である。
As a method for obtaining this thin plate-like solidified slag, US Pat.
There is No. 050884. This method is shown in Figure 1 (5), (B
), two water-cooled rotary drums 6 rotate the molten slag 4 supplied by the slag gutter 2 upward in opposite directions, and a recess formed by side walls 8 provided at both ends of the drums 6, This is a method in which the thin plate-shaped solidified slag 4A adhering to the surface of the drum 60 is scraped off with a scraper 10 by rotating the rotating drum 6.

上記ツウインドラム方式による従来方法のほかに、第2
図に示す如きワンドラム方式によるものもある。この方
法はスラグ樋2より流下する溶融スラグ4を回転する1
個のドラム6と側壁部12、底部14とによって形成さ
れた凹部に貯留してスラグプール16を形成せしめ、回
転するドラム60表面に薄層固化スラグ4Aを付着させ
る方法である。
In addition to the conventional twin-drum method described above,
There is also a one-drum system as shown in the figure. This method involves rotating the molten slag 4 flowing down from the slag gutter 2.
In this method, a thin layer of solidified slag 4A is deposited on the surface of the rotating drum 60 by storing the slag in a recess formed by the drum 6, the side wall 12, and the bottom 14 to form a slag pool 16.

上記いずれの方法による場合も回転ドラム6は冷却水1
8によって内部冷却されているので、回転ドラム6に接
触する溶融スラグ4が温度低下するほか、側壁8等によ
り冷却され、急速に温度低下を来し粘性を増加する。特
に第1回込)、(Blにて示す従来装置においては、2
個のドラム6によって形成されるV字状の谷間部20で
は双方のドラム6によって冷却され、また第2図に示す
従来装置においては、回転するドラム6のみならず、ス
ラグプール16を形成する側壁部12および底部141
/1mよっても顕熱が吸収されるので、溶融スラグ4の
温度が低下し粘性を増加する。その結果、第1図囚、(
B)に示す装置の場合には2個のドラム6によって形成
される谷間部20では、相反転する2個のドラム6によ
って溶融スラグ4を引き合うこととなり谷間部20で固
着スラグ4Bを形成し、回転するドラム60表面には新
たな溶融スラグ4が付着しなくなり、いわゆるスリップ
現象を発生する。また、第2図に示す装置の場合も溶融
スラグ4の温度低下による粘性の増加によって、スラグ
ゾール16の底部に形成された固着スラグ4Bとドラム
60表面に付着すべき高粘性スラグ4とが引き合い、ド
ラム6に付着する接着力よりも底部14に形成された固
着スラグ4Bへの接着力が大となればドラム60表面に
は新たな溶融スラグ4が付着せずスリップ現象を発生す
る。
In any of the above methods, the rotary drum 6 is filled with cooling water 1.
Since the molten slag 4 is internally cooled by the rotary drum 6, the temperature of the molten slag 4 in contact with the rotating drum 6 decreases, and is also cooled by the side walls 8, etc., causing a rapid temperature decrease and an increase in viscosity. In particular, in the conventional device shown by Bl, 2
In the V-shaped valley 20 formed by the drums 6, cooling is achieved by both drums 6, and in the conventional apparatus shown in FIG. part 12 and bottom part 141
/1m, sensible heat is absorbed, so the temperature of the molten slag 4 decreases and its viscosity increases. As a result, Figure 1 Prisoner (
In the case of the apparatus shown in B), in the valley part 20 formed by the two drums 6, the two drums 6 rotating in phase draw the molten slag 4 together, forming a fixed slag 4B in the valley part 20, New molten slag 4 no longer adheres to the surface of the rotating drum 60, causing a so-called slip phenomenon. Also, in the case of the apparatus shown in FIG. 2, due to the increase in viscosity due to the temperature drop of the molten slag 4, the fixed slag 4B formed at the bottom of the slag sol 16 and the highly viscous slag 4 to be attached to the surface of the drum 60 are attracted to each other. If the adhesive force to the fixed slag 4B formed on the bottom portion 14 is greater than the adhesive force to the drum 6, no new molten slag 4 will adhere to the surface of the drum 60, and a slip phenomenon will occur.

かかるスリップ現象は回転ドラム方式忙おいては、しば
しば生じ、一旦スリップ現象が発生すると回転する固体
ドラムと固化スラグとの接触となるのでスラグのドラム
6の表面への付着力がなくなり操業を中断せざるを得な
い状態となる。
Such a slip phenomenon often occurs when using a rotating drum system, and once the slip phenomenon occurs, the rotating solid drum comes into contact with the solidified slag, and the slag loses its adhesion to the surface of the drum 6, causing the operation to be interrupted. This becomes an unavoidable situation.

