JPS60200862A - Manufacture of sintered body constituting titanium nitride on surface and titanium nitride oxide in inside - Google Patents
Manufacture of sintered body constituting titanium nitride on surface and titanium nitride oxide in insideInfo
- Publication number
- JPS60200862A JPS60200862A JP59057443A JP5744384A JPS60200862A JP S60200862 A JPS60200862 A JP S60200862A JP 59057443 A JP59057443 A JP 59057443A JP 5744384 A JP5744384 A JP 5744384A JP S60200862 A JPS60200862 A JP S60200862A
- Authority
- JP
- Japan
- Prior art keywords
- titanium nitride
- sintered body
- titanium
- powder
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Compositions Of Oxide Ceramics (AREA)
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は表面層が窒化チタンで内部が酸窒化チタンより
なる焼結体の製法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a sintered body whose surface layer is made of titanium nitride and whose interior is made of titanium oxynitride.
IVa族、Va族金属の窒化物、即ち、窒化チタン、窒
化ジルコニウム、窒化ハフニウム、窒化ニオブ等は耐熱
性、耐食性に優れた高硬度化合物で、美麗な黄金光沢を
有する。さらに、これらの化合物は導電性を有するため
、はこり等が付着しにくい。それゆえ、フィルムや磁気
テープの巻き取りのガイド部材や、合成繊維やフィルム
等を製造する際のカイト部材として極めて優れた特性を
有し、また装飾用としても有用である。Nitrides of group IVa and Va group metals, ie, titanium nitride, zirconium nitride, hafnium nitride, niobium nitride, etc., are high hardness compounds with excellent heat resistance and corrosion resistance, and have a beautiful golden luster. Furthermore, since these compounds have electrical conductivity, it is difficult for lumps and the like to adhere to them. Therefore, it has extremely excellent properties as a guide member for winding up films or magnetic tapes, a kite member when manufacturing synthetic fibers, films, etc., and is also useful for decorative purposes.
これらの化合物のなかでも、窒化チタンは低比重であり
、比較的安価であるため最も一般的に使用されている。Among these compounds, titanium nitride is the most commonly used because it has a low specific gravity and is relatively inexpensive.
窒化チタンの焼結体は、従来、二酸化チタンと炭素材料
を混合した粉末を窒素雰囲気中で還元窒化することによ
って、窒化チタン粉末を得、該粉末を圧縮成形し、真空
中またはアルゴン等の不活性雰囲気中で1300〜15
00℃で焼結して製造している。しかし、前記方法で得
られる窒化チタン粉末は粒度が粗く、焼結に長時間を要
し、しかも緻密な焼結体を得ることができない。緻密な
焼結体を得ようとして、より高温で焼結を行なうと、脱
窒を起す。Sintered bodies of titanium nitride have conventionally been produced by reducing and nitriding a powder of a mixture of titanium dioxide and a carbon material in a nitrogen atmosphere, compression molding the powder, and molding the powder in a vacuum or in an argon atmosphere. 1300-15 in active atmosphere
Manufactured by sintering at 00°C. However, the titanium nitride powder obtained by the above method has a coarse particle size, requires a long time for sintering, and moreover, it is impossible to obtain a dense sintered body. If sintering is performed at a higher temperature in an attempt to obtain a dense sintered body, denitrification will occur.
それゆえ、他の化合物の焼結体の表面に窒化チタンをコ
ーティングすることも行なわれているが、母材と窒化チ
タンの被膜が剥離し易いという欠点があり、さらに被膜
自体の強度にも問題がある。Therefore, coating titanium nitride on the surface of sintered bodies of other compounds has been carried out, but this has the disadvantage that the titanium nitride coating is easily separated from the base material, and there are also problems with the strength of the coating itself. There is.
本発明は上記の欠点を改良するものであり、本発明方法
によれば、二酸化チタン粉末を700〜1000°Cの
温度範囲においてアンモニアガスと反応させ、得られる
酸窒化チタン粉末を圧縮成形し、1200−1700℃
の温度範囲においてアンモニア雰囲気中で焼結すること
によって、表面層のみが窒化チタンで内部が酸窒化チタ
ンよりなる焼結体が得られる。The present invention aims to improve the above-mentioned drawbacks, and according to the method of the present invention, titanium dioxide powder is reacted with ammonia gas in a temperature range of 700 to 1000°C, and the resulting titanium oxynitride powder is compression molded. 1200-1700℃
By sintering in an ammonia atmosphere at a temperature range of , a sintered body is obtained in which only the surface layer is made of titanium nitride and the inside is made of titanium oxynitride.
