JPS60182011A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS60182011A
JPS60182011A JP3638884A JP3638884A JPS60182011A JP S60182011 A JPS60182011 A JP S60182011A JP 3638884 A JP3638884 A JP 3638884A JP 3638884 A JP3638884 A JP 3638884A JP S60182011 A JPS60182011 A JP S60182011A
Authority
JP
Japan
Prior art keywords
alloy
layer
magnetic
recording medium
gaai
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3638884A
Other languages
Japanese (ja)
Inventor
Kazuhiko Nakamura
一彦 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP3638884A priority Critical patent/JPS60182011A/en
Publication of JPS60182011A publication Critical patent/JPS60182011A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a magnetic recording medium suitable for high-density recording and having excellent mass productivity by forming successively an underlying layer consisting of a GaAI alloy and magnetic metallic layer on a nonmagnetic base body. CONSTITUTION:An underlying layer 2 consisting of a GaAI alloy and a magnetic metallic layer 3 are successively deposited on a nonmagnetic base body 1 to constitute a magnetic recording medium. A high polymer film consisting of, for example, polyethylene terephthalate, etc. are used for the body 1 and Co, Fe, Ni or the alloy thereof (for example, Co-Ni alloy, etc.), etc. are used as the layer 2. The GaAI alloy having the compsn. range contg. 2-40wt% AI is usable as the GaAI alloy constituting the underlying layer. Said GaAI alloy is the nonmagnetic low melting metal which expands in volume during solidification. A vapor deposition method, sputtering method, ion plating method, etc. are usable for forming the layer 2 and the layer 3 on the body 1.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、磁気記録媒体に関する。[Detailed description of the invention] Industrial applications The present invention relates to magnetic recording media.

背景技術とその問題点 近年、磁気記録の高密度化の目的で薄膜磁気記録媒体、
即も非磁性基体上に真空蒸着、スパッタリング等の方法
により数白人〜略lμの厚さの強磁性金属を形成させた
磁気記録媒体についての(tll究が盛んである。この
ような磁気記録媒体においζ、高い抗磁力llcを有す
る磁性層を得る方法とし°C上述のIi!1!磁性金属
例えばCoを主体とする耐性全屈の蒸発粒子を斜めに入
射させる斜め蒸着法が提案されζいる。
Background technology and its problems In recent years, thin film magnetic recording media,
There is currently active research into magnetic recording media in which a ferromagnetic metal is formed on a non-magnetic substrate by methods such as vacuum deposition or sputtering. As a method for obtaining a magnetic layer having a high coercive force and a high coercive force, an oblique evaporation method has been proposed in which evaporated particles of a magnetic metal, such as Co, with a resistant total bending angle are incident obliquely. .

また、本出願人においζ、はぼ垂直蒸着法によって10
iい抗磁力を示し、且つ商い角形比をイjする1?i気
記録媒体も提案されている。この磁気記録媒体は非磁性
基体、Lにlliの1〜地層を被着した後、これの上に
例えばCoを主体の金屈硼P1層を形成するものである
In addition, the present applicant's odor ζ is approximately 10% by vertical evaporation method.
1 that exhibits a high coercive force and a squareness ratio of i? iQ recording media have also been proposed. This magnetic recording medium is constructed by depositing layers of 1 to 11 on a non-magnetic substrate L, and then forming a layer P1 of gold, mainly made of Co, for example.

しかし、前者の磁気記録媒体では磁f11金属のバッキ
ングがPlめ入射により低ドし、また酸素導入によって
飽和研束密度が低トする等の問題があった。一方1iJ
t考の磁気記録媒体では膜形成の際、基体温度を高温に
保たねばならないため、使用する非磁性基体が制限され
生産性の点でも問題があった。
However, in the former magnetic recording medium, there were problems such as the backing of the magnetic f11 metal being lowered due to the P1 incidence, and the saturation flux density being lowered due to the introduction of oxygen. On the other hand, 1iJ
In the conventional magnetic recording medium, the substrate temperature must be maintained at a high temperature during film formation, which limits the types of nonmagnetic substrates that can be used, which poses problems in terms of productivity.

発明の目的 本発明は、上述の点に鑑の、?口J密度記録に適し、L
つ量産性に優れた磁気記録媒体を提供するものである。
OBJECTS OF THE INVENTION In view of the above-mentioned points, the present invention has the following features: Suitable for mouth J density recording, L
The present invention provides a magnetic recording medium that is highly mass-producible.

発明の概要 本発明は、非磁性基体上にG3Al合金のト地1−と金
属磁性層を順次形成して成る磁気記録媒体である。
Summary of the Invention The present invention is a magnetic recording medium in which a G3Al alloy substrate 1 and a metal magnetic layer are sequentially formed on a nonmagnetic substrate.

この発明の磁気記録媒体では、峨性金属の蒸発粒子をほ
ぼ垂直入射しC(?i 4’l Itiを形成゛4−る
ことができるので磁性層のバッキングが密になり+F1
i密度記録に適する。また當に11.での/−を産が可
能でP産11[に通ずる。
In the magnetic recording medium of the present invention, the evaporated particles of the aggressive metal can be incident almost perpendicularly to form C(?i 4'l Iti), so the backing of the magnetic layer becomes dense and +F1
Suitable for i-density recording. Also, 11. It is possible to produce /- in , leading to P production 11 [.

