JPS6024442A - CO sensor - Google Patents
CO sensorInfo
- Publication number
- JPS6024442A JPS6024442A JP58133410A JP13341083A JPS6024442A JP S6024442 A JPS6024442 A JP S6024442A JP 58133410 A JP58133410 A JP 58133410A JP 13341083 A JP13341083 A JP 13341083A JP S6024442 A JPS6024442 A JP S6024442A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- powder
- sintered body
- cdo
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は可燃性ガスの検知に使用する複合金属酸化物半
導体を用いたCoセンサに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a Co sensor using a composite metal oxide semiconductor used for detecting combustible gases.
従来例の構成とその問題点
近年、可燃性ガスの検知素子材料について種々の研究開
発が活発化してきている。これは、一般家庭を中心に各
種工場などで可燃性ガスによる爆発事故や中毒事故が多
発し、大きな社会問題となっていることに強く起因して
いる。特にこれらの中でも、プロパンガス、あるいは都
市ガスを検知するものについては、感度、信頼性のいず
れにおいてもかなり高いレベルのものが開発され実用化
されるに至っている。これらFil例えば各種のガス漏
れ警報器などに広く応用されている。Conventional Structures and Their Problems In recent years, various research and developments have become active regarding materials for sensing elements for flammable gases. This is strongly attributable to the fact that explosions and poisoning accidents caused by flammable gases occur frequently, mainly in households and in various factories, and have become a major social problem. Among these, in particular, those that detect propane gas or city gas have been developed and put into practical use with considerably high levels of sensitivity and reliability. These films are widely applied, for example, to various gas leak alarms.
一方、いまひとつのガス防災の社会ニーズとして、CO
の検知が話題になってきでいる。これは種々のガス機器
の普及と住宅構造の気密化が大きな背景となっている。On the other hand, as another social need for gas disaster prevention, CO
Detection has become a hot topic. This is largely due to the spread of various gas appliances and the airtightness of housing structures.
すなわち、ガス器具の不完全燃焼あるいは火災の初期に
新建材などから発生するCOによる中毒の問題である。That is, there is a problem of incomplete combustion of gas appliances or poisoning due to CO generated from new building materials in the early stages of a fire.
特に後者においては、火災による死因の大部分がこれに
属するため、極めて重要な社会問題となっている。とこ
ろが現在の時点においては、COを的確に検知出来る安
価で簡便なガスセンサがないのが実状であり、前述の社
会ニーズに十分応えていない状況にある。その理由は、
一般的な可燃性ガスを対象としたセンサの場合には検知
されるべき可燃性ガスの濃度が爆発下限界の数分の1以
上という程度であるのに対して、CO用センサの場合に
は極めて微量のCOを検知せねばならないことによる。In particular, the latter is an extremely important social problem because it accounts for the majority of deaths caused by fire. However, at present, there is no inexpensive and simple gas sensor that can accurately detect CO, and the above-mentioned social needs are not fully met. The reason is,
In the case of a sensor for general combustible gases, the concentration of combustible gas to be detected is a fraction of the lower explosive limit, but in the case of a sensor for CO This is because extremely small amounts of CO must be detected.
すなわち、他の可燃性ガス用センサの場合にはガス爆発
を防ぐのが目的であるのに対して、CO用センサの場合
[1d、 Go中毒の予防が主目的であり。That is, in the case of sensors for other combustible gases, the purpose is to prevent gas explosions, whereas in the case of CO sensors [1d, the main purpose is to prevent Go poisoning.
その量は爆発下限界に比べると極めて微量な値の検知を
対象としなければならないことによる。This is because the amount must be detected at an extremely small amount compared to the lower explosive limit.
低価格で宣い信頼性をもつ可燃性ガスセンサにおいては
高温に保持された酸化物半導体がしばしば用いられ、そ
の抵抗値変化を検知する様にしている。この酸化物半導
体にはCOに高感度で、あるいは選択的に感応する物質
も幾種類か見出されているが、残念ながら信頼性の面で
未だ十分なセンサが得られていないのが現状である。In combustible gas sensors that are inexpensive and reliable, oxide semiconductors that are kept at high temperatures are often used to detect changes in their resistance. Several types of oxide semiconductors have been found that are highly sensitive or selectively sensitive to CO, but unfortunately, sensors with sufficient reliability have not yet been obtained. be.
発明の目的
不発・明はこのよつな状況に鑑みてなされたもので、C
Of高感度でかつ信頼性の高いCOセンサを実現するも
のである。The purpose of the invention was made in view of this situation, and C
A highly sensitive and highly reliable CO sensor is realized.
