JPS60239399A - 化合物半導体のアニ−ル法 - Google Patents

化合物半導体のアニ−ル法

Info

Publication number
JPS60239399A
JPS60239399A JP59095390A JP9539084A JPS60239399A JP S60239399 A JPS60239399 A JP S60239399A JP 59095390 A JP59095390 A JP 59095390A JP 9539084 A JP9539084 A JP 9539084A JP S60239399 A JPS60239399 A JP S60239399A
Authority
JP
Japan
Prior art keywords
compound semiconductor
film
substrate
implanted
inorg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59095390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480879B2 (pt
Inventor
Toshiki Ehata
敏樹 江畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP59095390A priority Critical patent/JPS60239399A/ja
Publication of JPS60239399A publication Critical patent/JPS60239399A/ja
Publication of JPH0480879B2 publication Critical patent/JPH0480879B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP59095390A 1984-05-11 1984-05-11 化合物半導体のアニ−ル法 Granted JPS60239399A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59095390A JPS60239399A (ja) 1984-05-11 1984-05-11 化合物半導体のアニ−ル法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59095390A JPS60239399A (ja) 1984-05-11 1984-05-11 化合物半導体のアニ−ル法

Publications (2)

Publication Number Publication Date
JPS60239399A true JPS60239399A (ja) 1985-11-28
JPH0480879B2 JPH0480879B2 (pt) 1992-12-21

Family

ID=14136316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59095390A Granted JPS60239399A (ja) 1984-05-11 1984-05-11 化合物半導体のアニ−ル法

Country Status (1)

Country Link
JP (1) JPS60239399A (pt)

Also Published As

Publication number Publication date
JPH0480879B2 (pt) 1992-12-21

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