JPS6025912U - 変位変換器 - Google Patents

変位変換器

Info

Publication number
JPS6025912U
JPS6025912U JP1984085614U JP8561484U JPS6025912U JP S6025912 U JPS6025912 U JP S6025912U JP 1984085614 U JP1984085614 U JP 1984085614U JP 8561484 U JP8561484 U JP 8561484U JP S6025912 U JPS6025912 U JP S6025912U
Authority
JP
Japan
Prior art keywords
detection
measurement
grid
piece
indicators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984085614U
Other languages
English (en)
Inventor
リチヤード．ビー．シピン
Original Assignee
ザ　ベンディクス　コ−ポレ−ション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ザ　ベンディクス　コ−ポレ−ション filed Critical ザ　ベンディクス　コ−ポレ−ション
Publication of JPS6025912U publication Critical patent/JPS6025912U/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案による格子−指標装置の概略図、第２図
は２軸変換装置の実施形態の立面図、第３図は第２図に
おける２軸変換装置の側面図、第４図は第３図における
部分４−４における断面図、第５図は第３図の部分５−
５における断面図、第６図は第３図の部分６−６におけ
る断四図、および第７図は２軸変換装置の実施例の部分
断面図である。 １０・・・格子片、１２・・・格子片の交差格子パター
ン、１４・・・指標片、２４．２６・・・支持部材。 ２６ ５２　　　　−―−ｉ シ曹 ４

Claims (1)

    【実用新案登録請求の範囲】
  1. 直交する方向に延びる対をなす測定用の格子を有する測
    定用の格子片と、各座標方向に設けた検出用の指標片と
    を包含し、前記検出用の指標片が前記測定用の格子とそ
    れぞれ対応してモアレ干渉縞を生ずる複数の検出用の指
    標を有し、これらの検出用の指標を座標方向のそれぞれ
    において前記格子に対し前後関係であるが互いにオフセ
    ットした関係に配置し、さらに前記測定用の格子を照明
    する光源装置と、前記検出用の指標を介して前記測定用
    の格子を検出して位相差信号を供給する複数の光電式検
    出器とをそなえた変位変換器において、前記検出用の指
    標１６，１８．２０．２２がひとつの指標片１４上に十
    字状に形成され、この十字の腕のそれぞれにひとつずつ
    検出用の格子線を形成したこと、それぞれ座標方向に互
    いにオフセットした前記検出用指標を前記十字の対向す
    る腕に配置したこと、および前記測定用の格子片１０の
    格子線が格子パターン１２を形成していることを特徴と
    する変位変換器。
JP1984085614U 1974-11-25 1984-06-11 変位変換器 Pending JPS6025912U (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/526,778 US3957378A (en) 1974-11-25 1974-11-25 Two-axis moire fringe displacement transducer
US526778 1974-11-25

Publications (1)

Publication Number Publication Date
JPS6025912U true JPS6025912U (ja) 1985-02-21

Family

ID=24098762

Family Applications (2)

Application Number Title Priority Date Filing Date
JP50140353A Pending JPS5177352A (ja) 1974-11-25 1975-11-25
JP1984085614U Pending JPS6025912U (ja) 1974-11-25 1984-06-11 変位変換器

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP50140353A Pending JPS5177352A (ja) 1974-11-25 1975-11-25

Country Status (6)

