JPS60224007A - Three dimensional automatic measuring machine - Google Patents

Abstract

PURPOSE:To simplify a feeding mechanism and to make the whole structure small-sized by making a table mobile against a base stand, and by providing a probe attaching and detaching mechanism inside a spindle Z and also by providing a controlling device to perform the control of a table feeding and probe attaching and detaching mechanism. CONSTITUTION:A table 50 is made mobile against a base stand 10 and columns 90 are fixed to the base stand 10. Also a beam 100 is provided to the columns 90 and a slider 110 is provided to this beam 100, and also a Z axis construction body 180 is supported by the slider 110. Further the Z axis construction body 180 has a probe attaching and detacthing mechanism which can perform an automatic attaching and detaching of a touch signal probe. On the other hand a probe stocker 290 which can hold plural probes is provided on the mobile table 50 and the mobile table 50 and probe attaching and detaching mechanism are operated by a controlling device 310.

Description

[Detailed description of the invention] [Technical field] The present invention relates to an automatic coordinate measuring machine.

[Background Art] Conventionally, three-dimensional measuring machines are known that measure the shape of an object by moving a touch signal probe three-dimensionally. Such a three-dimensional measuring machine generally has a support provided on the base so that it can move freely in the front-rear direction, that is, in the Y-axis direction, and a slider is mounted on a beam that is horizontally suspended between the upper ends of the support, in the left-right direction, that is, in the X-axis direction. A Z spindle is provided on the slider so as to be movable in the vertical direction, that is, in the Z-axis direction. The struts for these bases, the sliders for the struts, and the Z spindles for the sliders have a stacked structure in which they are assembled in this order.

Therefore, it is difficult to guarantee accuracy unless the structure is sequentially made strong from the base to the Z spindle. this is,
In so-called automatic three-dimensional measuring machines in which each axis is automatically driven, there are disadvantages such as the high horsepower of the drive source due to the heavy load, the sophisticated control system for high inertia, and the difficulty of high-speed feeding. However, since the overall structure becomes larger, it is economically disadvantageous.

Furthermore, even though it is an automatic three-dimensional measuring machine, the two-touch signal probe has conventionally been replaced manually, and there is a desire for an automatic three-dimensional measuring machine that can perform more complete automation.

[Object of the Invention] An object of the present invention is to provide an automatic three-dimensional measuring machine that can simplify the feeding mechanism, downsize the entire structure, and further promote automation.

[Structure of the Invention] The present invention makes the table movable with respect to the base, fixes the large support to the base, and provides a probe attachment/detachment mechanism that can automatically attach and detach the touch signal probe in order to achieve automation. At the same time, a plurality of probes are held on a movable table, table feeding and probe mounting are carried out. The configuration includes a control device that controls the mechanism, which allows the feeding structure to be downsized as the movable parts become smaller, and the probe attachment/detachment utilizes a drive mechanism such as a table necessary for moving the object to be measured. By doing so, the probe attachment/detachment mechanism does not require a special feeding machine, control circuit, etc., and furthermore, the probe attachment/detachment mechanism, control device, etc. enable further automation, which improves technical efficiency and economy. It has great value.

[Example] Hereinafter, one embodiment of the present invention will be described based on the drawings.

In FIGS. 1 and 2 showing the overall configuration, a base 10 made of six different materials such as natural stone and ceramic is horizontally installed on the installation floor 1 via a plurality of leveling jigs 30. This base 10 is formed in a substantially convex shape, and at the center of the upper surface of the convex base 10 there is a 6
A first guide member 11, which is made of 6-shaped members and forms a guide surface in the Y-axis direction, is fixed with screws.Furthermore, on both sides of this first guide member 11, a pair of flat second guide members also made of 6-shaped members are fixed. A guide member 12 is fixed symmetrically with screws with a portion thereof protruding from the upper surface of the convex portion of the base 10. At this time, the base 10 of the guide member 11 and the second guide member 12
The structure for fixing the first guide member 1 to the base 10 is such that the first guide member 1 is inserted into the screw hole of the fixing fitting 14 that is adhesively fixed in the blind hole 13 provided in the base 10.
This is done by screwing the port 16 through the first or second guide member 12. Furthermore, in this specification, the X-axis direction means the left-right direction in FIG. 2, the Y-axis direction means the direction perpendicular to the plane of the paper in the same figure, and the Z-axis direction means the up-down direction, that is, the vertical direction in the same figure. , these x, y, and z axes are
, the Y-axis is an axis in the horizontal plane, and the Z-axis direction is the vertical direction, which are three axes orthogonal to each other.

