JPS6029465A - Plastic body having moisture permeation resistance - Google Patents

Plastic body having moisture permeation resistance

Info

Publication number
JPS6029465A
JPS6029465A JP13970083A JP13970083A JPS6029465A JP S6029465 A JPS6029465 A JP S6029465A JP 13970083 A JP13970083 A JP 13970083A JP 13970083 A JP13970083 A JP 13970083A JP S6029465 A JPS6029465 A JP S6029465A
Authority
JP
Japan
Prior art keywords
thin film
synthetic resin
transparent
film layer
transparent thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13970083A
Other languages
Japanese (ja)
Other versions
JPS6246629B2 (en
Inventor
Shigemasa Kawai
河合 重征
Yoshiyuki Fukumoto
福本 義行
Kazu Yamanaka
山中 計
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP13970083A priority Critical patent/JPS6029465A/en
Publication of JPS6029465A publication Critical patent/JPS6029465A/en
Publication of JPS6246629B2 publication Critical patent/JPS6246629B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain a plastic body having superior moisture permeation resistance without deteriorating the transparency by forming a transparent thin film having a composition consisting of specific oxides on the surface of a transparent plastic body. CONSTITUTION:A transparent thin film of 100-5,000Angstrom thickness having a composition consisting of SiO2, B2O3 and BaO+Al2O3 in (2-4):(1-2):(0.3-1) molar ratio is formed on at least one side of a transparent and flexible plastic film of 5-300mum thickness made of PVC, polystyrene, polyvinyl butyral, polyethylene, polypropylene, cellophane or the like by vacuum deposition, ion plating, sputtering or other method. A flexible plastic body having superior moisture permeation resistance is obtd. without deteriorating the transparency.

Description

【発明の詳細な説明】 本発明は耐透湿性を有する合成樹脂体に関する。[Detailed description of the invention] The present invention relates to a synthetic resin body having moisture permeability resistance.

従来より、食品や薬品、化学製品の包装において内容物
の変質を避けるために、又、電子工業分野ではEL素子
の保膜などのために耐透湿性を有するものが使用される
・ 例えば、特開昭51−114483号公報ではポリエス
テルフィルムにアルミニウムを蒸着しているが、アルミ
ニウムを蒸着すれば当然透明性が損なわれてしまい、密
着強度も比較的小さいので、限られた用途にしか使用で
きなくなる。
Conventionally, moisture-resistant materials have been used to prevent the contents from deteriorating in the packaging of foods, medicines, and chemical products, and in the electronics industry to preserve the film of EL elements. In Japanese Patent Publication No. 51-114483, aluminum is vapor-deposited on a polyester film, but if aluminum is vapor-deposited, the transparency will naturally be lost and the adhesion strength will be relatively low, so it can only be used for limited purposes. .

又、特公昭5B−12953号公報ではグラスチックフ
ィルムK 81’ 07の薄膜層を設けて透明性を保持
しているが、耐透湿性は不充分なものであった。
Further, in Japanese Patent Publication No. 5B-12953, a thin film layer of glasstic film K 81'07 is provided to maintain transparency, but the moisture permeation resistance is insufficient.

本発明は上記従来の欠点を解消すべく鋭意検討の結果得
られたものであシ、透明性を損なわず、しかも耐透湿性
が極めて棗好である耐透湿性を有する合成樹脂体を提供
するものである。
The present invention has been obtained as a result of intensive studies to solve the above-mentioned conventional drawbacks, and provides a synthetic resin body that does not impair transparency and has moisture permeability that is extremely resistant to moisture. It is something.

本発明において、基材の透明合成樹脂体として社、ポリ
塩化ビニル、ポリスチレン、ポリビニルブチ2−ル、ポ
リエチレン、ボリグロピレン、ポリエステル、ポリアミ
ド、セロハン等の透明な合成樹脂体が使用される〇 又、透明合成樹脂体は可撓性に富むフィルム状体である
方が、包装あるいは積層して使用するために都合がよい
。しかしながら、本発明は基材がフィルム状体であるも
のに限られるのではなく、例えば板状体、レンズ体のよ
うな合成樹脂成形品に適用され、透湿による合成樹脂体
の変質、劣化を防止することができる。
In the present invention, transparent synthetic resin bodies such as polyvinyl chloride, polystyrene, polyvinyl butyl, polyethylene, polyglopyrene, polyester, polyamide, cellophane, etc. are used as the transparent synthetic resin body of the base material. It is convenient for the synthetic resin body to be a highly flexible film-like body for packaging or laminating. However, the present invention is not limited to those in which the base material is a film-like body, but can be applied to synthetic resin molded products such as plate-like bodies and lens bodies, and can prevent deterioration and deterioration of synthetic resin bodies due to moisture permeation. It can be prevented.