アンモニア雰囲気中において、二酸化チタン粉末を70
0〜100℃に加熱することにより、二酸化チタンの還
元と窒化が起って酸窒化チタン粉末が得られる。この温
度範囲では焼結は殆ど起らないので、微細な二酸化チタ
ン粉末を原料として使用すると、そのままの微細な酸窒
化チタンを得ることができる。In an ammonia atmosphere, titanium dioxide powder was
By heating to 0 to 100°C, titanium dioxide is reduced and nitrided to obtain titanium oxynitride powder. Sintering hardly occurs in this temperature range, so if fine titanium dioxide powder is used as a raw material, fine titanium oxynitride can be obtained as is.
このようにして得られる酸窒化チタン粉末を圧縮成形し
てアンモニア雰囲気中で焼結すると、表面層のみ窒化還
元されて、表面が窒化チタンで内部は酸窒化チタンのま
まである焼結体となり、微細な酸窒化チタン粉末を焼結
原料とするため、短時間で緻密な焼結体が得られる。ま
た窒化チタン層と内部の酸窒化チタンとの結合も強固で
ある。When the titanium oxynitride powder obtained in this way is compression molded and sintered in an ammonia atmosphere, only the surface layer is nitrided and reduced, resulting in a sintered body whose surface is titanium nitride and the inside remains titanium oxynitride. Since fine titanium oxynitride powder is used as the sintering raw material, a dense sintered body can be obtained in a short time. Furthermore, the bond between the titanium nitride layer and the titanium oxynitride inside is strong.
以下本発明を具体的に説明する。The present invention will be specifically explained below.
酸窒化チタンの原料となる二酸化チタンは、どのような
製法のものでもよいが、微細な酸窒化チタン粉末を得る
ためには、できるだけ微細な二酸化チタン粉末を用いな
ければならない。二酸化チタン粉末とアンモニアの反応
は700−1000°Cの温度範囲において1時間以上
行なう。700°C未満では反応速度が充分でなく、未
反応の二酸化チタンが多量に残留し、高強度の焼結体を
得るための原料としては不適である。また1 000
’0を超える温度では粒子の結合が起り、得られる酸窒
化チタン粉末は粗大なものとなるので焼結原料としては
同様に不適である。Titanium dioxide, which is a raw material for titanium oxynitride, may be manufactured by any method, but in order to obtain fine titanium oxynitride powder, it is necessary to use titanium dioxide powder as fine as possible. The reaction between titanium dioxide powder and ammonia is carried out at a temperature range of 700-1000°C for over 1 hour. If the temperature is less than 700°C, the reaction rate is insufficient and a large amount of unreacted titanium dioxide remains, making it unsuitable as a raw material for obtaining a high-strength sintered body. 1 000 again
If the temperature exceeds 0, bonding of particles occurs and the resulting titanium oxynitride powder becomes coarse, making it similarly unsuitable as a sintering raw material.
上記のようにして得られた酸窒化チタン粉末を所望の形
状に圧縮成形する。この時、バインダーとしてPVA、
CMC,PVP等の粘結物質(糊料)を少量添加してお
く方が圧粉体の強度を高め取扱いを容易にする。プレス
圧は特に限定されないが、高圧でプレスするほど窒化チ
タン層は薄くなる。The titanium oxynitride powder obtained as described above is compression molded into a desired shape. At this time, PVA as a binder,
Adding a small amount of a caking substance (sizing agent) such as CMC or PVP increases the strength of the green compact and makes it easier to handle. Although the pressing pressure is not particularly limited, the higher the pressing pressure, the thinner the titanium nitride layer becomes.
この圧粉体をアンモニア雰囲気中で1200〜1700
℃の温度範囲において焼結する。この時、アンモニアガ
スを窒素、アルゴン等の不活性ガスで稀釈して窒化チタ
ン層の厚さを制御することも可能である。This green compact was heated to 1200 to 1700 in an ammonia atmosphere.
Sinter in the temperature range of °C. At this time, it is also possible to control the thickness of the titanium nitride layer by diluting the ammonia gas with an inert gas such as nitrogen or argon.