The leveling jig 30 includes a base 31 having a substantially concave side surface, a sliding piece 33 that is slidably housed in the base 31 and has an inclined surface on its upper surface, and the base 31.
A port 34 is screwed into the rising portion of the base 31 so as to be movable in the vertical direction, and allows the sliding piece 33 to move forward and backward along the bottom surface of the base 31. A contact piece 36 having an inclined surface that engages with the inclined surface of 33 and abutting on the lower surface of the base lO
By turning the port 34, the height position of the base 10 relative to the installation floor 1 can be adjusted by the action of both inclined surfaces, and the base 10 can be positioned horizontally.

At both sides of the first guide member 11, there are a plurality of pairs of bend correction means 4, for example, three or more pairs, in fact about 16 to 32 pairs, which utilize sloped surfaces similarly to the leveling jig 30.
0 is arranged so that the straightness of the parallel guide surfaces 18 for restricting movement in the X-axis direction formed on both sides of the first guide member 11 can be obtained.

A metal table 50 is provided on the base 10 so as to be movable in the Y-axis direction. An air bearing 51 that opposes the parallel guide surface 18 of the first guide member 11 is attached to the lower surface of the table 50 via a bracket 52, and also supports vertical movement of the second guide member in the X-axis direction. A relatively large air bearing 53 is provided that opposes the upper guide surface 20 of the regulating parallel guide surface 20, and an air bearing 54 that opposes the lower guide surface 20 of the parallel guide surface 20 is provided on a bracket. These air bearings 51, 53, and 54 allow the table 50 to move on the base 10 with a slight force, and the connection between the first guide member 11 and the air bearing 51 The movement in the X-axis direction is regulated by the action, and the movement in the X-axis direction is regulated by the action of the second guide member 12 and the air bearings 53, 54, so that it can only move straight in the Y-axis direction. It has become.

Further, between the base IO and the table 50, a table 5 is provided.
A Y-axis direction drive mechanism 60 is provided for driving 0 in the Y-axis direction. As shown in FIG. 3, this Y-axis direction drive mechanism 60 includes a motor 62 fixed to the base 10 via a bracket 61, and an output shaft of this motor 62 connected via a coupling 63. A feed screw shaft 64 consisting of a pole screw shaft, a nut member 66 movably screwed onto the feed screw shaft 64 and fixed to the table 50 via a bracket 65, and a nut member 66 attached to the feed screw shaft 64. an electromagnetic brake 67 for stopping the rotation of the feed screw shaft 64, which is composed of a rotating disk and a braking unit for stopping the rotation of the rotating disk; and a bearing 68 that is provided on the bracket 61 and supports one end side of the feed screw shaft 64. , a bearing 69 fixed in the groove 21 provided in the first guide member 11 to support the other end side of the feed screw shaft 64, and a bearing 69 provided on the lower surface of the bracket 61 to send a predetermined electric signal to the motor 62, etc. It is composed of an electronic circuit section 70 that provides the following.

As shown in FIG.
The zero point position for measuring the origin position of the table 50, that is, the absolute position, is provided on the first guide member ll side. The zero setting means 80 includes a zero mark 81 and a detection switch 82 provided on the table 50 side. Further, the movement range of the table 50 is controlled by a dock 85 provided on the base 10 and a limit switch (not shown) provided on the table 50 side.

In FIG. 2, pillars 9 are provided on both sides of the base 10, respectively.
0 is fixed. The structure of fixing the support column 90 to the base 10 is such that a substantially pestle-shaped fastener 23 is inserted into a through-hole 24 inserted into a plurality of holes 22 provided along both sides of the base 10 in the Y-axis direction. A bolt 25 that is screwed through the
It is carried out by These columns 90 are each made of metal such as iron, and between the upper ends of these columns 90, a beam 100 as a non-moving body side structure made of six members similar to the base 10 is horizontally fixed. has been done. The fixing structure between the beam Zoo and the support 90 is similar to the fixation structure between the support 90 and the base 10, and the beam 10 is made of natural stone or the like.
A hole 10f provided on the 0 side, a substantially pestle-shaped tightening fitting 102 made of a metal material inserted into this hole 101, and a beam 10.
The bolt 104 is inserted through a through hole 103 provided on the zero side and is screwed into a screw hole of the fastening fitting 102.

