JPS6030352A - inkjet head - Google Patents

inkjet head

Info

Publication number
JPS6030352A
JPS6030352A JP13724883A JP13724883A JPS6030352A JP S6030352 A JPS6030352 A JP S6030352A JP 13724883 A JP13724883 A JP 13724883A JP 13724883 A JP13724883 A JP 13724883A JP S6030352 A JPS6030352 A JP S6030352A
Authority
JP
Japan
Prior art keywords
support substrate
piezoelectric polymer
inkjet head
electrode
displaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13724883A
Other languages
Japanese (ja)
Inventor
Satoru Yamamuro
山室　哲
Kyuhachiro Iwasaki
岩崎　久八郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP13724883A priority Critical patent/JPS6030352A/en
Priority to US06/634,543 priority patent/US4588998A/en
Priority to DE19843427850 priority patent/DE3427850A1/en
Publication of JPS6030352A publication Critical patent/JPS6030352A/en
Priority to US06/832,571 priority patent/US4700203A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 挟４北見 本発明は、インク室のインクを加圧してインク滴を噴射
するインクジェットヘッド、より詳細には、インク室の
インクを加圧する加圧素子として、圧電性高分子を用い
たインクジェットヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention uses a piezoelectric high pressure element as an inkjet head that pressurizes ink in an ink chamber to eject ink droplets, and more specifically, as a pressurizing element that pressurizes ink in the ink chamber. This invention relates to an inkjet head using molecules.

従】Ｕえ爾− インクジェット記録装置は周知であり、そのためのイン
クジェットヘッドも種々提案されているが、その代表的
なものに、セラミック電歪素子を用いたインクジェット
ヘッドがある。しかし、このヘッドは、インク加圧部の
面積が大きくすなわち電歪素子が大きく、マルチ化に限
界があった。Inkjet recording apparatuses are well known, and various inkjet heads for the same have been proposed, one of which is typically an inkjet head using a ceramic electrostrictive element. However, in this head, the area of the ink pressurizing section is large, that is, the electrostrictive element is large, and there is a limit to multiplication.

その他に、電界又は磁界の作用を利用したインクジェッ
トヘッド、或いは、バブルによるインクジェットヘッド
等も提案されているが、前者は比較的高電圧を要するた
め、駆動回路の小型化に限界があり、後者は熱パルスに
よって気泡の発生を繰り返すため、耐久性の点で問題が
あった。而して、インクジェットヘッドは、印写信号に
応じてインク室の体積を減少させてつまりインク室のイ
ンクに加圧を加えてインク滴を噴射させるものであり、
当然のことながら、その加圧手段として圧電性高分子を
使用することができる。Inkjet heads that utilize the action of electric or magnetic fields, or inkjet heads that use bubbles have also been proposed, but the former requires a relatively high voltage, which limits the miniaturization of the drive circuit, and the latter There was a problem with durability because bubbles were repeatedly generated due to heat pulses. The inkjet head reduces the volume of the ink chamber in response to a printing signal, that is, applies pressure to the ink in the ink chamber to eject ink droplets.
Naturally, a piezoelectric polymer can be used as the pressurizing means.

第１図は、従来の圧電性高分子を用いたマルチノズルの
インクジェットヘッドの一ヘッド例を示す図で、図中、
■は支持基板、１′は支持基板の変位部、２は変位部電
極、３は圧電性高分子、４ハクランド電極、５は保護層
、６はインク加圧室形成部材、７は外気と通じる空腔で
あるが、上記従来のマルチノズルのインクジェットヘッ
ドにおいては、ＩＣ技術の応用による電極パターンの形
成上、変位部電極２を支持基板１′上に蒸着等によって
取り付けており、そのため、電極２と支持基板１′とが
接合されており、電圧駆動によって圧電性高分子が変位
するとき、支持基板１′も共に変位しなければならず、
大きな負荷を伴なうことになる。FIG. 1 is a diagram showing an example of a multi-nozzle inkjet head using a conventional piezoelectric polymer.
2 is a support substrate, 1' is a displacement part of the support substrate, 2 is a displacement part electrode, 3 is a piezoelectric polymer, 4 is a Hakland electrode, 5 is a protective layer, 6 is an ink pressurization chamber forming member, 7 is connected to the outside air However, in the conventional multi-nozzle inkjet head described above, the displacement part electrode 2 is attached to the support substrate 1' by vapor deposition or the like in order to form an electrode pattern by applying IC technology. and a support substrate 1' are joined, and when the piezoelectric polymer is displaced by voltage drive, the support substrate 1' must also be displaced.
This will result in a heavy load.

