JPS6010155A - Through-hole inspecting apparatus - Google Patents
Through-hole inspecting apparatusInfo
- Publication number
- JPS6010155A JPS6010155A JP11907283A JP11907283A JPS6010155A JP S6010155 A JPS6010155 A JP S6010155A JP 11907283 A JP11907283 A JP 11907283A JP 11907283 A JP11907283 A JP 11907283A JP S6010155 A JPS6010155 A JP S6010155A
- Authority
- JP
- Japan
- Prior art keywords
- light
- hole
- ball
- mirror
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
（１） 発明の技術分野
本発明はプリント板のスルーホールの検査装置に係り、
特に光学的にスルーホールの欠陥の検出を高精度で打入
える様にしたスルーホール検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION (1) Technical field of the invention The present invention relates to an inspection device for through holes in printed circuit boards,
In particular, the present invention relates to a through-hole inspection device that optically detects defects in through-holes with high accuracy.
（２） 技術の背景
゛近年、電子技術の発達に伴い、電子計算等各種装置に
用いられるプリント板の技術も進歩し、多層板となし而
も多数のスルーホールが設けられる様になって来ている
。このスルーホールには導電性を与えるメッキが電気的
或いは化学的に施工されているが、必ずしも良好な状態
で形成されているとは限らず、切れ目、ピンホール等の
欠陥を生ずる場合がある。この欠陥はプリント板の信頼
性を低下せしめる事になるために予めその欠陥の有無を
検査する必要が有る。この検査手段は夫々固有の欠点を
有し、この欠点を解決すべく技術的開発が要望されてい
る。(2) Background of technology In recent years, with the development of electronic technology, the technology of printed circuit boards used in various devices such as electronic calculations has also progressed, and even multilayer boards have come to have many through holes. ing. Although these through holes are electrically or chemically plated to provide conductivity, they are not always formed in a good condition, and defects such as cuts and pinholes may occur. Since this defect reduces the reliability of the printed board, it is necessary to inspect it in advance for the presence or absence of the defect. Each of these inspection means has its own drawbacks, and there is a need for technical development to solve these drawbacks.
（３） 従来技術と問題点
従来、プリント板に設けられているスルーホールの検査
は目視で行なわれていたが、検査時間。(3) Conventional technology and problems Conventionally, through-holes in printed circuit boards were inspected visually, but the inspection time was limited.
目視による限界等の問題を有していた。この事からスル
ーホール検査に自動化が導入され次の様な方法が行なわ
れている。この方法による装置はプリント板に設りられ
ているスルーホールの中で検査対象となっているスルー
ホールからの光と１次の検査を行なうスルーホールから
の光を集光部で集光した後、２つの検知器に分配して欠
陥の検出と検査位置の検出が行なわれている。然し乍ら
この装置では光の分配がハーフミラ−を使用している為
にハーフミラ−内部を通って分路された光は屈折率の違
いにより収差が生じてしまい高精度の検査が行なえない
問題を有していた。There were problems such as limitations in visual inspection. For this reason, automation has been introduced into through-hole inspection, and the following methods are being used. The device using this method uses a condenser to collect light from the through hole to be inspected and light from the through hole that performs the primary inspection among the through holes installed in the printed circuit board. , the detection of defects and the detection of the inspection position are performed using two detectors. However, since this device uses a half mirror to distribute light, the light shunted through the half mirror has aberrations due to differences in refractive index, making it difficult to perform high-precision inspections. was.
（４） 発明の目的
本発明は上記従来の欠点に鑑み、スルーボールからの光
を三角ミラーで反射させる事により該光を分配し２つの
光検知器各々に収差のないスルーホールの像を結像させ
る様にしたスルーボール検査装置を提供することを目的
とするものである。(4) Purpose of the Invention In view of the above-mentioned drawbacks of the conventional art, the present invention distributes the light from a through ball by reflecting it with a triangular mirror, and forms an aberration-free image of the through hole on each of two photodetectors. It is an object of the present invention to provide a through-ball inspection device that allows images to be imaged.