A slider 110 is supported on the beam 100 so as to be movable in the X-axis direction, and the slider 110 is moved in the X-axis direction by an A guide rail 105 for guiding the slider 110 in the X-axis direction and a scale 106 for detecting the amount of movement of the slider 110 are provided on the back side of the beam lOO, which is automatically fed.

As shown in FIG. 4, the slider 110 includes an X-axis guide bearing box 112 that is provided to surround the beam lOO and has air bearings 111 facing each square surface of the beam 100. , a pair of upper and lower X-axis direction guide bearing boxes 114 having air bearings 113 installed in the front surface of this X-axis direction guide bearing box 112 and arranged in a rectangular planar shape inside, and these X-axis direction guide bearing boxes 114. A Z-axis structure 180 inserted into the bearing box 114 so as to be movable in the Z-axis direction, and the bearing box 11 for guiding the X-axis direction.
2, and a Z-axis drive mechanism 140 supported by a support frame 115 erected on the support frame 115; A locking device 160 is provided to prevent the structure 180 from falling.

The Z-axis direction drive mechanism 140
The upper and lower ends of the support frame 115 are rotatably supported by a motor 141 supported by a motor 141 and a bearing 143 and 144 that are rotatably driven by the motor 141 via a timing belt 142 and provided at the upper and lower parts of the support frame 115, respectively. The feed screw shaft 145 has a relatively large screw pitch of, for example, 4 mm or more, and the feed screw shaft 14
a nut member 146 supported movably in the axial direction by 5;
The guide rail is rotatably supported by this nut member 146 and abuts to sandwich both side walls of a guide rail 147 attached to the wall surface (not shown) on the front side in FIG. 4 of the support frame 115. 147, a pair of rollers 148 that guide the nut and member 146 to move easily in the Z-axis direction but not to rotate; a connecting plate 149 fixed to the nut member 146; (a bracket connected via a thrust bearing 150 and a push screw 151 having a spherical portion at the tip thereof and fixed to the upper end of the Z-axis structure 180);
152, and the Z-axis structure 180 can be driven in the Z-axis direction via the bracket 152 by driving the motor 141. At this time, the effects of bending, eccentricity, etc. of the feed screw shaft 145 are absorbed by the thrust bearing 150, which makes the feed screw shaft 145 immobile in the axial direction but movable in the radial direction with respect to the connecting plate 149. Only the movement of the nut member 146 in the Z-axis direction is transmitted to the structure 180.

The Z-axis structure 180 includes a hollow housing 181 that is made of a square tube and serves as a Z-axis member.
1 includes an air balance mechanism 190 and a probe attachment/detachment mechanism 200. This air balance mechanism 190 is
A cylinder 191 fixed to the housing 181 and having an open bottom end, and a piston 19 housed within the cylinder 191 and supported by the support frame 115.
2, and by supplying compressed air between the piston 192 and the upper part of the cylinder 191,
The weight of the Z-axis structure 180 is supported by the action of this compressed air, and the load on the feed screw shaft 145 side due to the own weight of the Z-axis structure 180 is reduced. Further, a scale 185 is fixed to the rear side of the housing 181 in the figure, and a detector 186 for reading the scale of this scale 185 is provided on the support frame 115.
5 and a detector 186, the amount of movement of the Z-axis structure 180 in the Z-axis direction is detected.

As shown in FIG. 5, the Z-axis structure 180 includes a hollow casing 181 as a Z-axis member made of the square cylinder, and inside this casing 181, an air balance mechanism 190 is disposed at the top. A Z spindle 22 is provided at the bottom.
0 is fixed. This Z spindle 220 has a tapered hole 219 as a probe attachment part, and houses therein a pole holder 226 with a hollow bottom serving as a probe support means so as to be movable in the axial direction. This pole holder 226' is provided with a plurality of poles 225 at its lower end that are movable in the radial direction and prevented from falling, and is moved up and down by a piston rod 232 as a drive rod. This piston rod 232 is equipped with pistons 233 in multiple stages, and these pistons 233
is housed in an actuator 235 as an extrusion means having a partition wall 234 and has a series of multi-stage pressure receiving surfaces. Further, the piston rod 232 is always kept upward by the plate 4f spring 228 as a retracting means, that is,
The pole holder 226 is always biased in a direction to be drawn into the small diameter guide hole 221. When pulling the pole holder 226 into the guide hole 221, the guide hole 226
1 causes the pawl 225 to protrude inward from the pawl holder 226, so that the pawl 225 can lock the pull stud 251 at the upper end of the probe holder 250. On the other hand, due to the operation of actuator 235,
When the piston rod 232 is pressed downward against the disc spring 228, the pole holder 226 is pushed out from the small diameter guide hole 221, and the chuck of the probe holder 250 can be released. Further, the movement of the piston rod 232 is detected by an axial position detecting means 238 consisting of a dog 236 and a pair of detectors 237.

