JPS60200982A - Clad material - Google Patents

Abstract

PURPOSE:To obtain a vessel having superior consumption resistance and a long life by cladding the surface of a W-base metal with an Ir-base metal. CONSTITUTION:When a W or W alloy vessel is used as a crucible for melting glass or ore contg. metallic oxide at a high temp. or as a tray, a boat or the like for vacuum deposition, oxide is formed by a reaction with O2 in the air. Since this oxide is liable to evaporate, the vessel is required to be used in an inert atmosphere. Even though the vessel is used in such a way, when glass, ore or the like contg. metallic oxide is melted, O contained in the resulting melt bonds to W to shorten the life of the vessel. The surface of the vessel is clad with Ir or an Ir alloy by physical vapor deposition such as ion plating so as to obtain a vessel having superior oxidation resistance and a long life.

Description

[Detailed description of the invention] The present invention relates to a clad container.

Conventionally, W or W alloy containers have been used for high-temperature crows, trays for melting ores containing metal oxides, trays for steaming, and bowls.
It was widely used. This is the melting point of W or about 34
This is because it has excellent mechanical properties at a very high temperature of 00°C and i'1'+1 temperature. However, when W exceeds 500 C, it reacts with oxygen in the air and forms oxides, which tend to evaporate, making it difficult to use it in an inert atmosphere. there were. Furthermore, even when used in such an inert atmosphere, when melting glass or ore containing metal oxides, W combines with the oxygen contained in the melt and -zeta oxides are dissolved. Make and container W force q
The drawback was that the lifespan of the container was short after dispensing. For this reason, the current situation is that either other metals are added to form an alloy to improve wear resistance, or an alloy sufficient to prevent oxidation of W has not been discovered.

The present invention was made in view of the above-mentioned drawbacks, and an object of the present invention is to provide a container with excellent wear resistance and long life.

The present invention is a crat container characterized in that the surface of W or W alloy is coated with Ir or Ir alloy.

In the present invention, Ir or 1r alloy is used because 1r
This is because its melting point is 2454°C, which is as high as W, and it also has excellent oxidation resistance at high temperatures, especially against metal oxides. However, containers made of solid Ir or Ir alloy are expensive and difficult to process, so it was decided to cover them. Coating is better done by physical vapor deposition such as ion blasting, sputtering or vapor deposition or by wet vapor deposition. This is because physical vapor deposition embeds Ir atoms in the surface layer of the W container, increasing the adhesion strength of the joint surface of the Ir and W alloy, resulting in a clad container with high mechanical strength. In this way, I
A crucible coated with r or Ir alloy has excellent oxidation resistance and mechanical strength of the joint surface, so it has a long life. In addition, as the Ir alloy, P L −1r , R
There is k+ -1r.

Examples and conventional examples will be described below.

[Example 1] When the cross section is U-shaped W with a wall thickness of 5 mm, a height of 100 mm, and an inner diameter of 80 II + 11, PT was applied to the inner wall of the crucible to a thickness of 1 under the following conditions.
Ion blating was performed down to 0 μm.

Atmosphere Vacuum degree: 2.0 x 10 +nm 1g Ionization voltage, current: 4QV, 5A Electron beam melting: 9 kv, 300 mA Thermionic: 10. 100A This is considered as practical product 1.

[Example 2] A PL-Ir alloy was sputter-linked to a thickness of 0.1 mm on the inner and outer walls of a Ruho made of W having the same shape as in Example 1 under the following conditions.

Pressure-Ar gas 3 x 10 am l1g Applied voltage:
400V high frequency power supply: 13.56 Mllz This is considered as practical product 2.

[Conventional example]

The W'M crucible used in Example 1 was a conventional product.

Next, we added S i O2A + to the practical product 1.2 and the conventional product.
Put 500g of 203 glass in Ar atmosphere, temperature about 22
It was used at 00°C for 60 minutes. When this was repeated 10 times, 50μ was removed from the surface of the W container for the conventional product, while only 5μ was removed for practical product 1, and 3μ for practical product 2.

Next, when the bottoms of the containers of Practical Product 2 and the conventional example were directly heated with a heater in the atmosphere and held at a temperature of about 1000'C for 10 hours, W, which was the conventional example, was oxidized and evaporated, resulting in a weight loss of 20 g. On the other hand, practical product 2 did not lose weight.

From these facts, the Kratt crucible of the present invention has significantly superior oxidation resistance as a crucible for dissolving metal oxides compared to conventional products, and Practical Product 2, which is coated with Ir alloy up to the outer wall, has oxidation resistance even when heated in the atmosphere. I know it's excellent.

As described in detail above, according to the present invention, it is possible to provide a crat container with excellent wear resistance and long life. Moreover, if the W container is completely coated, it can be replaced with a long life even in the atmosphere, and it is a cheap option since only a small amount of expensive Ir is required, which eliminates the need for expensive equipment.

Applicant: Nakagata Metal Industry Co., Ltd.

Claims (1)

[Claims] A cladding container characterized in that the surface of W or W alloy is coated with 1r or Ir alloy.