かくの如く回転ドラム方式におけるスリップ現象は従来
装置0最犬の欠点であって1木刀式が実用化されない最
大の原因となっている。
The slipping phenomenon in the rotating drum method is the greatest drawback of the conventional device, and is the biggest reason why the one-bokuto method is not put into practical use.

本発明の目的は、回転ドラム方式による上記従来装置の
欠点を解消し、円滑な連続操業を可能とする溶融スラグ
薄層固化装置を提供するにある。
An object of the present invention is to provide a molten slag thin layer solidification device that eliminates the drawbacks of the conventional rotary drum type device and enables smooth continuous operation.

本発明の要旨とするところは次の如くである。The gist of the present invention is as follows.

すなわち、高炉等より排出する溶融スラグを誘導するス
ラグ樋と、前記スラグ樋の端部より流下する溶融スラグ
を貯留してスラグプールを形成する側壁部および底部と
、前記スラグプールの溶融スラグと接して回転する冷却
ドラムと、前記冷却ドラムの表面に付着した固化スラグ
を除去する剥離装前とを有して成る溶融スラグ薄層固化
装置において、前記スラグプールの底部および側壁部の
いずれか一方または双方に設けた発熱体を有することを
特徴とする溶融スラグ薄層固化装置である。
That is, a slag gutter that guides molten slag discharged from a blast furnace, etc., a side wall portion and a bottom portion that store molten slag flowing down from the end of the slag gutter to form a slag pool, and a side wall portion and a bottom portion that are in contact with the molten slag of the slag pool. A molten slag thin layer solidification device comprising a cooling drum that rotates and a stripping device for removing solidified slag adhering to the surface of the cooling drum. This is a molten slag thin layer solidification device characterized by having heating elements provided on both sides.

木発明者らは回転ドラム方式における従来装置において
上記スリップ現象を発生する原因tよ、ツウインドラム
方式においては2個の互にト向き反対方向へ回転するド
ラムの相接する谷間部、またワンドラム方式O場合には
スラグプールの底部の回転ドラムと相接する部分の溶融
スラグが固化することに起因することに着目し、当該部
分に発熱体を設は溶融スラグの固化を防+hする方法を
創案し、本発明を完成したものである。
The inventors have discovered that the cause of the above-mentioned slip phenomenon in the conventional rotary drum system is the valley where two drums rotate in opposite directions in the twin drum system, and the valley where two drums rotate in opposite directions in the twin drum system. In this case, we focused on the fact that this is caused by the solidification of molten slag at the part of the bottom of the slag pool that comes into contact with the rotating drum, and devised a method to prevent the solidification of molten slag by installing a heating element in that part. , has completed the present invention.

本発明の実施列を添付第3図(A)、 CB)および第
4図にて示すツウインドラム方式の場合について説明す
る。すなわち、上向き方向に互に逆回転する2個の水冷
式回転ドラム6およびドラム6の軸方向の両端に設けた
側壁8によって形成される凹部にスラグ樋2によって導
入された溶融スラグ4を一時貯留してスラグプール16
を形成させる構成は従来装置と同一であるが、本発明に
おいては2個の回転ドラム6によって形成される谷間部
20およびドラム6の軸方向の両端と側壁8の接する位
置にドラム6の外周に沿って丸棒状カーボン電極22を
設け、これを電源装置24に結合することにより通電加
熱するようにした。電源装置24釦は電流制御装置を設
け、カーボン電極22f7)温度が溶融スラグ4が流動
性を失なう1000℃以上の温度を保持するように通電
電流を制御する。
The case of the twin-drum system in which the present invention is implemented is shown in the attached FIGS. 3(A), CB) and FIG. 4 will be described. That is, the molten slag 4 introduced by the slag gutter 2 is temporarily stored in the recess formed by the two water-cooled rotating drums 6 that rotate in opposite directions in the upward direction and the side walls 8 provided at both axial ends of the drums 6. slag pool 16
The structure for forming the grooves is the same as that of the conventional device, but in the present invention, there are grooves 20 formed by the two rotating drums 6 and on the outer periphery of the drums 6 at the positions where both axial ends of the drums 6 and the side walls 8 touch. A round bar-shaped carbon electrode 22 was provided along the line, and this was connected to a power supply device 24 to perform electrical heating. The power supply device 24 button is provided with a current control device, and controls the current flowing so that the temperature of the carbon electrode 22f7) is maintained at a temperature of 1000° C. or higher at which the molten slag 4 loses its fluidity.

