JPS6025748U - Vapor deposition material supply device - Google Patents
Vapor deposition material supply deviceInfo
- Publication number
- JPS6025748U JPS6025748U JP11772083U JP11772083U JPS6025748U JP S6025748 U JPS6025748 U JP S6025748U JP 11772083 U JP11772083 U JP 11772083U JP 11772083 U JP11772083 U JP 11772083U JP S6025748 U JPS6025748 U JP S6025748U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition material
- supply device
- material supply
- feeding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は蒸着装置の断面図、第２図は従来の供給装置の
一部を切り欠いた側面図、第３図は本考案の装置の一実
施例を示す平面図、第４図はその側面図である。
１２・・・・・・貯蔵繰り出し装置、１４・・・・・・
スプール、２０・・・・・・送り装置、３３・・・・・
・切断装置、３７・・・・・・移載装置、Ａ・・・・・
・蒸着材料としてのアルミニウム材、ａ・・・・・・蒸
着片としてのアルミニウム片。Fig. 1 is a sectional view of a vapor deposition device, Fig. 2 is a partially cutaway side view of a conventional supply device, Fig. 3 is a plan view showing an embodiment of the device of the present invention, and Fig. 4 is its side view. FIG. 12...Storage and delivery device, 14...
Spool, 20... Feeding device, 33...
・Cutting device, 37... Transfer device, A...
- Aluminum material as a vapor deposition material, a... Aluminum piece as a vapor deposition piece.
Claims (1)
繰り出し自在にスプールに巻着した貯蔵繰り出し装置と
、 この貯蔵繰り出し装置のスプールに巻着されたリボン状
の蒸着材料を所定の位置まで繰り出しつつ送る送り装置
と、 この送り装置によって送られたリボン状の蒸着材料を所
定の長さに切断する切断装置と、この切断装置で切断さ
れた蒸着片を蒸着部に供給する移載装置と、 を備えたことを特徴とする蒸着材料供給装置。[Claims for Utility Model Registration] A storage and feeding device in which a ribbon-shaped vapor deposition material formed to a certain width and thickness is wound around a spool so as to be freely fed out, and a ribbon-shaped device wound around the spool of this storage and feeding device. A feeding device that feeds the vapor deposition material to a predetermined position, a cutting device that cuts the ribbon-shaped vapor deposition material sent by the feeding device into a predetermined length, and a vapor deposition piece that is cut by the cutting device. A evaporation material supply device comprising: a transfer device for supplying a vapor deposition material to a portion;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11772083U JPS6025748U (en) | 1983-07-28 | 1983-07-28 | Vapor deposition material supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11772083U JPS6025748U (en) | 1983-07-28 | 1983-07-28 | Vapor deposition material supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6025748U true JPS6025748U (en) | 1985-02-21 |
Family
ID=30270876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11772083U Pending JPS6025748U (en) | 1983-07-28 | 1983-07-28 | Vapor deposition material supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6025748U (en) |
-
1983
- 1983-07-28 JP JP11772083U patent/JPS6025748U/en active Pending
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