JPS60159305U - クリ−ンル−ムの環境測定ロボツト - Google Patents

クリ−ンル−ムの環境測定ロボツト

Info

Publication number
JPS60159305U
JPS60159305U JP4729084U JP4729084U JPS60159305U JP S60159305 U JPS60159305 U JP S60159305U JP 4729084 U JP4729084 U JP 4729084U JP 4729084 U JP4729084 U JP 4729084U JP S60159305 U JPS60159305 U JP S60159305U
Authority
JP
Japan
Prior art keywords
robot
grid
clean room
environmental measurement
measurement robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4729084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435924Y2 (2
Inventor
加瀬　隆雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Corp
Original Assignee
Shimizu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Corp filed Critical Shimizu Corp
Priority to JP4729084U priority Critical patent/JPS60159305U/ja
Publication of JPS60159305U publication Critical patent/JPS60159305U/ja
Application granted granted Critical
Publication of JPH0435924Y2 publication Critical patent/JPH0435924Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
JP4729084U 1984-03-31 1984-03-31 クリ−ンル−ムの環境測定ロボツト Granted JPS60159305U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4729084U JPS60159305U (ja) 1984-03-31 1984-03-31 クリ−ンル−ムの環境測定ロボツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4729084U JPS60159305U (ja) 1984-03-31 1984-03-31 クリ−ンル−ムの環境測定ロボツト

Publications (2)

Publication Number Publication Date
JPS60159305U true JPS60159305U (ja) 1985-10-23
JPH0435924Y2 JPH0435924Y2 (2) 1992-08-25

Family

ID=30562475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4729084U Granted JPS60159305U (ja) 1984-03-31 1984-03-31 クリ−ンル−ムの環境測定ロボツト

Country Status (1)

Country Link
JP (1) JPS60159305U (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0271982A (ja) * 1988-09-05 1990-03-12 Takenaka Komuten Co Ltd クリーンルーム計測ロボット
WO2017030188A1 (ja) * 2015-08-19 2017-02-23 Cyberdyne株式会社 自律移動体および施設内管理運営システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0271982A (ja) * 1988-09-05 1990-03-12 Takenaka Komuten Co Ltd クリーンルーム計測ロボット
WO2017030188A1 (ja) * 2015-08-19 2017-02-23 Cyberdyne株式会社 自律移動体および施設内管理運営システム
JPWO2017030188A1 (ja) * 2015-08-19 2018-07-05 Cyberdyne株式会社 自律移動体および施設内管理運営システム

Also Published As

Publication number Publication date
JPH0435924Y2 (2) 1992-08-25

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