JPS60130834A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60130834A
JPS60130834A JP58238950A JP23895083A JPS60130834A JP S60130834 A JPS60130834 A JP S60130834A JP 58238950 A JP58238950 A JP 58238950A JP 23895083 A JP23895083 A JP 23895083A JP S60130834 A JPS60130834 A JP S60130834A
Authority
JP
Japan
Prior art keywords
wafers
diffusion
boat
gold
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58238950A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352456B2 (2
Inventor
Hitoshi Tsubone
坪根　衡
Hisanori Oki
沖　久典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58238950A priority Critical patent/JPS60130834A/ja
Publication of JPS60130834A publication Critical patent/JPS60130834A/ja
Publication of JPS6352456B2 publication Critical patent/JPS6352456B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P10/00—Bonding of wafers, substrates or parts of devices

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thyristors (AREA)
JP58238950A 1983-12-20 1983-12-20 半導体装置の製造方法 Granted JPS60130834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58238950A JPS60130834A (ja) 1983-12-20 1983-12-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58238950A JPS60130834A (ja) 1983-12-20 1983-12-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60130834A true JPS60130834A (ja) 1985-07-12
JPS6352456B2 JPS6352456B2 (2) 1988-10-19

Family

ID=17037693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58238950A Granted JPS60130834A (ja) 1983-12-20 1983-12-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60130834A (2)

Also Published As

Publication number Publication date
JPS6352456B2 (2) 1988-10-19

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