側壁8は通常耐火煉瓦等の絶縁部材で構築されているの
で、この場合はカーボン電極22はモルタル等でそのま
ま埋設できるが、鋳鉄部材等の導電性利料の場合には第
4図に示す如く絶縁部材26で保護する必要があり、ま
た谷間部20に設けるカーボン電極22の下部も回転ド
ラム6と直接接触しないように石綿等の絶縁部拐26に
て保護する必要のあることは当然である。
Since the side wall 8 is usually constructed of an insulating material such as a refractory brick, in this case, the carbon electrode 22 can be buried as is with mortar, etc., but in the case of a conductive material such as a cast iron material, as shown in FIG. It is necessary to protect it with an insulating member 26, and it is also necessary to protect the lower part of the carbon electrode 22 provided in the valley part 20 with an insulating member 26 made of asbestos or the like so that it does not come into direct contact with the rotating drum 6. .

本発明者らの本発明のパイロット試験装置においては、
側壁8へのカーボン電極22の埋設はアルミナ系耐火キ
ャスタブルを用い、谷間部20へのカーボン電極の設置
は板状石綿を用い、カーボン電極の温度を1150〜1
350℃に制御したところ、溶融スラグ4の固着は全く
見られず、従ってスリップ現象の発生もなく円滑な回転
ドラム6への付着操業を継続することができた。
In the pilot test device of the present invention by the inventors,
The carbon electrode 22 is buried in the side wall 8 using alumina-based fireproof castable, and the carbon electrode is installed in the valley part 20 using plate-like asbestos, and the temperature of the carbon electrode is set to 1150-1
When the temperature was controlled at 350° C., no adhesion of the molten slag 4 was observed, and therefore, the operation of smoothly adhering the molten slag to the rotating drum 6 could be continued without occurrence of a slip phenomenon.

なお、第2図にて示したワンドラム方式の場合には溶融
スラグ4が固着し易いスラグプール16を形成する底部
14と回転ドラム6との接触部位にドラム6の軸方向と
平行に、かつスラグプール16中の回転ドラム6の長さ
方向の両端にドラム6の外周に沿ってカーボン電極22
を設けることが最も効果的であることが判明した。
In the case of the one-drum system shown in FIG. 2, the slag is placed parallel to the axial direction of the drum 6 at the contact area between the bottom portion 14 and the rotating drum 6, which forms a slag pool 16 to which the molten slag 4 tends to stick. Carbon electrodes 22 are installed along the outer circumference of the drum 6 at both lengthwise ends of the rotating drum 6 in the pool 16.
It has been found that the most effective method is to provide

上記実施例より明らかなとおり、本発明σン回転冷却ド
ラム方式による溶融スラグ薄層固化装置は形成されるス
ラグプールの底部および側壁部のいずれか一方または双
方に通電できるカーボン電極等の発熱体を設けることに
より次の如き効果を収めることができた。
As is clear from the above examples, the molten slag thin layer solidification device using the σ-n rotating cooling drum system of the present invention has a heating element such as a carbon electrode that can conduct electricity to either or both of the bottom and side walls of the slag pool to be formed. By providing this, the following effects could be achieved.

(イ)形成されるスラグプール中の溶融スラグを加熱す
ることにより側壁部等からの冷却による固着スラグの発
生を防止し、スリップ現象を根絶することができたので
回転ドラムへのスラグ薄層の固化が円滑に実施すること
ができた。
(b) By heating the molten slag in the slag pool that is formed, it is possible to prevent the generation of stuck slag due to cooling from the side walls, etc., and eradicate the slip phenomenon, so that a thin layer of slag can be deposited on the rotating drum. Solidification could be carried out smoothly.

(ロ)(イ)により安定操業が可能となり、操業率の向
上、補修費の低減によりスラグの顕然回収費を著しく低
減させることができた。
(b) Stable operation was made possible by (b), and the apparent cost of slag recovery was significantly reduced by increasing the operating rate and reducing repair costs.

(ハ)発熱体の発熱エネルギーの一部はスラグ顕熱とし
て回収できるほか、その加熱費用の増加は(ロ)による
操業率の向上補修費の低減によって償って余りあるので
全体としてのコストの低減に著しく寄与できた。
(c) A part of the heat generated energy of the heating element can be recovered as slag sensible heat, and the increase in heating costs is more than compensated for by the improvement in operating efficiency and the reduction in repair costs due to (b), resulting in a reduction in overall costs. was able to make a significant contribution to

に)(イ)、(ロ)、←→の効果により従来工業化が不
可能視された回転冷却ドラム方式によるスラグの顕熱回
収方法の工業化が可能となった。
B) Due to the effects of (a), (b), and ←→, it has become possible to industrialize a method for recovering sensible heat from slag using a rotating cooling drum system, which was considered impossible to industrialize in the past.