Country Link
US (1) US3957378A (ja)
JP (2) JPS5177352A (ja)
CA (1) CA1028144A (ja)
DE (1) DE2550840C2 (ja)
FR (1) FR2292215A1 (ja)
GB (1) GB1513898A (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546347A (en) * 1981-05-18 1985-10-08 Mouse Systems Corporation Detector for electro-optical mouse
DE3234470C2 (de) * 1982-09-17 1985-11-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
DE3234471C1 (de) * 1982-09-17 1983-08-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
JPS60250201A (ja) * 1984-05-25 1985-12-10 Agency Of Ind Science & Technol 投影像の二次元的な変位測定装置
US4782327A (en) * 1985-01-02 1988-11-01 Victor B. Kley Computer control
US4984287A (en) * 1988-11-15 1991-01-08 Msc Technologies, Inc. Method for orienting a dual mouse optical scanner
US4942621A (en) * 1988-11-15 1990-07-17 Msc Technologies, Inc. Method for mapping scanned pixel data
EP0392085B1 (de) * 1989-04-12 1992-04-15 Landis & Gyr Betriebs AG Anordnung zur Messung einer Spurabweichung einer bewegbaren Folienbahn
US5390424A (en) * 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US5052807A (en) * 1990-06-28 1991-10-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Three dimensional moire pattern alignment
US5390423A (en) * 1991-01-22 1995-02-21 Renishaw Plc Analogue probe
DE4105433C2 (de) * 1991-02-21 1994-05-19 Heidenhain Gmbh Dr Johannes Einrichtung zur Konturformprüfung an einer Bearbeitungs- oder Meßmaschine
US5204524A (en) * 1991-03-22 1993-04-20 Mitutoyo Corporation Two-dimensional optical encoder with three gratings in each dimension
US6660997B2 (en) * 2001-04-26 2003-12-09 Creo Srl Absolute position Moiré type encoder for use in a control system
US7256871B2 (en) * 2004-07-27 2007-08-14 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1220152B (de) * 1963-08-23 1966-06-30 Wenczler & Heidenhain Vorrichtung zum verkantungsfehlerfreien Messen von Laengen
US3330964A (en) * 1963-09-09 1967-07-11 Itck Corp Photoelectric coordinate measuring system
US3578979A (en) * 1968-04-23 1971-05-18 Tajima Seisakusho Kk Electrical signal generating apparatus having a scale grid
DE2003492A1 (de) * 1970-01-27 1971-08-12 Leitz Ernst Gmbh Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens
GB1383744A (en) * 1971-06-01 1974-02-12 Ferranti Ltd Indicating devices
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3806254A (en) * 1971-12-08 1974-04-23 Information Storage Systems Agc servo system having error signal responsive to a non-extinguishable intensity light energy signal
US3867038A (en) * 1972-11-27 1975-02-18 Baird Atomic Inc Optical alignment system
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer

Also Published As

Publication number Publication date
CA1028144A (en) 1978-03-21
GB1513898A (en) 1978-06-14
US3957378A (en) 1976-05-18
JPS5177352A (ja) 1976-07-05
FR2292215B1 (ja) 1978-05-12
DE2550840C2 (de) 1984-07-26
FR2292215A1 (fr) 1976-06-18
DE2550840A1 (de) 1976-05-26

Similar Documents

Publication Publication Date Title
SU502361A1 (ru) Фотоэлектрический автоколлиматор
JPH025022U (ja)
JP3040301U (ja) １回転未満のダイヤルゲージ
JPS5810017U (ja) 光電型エンコ−ダの零点検出装置
JPS6138512U (ja) シエル形状測定装置
JPS61199601U (ja)
JPS594643Y2 (ja) シンパクスウケイ
JPS632104U (ja)
JPS6327801U (ja)
JPS59135406U (ja) 物体の異常測定装置
JPS61102812U (ja)
JPS5931008U (ja) 座標測定機の遠隔操作装置
JPS5989201U (ja) 角度ゲ−ジ板
JPS6068409U (ja) 回転角度測定装置
JPS6167506U (ja)
JPH03125212U (ja)
JPH0181257U (ja)
JPS59147576U (ja) スイング測定装置
JPS6367801U (ja)
JPS59152419U (ja) 電磁流量計の接続構造
JPS5869203U (ja) 内径測定器
FLAGGE Measuring probe position recorder[Patent]
JPS61205012U (ja)
JPS6090611U (ja) インクリメンタル型エンコ−ダ
JPS6253309U (ja)