The Z spindle 220 has a protrusion 239 for positioning the probe holder 250 on its lower surface, and a fixing pin 243 as an electrical contact.
3, the probe holder 250 and this holder 25
touch signal probe 270 or 28 attached to
0 (see Fig. 6-7).

The probe attaching/detaching mechanism 2 is constructed by the actuator 235 as the pushing means, the disc spring 2288 as the retracting means, and the pole holder 226 as the probe supporting means.
00 is configured, and this probe attachment/detachment mechanism 200 allows
Hole 219 of Z spindle 220 as probe attachment part
The probe holder 250 of the touch signal probes 270 and 280 is attached and detached at the same time.

As shown in FIGS. 6 and 7, the probe holder 250 includes a holder body 256 having a pull stud 251 at the upper end, a flange portion 252 and a tapered surface 253 in the middle, and a lower end of the holder body 256. A touch signal probe 270 or 280 having a different shape having a measuring point 271 or 281 at the lower end and a male screw 272 or 282 at the upper end is screwed and fixed to the section. At this time, the touch signal probe 280 is connected to the rotating part 2 having the measuring element 281.
83, and a portion of this rotating portion 283 can be rotated with respect to a main body 284 having a male thread 282 and fixed at the rotated position.

Further, on the upper surface of the flange portion 252 of the probe holder 250, there is a groove-shaped engagement recess that can be engaged with a protrusion 239 provided at the lower end of the Z spindle 220 and constitutes a positioning means together with the protrusion 239. 257 is provided, and a contact pin 266 that comes into contact with the fixing pin 243 provided at the lower end of the Z spindle 220 is also provided. Further, a pin hole 2 is provided on the lower surface of the flange portion 252.
58 and an engagement groove 269 are formed.

1 and 2, a probe force/force 290 is provided on the table 50. As shown in FIGS. As shown in FIGS. 1@8 to 11, the probe stocker 290 includes a holding stand 291 fixed to one end, that is, the rear end side of the table 50, and a holding stand 291 fixed to the upper part of this holding stand 291, as well as the table 50. A plurality of holding plates 293 each having a notch 292 opened toward the other end, that is, the front end, and the notch 29 on the upper surface of this holding plate 293.
2, and can be engaged with pin holes 268 and engagement grooves 269 formed on the lower surface of the flange portion 252 of the probe holder 250, and together with these pin holes 268 and engagement grooves 269, the probe posture is maintained. A pair of flange holders 296 made of an insulating material are provided at both sides of the notch 292 of the holding plate 293 and support the lower surface of the flange 252 of the probe holder 250. , a detector 297 consisting of a reed switch or the like is located in the notch of the pair of flange holders 296 and detects whether or not the probe holder 250 is placed; One end is rotatably supported by a bracket 298 fixed to each bracket 298, and the other end is swingable at a predetermined angle by a swing regulating pin 299 provided on the bracket 298.
The clamping body 300 protrudes inward from the clamping body 92 and the clamping body 3
00 and a plate spring 301 that is interposed between the bracket 298 and urges the clamping body 300 to protrude inward of the notch 292. is the probe holder 2
50 are placed with their positions adjusted. At this time, each probe holder 250 is prevented from falling from the holding plate 293 by the action of the clamping body 300 urged by the leaf spring 301.

Although the Lieutenant General number 310 in Figure 1 is shown in a simplified diagram,
A printer, which has a display section 311 and is not shown, C
A control device 320, which has peripheral equipment such as an RT, and further has a computer system with an internal calculation function, storage function, etc., and controls the movement of each part according to a predetermined program, is placed on a table 5°. The measured object 26 is a bellows cover that protects the Y-axis direction drive mechanism 60 from dust, and 27 is a side cover. Further, the probe attachment/detachment mechanism 200
and the probe stocker 290 constitute an automatic probe attachment/detachment device.

