JPS60153533U - Wafer holding device - Google Patents
Wafer holding deviceInfo
- Publication number
- JPS60153533U JPS60153533U JP4006184U JP4006184U JPS60153533U JP S60153533 U JPS60153533 U JP S60153533U JP 4006184 U JP4006184 U JP 4006184U JP 4006184 U JP4006184 U JP 4006184U JP S60153533 U JPS60153533 U JP S60153533U
- Authority
- JP
- Japan
- Prior art keywords
- holding device
- wafer holding
- axis
- holding
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はイオン注入装置の断面図、第２図は第１図の押
え環のＡ矢視平面図、第３図は本考案の一実施例のウェ
ーハ押え板をプラテン側から見た平面図である。
１６・・・・・・押え板、１７・・曲回転軸、１８・・
曲長穴、１９・・・・・・駆動リング、２ｏ・・・・・
・ピン、２１・・・・・・開口部。FIG. 1 is a cross-sectional view of the ion implantation apparatus, FIG. 2 is a plan view of the holding ring shown in FIG. It is. 16...Press plate, 17...Curved rotation axis, 18...
Curved oblong hole, 19... Drive ring, 2o...
・Pin, 21...Opening.
Claims (1)
された複数の押え板とを備え、該押え板はそれぞれ回転
軸と穴とを有し、各押え板の穴に、前記中心軸の周りに
回転可能な環状板に植え付けられた複数のピンの一つが
それぞれ嵌入していることを特徴とするウェーハ押え装
置。It comprises a substrate and a plurality of holding plates movable perpendicularly to the substrate surface and arranged around a central axis, each holding plate having a rotation axis and a hole, and a A wafer holding device characterized in that one of a plurality of pins installed in an annular plate rotatable around an axis is fitted into each pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4006184U JPS60153533U (en) | 1984-03-21 | 1984-03-21 | Wafer holding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4006184U JPS60153533U (en) | 1984-03-21 | 1984-03-21 | Wafer holding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60153533U true JPS60153533U (en) | 1985-10-12 |
Family
ID=30548593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4006184U Pending JPS60153533U (en) | 1984-03-21 | 1984-03-21 | Wafer holding device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60153533U (en) |
-
1984
- 1984-03-21 JP JP4006184U patent/JPS60153533U/en active Pending
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