JPS6031410A - Rotary type shelf facility - Google Patents

Abstract

PURPOSE:To certainly prevent pollution in a rotary type shelf facility, placed under dustless and aseptic circumstances in an enclosed body, by realizing service supply of nitrogen gas and the like into each housing box through a coupler 32 connected to a bucket in the lowest position while rotation of buckets is stopped. CONSTITUTION:At the time of taking out a load from a housing box 26, a controlling board is handled to put a group of buckets 12 in rotation and a bucket 12, intended as an object, is stopped in opposition to a load handling port 19. Then, a door 20 is opened and the load is put in and out from the housing box 26, with an opened lid, through said port 19. At this time, a supply side coupler 39 is raised and pressed to closely touch a receiving side coupler 32 of the bucket 12 in the lowest position. Then, nitrogen gas from a nitrogen gas supply source is supplied, through couplers 39, 32 and a tube or the like, to an annular passage introducing said gas into each box 26 and service supply passages including tubes. Thus, the load such as silicone wafer and the like is prevented from contacting the air.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a rotary shelving system that is used to store loads in a dust-free or sterile environment and to take out desired loads when desired.

The above-mentioned rotary shelving equipment has a driven wheel body and a driving wheel body arranged side by side at an appropriate interval in the vertical direction within a box-shaped surrounding wall.
An endless rotating body is wound between these wheels, a large number of buckets are attached to the endless rotating body, and a cargo handling port is formed at the lower front of the surrounding wall body.

Recently, in the above-mentioned carousel equipment, it has become desirable to prevent the stored loads from coming into contact with the air or to take some kind of treatment. For example, in semiconductor manufacturing and storage processes in the electronics industry, nitrogen gas is supplied into storage boxes to prevent semiconductor loads such as silicon wafers from coming into contact with air. However, in rotary shelving equipment, the bucket group rotates with the rotation of the endless rotating body, so it is very difficult to supply each bucket with a utility such as nitrogen gas. Therefore, there has been no conventional device that satisfies the above requirements.

In view of the above-mentioned points, the present invention provides a rotary shelf facility that can supply utility items into a storage box while the rotation of packets is stopped, and will be described in detail below with reference to the drawings.

In FIGS. 1 and 2, 1 is a box-shaped surrounding wall provided on the floor 2, and 3 is a drive unit on both left and right sides of the surrounding wall 1, with a large packet room 4 in the center and a drive on both sides. A separate plate forms a mechanical chamber 5 in which a body, a conductor, etc. are arranged, 6 is a driven wheel body disposed on the upper part of the mechanical chamber 5 on both sides, and 7 is a lower part of the driven wheel body 6 on both sides. The driving wheel bodies 8, which are respectively disposed and attached to a common drive shaft 9, are endless rotating bodies such as chains wound between the driving wheel body 7 and the driven wheel body 6 on both sides.

Reference numeral 10 denotes a drive motor with a speed reducer that can be driven in forward and reverse directions, and drives and rotates the drive shaft 9 via a winding transmission 11.

12 is a bucket, 16 is an arm rod connected to the endless rotating body 8,
Reference numeral 14 denotes a horizontal pin rotatably supported by an arm rod 16, and the buckets 12 are arranged in the packet chambers 4 on both sides. The horizontal pin 14 passes through an annular slit 15 in the separate plate 3, as shown in FIG. Reference numeral 16 denotes a clean air supply device, which is operated regardless of whether the endless rotating body 8 and thus the packet 12 are rotating or not, and supplies clean air to the upper part of the packet chamber 4. The clean air supplied to the packet chamber 4 passes through the slit 15 to prevent dust generated in the mechanical chamber 5 from moving into the packet chamber 4, and is discharged to the exhaust port 17 of the exhaust pipe 18 along with the exhaust airflow. exhaust pipe 18
A duct etc. is connected to. Reference numeral 19 denotes a cargo handling port formed in the enclosure 1, and 20 a door for closing the cargo handling port, which opens and closes up and down automatically or manually. 21 is a control panel, 26 is a storage box for the load placed on the packet 12,
47 is a storage box lift device.

The service path to the storage box 26 on each packet 12 is shown in FIGS. 24 is a connector communicating with the annular path 22;
25 is a tube that connects the annular paths 22 formed by the grooves of the swivel block 23 inserted into the horizontal pins 14 of each of the ducts 12 via the connectors 24; A lateral pin inner hole 2 is connected at one end to the annular passage 22 and at the other end to an inner end opening of the lateral pin 14.
8 is an elbow connected to an opening at one end of the horizontal pin internal passage 27;
Reference numeral 29 denotes a block having a hole therein that communicates with a hole drilled in the outer wall of the storage box 26, and a flow rate regulating valve 60 is attached to one end of the hole of the block 29. 61 is a tube connecting this flow rate regulating valve 60 and the elbow 28. Reference numeral 62 denotes a utility receiving coupler attached to the lower surface of the duct 12, and is provided with a receiving passage 63 that opens downward, and a gasket 38 is attached to the outer periphery of the receiving passage 66. Further, a hole communicating with the receiving passage 36 is provided on the side surface of the receiving coupler 62, a check valve 64 is connected to this hole, and an elbow 65 is further connected to this check valve 64. 66 is an elbow connected to a hole communicating with the shaft pin hole 27 of the horizontal pin 14 in a direction perpendicular to the shaft pin hole 27;
7 is a tube connecting this elbow 66 and the elbow 35 connected to the receiving coupler 62 side.