発明の構成
本発明は酸化カドミウム(CaO)をガス感応体として
用いたガス検知素子において、これに対する添加物の効
果について検討している中で見出さnたものである。Structure of the Invention The present invention was discovered while studying the effects of additives on a gas sensing element using cadmium oxide (CaO) as a gas sensitive material.
すなわち、本発明のCOセンサはCdOに対してAuを
ムUに換算して0.1〜10重量%添加したものをガス
感応体として用いたものであバこれにより、ガス感応特
性とその信頼性が飛躍的に向上し、しかも先述の微少量
のCOに対しても実用上十分大きな感度を実現し得るこ
とを見出したことによってなされたものである。That is, the CO sensor of the present invention uses CdO to which 0.1 to 10% by weight of Au is added as a gas sensitive material.This improves the gas sensitive characteristics and its reliability. This was achieved based on the discovery that the sensitivity was dramatically improved and that it was possible to realize a sufficiently high sensitivity for practical use even to the minute amount of CO mentioned above.
実施例の説明 以下に本発明の詳細な説明する。Description of examples The present invention will be explained in detail below.
壕ず実施例1においては、市販のCdOを用い。In Example 1, commercially available CdO was used.
これに対するAuの添加量効果について述べる。The effect of the amount of Au added on this will be described.
〔実施例1〕
市販の酸化カドミウム(CaO)に、市販の塩化金酸(
HAuCl4・4H20)を水に溶がしてこの濃度が1
00−4tになるように調製した溶液を第1表中に示し
たようにそれぞれ添加した。そしてそれぞれの粉体をら
いかい機で3時間乾式混合した。この粉体に2本の白金
線を埋め込んで、直径2問、高さ3酊の円柱状に加圧成
型し、空気中において75Q℃で1時間の焼成を行なっ
た。得られた多孔質の焼結体を検知素子用ヘッダーにと
りつけ、焼結体の1わりにコイル状のヒータを配置し、
防爆用のステンレス鋼網をかぶせてCOセンサt[′f
?−O
第1図QcOセンサの構造を示したものである。[Example 1] Commercially available cadmium oxide (CaO) was mixed with commercially available chloroauric acid (
HAuCl4・4H20) is dissolved in water and the concentration is 1.
00-4t solutions were added as shown in Table 1, respectively. The respective powders were then dry mixed for 3 hours using a mixer. Two platinum wires were embedded in this powder, which was press-molded into a cylindrical shape with two diameters and three heights, and was fired in air at 75Q°C for 1 hour. The obtained porous sintered body was attached to a sensing element header, and a coil-shaped heater was placed in place of one of the sintered bodies.
CO sensor t [′f
? -O Figure 1 shows the structure of the QcO sensor.
図において、1は焼結体で、2本の白金線からなる電極
3,4が埋め込まれている。2は焼結体1を加熱するた
めのヒータで、ヒータ用ピン11゜12からヒータ用フ
レーム7.8を通じてヒータに電力が供給される。焼結
体1の抵抗は電極3゜4からフレーム6.6t通してピ
ン9,1oの間で測定されるよう構成されている。ヒー
タ用ピン11、’12およびピン9,1oはヘッダー1
3に固定され、ステンレス鋼製金網14はヘッグーニと
りつけられている。In the figure, 1 is a sintered body in which electrodes 3 and 4 made of two platinum wires are embedded. Reference numeral 2 denotes a heater for heating the sintered body 1, and power is supplied to the heater from heater pins 11 and 12 through heater frames 7 and 8. The resistance of the sintered body 1 is configured to be measured between the pins 9 and 1o from the electrode 3.4 through the frame 6.6t. Heater pins 11 and '12 and pins 9 and 1o are header 1
3, and a stainless steel wire mesh 14 is attached to the heggoni.
以上のようにして得られたGOセンサについて、ガス感
応特性、通常使用温度(4so℃)での課電寿命を調べ
た。Regarding the GO sensor obtained as described above, the gas sensitivity characteristics and the energized life at normal usage temperature (4so° C.) were investigated.