フィルム状体の透明合成樹脂体は、厚みとしては5〜3
00μmで可撓性に富むものとなされ、好ましくは5〜
100μm になされる。フィルム状体の透明合成樹脂
体に対し、酸化物組成物を蒸着等するには、通常冷却ロ
ールを介した巻取り工程が必要であるが、フィルム状体
の透明合成樹脂体の厚みが5μm未満であると、しわや
亀裂の発生が生じ易くなり、厚みが300μmを越える
と柔軟性に乏しくなって連続巻取わが困難になってしま
う。
The film-like transparent synthetic resin body has a thickness of 5 to 3
00 μm and is highly flexible, preferably 5 to 50 μm.
The thickness is 100 μm. In order to vapor-deposit an oxide composition on a film-like transparent synthetic resin body, a winding process using a cooling roll is normally required, but if the film-like transparent synthetic resin body has a thickness of less than 5 μm. If so, wrinkles and cracks are likely to occur, and if the thickness exceeds 300 μm, flexibility becomes poor and continuous winding becomes difficult.

透明合成樹脂体の少なくとも片面には透明薄膜層が形成
される。該透明薄膜層はS+OZ、B、O。
A transparent thin film layer is formed on at least one side of the transparent synthetic resin body. The transparent thin film layer is S+OZ, B, O.

BaO1Attosからなり、モル比で(SIOz):
(BtOa): (BaO1Attos): 2〜4 
: 1〜2:0.3〜l となされた組成物からなる。
Consisting of BaO1Attos, in molar ratio (SIOz):
(BtOa): (BaO1Attos): 2-4
: 1-2:0.3-1.

BaOとAt20Sは、その一方が実質的に含まれなく
ともよい。
One of BaO and At20S may not be substantially included.

透明薄膜層の上記の組成にNatoなどのアルカリ金属
の酸化物が多量に入ると、その親水性のために耐透湿性
は損なわれ、真空蒸着を行なうにも組成が変動し易い欠
点を生じる。
If a large amount of an oxide of an alkali metal such as Nato is included in the above-mentioned composition of the transparent thin film layer, moisture permeability will be impaired due to its hydrophilic nature, and the composition will easily fluctuate even when vacuum evaporation is performed.

又、透明薄膜層のモル比が、上記の範囲を外れると層分
離を起こし易くなり、耐透湿性が低下する。そして、B
tOaの量が大きくなるとその水との反応性によって耐
透湿性が悪化し、(BaO1Attos)の量が小さく
なると耐水性が劣る傾向となる。
Furthermore, if the molar ratio of the transparent thin film layer is out of the above range, layer separation tends to occur and moisture permeation resistance decreases. And B
As the amount of tOa increases, the moisture permeability resistance tends to deteriorate due to its reactivity with water, and as the amount of (BaO1Attos) decreases, the water resistance tends to deteriorate.

上記の酸化物組成物を透明合成樹脂体表面に形成する方
法として最も好ましいのはスパッタリング法であシ、ス
パッタリングのターゲットを上記の組成とすることでは
y同じ組成の透明薄膜層を形成することができる。
The most preferable method for forming the above oxide composition on the surface of a transparent synthetic resin body is sputtering, and by using the sputtering target with the above composition, it is possible to form a transparent thin film layer with the same composition. can.

また、真空蒸着法、イオンブレーティング法によっても
、上記の組成の透明薄膜層を形成することができる。真
空蒸着法の場合は、蒸気圧の異なる混合物質をそのま\
の組成で薄膜層を形成するのは困難であるとされている
。しかし、本発明者等は上記組成物を予め電気炉で溶融
しガラス化したものを蒸発材として使用し、電子銃加熱
方式で蒸発させれば、略同じ組成の蒸着膜が得られるこ
とを確認した。
Further, a transparent thin film layer having the above composition can also be formed by a vacuum evaporation method or an ion blating method. In the case of vacuum evaporation, mixed substances with different vapor pressures are directly deposited.
It is said that it is difficult to form a thin film layer with a composition of . However, the present inventors have confirmed that if the above composition is melted in an electric furnace and vitrified in advance and used as an evaporation material and evaporated using an electron gun heating method, a deposited film with approximately the same composition can be obtained. did.