実施例 以下、本発明の詳細な説明する。Example The present invention will be explained in detail below.

本発明においては、図に)J(ずように非磁性基体(1
)」−にGaAl合金のト地層(2)と金属磁性層(3
)を順次被着して磁気記録媒体を構成する。
In the present invention, the non-magnetic substrate (1
)'' - a GaAl alloy layer (2) and a metal magnetic layer (3).
) are sequentially deposited to form a magnetic recording medium.

非磁性基体(1)としては、例えばポリエチレンテレフ
タレート、ポリアミi′、ポリアミド・イミド、ポリイ
ミド等の市分子フィルム、ガラス、セラミック、サファ
イア或いは表面を酸化した金属板等を用いることができ
る。
As the non-magnetic substrate (1), for example, a molecular film such as polyethylene terephthalate, polyamide i', polyamide/imide, polyimide, glass, ceramic, sapphire, or a metal plate with an oxidized surface can be used.

金属磁性層(2)とし−(はCo、 l’e、旧或いは
これらの合金(例えばGo−Ni合金等)等を用いるこ
とができる。
The metal magnetic layer (2) may be made of Co, L'E, old metal, or an alloy thereof (for example, a Go-Ni alloy).

1−地j4を構成JるG8^1合金としては、八1が2
〜40市皇%含有する組成範囲のものを用いることがで
きる。このGaA 1合金は凝固Itkテに体積膨張°
4゛る非磁性の11〜融点金属である。
As for the G8^1 alloy that constitutes 1-G4, 81 is 2
A composition ranging from 40% to 40% can be used. This GaA 1 alloy expands in volume as it solidifies.
It is a non-magnetic metal with a melting point of 11~4.

非磁性基体+114二へのGa1llド地層(2)及び
金属磁性層(3)の形成には蒸着法、スパッタリング法
、イオンブレーティング法等を用いることができる。
A vapor deposition method, a sputtering method, an ion-blating method, etc. can be used to form the Ga1lled layer (2) and the metal magnetic layer (3) on the non-magnetic substrate.

実施例1 ガラス基扱まりなる非磁性基体fil−tに1.OX 
10−’ Torr〜1.Ox 1o−5Torrの貝
空中で基体温度30°c ニ保持した状態でGaro 
Al30合金を500人蒸着し゛Cト地層(2)を形成
し、引き続きCo6s Ni3s合金を200人蒸着し
て金属磁性層(3)を形成した。基体4に度は基体近傍
に位置した熱電対により1測し、層の厚さは水晶振動子
によりモニターした。このようにしζ(L−また磁気記
録媒体を実施例1とした。
Example 1 1. OX
10-' Torr~1. The Garo
Al30 alloy was deposited by 500 people to form a carbon layer (2), and subsequently Co6sNi3s alloy was deposited by 200 people to form a metal magnetic layer (3). The temperature of the substrate 4 was measured once with a thermocouple located near the substrate, and the layer thickness was monitored with a quartz crystal oscillator. In this way, a magnetic recording medium was prepared as Example 1.

実施例2 実施例1と同様の方法によるも、基体温度を100℃と
してGa7o−八130合金を500人、Cog5Ni
as合金を200人人々M、!¥した。このようにして
(Mた磁気記録媒体を実施例2とした。
Example 2 By the same method as in Example 1, the substrate temperature was 100°C, Ga7o-8130 alloy was used for 500 people, Cog5Ni
200 people M, as alloy! I paid ¥. A magnetic recording medium obtained in this manner was designated as Example 2.

実施例3 実施例1と同様の方法によるも、基体温度を30℃とし
、[+ato−八I〕oへ金を′500人、C065−
Ni35合金を10()八人々范着した。このよ−)に
しζiすだ磁気記録媒体を実施例3とした。
Example 3 In the same manner as in Example 1, the substrate temperature was set at 30°C, and gold was added to [+ato-8I]o for 500 min, C065-
Eight Ni35 alloys were installed. This ζi magnetic recording medium was prepared as Example 3.

実施例4 実施例1と同様の方法によるも、基体?X!+度を10
0°Cとし、Gavo−へ131〕合金を500人、C
ogs −Ni3i合金を100八人々蒸着した。この
ようにし“(得た磁気記録媒体を実施例4とした。
Example 4 A substrate was prepared in the same manner as in Example 1. X! +10 degrees
Gavo-131] alloy at 0°C, 500 people, C
ogs-Ni3i alloy was deposited by 100%. The thus obtained magnetic recording medium was designated as Example 4.

1、記各例の(d気記録媒体の磁気特性を測定した結果
をF記表に示−3°。
1. The results of measuring the magnetic properties of the (d) recording medium of each example are shown in the table F. -3°.