焼結温度を1200−1700’Cに限定する理由は、
1200°C未満では、いかに長時間焼結しても密度は
トがらず、充分な硬度を有する焼結体が得られない。ま
た1 700 ’Cを超える温度で焼結しても、焼結時
間は短縮されないのみならず、脱窒素が起りはじめ、緻
密な焼結体を得ることができない。また焼結温度に達す
るまでの昇温速度は500℃/hr以下が望ましい。5
00°C/hrを超える速度で昇温すると、ひび割れを
生じたり、表面の窒化チタン層が剥離することがある。The reason for limiting the sintering temperature to 1200-1700'C is
If the temperature is less than 1200°C, no matter how long the sintering time is, the density will not decrease and a sintered body with sufficient hardness will not be obtained. Furthermore, even if sintering is performed at a temperature exceeding 1,700'C, not only will the sintering time not be shortened, but denitrification will begin to occur, making it impossible to obtain a dense sintered body. Further, the temperature increase rate until reaching the sintering temperature is desirably 500° C./hr or less. 5
If the temperature is increased at a rate exceeding 00°C/hr, cracks may occur or the titanium nitride layer on the surface may peel off.
このように、内部が酸窒化チタンからなり、表面層が窒
化チタンからなる緻密な焼結体を容易に得ることができ
る。In this way, a dense sintered body whose interior is made of titanium oxynitride and whose surface layer is made of titanium nitride can be easily obtained.
なお、内部の酸窒化チタンの酸素量は二酸化チタン粉末
をアンモニアと反応させる際の温度と反応時間を調整す
ることによって制御できる。Note that the amount of oxygen in the titanium oxynitride inside can be controlled by adjusting the temperature and reaction time when titanium dioxide powder is reacted with ammonia.
次に実施例により本発明を具体的に説明する。Next, the present invention will be specifically explained with reference to Examples.
平均粒径0.03gの二酸化チタンを第1表に示す条件
でアンモニア雰囲気中で反応させて得られた粉末2.0
gを直径10)の円柱形に圧縮成型し、焼結した。生成
した焼結体の性状も同表中に記しである。Powder 2.0 obtained by reacting titanium dioxide with an average particle size of 0.03 g in an ammonia atmosphere under the conditions shown in Table 1.
g was compression molded into a cylindrical shape with a diameter of 10) and sintered. The properties of the produced sintered body are also listed in the same table.
本発明の製造条件外の条件で製造した試料についても同
表中に示しである。Samples manufactured under conditions other than those of the present invention are also shown in the same table.
なお、窒化チタン粉末は直径1.0終以下のものは得が
たく、この粒径の粉末を使用して焼結体を造ると、2ト
ンのプレス圧を用いても焼結体の密度は96.8%以下
である。It is difficult to obtain titanium nitride powder with a diameter of less than 1.0 mm, and when a sintered body is made using powder with this particle size, the density of the sintered body will be low even if a press pressure of 2 tons is used. It is 96.8% or less.
特許出願人 三菱金属株式会社
代理人 弁理士 松井政広
手続補正書
昭和60年 6月11日
特許庁長官 志 賀 学 殿
l 事件の表示
昭和59年 特 許 願 第057443号2 発明の
名称 表面が窒化チタンで内部が酸窒化チタンよりなる
焼結体の製法
3 補正をする者
事件との関係 特許出願人
名 称 (82G) 三菱金属株式会社4 代 理 人
(〒164)
住 所 東京都中野区本町1丁目31番4号5 補正指
令の日付 自発
6 補正により増加する発明の数 なし7 補正の対象
明細書の特許請求の範囲、発明の詳細な説明の各欄
8 補正の内容 別紙のとおり
工 明細書の特許請求の範囲を次のように訂正する。Patent Applicant Mitsubishi Metals Co., Ltd. Agent Patent Attorney Masahiro Matsui Procedural Amendment June 11, 1985 Manabu Shiga, Commissioner of the Japan Patent Office Indication of the Case 1982 Patent Application No. 057443 2 Name of the Invention Surface is nitrided Method for producing a sintered body made of titanium with a titanium oxynitride interior 3 Relationship with the amended case Name of patent applicant (82G) Mitsubishi Metals Co., Ltd. 4 Agent (164) Address 1 Honmachi, Nakano-ku, Tokyo Chome 31-4 No. 5 Date of amendment order Voluntary action 6 Number of inventions to be increased by amendment None 7 Subject of amendment Scope of claims in the specification, each column of detailed explanation of the invention 8 Contents of amendment As shown in the attached sheet Specification amend the claims as follows.