Next, the operation of this embodiment will be explained.

A touch signal probe 27 having a predetermined shape is placed on the holding plate 293 of the probe stocker 290 fixed on the table 50.
The probe holder 250 with the probe 0 or 280 attached thereto is set, and the object to be measured 320 is placed and fixed on the table 5°. In this state, when a predetermined command is given by the control device 310, the motor 62 of the Y-axis direction drive mechanism 60 is driven by this command, and the coupling 63 and the feed screw shaft 6 are driven.
4 etc., the table 50 is moved to the left front in FIG. On the other hand, the Y-axis direction drive mechanism 6
0 and the motor 1 of the X-axis direction drive mechanism 120.
22 is driven, the slider 110 is moved in the X-axis direction, the Z-axis structure 180 is moved to a position directly above a predetermined probe holder 250 placed on the probe stocker 290, and is stopped.

In this state, the motor 141 of the X-axis direction drive mechanism 140 inside the slider 110 is activated to lower the Z-axis structure 180, and the Z-axis structure 180 is moved as a probe attachment part of the Z-axis spindle 220 housed inside the Z-axis structure 180. The probe holder 250 is housed in the hole 219. At this time, as shown in FIG. 5, the actuator 235 is actuated and pushes down the piston rod 232 as a driving rod against the disc spring 228, so the pole holder 226 is removed from the guide hole 221 and the pole 225 is free. state, therefore, the pull stud 2 at the upper end of the probe holder 250
51 is easily inserted into the pole holder 226.

Next, when the actuator 235 is deactivated, the piston rod 232 is raised by the action of the disc spring 228, so the pull stud 251 is moved by the pawl holder 226.
is pulled in, the tapered surface 253 of the probe holder 250 is engaged with the hole 219, and the protrusion 239 formed at the lower end of the probe attachment/detachment mechanism 200 is inserted into the probe holder 250.
The probe is inserted into the engagement recess 257 of the probe attachment/detachment mechanism 2.
The fixing pin 243 of the probe holder 250 contacts the contact pin 266 of the probe holder 250 to establish electrical continuity.

After the attachment of the probe holder 250 to the probe attaching/detaching mechanism 200 is adjusted in this manner, the Y-axis direction drive mechanism 60, the X-axis direction drive mechanism 120, and the X-axis direction drive mechanism 140 are controlled by the control device 310. Driven by
The probe 281 of the touch signal probe 280 attached to the lower end of the Z-axis structure 180 is brought into contact with a predetermined position of the object to be measured 320, and the X and Y of the probe 281 at the time of contact are
.

The position in the Z-axis direction is stored in the control device 310, and the points of contact with the object to be measured 320 by the probe 281 are sequentially measured to complete the measurement of the object to be measured 320. This object to be measured 3
20, if it is necessary to replace the touch signal probe 280, replace the Z-axis structure 1 in the same manner as described above.
80 is located above the probe stocker 290,
This can be done by attaching a predetermined probe holder 250 placed on the probe stocker 290 to the Z-axis structure 180. At this time, use the used probe holder 2.
50 is the notch 292 of the probe stocker 290,
It will be returned to the vacant place, but this return work is
After positioning the Z-axis structure 180 at the position of the vacant notch 292, the actuator 235 is activated and the disc spring 2
28, the piston rod 232 is lowered to release the pull stud 251 from the pawl holder 226, and the Z-axis structure 180 is raised in this released state.

According to this embodiment as described above, there are the following effects.

That is, in this embodiment, since the table 50 is movable, there is no need to move the heavy support column 90, etc., and the drive mechanism, that is, the Y-axis direction drive mechanism 60, can use a small amount of power, and the inertia is also small. The stopping position of the table 50 can also be made accurately. In addition, the table 50 is a base 10
Since it is guided by the two parallel surfaces of the X-axis direction movement regulating member 11 and the Z-axis direction movement regulating member 12 provided above, unlike the conventional V-shaped guide groove, the two directions are independent from each other. can be adjusted, and the guiding accuracy of the table 50 can be improved. In addition, the X-axis direction movement regulating member 1
1, since the straightness of the parallel guide surface 18 can be adjusted by the bend correction means 40, the guide accuracy can also be improved from this point of view.

