JPS60220139A - 光による反応誘起方法 - Google Patents

光による反応誘起方法

Info

Publication number
JPS60220139A
JPS60220139A JP7470384A JP7470384A JPS60220139A JP S60220139 A JPS60220139 A JP S60220139A JP 7470384 A JP7470384 A JP 7470384A JP 7470384 A JP7470384 A JP 7470384A JP S60220139 A JPS60220139 A JP S60220139A
Authority
JP
Japan
Prior art keywords
reaction
light
wavelength
gas
reactions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7470384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0153577B2 (de
Inventor
Misao Saga
佐賀　操
Akinori Shimizu
了典 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP7470384A priority Critical patent/JPS60220139A/ja
Publication of JPS60220139A publication Critical patent/JPS60220139A/ja
Publication of JPH0153577B2 publication Critical patent/JPH0153577B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/121—Coherent waves, e.g. laser beams

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP7470384A 1984-04-13 1984-04-13 光による反応誘起方法 Granted JPS60220139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7470384A JPS60220139A (ja) 1984-04-13 1984-04-13 光による反応誘起方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7470384A JPS60220139A (ja) 1984-04-13 1984-04-13 光による反応誘起方法

Publications (2)

Publication Number Publication Date
JPS60220139A true JPS60220139A (ja) 1985-11-02
JPH0153577B2 JPH0153577B2 (de) 1989-11-14

Family

ID=13554850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7470384A Granted JPS60220139A (ja) 1984-04-13 1984-04-13 光による反応誘起方法

Country Status (1)

Country Link
JP (1) JPS60220139A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988005087A1 (fr) * 1986-12-25 1988-07-14 Kawasaki Steel Corporation Procede cvd optique
JP2011025170A (ja) * 2009-07-27 2011-02-10 Lintec Corp 光照射装置および光照射方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7095075B2 (en) 2003-07-01 2006-08-22 Micron Technology, Inc. Apparatus and method for split transistor memory having improved endurance
US7241654B2 (en) 2003-12-17 2007-07-10 Micron Technology, Inc. Vertical NROM NAND flash memory array
US6878991B1 (en) 2004-01-30 2005-04-12 Micron Technology, Inc. Vertical device 4F2 EEPROM memory
US7075146B2 (en) 2004-02-24 2006-07-11 Micron Technology, Inc. 4F2 EEPROM NROM memory arrays with vertical devices

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59216629A (ja) * 1983-05-24 1984-12-06 Nec Corp 光気相成長法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59216629A (ja) * 1983-05-24 1984-12-06 Nec Corp 光気相成長法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988005087A1 (fr) * 1986-12-25 1988-07-14 Kawasaki Steel Corporation Procede cvd optique
EP0298126B1 (de) * 1986-12-25 1994-06-15 Kawasaki Steel Corporation Optisches cvd-verfahren
JP2011025170A (ja) * 2009-07-27 2011-02-10 Lintec Corp 光照射装置および光照射方法

Also Published As

Publication number Publication date
JPH0153577B2 (de) 1989-11-14

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