又、一般に混合物を真空蒸着する時に用いられるフラッ
シエ蒸着法によっても、上記の組成の蒸着膜を形成する
ことができる。
Further, a vapor deposited film having the above composition can also be formed by a flashier vapor deposition method which is generally used when vacuum vapor depositing a mixture.

本発明においては、真空蒸着法、イオンブレーティング
法、スパッタリング法のいずれによっても、透明薄膜層
の基材の透明合成樹脂体に対する密着性は良好であり、
透明性もよい。又、透明薄膜層を真空蒸着法等で形成し
たフィルム状の透明合成樹脂体でカール性、が大きな問
題とならないのも本発明の特徴である。これは、従来の
S i *Oyに比較して木兄q(510,、B xo
s1真空蒸着法、イオンブレーティング法、スノくツタ
リング法により透明薄膜層を形成するには、通常2X1
0 1orr以下の真空雰囲気下で行なわれるが、不純
物の混入による性能の低下を避けるためには5X1G−
’1orr以下の真空雰囲気下で行なうのが好ましい。
In the present invention, the adhesion of the transparent thin film layer to the transparent synthetic resin body of the base material is good regardless of whether the vacuum evaporation method, ion blating method, or sputtering method is used.
Transparency is also good. Another feature of the present invention is that curling does not pose a major problem in a film-like transparent synthetic resin body in which a transparent thin film layer is formed by a vacuum evaporation method or the like. Compared to the conventional S i *Oy, this is
To form a transparent thin film layer by s1 vacuum evaporation method, ion blating method, or snok tsuttering method, usually 2×1
The test is carried out under a vacuum atmosphere of 0.1 orr or less, but in order to avoid deterioration of performance due to the contamination of impurities, 5X1G-
It is preferable to carry out under a vacuum atmosphere of 1 orr or less.

透明薄膜層は、柔軟性、密着性を良好なものとするため
にその厚みを100〜5000A の範囲になすのがよ
く、更に好ましくは500〜2500Aの範囲にするの
がよい。
The thickness of the transparent thin film layer is preferably in the range of 100 to 5000 Å, more preferably in the range of 500 to 2500 Å, in order to have good flexibility and adhesion.

透明薄膜層の厚みが5ooo、Kを越えても透明性を損
なうことはないが、フィルム状の透明合成樹脂体のカー
ル性が問題となった9、亀裂や剥離が生じ易くなること
がらる。又、透明薄膜層の厚みが100K 未満になる
と、膜が島状構造となって耐透湿性が不充分なものとな
る恐れがある。
Even if the thickness of the transparent thin film layer exceeds 500,000 K, the transparency will not be impaired, but the curling property of the film-like transparent synthetic resin body has become a problem9, and cracks and peeling may easily occur. Furthermore, if the thickness of the transparent thin film layer is less than 100K, the film may have an island-like structure, resulting in insufficient moisture permeation resistance.

本発明耐透湿性合成樹脂体を包装体として使用する場合
、ヒートシール性を付与することが望ましくなる。その
場合、(5ift%B2O3、BaO1hLzOs )
の糸からなる透明薄膜層の上にヒートシール性を有する
合成樹脂フィルムを積層することによ如、本発明耐透湿
性合成樹脂体にヒートシール性を付与することができる
。
When the moisture permeable synthetic resin body of the present invention is used as a packaging body, it is desirable to impart heat sealability to it. In that case, (5if%B2O3, BaO1hLzOs)
Heat-sealability can be imparted to the moisture permeable synthetic resin body of the present invention by laminating a synthetic resin film having heat-sealability on a transparent thin film layer made of threads.

ヒートシール性を有する合成樹脂フィルムとしては、ポ
リエチレン、ポリプロピレン、エチレン酢酸ヒニル共重
合体、エチレン系アイオノマー等が挙げられ、透明性を
失なわないものとされる。
Examples of the synthetic resin film having heat-sealability include polyethylene, polypropylene, ethylene-hinyl acetate copolymer, ethylene-based ionomer, etc., and the film does not lose its transparency.

ヒートシール性を有する合成樹脂フィルムを積層するに
は、接着剤を用いる法(ドライラミネ−ト法)、合成樹
脂をフィルム状に溶融押出して基材に圧着する法(エク
ストルージョンラミネート法)がある。
To laminate synthetic resin films having heat-sealing properties, there are a method using an adhesive (dry lamination method) and a method of melt-extruding a synthetic resin into a film and pressing it onto a base material (extrusion lamination method).