表 このように1−地層としてGaと八1の合金を用いるご
とによっ′(非磁セ1基体の基体温度が常ri! ’C
あっても、所望の磁気特性がj)−られる。C8は融点
が29.8℃であるが、^1との合金は融点が26.4
℃と低トするため、液状の−1・地層を形成しやずく、
そのl−に金属磁性j−を形成すると磁性金属の111
(粒子間にGa^1′合金が拡散し、磁性金属の微粒子
間の磁気的結合を弱め、その結果、商い抗磁力の磁気記
録媒体がf!−7られる。
As shown in the table above, each time an alloy of Ga and 81 is used as the 1-layer, the temperature of the non-magnetic cell 1 substrate is always ri!
Even if there is, the desired magnetic properties can be achieved. C8 has a melting point of 29.8℃, but the alloy with ^1 has a melting point of 26.4℃.
Due to the low temperature, a liquid -1 layer is formed.
When metal magnetic j- is formed on that l-, magnetic metal 111
(The Ga^1' alloy diffuses between the particles, weakening the magnetic coupling between the fine particles of the magnetic metal, and as a result, the magnetic recording medium has a coercive force of f!-7.

面、金属磁性層は−Wに限られるものではなく一1二達
したト地層を介在させた多層構造と一4′るごともでき
る。
The metal magnetic layer is not limited to -W, but can also have a multilayer structure with 112 or 14 layers interposed therebetween.

発明の効果 、上述した本発明によれば、凝固時に体積膨張するGa
^1の下地1@を介し゛ζ合金1fii性層を形成する
ことにより、金IIバ化′ゑ(’I: lI!!iがほ
ぼ!IFll′I方向からの蒸着でも微細化され、r+
iい抗磁〕月1cをfu、また高い角形比Rsをj!l
ることができる。
Effects of the invention: According to the present invention described above, Ga that expands in volume during solidification
By forming the ``ζ alloy 1fii layer through the base layer 1 of ^1, the gold II alloy''('I: lI!!i can be refined even by vapor deposition from the almost !IFll'I direction, and r+
I have a high antimagnetic resistance] Moon 1c is fu, and high squareness ratio Rs is j! l
can be done.

そして、金属磁性1@を用いる、二とと相俟つ′(,1
1!:直蒸着が1+J能なため金属磁セ11−のバッキ
ングが密になり、l1li密度記録に通ずるものである
。また1、・lめ苅着よりは効イ4のよい11−産がで
きp産性にもJ角Jる。1:た、磁気的に面内等方性の
磁性層であるためにテープ、ディスク等応用範囲が極め
て広い。
Then, using metal magnetism 1@, it is combined with 2′(,1
1! : Since direct deposition has a 1+J capability, the backing of the metal magnetic layer 11- becomes dense, leading to 11li density recording. In addition, it can produce 11-products that are more effective than 1, 1-l rice cultivation, and the p-productivity is also higher. 1: Since it is a magnetic layer that is magnetically isotropic in the plane, it has an extremely wide range of applications such as tapes and disks.

さらに、本発明では、1〜地層のGaAl合金が低面:
点金属であり、膜形成時の基体lA!1度を電層として
も所望の磁気11.’i 111が得られるので、非磁
性基体に対する熱的損傷(カール、しわ等)を排除でき
る。
Furthermore, in the present invention, the GaAl alloy of 1 to 2 layers has a low surface:
Point metal, substrate lA during film formation! Desired magnetism even if 1 degree is used as an electric layer 11. Since 'i 111 is obtained, thermal damage (curl, wrinkles, etc.) to the non-magnetic substrate can be eliminated.

このため、非磁性基体の祠′にの選択の自由度が増し、
温度二1ントl」−小制御のための設イメ11i、対策
等が不要になり、極めて量産)!1に適するものである
For this reason, the degree of freedom in selecting a non-magnetic substrate for the shrine increases,
Temperature 21 tl'' - Design 11i for small control, no countermeasures required, extremely mass production)! It is suitable for 1.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の磁気記録媒体の例をボず141i曲図であ
る。 (1)は非磁111基体、(2)は〔;様I合金1〜地
層、(3)は金属磁性層である。 代理人 伊藤 貞 同 松隈秀盛
The figure is a diagram showing an example of the magnetic recording medium of the present invention. (1) is a non-magnetic 111 substrate, (2) is a [;-like I alloy 1 to earth layer, and (3) is a metal magnetic layer. Agent Sadado Ito Hidemori Matsukuma

Claims (1)

【特許請求の範囲】[Claims] 非磁性基体上にGaAl合金のト地層と金属磁性層が順
次形成されて成る磁気記録媒体。
A magnetic recording medium in which a GaAl alloy layer and a metal magnetic layer are sequentially formed on a nonmagnetic substrate.
JP3638884A 1984-02-28 1984-02-28 Magnetic recording medium Pending JPS60182011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3638884A JPS60182011A (en) 1984-02-28 1984-02-28 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3638884A JPS60182011A (en) 1984-02-28 1984-02-28 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS60182011A true JPS60182011A (en) 1985-09-17

Family

ID=12468465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3638884A Pending JPS60182011A (en) 1984-02-28 1984-02-28 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS60182011A (en)

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