JPS60208824A - 気相成長装置 - Google Patents
気相成長装置Info
- Publication number
- JPS60208824A JPS60208824A JP59066064A JP6606484A JPS60208824A JP S60208824 A JPS60208824 A JP S60208824A JP 59066064 A JP59066064 A JP 59066064A JP 6606484 A JP6606484 A JP 6606484A JP S60208824 A JPS60208824 A JP S60208824A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- chamber
- reaction
- gas
- transparent plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
- H10P14/3411—Silicon, silicon germanium or germanium
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066064A JPS60208824A (ja) | 1984-04-03 | 1984-04-03 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066064A JPS60208824A (ja) | 1984-04-03 | 1984-04-03 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60208824A true JPS60208824A (ja) | 1985-10-21 |
| JPH0518250B2 JPH0518250B2 (2) | 1993-03-11 |
Family
ID=13305048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59066064A Granted JPS60208824A (ja) | 1984-04-03 | 1984-04-03 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60208824A (2) |
-
1984
- 1984-04-03 JP JP59066064A patent/JPS60208824A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518250B2 (2) | 1993-03-11 |
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