ドライラミネート法においては、合成樹脂フィルムによ
って使用する接着剤が変ってくるが、一般にインシアネ
ート系の接着剤が使われる〇エクストルージョンラミネ
ート法においては、錯グネ1りPe酸)化物p透明薄膜
層にアンカー効果が発現されるため、通常行なわれる有
機チタネート系、イソシアネート系、ポリエチレンイミ
ン系のアンカー剤によるアンカー処理が不要となる。従
って、従来の有機溶剤を使用する必要がなくな妙、製造
作業環境を悪化することも、製品中に有機溶剤が残存す
ることもなくなる。
In the dry lamination method, the adhesive used varies depending on the synthetic resin film, but incyanate-based adhesives are generally used. In the extrusion lamination method, a transparent thin film layer of complex glue (1), (Pe acid) compound, (3) Since the anchoring effect is expressed, the anchor treatment using an organic titanate-based, isocyanate-based, or polyethyleneimine-based anchoring agent, which is usually performed, becomes unnecessary. Therefore, there is no need to use conventional organic solvents, and the production environment will not be degraded, nor will organic solvents remain in the product.

以下に本発明の実施例を示す。Examples of the present invention are shown below.

〈実施例1〉 5loz、B2O3、BaO1At之OIIのモル比を
3:1: 0.67 : 0.33とした酸化物の混合
物を電気炉で溶解しガラス化したものを5X Iorr
の真空下で電子銃加熱方式で加熱蒸発させ、ポリエチレ
ンテレ7タレー) (PET)フィルム(15μ扉厚)
上に100OAの厚みの透明薄膜層を形成した。透明薄
膜層の厚みは水晶発振式のモニターにより計測した。透
明薄膜層の組成は、χ線マイクロアナライザーで分析し
たところ、当初の混合物の組成と略同等であった。
<Example 1> A mixture of oxides with a molar ratio of 5LOZ, B2O3, BaO1At to OII of 3:1:0.67:0.33 was melted in an electric furnace and vitrified to 5X Iorr.
Polyethylene Tele7 (PET) film (15μ door thickness) is heated and evaporated using an electron gun heating method under a vacuum of
A transparent thin film layer with a thickness of 100 OA was formed on top. The thickness of the transparent thin film layer was measured using a crystal oscillation type monitor. The composition of the transparent thin film layer was analyzed using a chi-ray microanalyzer and was found to be approximately the same as the composition of the initial mixture.

形成された透明薄膜層の密着性d JIS D0202
で確認したが非常に良好であった。
Adhesion d of formed transparent thin film layer JIS D0202
I checked it and it was in very good condition.

又、透明薄膜層を形成したフィルムの光透過率は未蒸着
フィルム略同等であシ、透明性は良好であった。
Further, the light transmittance of the film on which the transparent thin film layer was formed was approximately the same as that of the undeposited film, and the transparency was good.

透湿度は40℃、相対湿度90%RHにおいて、JIS
Z 0208(カップによる重量法)及び湿度計法で測
定したが、両者の値は略同等であった@〈実施例2〉 実施例1において、透明薄膜層の厚みを2000Aとし
た。
Moisture permeability is JIS at 40℃ and relative humidity 90%RH.
It was measured by Z 0208 (gravimetric method using a cup) and hygrometer method, and both values were approximately the same @<Example 2> In Example 1, the thickness of the transparent thin film layer was set to 2000A.

〈実施例3.4〉 実施例1のPETフィルムに代えて、二軸延伸ポリプロ
ピレン(OPP)フィルム(25μm厚)を使用した。
<Example 3.4> Instead of the PET film of Example 1, a biaxially oriented polypropylene (OPP) film (25 μm thick) was used.

〈実施例5〜8〉 実施例1の混合物組成に代えて、表に示した組成のもの
を使用して、透明薄膜層を形成した。
<Examples 5 to 8> In place of the mixture composition of Example 1, the compositions shown in the table were used to form transparent thin film layers.

〈比較例1.2〉 ′) 実施例\1の混合物組成に代えて、本発明のモル比組成
の範囲から外れるものを使用して、透明薄膜層を形成し
た。
<Comparative Example 1.2>') In place of the mixture composition of Example \1, a transparent thin film layer was formed using a mixture having a molar ratio composition outside the range of the present invention.

〈比較例3,4〉 従来公知の耐透湿性透明薄膜層を形成するSiO及びS
tO,を使用して、透明薄膜層を形成した。
<Comparative Examples 3 and 4> SiO and S forming a conventionally known moisture-resistant transparent thin film layer
A transparent thin film layer was formed using tO,.