（５） 発明の構成
そしてこの目的は本発明によればプリント板のスルーホ
ールの欠陥を光学的に検査する装置に於いて、該スルー
ボール像を検知器に結像させる集光部と、該スルーホー
ルの欠陥部から漏れた光を検知する光検知器と遮光マス
クで覆われていないスルーホールを通過した光を検知す
る光検知器に該スルーホールからの光を分配する手段を
設けた事を特徴とするスルーボール検査装置を提供する
ことによって達成される。(5) Structure and object of the invention According to the present invention, an apparatus for optically inspecting defects in through-holes in a printed circuit board includes a condensing section for focusing the through-ball image on a detector; A means for distributing the light from the through hole is provided between a photodetector that detects light leaking from the defective part of the through hole and a photodetector that detects the light that passes through the through hole that is not covered by the light shielding mask. This is achieved by providing a through-ball inspection device characterized by:
（６） 発明の実施例 以下１本発明の一実施例を図面によって詳述する。(6) Examples of the invention An embodiment of the present invention will be described in detail below with reference to the drawings.
第１図は本発明によるスルーボール検査装置の一実施例
の概略的構成を示す図である。同図に於いて、複数のス
ルーホール１が設けられているプリント板３と検査対象
となる該スルーボール１を覆うマスク５上には光４が照
射されている。前記光４は前記マスク５で覆われていな
い前記スルーホール１を通過、或いは前記プリン１−板
３内で散乱光４ａとなり前記スルーホール１の欠陥部か
ら透過して集光部６例えばレンズで集光される。前記集
光された光は平板ミラー２ａ＋＋２．ｂ＋が東根型に構
成されている三角ミラー２ａで分配され。FIG. 1 is a diagram showing a schematic configuration of an embodiment of a through ball inspection device according to the present invention. In the figure, light 4 is irradiated onto a printed board 3 in which a plurality of through holes 1 are provided and a mask 5 that covers the through balls 1 to be inspected. The light 4 passes through the through-hole 1 that is not covered by the mask 5, or becomes scattered light 4a within the print 1-plate 3, and is transmitted through a defective part of the through-hole 1 to a condensing part 6, such as a lens. The light is focused. The focused light is passed through flat mirrors 2a++2. b+ is distributed by a triangular mirror 2a configured in a Higashine shape.
光検知器７，８に収束し、前記スルーホールの欠陥等の
情報が検出される。そして前記検出情報は検査回路９に
入力する。The light converges on the photodetectors 7 and 8, and information such as defects in the through holes is detected. The detection information is then input to the inspection circuit 9.
第１図に於いて、プリント板３面に垂直に照射している
光４は一部がスルーボール１を通過し。In FIG. 1, part of the light 4 irradiating the printed board 3 perpendicularly passes through the through ball 1.
他はプリント板３内に散乱する。マスクで覆われていな
いスルーボール１を通過した光は集光部６で集光され三
角ミラー２ａを構成している平板ミラー２ ａ 、＋で
反射し光検知器４に該スルーホールの像が検出される。The others are scattered inside the printed board 3. The light that has passed through the through ball 1 that is not covered by the mask is collected by the condenser 6 and reflected by the flat mirrors 2a and + that constitute the triangular mirror 2a, and an image of the through hole is displayed on the photodetector 4. Detected.
そして前記光検知器４から検知信号が検査回路９に入力
し２次の検査対象となるスルーボールの位置が認知され
る。一方、マスク５で覆われているスルーホール１に欠
陥を生じていた場合、前記プリント板３に垂直に入射し
た光４はこのプリント板３内で散乱し、このスルーボー
ルｌの欠陥からこの散乱光４ａが漏れる漏洩光４ｂとな
り集光部６で集光され三角ミラー２ａを構成している平
板ミラー２ｂ＋で反射し光検知器７に収束し検出される
。そして前記光検知器７から検知信号が検査回路９に入
力し、前記スルーホール１は検査が行なわれる。前記三
角ミラー２ａは前記集光部６で集光された光が等分配と
なるように位置、角度を設定すると共に、前記光検知器
７，８にこの光が収束する様に設けられている。Then, a detection signal from the photodetector 4 is input to the inspection circuit 9, and the position of the through ball to be inspected for the second time is recognized. On the other hand, if a defect occurs in the through hole 1 covered by the mask 5, the light 4 that is perpendicularly incident on the printed board 3 will be scattered within the printed board 3, and this scattering will occur from the defect in the through ball l. The light 4a becomes leaked light 4b, which is focused by the condenser 6, reflected by the flat mirror 2b+ constituting the triangular mirror 2a, converged on the photodetector 7, and detected. Then, a detection signal from the photodetector 7 is input to the inspection circuit 9, and the through hole 1 is inspected. The triangular mirror 2a is positioned and angled so that the light collected by the condenser 6 is equally distributed, and is provided so that the light is converged on the photodetectors 7 and 8. .