Furthermore, since the X-axis direction movement regulating member 11 and the Z-axis direction movement regulating member 12 are formed separately from the base 10, their guide surfaces can be machined relatively easily and with high precision. I can do it. In addition, the Z-axis structure 180
A probe attaching/detaching mechanism 200 is provided inside, a probe stocker 290 is provided on the table 50, and the table 50 is moved, so the function of automatic replacement of the touch signal probes 270, 280 is easily achieved. be able to. In addition, since multiple types of touch signal probes 270, 280 are attached to the probe holder 25.0 in advance and prepared after adjusting their posture on the probe stocker 290, the replacement work of the touch signal probes 270, 280 is easy. This can be carried out in about the same amount of time as measuring one point using the signal probes 270 and 280, and work can be done extremely quickly while replacing the touch signal probes 270 and 280. At this time, touch signal probe 2
Each time 70, 280 is replaced, the origin may be checked by contacting the touch signal probes 270, 210 to the origin position (not shown). If the origin is checked every time the parts 70, 280 are replaced in this way, measurement accuracy can be further improved. . Further, the connection structure between the base 10 and the beam 100 and the support column 90, which are made up of six members, is the hole 22. Tightening fitting inserted into lot 23゜10
Bolt 25 inserted through through hole 24, 103 in 2
, 104, reliable fixing can be achieved with a simple configuration. Furthermore, since an air balance mechanism 190 is provided within the Z-axis structure 180, the Z-axis
The operating force for driving the shaft structure 180 can be made extremely small, the motor 141 that drives the Z-axis structure 180 can be made smaller, and the slider 110 can be made smaller and lighter. In addition, the influence of eccentricity of the feed screw shaft 145 of the Z-axis direction drive mechanism 140 can be absorbed by the action of the connecting plate 149 and the thrust bearing 150, and an adverse effect on measurement accuracy can be prevented. Further, in order to speed up the drive of the Z-axis structure 180, the lead of the feed screw shaft 145 is set to be, for example, 4 mm or more, but when such a large lead is taken, the air balance mechanism 190 If the air for air balance is lost for some reason, the feed screw shaft 145 may be rotated from the nut member 146 side due to the weight of the Z-axis structure 180, and the Z-axis structure 180 may fall by itself. In the embodiment, a lock device 160 is provided so that the upper end of the feed screw shaft 145 is strongly locked by the lock device 160 when compressed air is lost, so that the feed screw shaft 145 cannot be rotated in the opposite direction when air is lost. This can be effectively prevented, and damage to various parts due to falling of the Z-axis structure 180 can be prevented. Furthermore, since the driving source for the piston rod 232 in the probe attachment/detachment mechanism 200 is an actuator 235 having a plurality of pressure-receiving surfaces, the probe holder 250 can be moved using relatively low-pressure compressed air installed in a general factory. Even if the force of the Belleville spring 228 holding the probe is strong, the spring force of the Belleville spring 228 can be sufficiently overcome to drive the piston rod 232, and the probe holter 250 can be reliably attached. .

Further, since the Z spindle 220 and the probe holder 250 are positioned by the protrusion 239 and the engagement recess 257, the mounting position relative to the Z spindle 220 can be set accurately. Further, when installing the probe holder 250 in the probe stocker 290, the position is determined by the pin hole 268, the engagement groove 269, and the pins 294 and 295, so that the installation position can be accurately performed. Further, since the probe stocker 290 is provided with a clamping means consisting of a pair of clamping bodies 300, the probe holder 250 will not fall from the probe stocker 290 unexpectedly due to inertia force due to movement of the table 50, etc. accidents can be prevented. Further, since the probe stocker 290 is provided with a detector 297, it can be immediately determined whether or not the probe holder 250 is placed. Section 292
can be easily detected. Furthermore, since the base 10 and the beam lOO are composed of six different members, it is possible to effectively prevent a decrease in accuracy due to changes over time. In addition, the connection structure between the base lO and the X-axis direction movement regulating member 11 or the X-axis direction movement regulating member 12 is such that the connection structure between the base lO and the X-axis direction movement regulating member 11 or the Since it is fixed with the pole 16 that passes through the movement regulating member 11 or the X-axis direction movement regulating member 12, the fixing can be performed simply and reliably. Also, Z when compressed air is lost
The fall prevention structure of the shaft structure 180 is designed to stop the feed screw shaft 145 instead of stopping the Z-axis structure 180 itself, so it can be opened and closed with a light force, and the locking device 160 The structure of can be simplified.