〈比較例5〉 不透明であるが、耐透湿性が良好であると言われている
^を薄膜層を、PETフィルム上に形成させた。
<Comparative Example 5> A thin film layer, which is opaque but is said to have good moisture permeability, was formed on a PET film.

以下余白 ◎;密着性、透明性良好 Δ:密着性や\不良 ×;不透明 以上詳述した通抄、本発明耐透明性合成樹脂体は透明性
を損なうことなく、従来得られなかった極めて良好な耐
透湿性を得ることができ、食品や薬品の包装体として、
EL素子の保護体として使用することができる。
Below margin ◎; Good adhesion and transparency Δ: Poor adhesion and \Poor ×; Transparency and above. It has excellent moisture permeability and can be used as food and drug packaging.
It can be used as a protector for EL elements.

特許出願人 積水化学工業株式会社 代表者 藤 沼 基 利patent applicant Sekisui Chemical Co., Ltd. Representative: Mototoshi Fujinuma

Claims (1)

【特許請求の範囲】 り透明合成樹脂体の少なくとも片面に、SiO2,To
ss。 BaO1AttOsがモル比で、(Sift ) e 
(BtOa)S(nao+Atzoa) = 2〜4 
: 1〜2 : 0.3〜1となされた組成物の透明薄
膜層が形成されてなることを特徴とする耐透湿性を有す
る合成樹脂体。 λ透明合成樹脂体が厚み5〜300μ扉の可撓性に富む
フィルム状体でおり、透明薄膜層が厚み100へ500
OAである特許請求の範囲第1項記載の耐透湿性を有す
る合成樹脂体。 3、透明薄膜層が真空蒸着法またはイオンブレーティン
グ法またはスパクタリング法によって形成されている特
許請求の範囲第1項または第2項記載の耐透湿性を有す
る合成樹脂体。
[Claims] At least one side of the transparent synthetic resin body is made of SiO2, To
ss. The molar ratio of BaO1AttOs is (Sift) e
(BtOa)S(nao+Atzoa) = 2~4
A synthetic resin body having moisture permeability, characterized in that a transparent thin film layer of a composition having a ratio of: 1 to 2: 0.3 to 1 is formed. The lambda transparent synthetic resin body is a highly flexible film-like body with a thickness of 5 to 300μ, and the transparent thin film layer has a thickness of 100 to 500μ.
The synthetic resin body having moisture permeability according to claim 1, which is OA. 3. The synthetic resin body having moisture permeability resistance according to claim 1 or 2, wherein the transparent thin film layer is formed by a vacuum evaporation method, an ion blating method, or a sputtering method.
JP13970083A 1983-07-29 1983-07-29 Plastic body having moisture permeation resistance Granted JPS6029465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13970083A JPS6029465A (en) 1983-07-29 1983-07-29 Plastic body having moisture permeation resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13970083A JPS6029465A (en) 1983-07-29 1983-07-29 Plastic body having moisture permeation resistance

Publications (2)

Publication Number Publication Date
JPS6029465A true JPS6029465A (en) 1985-02-14
JPS6246629B2 JPS6246629B2 (en) 1987-10-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP13970083A Granted JPS6029465A (en) 1983-07-29 1983-07-29 Plastic body having moisture permeation resistance

Country Status (1)

Country Link
JP (1) JPS6029465A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283324A (en) * 1985-10-07 1987-04-16 Kogyo Kaihatsu Kenkyusho Production of optical glass
DE3842506A1 (en) * 1987-12-17 1989-06-29 Toyo Ink Mfg Co METHOD AND DEVICE FOR PRODUCING DEPOSIT FILMS
EP0549528A1 (en) * 1991-12-20 1993-06-30 Alusuisse-Lonza Services Ag Method for fabrication of coated substrates
WO1994019506A1 (en) * 1993-02-25 1994-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vacuum-vapour-phase deposited barrier layer for the packaging industry and vaporized substance for producing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283324A (en) * 1985-10-07 1987-04-16 Kogyo Kaihatsu Kenkyusho Production of optical glass
DE3842506A1 (en) * 1987-12-17 1989-06-29 Toyo Ink Mfg Co METHOD AND DEVICE FOR PRODUCING DEPOSIT FILMS
EP0549528A1 (en) * 1991-12-20 1993-06-30 Alusuisse-Lonza Services Ag Method for fabrication of coated substrates
WO1994019506A1 (en) * 1993-02-25 1994-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vacuum-vapour-phase deposited barrier layer for the packaging industry and vaporized substance for producing the same

Also Published As

Publication number Publication date
JPS6246629B2 (en) 1987-10-02

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