JPS6011077U - 探針装置 - Google Patents

探針装置

Info

Publication number
JPS6011077U
JPS6011077U JP10370983U JP10370983U JPS6011077U JP S6011077 U JPS6011077 U JP S6011077U JP 10370983 U JP10370983 U JP 10370983U JP 10370983 U JP10370983 U JP 10370983U JP S6011077 U JPS6011077 U JP S6011077U
Authority
JP
Japan
Prior art keywords
probe device
coaxial
wavelength
measurement
electrically connected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10370983U
Other languages
English (en)
Inventor
古塚　岐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP10370983U priority Critical patent/JPS6011077U/ja
Publication of JPS6011077U publication Critical patent/JPS6011077U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は従来の探針装置の斜視図、第２図は本考案の一
実施例を示す探針装置の斜視図である。 １１〜・・・絶縁体基板、１２１，１２２・・・・・・
導体パターン、２１・・・・・・同軸線路、２１ａ・・
・・・・外導体、３１１．３１２，３１３・・・・・・
金属針、４゛１・・・・・・同軸接栓、５１・・・・・
・端子、６１１・・・・・・接地連結線、６１２・・・
・・・接地線。

Claims (1)

    【実用新案登録請求の範囲】
  1. 同軸線路の一端に同軸接栓が、他端の中心導体に金属針
    がそれぞれ装着された同軸型探針を複数個備える高周波
    測定用探針装置において、金属針が接着された側の各同
    軸線路の端部外導体同士を測定高周波の波長の１７８以
    下の長さの接地連結線で互いに電気的に接続し、被測定
    物の接地端子に接触させる接地用探針と、前記接地連結
    線とを測定高周波の波長の１７８以下の長さの接地線で
    電気的に接続したことを特徴とする探針装置。
JP10370983U 1983-07-04 1983-07-04 探針装置 Pending JPS6011077U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10370983U JPS6011077U (ja) 1983-07-04 1983-07-04 探針装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10370983U JPS6011077U (ja) 1983-07-04 1983-07-04 探針装置

Publications (1)

Publication Number Publication Date
JPS6011077U true JPS6011077U (ja) 1985-01-25

Family

ID=30243834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10370983U Pending JPS6011077U (ja) 1983-07-04 1983-07-04 探針装置

Country Status (1)

Country Link
JP (1) JPS6011077U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117769U (ja) * 1990-03-19 1991-12-05
JP2006010559A (ja) * 2004-06-28 2006-01-12 Nidec-Read Corp プローブ装置及び基板検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117769U (ja) * 1990-03-19 1991-12-05
JP2006010559A (ja) * 2004-06-28 2006-01-12 Nidec-Read Corp プローブ装置及び基板検査装置

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