JPS6020134A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS6020134A JPS6020134A JP12919083A JP12919083A JPS6020134A JP S6020134 A JPS6020134 A JP S6020134A JP 12919083 A JP12919083 A JP 12919083A JP 12919083 A JP12919083 A JP 12919083A JP S6020134 A JPS6020134 A JP S6020134A
- Authority
- JP
- Japan
- Prior art keywords
- surface wave
- pressure
- substrate
- warping
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 230000010355 oscillation Effects 0.000 claims abstract description 5
- 244000126211 Hericium coralloides Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、表面波発振器を用いて外気圧などを検知する
だめの圧力センサに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pressure sensor that detects external pressure and the like using a surface wave oscillator.
圧力レン蕾すとしては、ベローズやタイヤフラムの動き
を利用したものが多く提案されているが、いずれもベロ
ーズやダイヤフラムの動さに応じてスイッチを動作さぜ
る成域的な圧力スイッチというべきものであり、使用用
途が限られている。Many pressure switches have been proposed that utilize the movement of bellows or tire flams, but all of them should be considered general pressure switches that operate the switch according to the movement of the bellows or diaphragm. It has limited uses.
本発明は、表面波発振器を用いることにより、構造が簡
単でかつ安価で、しがもアナログ的出力が得られ、高度
計など広範囲な、用途に利用できるようにした圧力セン
サを提供することを目的とづる。An object of the present invention is to provide a pressure sensor that uses a surface wave oscillator, has a simple structure, is inexpensive, can still provide an analog output, and can be used for a wide range of applications such as altimeter. Tozuru.
すなわち本発明は、表面波発振器を構成−りる表面波基
板または表面波基板を載置したタイヤフラムによってケ
ース内に一定圧の密閉空間を形成し、その空間内部と外
部との圧力差で生ずる表面波基板のそりによって表面波
発振器の発振周波数を変化させ、この周波数変化に基い
て外部圧力を検知するようにしたものである。That is, the present invention forms a sealed space with a constant pressure in a case using a surface wave substrate constituting a surface wave oscillator or a tire flam on which a surface wave substrate is placed, and generates a pressure difference between the inside and outside of the space. The oscillation frequency of the surface wave oscillator is changed by the warpage of the surface wave substrate, and external pressure is detected based on this frequency change.
以下、本発明の一実施例を図面を参照しつつ訂）ボＪ
る 。Hereinafter, one embodiment of the present invention will be described with reference to the drawings)
Ru.
第１図において、１は一端開口状のケースで、そのケー
ス内側面に段差２が設けられ、まＩこケース内側面の段
差２より底部側に貫通孔３が設りられている。４は表面
波基板で、ＰＺｌ−などの圧電セラミックス、１−ｉＮ
ｂ０３などの単結晶、あるいはＺｎＯなとの圧電薄膜を
形成したカラスＦ’＝ ＋ｔｉなどで構成されている。In FIG. 1, reference numeral 1 denotes a case with an open end, and a step 2 is provided on the inner surface of the case, and a through hole 3 is provided on the bottom side of the step 2 on the inner surface of the case. 4 is a surface wave substrate made of piezoelectric ceramics such as PZl-, 1-iN
It is composed of a single crystal such as b03 or a glass F'=+ti formed with a piezoelectric thin film such as ZnO.
この表面波基板４上には、第２図に示すように、一対の
インターディジタル電極５．６が適当距離隔てて形成さ
れ、表面波遅延線が構成されている。この表面波ｉ１Ｚ
延線におＣプる各インターディジタル電極５．６の一方
側のくしｆ＋Ｆ＋電４４ｉ間に増幅器７が挿入され、各
電極５．６の他方側のくし歯電極がアースされ、増幅器
７の出力側には表面波発振器の出力端が設けられている
。このような表面波基板４はケース１内の段差２１−に
固定され、ケース１どの間で密閉空間８が４１４成され
、貫通孔３を通して密閉空間８内の圧力が一定値に設定
されている。一定圧に設定後は貫通孔３にシール部月９
が取りイ」りられる。そして、／７−ス１の聞に１端に
は多数の孔を右りる器１ｏが取り伺（）られでいる。On this surface wave substrate 4, as shown in FIG. 2, a pair of interdigital electrodes 5.6 are formed at an appropriate distance apart, forming a surface wave delay line. This surface wave i1Z
An amplifier 7 is inserted between the comb f+F+electrode 44i on one side of each interdigital electrode 5.6 connected to the wire extension, and the comb tooth electrode on the other side of each electrode 5.6 is grounded, and the output of the amplifier 7 is An output end of a surface wave oscillator is provided on the side. Such a surface wave substrate 4 is fixed to a step 21 in the case 1, and a sealed space 8 is formed between the cases 1 and 414, and the pressure in the sealed space 8 is set to a constant value through the through hole 3. . After setting a constant pressure, seal part 9 in through hole 3.