ガス感応特性の測定方法は%あらかじめCOセンサのヒ
ータ部に電流を流し、感応体の温度が360℃になるよ
うに調整しておき、それを容積の知ら几ている測定箱内
に挿入した後、注射器でテスト用ガス(Coガx(CO
5,o%とN296.0%との混合ガス)、及びN2ガ
ス(99%以上))を測定箱内に注入し、COあるいは
N2の濃度が0.01容量% (100F)K達した時
に焼結感応体の抵抗値を測定した。測定するガス濃度を
1100ppに選んだのは、 COの労働衛生上の許容
濃度が100打mであるため、少なくともこの濃度以下
で感応する必要があるからである。The method for measuring gas sensitivity characteristics is to apply a current to the heater part of the CO sensor in advance, adjust the temperature of the sensitive body to 360°C, and then insert it into a measurement box with a known volume. , test gas (Co gas) with a syringe
A mixed gas of 5.0% and N2 (96.0%) and N2 gas (99% or more)) are injected into the measurement box, and when the concentration of CO or N2 reaches 0.01% by volume (100F)K. The resistance value of the sintered sensitive body was measured. The gas concentration to be measured was chosen to be 1100 ppm because the permissible concentration of CO for industrial hygiene is 100 ppm, so it was necessary to be sensitive to at least this concentration or lower.
ガス感応特性は、(1)ガス感e(空気中の抵抗値(R
a)/ガス中の抵抗値(Rg))、(11)抵抗経時変
化率ΔR(感応体を450℃の温度で2000時間保持
した場合の抵抗値の初期値に対する変化率)で評価した
。第1表及び第3図には、添加物(ムU)を加えた場合
のガス感度(Ra/Rg)と、抵抗経時変化率(ΔR)
を示す。The gas sensitivity characteristics are as follows: (1) Gas sensitivity e (resistance value in air (R
a)/resistance value in gas (Rg)), and (11) rate of change in resistance over time ΔR (rate of change in resistance value relative to the initial value when the sensitive body is held at a temperature of 450° C. for 2000 hours). Table 1 and Figure 3 show the gas sensitivity (Ra/Rg) when an additive (MU) is added and the rate of change in resistance over time (ΔR).
shows.
第1表
■比較例
第1表及び第3図より、CdOにムUを1.0〜10重
量%添加することによりCOに対して極めて高い活性度
を示し、しかもこれが経時的に安定なため、結果的に非
常に大きなガス感度と信頼性を実現し得ることがわかる
。Table 1 Comparative Example Table 1 and Figure 3 show that adding 1.0 to 10% by weight of MuU to CdO shows extremely high activity towards CO, and is stable over time. As a result, it can be seen that extremely high gas sensitivity and reliability can be achieved.
この実施例1では、感応体が焼結体の場合であり、母材
料のCdOが市販試薬を用いた場合のAuの添加物量に
ついて述べた。次に示す実施例2では、感応体が焼結膜
の場合で、母材料のCdOは沈殿法で得た粉体を用いた
場合のムUの添加社効果について述べる。In Example 1, the sensitive body is a sintered body, and the additive amount of Au is described when a commercially available reagent is used as the base material CdO. In Example 2, which will be described below, we will discuss the effect of adding Mu when the sensitive body is a sintered film and the base material CdO is a powder obtained by a precipitation method.
〔実施例2〕
出発原料は市販の硫酸カドミウム(CdS04・、rH
20)100gを11の水に溶かし、60℃に保ちなが
ら攪拌した。この溶液の温度を50℃に保ちつつ、この
溶液に2規定の水酸化ナトリウム(NaOH)溶液をe
omt1分の割合で溶液の水素イオン濃度が9になるま
で滴下した。滴下終了後、ただちにこの沈殿物を吸引ろ
過した。さらに、この沈殿物上には繰り返し水を注ぎ、
充分に洗浄を行った。[Example 2] The starting material was commercially available cadmium sulfate (CdS04, rH
20) 100g of the solution was dissolved in water from step 11 and stirred while maintaining the temperature at 60°C. While keeping the temperature of this solution at 50°C, add 2N sodium hydroxide (NaOH) solution to this solution.
The solution was added dropwise at a rate of 1 minute until the hydrogen ion concentration of the solution reached 9. Immediately after the dropwise addition was completed, the precipitate was suction-filtered. Furthermore, water was repeatedly poured over this precipitate,
Washed thoroughly.
このようにして得られた粉体を空気中で110℃で1時
間の熱処理を行なった。この熱処理粉体に。The powder thus obtained was heat treated in air at 110° C. for 1 hour. to this heat-treated powder.
市販の塩化金酸(HAuCl4・4H20)を水に溶か
してこの濃度が1001q/mlになるように調製した
溶液を第2表中に示したようにそれぞれ添加した。そし
てそれぞ几の粉体をらいかい機で3時間乾式混合した。A solution prepared by dissolving commercially available chloroauric acid (HAuCl4.4H20) in water to a concentration of 1001 q/ml was added as shown in Table 2. Then, the respective powders were dry mixed for 3 hours using a sieve machine.
