JPS60189842U - 表面欠陥計測装置 - Google Patents

表面欠陥計測装置

Info

Publication number
JPS60189842U
JPS60189842U JP7843684U JP7843684U JPS60189842U JP S60189842 U JPS60189842 U JP S60189842U JP 7843684 U JP7843684 U JP 7843684U JP 7843684 U JP7843684 U JP 7843684U JP S60189842 U JPS60189842 U JP S60189842U
Authority
JP
Japan
Prior art keywords
measurement data
measured
scanning period
deviation
sum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7843684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333001Y2 (mo
Inventor
橋本　利夫
今野　憲一
幸治 山田
和久 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Toyota Motor Corp
Original Assignee
Koyo Seiko Co Ltd
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd, Toyota Motor Corp filed Critical Koyo Seiko Co Ltd
Priority to JP7843684U priority Critical patent/JPS60189842U/ja
Publication of JPS60189842U publication Critical patent/JPS60189842U/ja
Application granted granted Critical
Publication of JPH0333001Y2 publication Critical patent/JPH0333001Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7843684U 1984-05-28 1984-05-28 表面欠陥計測装置 Granted JPS60189842U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7843684U JPS60189842U (ja) 1984-05-28 1984-05-28 表面欠陥計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7843684U JPS60189842U (ja) 1984-05-28 1984-05-28 表面欠陥計測装置

Publications (2)

Publication Number Publication Date
JPS60189842U true JPS60189842U (ja) 1985-12-16
JPH0333001Y2 JPH0333001Y2 (mo) 1991-07-12

Family

ID=30622414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7843684U Granted JPS60189842U (ja) 1984-05-28 1984-05-28 表面欠陥計測装置

Country Status (1)

Country Link
JP (1) JPS60189842U (mo)

Also Published As

Publication number Publication date
JPH0333001Y2 (mo) 1991-07-12

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