It can be taken away. And, between /7 and 1, there is a vessel 1o with a large number of holes at one end.
本実施例において、外気圧が変化し、密閉空間Φ
８内の圧ツノと間に差が生ずると、その斤力差にＪ：っ
Ｃ表面波基板４にそりが起こり、そのそりに基いて、表
面波が一方の電極５から他方の電極６へ伝わる芹延＋ｔ
’ｒ間が変化して、発振周波数が変化する。この周波数
変化によって外気圧を検知することができる。したがっ
て、外気圧の微妙な変化をアナログ的にかつ正確に測定
することができる。In this embodiment, when the external pressure changes and a difference occurs between the pressure horns in the closed space Φ 8, warping occurs in the surface wave substrate 4 due to the difference in clamping force, and based on the warping, , Serinobe+t where the surface wave is transmitted from one electrode 5 to the other electrode 6
'r changes, and the oscillation frequency changes. The external pressure can be detected by this frequency change. Therefore, subtle changes in external pressure can be measured analogously and accurately.
上記実施例は、表面波発振器として表面波遅延線を用い
たものを示したが、本発明によれば、表面波共振子を用
いて発振器を構成しても同様である。また、表面波基板
は別個のタイヤフラムに貼りイ」け、このタイヤフラム
をケース１内の段差２に取り付けるようにしてもにい。Although the above embodiments use a surface wave delay line as a surface wave oscillator, according to the present invention, the oscillator may be configured using a surface wave resonator. Alternatively, the surface wave substrate may be pasted onto a separate tire flam, and this tire flam may be attached to the step 2 inside the case 1.
本発明は、以上説明したように構成されているので、構
造が簡単でかつ安価に構成でき、しかしアナログ的出力
が得られ、高度計など広範囲な用途に利用することかで
きる。Since the present invention is constructed as described above, it has a simple structure and can be constructed at low cost, yet provides an analog output and can be used in a wide range of applications such as altimeter.
第１図は本発明による圧力セン１ノの〜実施例を示す断
面図、第２図は表面波発振器の概略図である。
１はケース、４は表面波発振器を（ｊ４成づる表面波基
板である。
特 許 出 願 人
株式愈着ｔ’ｖ’ ｔＩｌ製作所FIG. 1 is a sectional view showing an embodiment of a pressure sensor 1 according to the present invention, and FIG. 2 is a schematic diagram of a surface wave oscillator. 1 is a case, and 4 is a surface wave board made up of a surface wave oscillator (J4).
Claims (1)
を載置したダイヤフラムによってケース内に一定圧の密
閉空間を形成し、その空間内部と外部との圧力差で生ず
る表面波基板のそりによって表面波発振器の発振周波数
を変化さけ、この周波数変化に基いて外部圧力を検知す
るようにしたことを特徴とする圧力レンサ。A sealed space with a constant pressure is formed in the case by the surface wave substrate that constitutes the surface wave oscillator or the diaphragm on which the surface wave substrate is placed, and the surface wave substrate warps due to the pressure difference between the inside and outside of the space. A pressure sensor characterized in that the oscillation frequency of a wave oscillator is avoided and external pressure is detected based on this frequency change.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12919083A JPS6020134A (en) | 1983-07-14 | 1983-07-14 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12919083A JPS6020134A (en) | 1983-07-14 | 1983-07-14 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6020134A true JPS6020134A (en) | 1985-02-01 |
Family
ID=15003365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12919083A Pending JPS6020134A (en) | 1983-07-14 | 1983-07-14 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6020134A (en) |
-
1983
- 1983-07-14 JP JP12919083A patent/JPS6020134A/en active Pending
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