Figures 9 and 10 show the connection between the utility receiving coupler 9 and the utility supply coupler. An elbow 43 is connected to a hole communicating with this groove from the side. A tube 44 is connected to this elbow 43 and communicates with a useful nitrogen supply source (not shown). 40 is a rod protruding from both sides of the lower part of the supply side turnip 2-69; 41 is a plate that supports the supply side coupler 39;
A spring 42 is inserted into the rod 40 and springs the supply coupler 69 upward against the plate 41. Reference numeral 45 denotes a reader/reader device, which is supported by a support plate 48, and has a plate 41 fixedly supported on the upper end of its piston rod. 46
is a frame that stands on the bottom plate of the surrounding wall 1 and supports the support plate 48.

Next, the operation of the equipment of the present invention will be explained. When not in operation, each door 2o is lowered to close the cargo handling port 19. When taking out a load from the storage box 26, use the control panel 2.
1 to rotate the 12 groups of packets. At this time, the target packet 12 is stopped facing the cargo handling port 19 according to a command from the control panel 21. Thereafter, the door 20 is opened automatically or manually, and the cargo is taken in and out of the storage box 26 with the lid opened through the opened cargo handling port 19. Regardless of whether the packet is rotating or not, the clean air supply device 16 operates to supply clean air to the upper part of the packet chamber 4. The clean air supplied to the packet chamber 4 enters the mechanical chamber 5 through the slit 15 of the separate plate 6 as described above, and carries the dust generated in the mechanical chamber 5 into the exhaust airflow without transferring it to the packet chamber. The air is discharged from an exhaust pipe 18 at the upper part of the mechanical room 5 to a duct or the like.

When the rotation of the packet 12 is stopped, as shown in FIGS. 9 and 10, the supply coupler 69, which is spaced apart and facing the receiving coupler 62 attached to the lowest packet 12, is connected to the cylinder device 45. is raised by being stretched, and is elastically pressed against the receiving coupler 32 of the packet 12 located at the lowest position by the force of the spring 42. After that, nitrogen gas is supplied from a nitrogen gas supply source. The supplied nitrogen gas is supplied to the annular utility supply path consisting of the annular path 22 and the tube 25 via the supply side coupler 69, the receiving side force grapher 32, the tube 67, and the horizontal bottle inner hole 27, and then It is simultaneously supplied into each storage box 26 from the utility supply path of each packet 12 through the horizontal bin inner hole 27, the tube 61, and the hole in the block 29. The storage box 26 of the lowest packet 12 is directly supplied from the horizontal bin inner hole 27 to the tube 61 side. Therefore, while the rotation of the packet 12 is stopped, nitrogen gas is simultaneously supplied to all the storage boxes 26 as described above. Therefore, when storing silicon sea urchins, for example, in the storage box 26, it is possible to prevent these soligo's/wafers from coming into contact with air. Prior to the start of rotation of the packet 12, the supply side coupler 69 is lowered and separated from the receiving side force grapher 32, and nitrogen gas is not supplied while the packet 12 is rotating, so that the packet 12 rotates smoothly. It is done.

Note that the utility is not limited to the nitrogen gas mentioned above, and it goes without saying that any gas can be used depending on the purpose.

As explained above, according to the present invention, when the rotation is stopped, the utility supply coupler is raised and connected to the receiving side force grating attached to the lowest packet, so that the load can be placed on each packet. It is possible to continue supplying utilities into the storage box of

[Brief explanation of drawings]

FIG. 1 is a front view of an embodiment of the present invention, FIG. 2 is a longitudinal sectional view thereof, and FIG. 3 is a longitudinal sectional view showing a separate plate portion.
Fig. 4 is a side view of the packet, Fig. 5 is a front view of the packet, Fig. 6 is a bottom view of the receiving side coupler attachment area of the packet, Fig. 7 is a sectional view taken along line A-A in Fig. 5, and Fig. 8 is a side view of the packet. The figure is a sectional view taken along line B-8 in the diagram, FIG. 9 is a side view showing the connecting portion between the receiving side power grapher and the supplying side coupler, and FIG. 10 is a front view thereof. DESCRIPTION OF SYMBOLS 1... Surrounding wall body, 6... Driven wheel body, 7... Drive wheel body, 8... Endless rotating body, 12... Packet, 13...
・Arm rod, 14...Horizontal pin, 19...Cargo handling port, 2
2... ring road, 23... swivel block, 25...
... Tube, 26... Storage box, 27... Horizontal bottle inner hole, 31... Tube, 62... Receiving side coupler, 67... Tube, 69... Supply side coupler, 45...・・Cylinder device Broom 5 figures Broom 6 figures Kaya 7 figures Kaya 9 figures, 10 eyes

Claims (1)

[Claims] A driven wheel body and a driving wheel body are arranged at intervals in the vertical direction in a box-shaped surrounding wall, and an endless rotating body is wound between the driven wheel body and the driving wheel body, and the endless rotating body is wrapped around the driven wheel body and the driving wheel body. In a rotary shelving facility that supports a large number of buckets and has a cargo handling port formed at the front lower part of the surrounding wall body, a utility that can orbit along the endless rotating body and rotate integrally with the endless rotating body. A supply path is provided, and the utility supply path is connected to the storage box for the cargo loaded on each of the packets, and is also connected to the utility receiving side loader attached to the bottom surface of each bucket. A utility supply coupler connected to a utility supply source is provided facing from below the receiving coupler attached to the lower bucket, and the supply coupler is connected to the opposing receiving coupler. Rotary shelf equipment characterized by being equipped with a lifting device for connecting and separating.