そして本発明の装置は前記光の分配をハーフミラ−等を
使用しないので前記スルーホール１からの光は集光部６
．三角ミラー２ａを介すだけですべて空気中をを伝わり
、ノ′＼−フミラーにおける収差を考慮する必要がない
。Since the device of the present invention does not use a half mirror or the like to distribute the light, the light from the through hole 1 is transmitted to the condensing section 6.
．． All the light is transmitted through the air only via the triangular mirror 2a, and there is no need to take into account aberrations in the nof mirror.
第２図は本発明の他の実施例の要部斜視図である。FIG. 2 is a perspective view of essential parts of another embodiment of the present invention.
同図に於いて、第１図の三角ミラー２ａを構成している
ミラー２ｂ＋の光の反射面積がミラー２ａ１より大きく
した状態が三角ミラー２ｂである。In the same figure, the triangular mirror 2b is in a state where the light reflection area of the mirror 2b+, which constitutes the triangular mirror 2a of FIG. 1, is larger than that of the mirror 2a1.
この時、ミラー２ｂ＋は２ｂ２に、２ａ１は２ａ２に対
応している。すなわち、検査対象となっているスルーホ
ール１からの光は弱い為により反射面積を大き（て検出
に寄与させる目的からである。At this time, mirror 2b+ corresponds to 2b2, and mirror 2a1 corresponds to 2a2. That is, since the light from the through hole 1 to be inspected is weak, the purpose is to increase the reflection area (and thereby contribute to detection).
一方１次の検査対象であるスルーボールｌから通過して
来る光はマスクを介していないから強いので反射面積を
小さくしても容易に検出が可能である。この三角ミラー
２ｂを用いた場合は第１図に於ける三角ミラー２ａの位
置と異なる位置に設ける必要がある。On the other hand, the light passing from the through ball l, which is the primary inspection object, is strong because it does not pass through the mask, so it can be easily detected even if the reflection area is made small. When this triangular mirror 2b is used, it needs to be provided at a position different from the position of the triangular mirror 2a in FIG.
（７） 発明の効果
以上、詳細に説明したように本発明のスルーボール検査
装置は、スルーホールからの光を三角ミラーなる簡単な
機構で分配でき、また光を光検知器に収差を生じること
なく導く事ができるので精度の高い検査が行なえる効果
大なるものがある。(7) Effects of the Invention As explained in detail above, the through-ball inspection device of the present invention can distribute the light from the through-hole using a simple mechanism such as a triangular mirror, and also prevents the light from causing aberrations on the photodetector. This has the great effect of allowing highly accurate inspections to be conducted.
第１図は本発明一実施例の構成図、第２図は本発明の他
の実施例を示す三角ミラーの機構図である。
１・・・スルーボール ２ａ、２ｂ・・・三角ミラー、
３．・・・プリント板４・・・光 ５・・・マスク、
６・・・集光部 ７，８・・・光検知器 ９
・・・検査回路FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is a mechanical diagram of a triangular mirror showing another embodiment of the present invention. 1... Through ball 2a, 2b... Triangular mirror,
3. ...Printed board 4...Light 5...Mask,
6... Light collecting section 7, 8... Photodetector 9... Inspection circuit
Claims (2)
査する装置に於いて、該スルーホール像を検知器に結像
させる集光部と、該スルーホールの欠陥部から漏れた光
を検知する光検知器と遮光マスクで覆われていないスル
ーボールを通過した光を検知する光検知器に該スルーボ
ーからの光を分配する手段を設けた事を特徴とするスル
ーボール検査装置。(1) A device that optically inspects defects in through balls on printed boards includes a light condensing unit that focuses the through hole image on a detector and detects light leaking from the defective portion of the through hole. A through-ball inspection device comprising a photodetector and a means for distributing light from the through-ball to a photodetector for detecting light passing through the through-ball that is not covered with a light-shielding mask.
つの平面を有するミラーによることを特徴とする特許請
求の範囲第１項記載のスルーホール検査装置。(2) The means for distributing the light from the through ball is 2.
2. A through-hole inspection device according to claim 1, characterized in that the device comprises a mirror having two planes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11907283A JPS6010155A (en) | 1983-06-30 | 1983-06-30 | Through-hole inspecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11907283A JPS6010155A (en) | 1983-06-30 | 1983-06-30 | Through-hole inspecting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6010155A true JPS6010155A (en) | 1985-01-19 |
Family
ID=14752186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11907283A Pending JPS6010155A (en) | 1983-06-30 | 1983-06-30 | Through-hole inspecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6010155A (en) |
-
1983
- 1983-06-30 JP JP11907283A patent/JPS6010155A/en active Pending
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