JPS60249691A - 回転ピストン真空ポンプ - Google Patents
回転ピストン真空ポンプInfo
- Publication number
- JPS60249691A JPS60249691A JP9766685A JP9766685A JPS60249691A JP S60249691 A JPS60249691 A JP S60249691A JP 9766685 A JP9766685 A JP 9766685A JP 9766685 A JP9766685 A JP 9766685A JP S60249691 A JPS60249691 A JP S60249691A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pump
- oil
- vacuum pump
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 14
- 239000000314 lubricant Substances 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 14
- 238000004891 communication Methods 0.000 claims description 7
- 230000004044 response Effects 0.000 claims description 5
- 230000001050 lubricating effect Effects 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims 1
- 239000003921 oil Substances 0.000 description 150
- 230000009471 action Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 3
- 239000000806 elastomer Substances 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 229920002449 FKM Polymers 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/021—Control systems for the circulation of the lubricant
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Compressor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61260084A | 1984-05-21 | 1984-05-21 | |
| US612600 | 1984-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60249691A true JPS60249691A (ja) | 1985-12-10 |
Family
ID=24453849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9766685A Pending JPS60249691A (ja) | 1984-05-21 | 1985-05-08 | 回転ピストン真空ポンプ |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0163228A3 (de) |
| JP (1) | JPS60249691A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1246969B (it) * | 1991-06-17 | 1994-12-01 | Galileo Vacuum Tec Spa | Pompa rotativa per vuoto, con otturatore a comando automatico per l'isolamento dell'ambiente sotto-vuoto. |
| DE4325281A1 (de) * | 1993-07-28 | 1995-02-02 | Leybold Ag | Vakuumpumpe mit einer Gasballasteinrichtung |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1195361A (en) * | 1966-03-28 | 1970-06-17 | N G N Ltd | Improvements in and relating to Vacuum Pumping apparatus including a Rotary Vacuum Pump |
| US3406897A (en) * | 1966-07-18 | 1968-10-22 | Leybold Holding Ag | Mechanical vacuum pump |
| DE1728277A1 (de) * | 1967-09-21 | 1972-06-15 | Edwards High Vacuum Internat L | Mehrstufige Rotorpumpe |
| US3698838A (en) * | 1971-02-11 | 1972-10-17 | Ingersoll Rand Co | Automatic fluid supply and control means |
| DE2451685A1 (de) * | 1974-10-31 | 1976-05-06 | Pfeiffer Vakuumtechnik | Vakuumpumpe mit eingebautem absperrventil |
| DD131487A1 (de) * | 1977-06-24 | 1978-06-28 | Juergen Kaunert | Absperrventil mit automatischer belueftungseinrichtung fuer vakuumpumpen |
| DD205219A1 (de) * | 1981-10-15 | 1983-12-21 | Pumpen U Verdichter Wissenscha | Hydraulisch-mechanische schutzeinrichtung fuer pumpen |
-
1985
- 1985-05-08 JP JP9766685A patent/JPS60249691A/ja active Pending
- 1985-05-20 EP EP85106167A patent/EP0163228A3/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP0163228A2 (de) | 1985-12-04 |
| EP0163228A3 (de) | 1986-03-05 |
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