一圧一一」町 本発明は、上述のごとき従来技術の欠点を解消するため
になされたもので、特に、圧電性高分子が変位する際、
該圧電性高分子の変位部が支持基板から離れるようにし
、もって、負荷の軽減を図ったものである。The present invention was made to solve the above-mentioned drawbacks of the prior art.In particular, when a piezoelectric polymer is displaced,
The displacement portion of the piezoelectric polymer is moved away from the support substrate, thereby reducing the load.

鼻−一部 本発明の構成について、以下、実施例に基づいて説明す
る。Nose - Part of the configuration of the present invention will be described below based on examples.

第２図は、本発明によるインクジェットヘッドの一実施
例を説明するための要部構成図で、図中、第１図と同様
の作用をする部分には第１図の場合と同一の参照番号が
付しである。而して、本発明においては、支持基板側電
極２と変位部支持基板１＃どの間に。FIG. 2 is a main part configuration diagram for explaining one embodiment of an inkjet head according to the present invention. In the figure, parts having the same functions as those in FIG. 1 have the same reference numbers as in FIG. 1. is attached. Therefore, in the present invention, between the support substrate side electrode 2 and the displacement part support substrate 1#.

（ａ）支持基板とは非接着性であること、（ｂ）物理的
・化学的などのなんらかの表面処理を施こすことによっ
て、支持基板側電極とは、（１）直接に、または、（Ｉ
Ｉ）その処理面と支持基板側電極とのの間に接着層を介
在させることにより間接的に接着させること、 （ｃ）支持基板の一部または全面に通気孔を設ける際に
、耐エッチ性を有していること、 を特徴としてもつ高分子化合物（接着、非接着層）８を
設け、これによって、圧電性高分子の変位部が支持基板
から離れることができるようにしている。従って、本発
明によると、高分子化合物８は圧電性高分子３とは接着
されているので、該圧電性高分子が変位する時は該圧電
性高分子と共に変位するが、変位部支持基板１”とは非
接着である３− ので、該変位部支持基板１＃とは容易に離れることがで
き、従って、該変位部支持基板１″′は変位する必要は
ない。なお、その際、変位部支持基板１′に第３図に示
すように通気孔１ａを設けておくと、圧電性高分子の変
位をより容易に行うことができる。(a) It must be non-adhesive to the support substrate, and (b) By applying some kind of physical or chemical surface treatment, the electrode on the support substrate side can be formed (1) directly or (I).
I) Indirect adhesion by interposing an adhesive layer between the treated surface and the supporting substrate side electrode, (c) Etch resistance when providing ventilation holes in part or the entire surface of the supporting substrate. A polymer compound (adhesive, non-adhesive layer) 8 having the following characteristics is provided, thereby allowing the displaced portion of the piezoelectric polymer to separate from the support substrate. Therefore, according to the present invention, since the polymer compound 8 is bonded to the piezoelectric polymer 3, when the piezoelectric polymer is displaced, it is displaced together with the piezoelectric polymer; ``3-'' is non-adhesive, so it can be easily separated from the displacement portion support substrate 1#, and therefore the displacement portion support substrate 1'' does not need to be displaced. In this case, if a ventilation hole 1a is provided in the displacement part support substrate 1' as shown in FIG. 3, the piezoelectric polymer can be more easily displaced.

前記非接着性の高分子化合物としては、テフロン等のフ
ッ素樹脂系のものが適しているが、以下にその理由を説
明する。As the non-adhesive polymer compound, a fluororesin type compound such as Teflon is suitable, and the reason thereof will be explained below.

テフロンなどのフッ素樹脂は、耐熱性、電気絶縁性、撥
水性、非接着性、耐薬品性などにすぐれている。本発明
では、上記（ａ）、（Ｃ）から非接着性と耐エツチング
性が要求されるが、テフロンはその両要件を満たしてい
る。また、テフロン樹脂は、スパッタリングによって薄
膜形成ができるので、小型化・マルチ化などの微細加工
に適し、しかも量産性によい。さらに、テフロンは、ス
パッタエッチ処理等による表面処理を施こすことにより
、その表面に接着力を持たせることができ、これによっ
て、上記（ｂ）の要件を満たすことができ４− る。このように本発明は、テフロンのような高分子化合
物を用いることにより、所期の目的を達成することがで
きる。なお、以上には、変位部電極２とグランド電極４
との間に圧電性高分子３をサンドイッチした場合の例に
ついて説明したが、本発明は、上記実施例に限定される
ものではなく、例えば、圧電性高分子をバイモルフ構成
したものについても適用可能であることは容易に理解で
きよう。Fluororesins such as Teflon have excellent heat resistance, electrical insulation, water repellency, non-adhesion, and chemical resistance. In the present invention, non-adhesion and etching resistance are required from the above (a) and (C), and Teflon satisfies both of these requirements. Furthermore, since Teflon resin can be formed into a thin film by sputtering, it is suitable for microfabrication such as miniaturization and multiplication, and is good for mass production. Furthermore, Teflon can be given adhesive strength to its surface by subjecting it to a surface treatment such as sputter etching, thereby satisfying the above requirement (b). As described above, the present invention can achieve the intended purpose by using a polymer compound such as Teflon. In addition, in the above, the displacement part electrode 2 and the ground electrode 4
Although an example has been described in which the piezoelectric polymer 3 is sandwiched between It is easy to understand that.