本発明の上記実施例では発熱体としてカーボン電極を使
用した場合について説明したが、カーボン電極に限らず
カーボラニ5ンダム等の発熱体も使用可能であることは
勿論である。
In the above embodiments of the present invention, a case has been described in which a carbon electrode is used as the heating element, but it goes without saying that the heating element is not limited to a carbon electrode, and a heating element such as a carboranidum can also be used.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(A)、 (B)はツウインドラム方式による溶
融スラグ薄層固化装置の従来例を示し、<A)は正面断
面図、郵)は側断面図、第2図はワンドラム方式による
溶融スラグ薄層固化装置の従来例を示す正面断面図、第
3図(A)、 (B)および第4図は本発明による溶融
スラグ薄層固化装置を示し、第3図(5)はその正面断
面図、第3図(B)は側断面図、第4図は第3図(5)
のA部の拡大側断面図である。 2・・・スラグ樋、    4・・・溶融スラグ4A・
・・固化スラグ、4B・・・固着スラグ6・・・水冷式
回転ドラム、8・・・側壁10・・・スクレーパー(剥
離装置) 12・・・側壁部、    14・・・底部20・・・
谷間部、22・・・カーボン電極(発熱体)24・・・
電源装置。 代理人 弁理士 中 略 武 雄 第1図 (A)            (B)第2図
Figures 1 (A) and (B) show conventional examples of molten slag thin layer solidification equipment using the twin-drum method. 3(A), (B) and 4 are front sectional views showing a conventional example of a thin layer solidification device, and FIG. 4 shows a molten slag thin layer solidification device according to the present invention, and FIG. 3(5) is a front sectional view thereof. Figure 3 (B) is a side sectional view, Figure 4 is Figure 3 (5)
FIG. 2 is an enlarged side sectional view of part A of FIG. 2... Slag gutter, 4... Molten slag 4A.
...Solidified slag, 4B...Fixed slag 6...Water-cooled rotating drum, 8...Side wall 10...Scraper (peeling device) 12...Side wall part, 14...Bottom part 20...
Valley part, 22... Carbon electrode (heating element) 24...
power supply. Representative Patent Attorney (Omitted) Takeo Figure 1 (A) (B) Figure 2

Claims (1)

【特許請求の範囲】[Claims] (1)高炉等より排出する溶融スラグな誘導するスラグ
樋と、前記スラグ樋の端部より流下する溶融スラグを貯
留してスラグプールを形成する側壁7f部および底部と
、前記スラグプールの溶融スラグと接して回転する冷却
ドラムと、前記冷却ドラムの表面に付着した固化スラグ
を除去する剥離装置とを有して成る溶融スラグ薄層固化
装置において、前記スラグプールめ底部および側壁部の
いずれか一方または双方に設けた発熱体を有することを
特徴とする溶融スラグ薄層固化装置。
(1) A slag gutter that guides molten slag discharged from a blast furnace, etc., a side wall 7f portion and a bottom portion that store the molten slag flowing down from the end of the slag gutter to form a slag pool, and a molten slag in the slag pool. A molten slag thin layer solidification device comprising a cooling drum that rotates in contact with the cooling drum and a peeling device that removes solidified slag adhering to the surface of the cooling drum, wherein either one of the bottom portion and the side wall portion of the slag pool Or a molten slag thin layer solidification device characterized by having heating elements provided on both sides.
JP57201325A 1982-11-17 1982-11-17 Device for solidifying thin molten slag layer Pending JPS5993810A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57201325A JPS5993810A (en) 1982-11-17 1982-11-17 Device for solidifying thin molten slag layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57201325A JPS5993810A (en) 1982-11-17 1982-11-17 Device for solidifying thin molten slag layer

Publications (1)

Publication Number Publication Date
JPS5993810A true JPS5993810A (en) 1984-05-30

Family

ID=16439137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57201325A Pending JPS5993810A (en) 1982-11-17 1982-11-17 Device for solidifying thin molten slag layer

Country Status (1)

Country Link
JP (1) JPS5993810A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63207614A (en) * 1987-02-24 1988-08-29 株式会社東京精密 Method of cutting ingot
JPH0642810Y2 (en) * 1989-09-28 1994-11-09 九州電子金属株式会社 Material fixing device for inner blade cutting machine
JPH081659A (en) * 1994-06-27 1996-01-09 Komatsu Electron Metals Co Ltd Jig for preventing falling of cut piece of single crystal ingot
JP2007281210A (en) * 2006-04-07 2007-10-25 Disco Abrasive Syst Ltd Substrate cutting method and substrate cutting apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63207614A (en) * 1987-02-24 1988-08-29 株式会社東京精密 Method of cutting ingot
JPH0642810Y2 (en) * 1989-09-28 1994-11-09 九州電子金属株式会社 Material fixing device for inner blade cutting machine
JPH081659A (en) * 1994-06-27 1996-01-09 Komatsu Electron Metals Co Ltd Jig for preventing falling of cut piece of single crystal ingot
JP2007281210A (en) * 2006-04-07 2007-10-25 Disco Abrasive Syst Ltd Substrate cutting method and substrate cutting apparatus

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