「 1 酸窒化チタン粉末を圧11成形し、1200〜
1700°Cの温度範囲においてアンモニア雰囲気中で
焼結することからなる、表面層のみが窒化チタンで内部
が酸窒化チタンからなる焼結体の製法。1. Pressure mold the titanium oxynitride powder to 1200~
A method for producing a sintered body in which only the surface layer is made of titanium nitride and the inside is made of titanium oxynitride, which is sintered in an ammonia atmosphere in a temperature range of 1700°C.
2 上記酸窒化チタン粉末が、二酸化チタン粉末を70
0−1000℃の温度範囲においてアンモニアガスと反
応させて得られるものである、特許請求の範囲第1項の
製法。町
II 明細書の発明の詳細な説明の記載を次のように訂
正する。2 The titanium oxynitride powder contains 70% of the titanium dioxide powder.
The manufacturing method according to claim 1, which is obtained by reacting with ammonia gas in a temperature range of 0 to 1000°C. Town II The description of the detailed description of the invention in the specification is corrected as follows.
1 第3頁第12行から同頁第14行の記載「二酸化チ
タン粉末を・・・・・得られる」を削除する。1. The statement "Titanium dioxide powder can be obtained" from line 12 to line 14 of page 3 is deleted.
2 第3頁第20行の記載「700〜100°C」をI
’700〜1000’Cj 、!l:訂正する。2 Change the description “700 to 100°C” on page 3, line 20 to I
'700~1000'Cj,! l: Correct.
3 第4頁第9行の記載「のままである焼結体となり」
を「のままであり、表面層から内部にかけて窒化チタン
が酸窒化チタンに漸移する焼結体となりjと訂正する。3 The statement on page 4, line 9: “The sintered body remains as it is.”
is corrected as ``It remains as it is, and becomes a sintered body in which titanium nitride gradually changes to titanium oxynitride from the surface layer to the inside.
4 第5頁第15行から同頁第16行の記載「アンモニ
アガスを窒素、アルゴン等の不活性ガスで希釈して」を
1アンモニアガスをアルゴン等の希ガス類で希釈してj
と訂正する。4. The statement from page 5, line 15 to line 16 of the same page, ``Dilute ammonia gas with an inert gas such as nitrogen or argon,'' is 1. Dilute ammonia gas with a rare gas such as argon.j
I am corrected.
5 第7頁第1表、焼結雰囲気の欄の記載rNH380
% 十 N220z 、 NH350%” N250%
J を FNH380% + Ar 20%、NH3
50% +Ar501 j ト訂正する。5 Page 7, Table 1, description in the sintering atmosphere column rNH380
% 10 N220z, NH350%” N250%
J to FNH380% + Ar 20%, NH3
50% +Ar501 j Correct.
Claims (1)
囲においてアンモニアガスと反応させ、得られる酸窒化
チタン粉末を圧縮成形し、1200〜1700℃の温度
範囲においてアンモニア雰囲気中で焼結することからな
る、表面層のみが窒化チタンで内部が酸窒化チタンから
なる焼結体の製法。1. Reacting titanium dioxide powder with ammonia gas at a temperature range of 700 to 1000°C, compression molding the obtained titanium oxynitride powder, and sintering it in an ammonia atmosphere at a temperature range of 1200 to 1700°C. A method for producing a sintered body in which only the surface layer is made of titanium nitride and the inside is made of titanium oxynitride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59057443A JPS60200862A (en) | 1984-03-27 | 1984-03-27 | Manufacture of sintered body constituting titanium nitride on surface and titanium nitride oxide in inside |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59057443A JPS60200862A (en) | 1984-03-27 | 1984-03-27 | Manufacture of sintered body constituting titanium nitride on surface and titanium nitride oxide in inside |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60200862A true JPS60200862A (en) | 1985-10-11 |
| JPS6341870B2 JPS6341870B2 (en) | 1988-08-19 |
Family
ID=13055797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59057443A Granted JPS60200862A (en) | 1984-03-27 | 1984-03-27 | Manufacture of sintered body constituting titanium nitride on surface and titanium nitride oxide in inside |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60200862A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH056437U (en) * | 1991-07-09 | 1993-01-29 | リズム時計工業株式会社 | Waterproof camera with heater glass to prevent shortage |
-
1984
- 1984-03-27 JP JP59057443A patent/JPS60200862A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH056437U (en) * | 1991-07-09 | 1993-01-29 | リズム時計工業株式会社 | Waterproof camera with heater glass to prevent shortage |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341870B2 (en) | 1988-08-19 |
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