JPS60140641U - 荷電粒子照射装置 - Google Patents

荷電粒子照射装置

Info

Publication number: JPS60140641U
Authority: JP; Japan
Prior art keywords: oxygen concentration; charged particle; inert gas; irradiation device; particle irradiation
Prior art date: 1984-02-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2879384U

Other languages

English (en)

Japanese (ja)

Other versions

JPS638424Y2 (2

Inventor

寿男木村

寺澤　隆裕

水澤　健一

Original Assignee

日新ハイボルテ−ジ株式会社

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-02-28

Filing date

1984-02-28

Publication date

1985-09-18

1984-02-28 Application filed by 日新ハイボルテ−ジ株式会社 filed Critical 日新ハイボルテ−ジ株式会社

1984-02-28 Priority to JP2879384U priority Critical patent/JPS60140641U/ja

1985-09-18 Publication of JPS60140641U publication Critical patent/JPS60140641U/ja

1988-03-14 Application granted granted Critical

1988-03-14 Publication of JPS638424Y2 publication Critical patent/JPS638424Y2/ja

Status Granted legal-status Critical Current

Links

239000002245 particle Substances 0.000 title claims 4
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
239000001301 oxygen Substances 0.000 claims description 5
229910052760 oxygen Inorganic materials 0.000 claims description 5
238000001816 cooling Methods 0.000 claims description 2
239000011261 inert gas Substances 0.000 claims 4
239000007789 gas Substances 0.000 claims 2
238000001514 detection method Methods 0.000 claims 1
238000010894 electron beam technology Methods 0.000 description 3
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
229910001873 dinitrogen Inorganic materials 0.000 description 2
238000010586 diagram Methods 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Landscapes

Physical Or Chemical Processes And Apparatus (AREA)
Application Of Or Painting With Fluid Materials (AREA)

JP2879384U 1984-02-28 1984-02-28 荷電粒子照射装置 Granted JPS60140641U (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2879384U JPS60140641U (ja)	1984-02-28	1984-02-28	荷電粒子照射装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2879384U JPS60140641U (ja)	1984-02-28	1984-02-28	荷電粒子照射装置

Publications (2)

Publication Number	Publication Date
JPS60140641U true JPS60140641U (ja)	1985-09-18
JPS638424Y2 JPS638424Y2 (2)	1988-03-14

Family

ID=30527004

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2879384U Granted JPS60140641U (ja)	1984-02-28	1984-02-28	荷電粒子照射装置

Country Status (1)

Country	Link
JP (1)	JPS60140641U (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2001026803A1 (en) *	1999-10-12	2001-04-19	Toyo Ink Manufacturing Co., Ltd.	Method and apparatus for irradiating active energy ray
JP2006275515A (ja) *	2005-03-25	2006-10-12	Dainippon Printing Co Ltd	電子線照射装置
JP2010054407A (ja) *	2008-08-29	2010-03-11	Univ Of Fukui	電子線照射装置及び電子線照射方法

1984
- 1984-02-28 JP JP2879384U patent/JPS60140641U/ja active Granted

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2001026803A1 (en) *	1999-10-12	2001-04-19	Toyo Ink Manufacturing Co., Ltd.	Method and apparatus for irradiating active energy ray
US6930315B2 (en)	1999-10-12	2005-08-16	Toyo Ink Manufacturing Co., Ltd.	Method and apparatus for irradiation of active energy beam
JP2006275515A (ja) *	2005-03-25	2006-10-12	Dainippon Printing Co Ltd	電子線照射装置
JP2010054407A (ja) *	2008-08-29	2010-03-11	Univ Of Fukui	電子線照射装置及び電子線照射方法

Also Published As

Publication number	Publication date
JPS638424Y2 (2)	1988-03-14

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