JPS638424Y2 - - Google Patents
Info
- Publication number
- JPS638424Y2 JPS638424Y2 JP2879384U JP2879384U JPS638424Y2 JP S638424 Y2 JPS638424 Y2 JP S638424Y2 JP 2879384 U JP2879384 U JP 2879384U JP 2879384 U JP2879384 U JP 2879384U JP S638424 Y2 JPS638424 Y2 JP S638424Y2
- Authority
- JP
- Japan
- Prior art keywords
- oxygen concentration
- irradiation chamber
- gas
- irradiation
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 25
- 239000001301 oxygen Substances 0.000 claims description 25
- 229910052760 oxygen Inorganic materials 0.000 claims description 25
- 239000011261 inert gas Substances 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 18
- 229910001873 dinitrogen Inorganic materials 0.000 description 18
- 238000010894 electron beam technology Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2879384U JPS60140641U (ja) | 1984-02-28 | 1984-02-28 | 荷電粒子照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2879384U JPS60140641U (ja) | 1984-02-28 | 1984-02-28 | 荷電粒子照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60140641U JPS60140641U (ja) | 1985-09-18 |
| JPS638424Y2 true JPS638424Y2 (2) | 1988-03-14 |
Family
ID=30527004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2879384U Granted JPS60140641U (ja) | 1984-02-28 | 1984-02-28 | 荷電粒子照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60140641U (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU778181B2 (en) | 1999-10-12 | 2004-11-18 | Toyo Ink Manufacturing Co. Ltd. | Method and apparatus for irradiating active energy ray |
| JP4641844B2 (ja) * | 2005-03-25 | 2011-03-02 | 大日本印刷株式会社 | 電子線照射装置 |
| JP2010054407A (ja) * | 2008-08-29 | 2010-03-11 | Univ Of Fukui | 電子線照射装置及び電子線照射方法 |
-
1984
- 1984-02-28 JP JP2879384U patent/JPS60140641U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60140641U (ja) | 1985-09-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6646278B1 (en) | Irradiating device | |
| DE69704219T2 (de) | Laser mit verbesserter Strahlqualität und verringerten Betriebskosten | |
| WO2003099208A3 (en) | Recirculating target and method for producing radionuclide | |
| JP2004219408A (ja) | 強制ガス流キャニスター脱水 | |
| JPS638424Y2 (2) | ||
| US20160282886A1 (en) | Upper dome temperature closed loop control | |
| US6710846B2 (en) | Environmental control apparatus for exposure apparatus | |
| JP3494889B2 (ja) | 集束イオンビーム加工装置 | |
| KR980005396A (ko) | 이온 빔 가공장치 및 그 방법 | |
| JPH05202496A (ja) | 平版印刷版用支持体の封孔処理方法及び装置 | |
| CN111701822A (zh) | 紫外固化设备中的风机控制方法及紫外固化设备 | |
| JP2003007323A (ja) | 燃料電池の冷却装置 | |
| JPH0618608Y2 (ja) | 紫外線硬化形塗工剤用硬化装置 | |
| JP4250778B2 (ja) | 高温高圧流体冷却方法及び装置 | |
| JPH09262528A (ja) | 電子線照射処理装置 | |
| JPH09292498A (ja) | 電子線照射処理装置 | |
| JPH03115517A (ja) | 転炉排ガスの冷却装置 | |
| JP2593685Y2 (ja) | 電子線照射装置の酸素濃度制御装置 | |
| JP3564180B2 (ja) | 固体高分子型燃料電池電源温度調整システム | |
| JPH033316A (ja) | 縮小投影型露光装置 | |
| WO2024202427A1 (ja) | 乾燥装置 | |
| KR101832883B1 (ko) | 결로 방지 기능을 구비한 글로브 박스 시스템 | |
| SU870876A1 (ru) | Способ управлени процессом сушки | |
| CN121419821A (zh) | 激光加工系统和方法 | |
| JPH01155021A (ja) | 水冷エンジンの排熱回収装置 |