効−−ヨ１ 以上の説明から明らかなように、本発明によると、圧電
性高分子が変位する際、該圧電性高分子の変位部が支持
基板から離れるので、圧電性高分子と共に支持基板を変
位させなけれがならない従来技術に比し、圧電性高分子
を変位させるための負荷を軽減することができ、圧電性
高分子の変位量の効率向上を図ることができる。また、
その際、圧電性高分子と変位部支持基板との間に配設さ
れた高分子化合物（接着、非接着層）が支持基板側電極
を保護する役割をもする。Effect 1 As is clear from the above explanation, according to the present invention, when the piezoelectric polymer is displaced, the displaced portion of the piezoelectric polymer separates from the support substrate. Compared to conventional techniques in which the piezoelectric polymer must be displaced, the load for displacing the piezoelectric polymer can be reduced, and the efficiency of displacement of the piezoelectric polymer can be improved. Also,
At this time, the polymer compound (adhesive/non-adhesive layer) disposed between the piezoelectric polymer and the displacement part support substrate also serves to protect the electrode on the support substrate side.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、従来のインクジェットヘッドの一例を説明す
るための要部構成図、第２図は１本発明によるインクジ
ェット記録装置の一実施例を説明するための構成図、第
３図は、変位部支持基板の平面図である。 １・・・支持基板、２・・・変位部電極、３・・・圧電
性高分子、４・・・グランド電極、５・・・保護層、６
・・・インク加圧室形成部材、７・・・空腔、８・・・
高分子化合物（接着、非接着層）。 ７− 第　１　図 ら −９へ１−FIG. 1 is a configuration diagram of main parts for explaining an example of a conventional inkjet head, FIG. 2 is a configuration diagram for explaining an embodiment of an inkjet recording apparatus according to the present invention, and FIG. 3 is a diagram of a displacement FIG. DESCRIPTION OF SYMBOLS 1... Support substrate, 2... Displacement part electrode, 3... Piezoelectric polymer, 4... Ground electrode, 5... Protective layer, 6
... Ink pressurization chamber forming member, 7 ... Cavity, 8 ...
Polymer compound (adhesive, non-adhesive layer). 7- To Figure 1-9 1-

Claims (1)

【特許請求の範囲】[Claims] 支持基板上に、変位部電極とグランド電極とでサンドイ
ンチされた圧電性高分子又は圧電性高分子を用いたバイ
モルフと、その保護層と、インク加圧室形成部とを有す
るインクジェットヘッドにおいて、前記支持基板と支持
基板側電極とが接合されていないことを特徴とするイン
クジェットヘッド。An inkjet head having, on a support substrate, a piezoelectric polymer or a bimorph using a piezoelectric polymer sandwiched between a displacement part electrode and a ground electrode, a protective layer thereof, and an ink pressurizing chamber forming part, An inkjet head characterized in that the support substrate and the support substrate side electrode are not bonded to each other.
JP13724883A 1983-07-27 1983-07-27 inkjet head Pending JPS6030352A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13724883A JPS6030352A (en) 1983-07-27 1983-07-27 inkjet head
US06/634,543 US4588998A (en) 1983-07-27 1984-07-26 Ink jet head having curved ink
DE19843427850 DE3427850A1 (en) 1983-07-27 1984-07-27 COLOR BEAM HEAD
US06/832,571 US4700203A (en) 1983-07-27 1986-02-24 Ink jet head for compressing ink to eject drops of ink

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13724883A JPS6030352A (en) 1983-07-27 1983-07-27 inkjet head

Publications (1)

Publication Number Publication Date
JPS6030352A true JPS6030352A (en) 1985-02-15

Family

ID=15194227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13724883A Pending JPS6030352A (en) 1983-07-27 1983-07-27 inkjet head

Country Status (1)

Country Link
JP (1) JPS6030352A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013176853A (en) * 2012-02-28 2013-09-09 Seiko Epson Corp Liquid jet head and method for driving the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013176853A (en) * 2012-02-28 2013-09-09 Seiko Epson Corp Liquid jet head and method for driving the same

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