この粉体を60〜100μに整粒し、トリエノに示した
。図において、COセンサの基板として縦、横それぞれ
5朋、厚みQ、5MMのアルミナ基板1の表面にQ、5
龍の間隔に一対の櫛形の金電極2を形成した。裏面には
抵抗体用の金電極3も同時に形成し、この間にグレーズ
抵抗体4を印刷し、焼きつけてヒータとした0
次に、上述のペーストを芦板の表面に約7071の厚み
に印刷し、室温で自然乾燥させた後、750℃の温度に
なる壕で徐々に加熱し、この温度で1時間保持した。こ
の段階でペーストが蒸発し、焼結膜6になった。このガ
ス感応体の厚みは約65μであった。このようにしてC
Oセンサを得た。This powder was sized to a size of 60 to 100 microns and presented to Trieno. In the figure, the surface of an alumina substrate 1 with a thickness of 5 mm and a length of 5 mm each as a substrate for a CO sensor is Q and 5 mm.
A pair of comb-shaped gold electrodes 2 were formed between the dragons. A gold electrode 3 for the resistor was also formed on the back side at the same time, and during this time a glaze resistor 4 was printed and baked to serve as a heater.Next, the above paste was printed on the surface of the reed board to a thickness of about 7071mm. After air drying at room temperature, it was gradually heated in a trench to a temperature of 750° C. and maintained at this temperature for 1 hour. At this stage, the paste evaporated and became a sintered film 6. The thickness of this gas sensitive body was approximately 65μ. In this way C
Obtained an O sensor.
第2表
■比較例
それぞれのCOセンサのガス感応特性を実施例1の場合
と同様の方法で測定した。第2表及び第4図に%CdO
にムUを添加した時のガス感度(Ra71g)と抵抗変
化率(ΔR)を示す。Table 2 - Comparative Example The gas sensitivity characteristics of each CO sensor were measured in the same manner as in Example 1. %CdO in Table 2 and Figure 4
The gas sensitivity (Ra71g) and resistance change rate (ΔR) are shown when MuU is added to the sample.
第2表及び第4図から明らかなように、感応体が焼結膜
であっても、またCdOを沈殿法で作製した粉体を用い
た場合でも、実施例1で得られたのとはy同じ特性が得
られている。また抵抗値の経時変化率も実施例1と同様
非常に小さい。As is clear from Table 2 and FIG. 4, even if the sensitive body is a sintered film or a powder prepared by the CdO precipitation method, the results obtained in Example 1 are The same characteristics are obtained. Further, the rate of change in resistance value over time is also very small, as in Example 1.
また第2表及び第4図から、Auの添加量が0.1重量
%未満ではその効果はなく、本発明の効果が期待できな
い。また逆に添加量が10.0重量係を超えるとガス感
度の低下あるいは特性の安定性の面で実用性に欠けるよ
うになる。本発明のガス検知素子に含まれるAu量を、
CdOに対して添加する量で0.1〜10重量%に限
定したのは上述した理由に依る。Moreover, from Table 2 and FIG. 4, if the amount of Au added is less than 0.1% by weight, there is no effect, and the effect of the present invention cannot be expected. On the other hand, if the amount added exceeds 10.0% by weight, it becomes impractical in terms of reduced gas sensitivity or stability of characteristics. The amount of Au contained in the gas sensing element of the present invention is
The reason why the amount added to CdO is limited to 0.1 to 10% by weight is based on the above-mentioned reason.
ところで、実施例1では酸化カドミウムとして市販の酸
化物試薬を、実施例2ではカドミウムの出発原料として
硫酸カドミウムを、′!たAu Vcついては市販の塩
化金酸を用いたものについて述べたが、本発明は最終的
に感応体の組成が前述した範囲内のものであればよく、
何ら出発原料や製造工程を限定するものではない。By the way, in Example 1, a commercially available oxide reagent was used as cadmium oxide, and in Example 2, cadmium sulfate was used as the starting material for cadmium. Regarding Au Vc, we have described the one using commercially available chloroauric acid, but in the present invention, the final composition of the sensitizer may be within the above-mentioned range.
This does not limit the starting materials or manufacturing process in any way.