In addition, in carrying out the present invention, the probe attachment/detachment mechanism 200
The support part of the pull stud 251, that is, the ball holder 226, is not limited to the above structure, but may be supported by an electromagnet,
It may also be supported by a collet chuck. Furthermore, the method of supporting the pull stud 251 in the probe attaching/detaching mechanism 200 is not limited to the method in which it is always held between the pull studs as in the above embodiment. hole 219
It may also be held with Furthermore, each Y, X, Z
Axial drive mechanism 60, 120° 140 motor 62,1
22,141 is AC.

It includes not only DC and pulse motors, but also air motors, hydraulic motors, etc. In addition, the probe stocker 290
The holding plate 293 is not limited to being divided into a plurality of parts as in the above embodiment, but may be formed into a single piece. In this case, a plurality of notches 292 may be formed on one holding plate 293. becomes. Further, the probe attaching/detaching mechanism 200 is not limited to being provided within the Z-axis structure 180, but may be provided outside thereof, and its structure is not limited to the structure of the above embodiment. Further, among the three orthogonal axes X, Y, and Z, the Z axis does not necessarily have to be vertical, and the x axis may be vertical, and in this case, the Z spindle 220 will be arranged horizontally. Furthermore, the touch signal probe in the present invention is not limited to the touch signal probes 270 and 280 themselves, but also includes those attached to the probe holder 250.

[Effects of the Invention] As described above, according to the present invention, the structure of the driving part can be made smaller;
This has the effect of being able to simplify the process and provide an automatic three-dimensional measuring machine that is more automated.

[Brief explanation of the drawing]

Fig. 81 is a perspective view showing the overall configuration of an embodiment of the present invention, Fig. 2 is a partially cutaway front view, Fig. 3 is an enlarged sectional view of the Y-axis direction drive mechanism, and Fig. 4 is a view of the slider. FIG. 5 is an enlarged sectional view of the probe attaching/detaching mechanism. FIG. 6 is an enlarged sectional view of the probe holder with a portion cut away. FIG. 7 is a plan view of FIG. 6. is an enlarged plan view of the probe stocker, FIG. 9 is an enlarged plan view with a part of the main part of FIG. 8 cut away, FIG. 1O is an enlarged front view with a part cut away, and FIG. It is an enlarged cross-sectional view seen from below. DESCRIPTION OF SYMBOLS 10... Base, 11... First guide member, 12...
・Second guide member, 18.20...Parallel guide surface, 51
゜53.54... Air bearing, 60... Y-axis direction drive mechanism, 100... Beam, 110... Slider,
DESCRIPTION OF SYMBOLS 120... X-axis direction drive mechanism, 140... ...Spindle, 226...Pole holder, 250...Probe holder, 270.280...
Touch signal probe, 271, 281... Measuring point, 2
90... Probe stocker, 310... Control device,
320...Object to be measured. Agent: Patent attorney Minoru Kinoshita (and one other person)

Claims (1)

[Claims] (1) x, y orthogonal to each other with the Y axis as the horizontal axis
, displacement in the X and X-axis directions is made impossible through a base that has a guide surface that restricts movement in the X and X-axis directions of the three z axes, and an air bearing that uses the guide surface of this base. A table is screwed onto a drive feed screw shaft provided along the Y-axis direction at the center of the base and is held on the base so as to be able to automatically feed in the Y-axis direction, and a table is mounted on both sides of the base in the X-axis direction. A pair of upright columns, a beam member suspended horizontally between the pair of columns, a slider attached to the beam member so that it can be automatically moved in the X-axis direction, and a touch signal probe can be attached to the tip. a Z spindle supported by a slider so as to be able to automatically feed in the X-axis direction, and a plurality of touch signal probes held at one end of the table in the feeding direction with the axis of the mounting part aligned with the X-axis direction; a probe attachment/detachment mechanism that allows a touch signal probe housed in the Z spindle and held on the table to be retracted into a probe attachment portion of the Z spindle, and to push out the touch signal probe attached to the attachment portion toward the table side; and a control device that drives and controls the table and the Z spindle to align the mounting axis of the selected touch signal probe with the axis of the second spindle and operates the probe attachment/detachment device. Automatic coordinate measuring machine.