JPS60232654A - 走査形電子顕微鏡に於ける試料台装置 - Google Patents

走査形電子顕微鏡に於ける試料台装置

Info

Publication number
JPS60232654A
JPS60232654A JP59086793A JP8679384A JPS60232654A JP S60232654 A JPS60232654 A JP S60232654A JP 59086793 A JP59086793 A JP 59086793A JP 8679384 A JP8679384 A JP 8679384A JP S60232654 A JPS60232654 A JP S60232654A
Authority
JP
Japan
Prior art keywords
screw
cylinder
tubular member
rotation
cylindrical body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59086793A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057818B2 (cs
Inventor
Yoshimasa Unno
海野　義昌
Shinjiro Katagiri
片桐　信二郎
Akihisa Takeyumi
晃久 武弓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Naka Seiki Ltd
Original Assignee
Hitachi Ltd
Hitachi Naka Seiki Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Naka Seiki Ltd filed Critical Hitachi Ltd
Priority to JP59086793A priority Critical patent/JPS60232654A/ja
Publication of JPS60232654A publication Critical patent/JPS60232654A/ja
Publication of JPH057818B2 publication Critical patent/JPH057818B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59086793A 1984-04-28 1984-04-28 走査形電子顕微鏡に於ける試料台装置 Granted JPS60232654A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59086793A JPS60232654A (ja) 1984-04-28 1984-04-28 走査形電子顕微鏡に於ける試料台装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59086793A JPS60232654A (ja) 1984-04-28 1984-04-28 走査形電子顕微鏡に於ける試料台装置

Publications (2)

Publication Number Publication Date
JPS60232654A true JPS60232654A (ja) 1985-11-19
JPH057818B2 JPH057818B2 (cs) 1993-01-29

Family

ID=13896655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59086793A Granted JPS60232654A (ja) 1984-04-28 1984-04-28 走査形電子顕微鏡に於ける試料台装置

Country Status (1)

Country Link
JP (1) JPS60232654A (cs)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS455382Y1 (cs) * 1966-04-06 1970-03-14
JPS5635360A (en) * 1979-08-31 1981-04-08 Internatl Precision Inc Sample tilting device for electron microscope or the like
JPS58144754U (ja) * 1982-03-24 1983-09-29 株式会社明石製作所 試料移動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS455382Y1 (cs) * 1966-04-06 1970-03-14
JPS5635360A (en) * 1979-08-31 1981-04-08 Internatl Precision Inc Sample tilting device for electron microscope or the like
JPS58144754U (ja) * 1982-03-24 1983-09-29 株式会社明石製作所 試料移動装置

Also Published As

Publication number Publication date
JPH057818B2 (cs) 1993-01-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term