発明の詳細
な説明したように、本発明のCOセンサは、C(10に
Au を添加した焼結体あるいは焼結膜を感応体として
用いたものであ凱これによって微量検知が難しいとされ
てきたCo ガスに対して大きい感度を実現し得るもの
である。これはガス器具の不完全燃焼あるいは火災の初
期に発生するCOによる中毒事故が多発する傾向にある
昨今、これを未然に防ぐCOセンサの要求が人さくなり
つつ6 ル社会ニーズに的確に対応するものであり、そ
の効果は極めて大なるものがある。また1本発明のい貰
ひとつの効果は寿命特性、特に通電による抵抗値の経時
変化の大幅な軽減である。これは換言すればあらゆる検
知素子の最も重要な要素である素子の信頼性の向上に極
めて太さな寄与をもたらすものである。As described in detail, the CO sensor of the present invention uses a sintered body or a sintered film in which Au is added to C(10) as a sensitive body. It is possible to realize high sensitivity to Co gas.This is due to the fact that there are many accidents caused by CO poisoning due to incomplete combustion of gas appliances or early stages of fires. It accurately responds to the needs of society as society's demands become more modest, and its effects are extremely significant.One advantage of the present invention is the lifespan characteristics, especially the change in resistance value over time due to energization. This is a significant reduction in variation.In other words, this makes an extremely significant contribution to improving the reliability of the device, which is the most important element of any sensing device.
センサの構造を示す図、第3図、第4図は本発明の一実
施例におけるCOセンサの添加物量と、COおよびH2
に対する感度(Ha/Rg )ならびに抵抗経時変化率
(ΔR)との関係を示した特性図である。Figures 3 and 4, which show the structure of the sensor, show the amount of additives in the CO sensor and the amount of CO and H2 in an embodiment of the present invention.
FIG. 2 is a characteristic diagram showing the relationship between sensitivity (Ha/Rg) and resistance change rate over time (ΔR).
1・・・・・・焼結体。1... Sintered body.
代理人の氏名 弁理士 中 尾 敏 男 はが1名区
ロ
ー へ
W& 脈
目 旧
桝 椰
d ムName of agent: Patent attorney Toshio Nakao (1 person)
Low to W& pulse old masu palm dam
Claims (2)
1〜10重量%含まれるものをガス感応体として用いる
ことを特徴とするCoセンサ。(1) Cadmium oxide (CdO) VC gold (MU) is 0.
A Co sensor characterized in that a Co sensor containing 1 to 10% by weight is used as a gas sensitive material.
体、またはペーストを印刷して焼成して得られる焼結膜
であることを特徴とする特許請求の範囲第(1)項記載
のCoセンサ。(2) Claim (1) characterized in that the gas sensitive body is a sintered body obtained by pressure molding and firing, or a sintered film obtained by printing and firing a paste. Co sensor as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58133410A JPS6024442A (en) | 1983-07-20 | 1983-07-20 | CO sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58133410A JPS6024442A (en) | 1983-07-20 | 1983-07-20 | CO sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6024442A true JPS6024442A (en) | 1985-02-07 |
| JPH022100B2 JPH022100B2 (en) | 1990-01-16 |
Family
ID=15104109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58133410A Granted JPS6024442A (en) | 1983-07-20 | 1983-07-20 | CO sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6024442A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6230206U (en) * | 1985-08-09 | 1987-02-23 |
-
1983
- 1983-07-20 JP JP58133410A patent/JPS6024442A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6230206U (en) * | 1985-08-09 | 1987-02-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH022100B2 (en) | 1990-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5853862B2 (en) | Flammable gas detection element | |
| JPH0468586B2 (en) | ||
| CN114113241B (en) | A double-layer SnO2-based methane sensor resistant to HMDSO poisoning and its preparation method | |
| JPS6024442A (en) | CO sensor | |
| JP3854358B2 (en) | Gas sensor material | |
| JPH022099B2 (en) | ||
| JP2000111507A (en) | Chlorofluorocarbon sensor and its manufacturing method | |
| JPH0230661B2 (en) | GASUKENCHISOSHI | |
| JPH07198651A (en) | Thin film type gas sensor | |
| JPH0230663B2 (en) | GASUKENCHISOSHI | |
| JPS60170760A (en) | Flammable gas detection element | |
| JPH0230662B2 (en) | COSENSA | |
| JPS59105553A (en) | Gas detecting element | |
| JPS58200153A (en) | gas detection element | |
| JPS60170759A (en) | Flammable gas detection element | |
| JPH02263145A (en) | Semiconductor type gas sensor | |
| JPS60253859A (en) | Gas sensor | |
| JP2819362B2 (en) | Gas detection material | |
| JPH0551096B2 (en) | ||
| JP2000304720A (en) | Carbon monoxide sensor | |
| JPH1073552A (en) | CO sensor | |
| JPH09145656A (en) | Contact combustion gas sensor | |
| JPS59105552A (en) | Gas detecting element | |
| JPS628139B2 (en) | ||
| JPH052266B2 (en) |