JPS603149A - Manufacture of thick film circuit - Google Patents

Manufacture of thick film circuit

Info

Publication number
JPS603149A
JPS603149A JP58111231A JP11123183A JPS603149A JP S603149 A JPS603149 A JP S603149A JP 58111231 A JP58111231 A JP 58111231A JP 11123183 A JP11123183 A JP 11123183A JP S603149 A JPS603149 A JP S603149A
Authority
JP
Japan
Prior art keywords
conductor
paste
contact
substrate
thick film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58111231A
Other languages
Japanese (ja)
Inventor
Yukio Maeda
幸男 前田
Kazuhiro Karatsu
唐津 和裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58111231A priority Critical patent/JPS603149A/en
Publication of JPS603149A publication Critical patent/JPS603149A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To prevent a conductor and a conveyer from coming into contact with each other while reducing the drying and baking frequencies by a method wherein a thick film dried paste is provided on a conductor side coming into contact with a conveyer to be baked not to come into contact with the conveyer. CONSTITUTION:A conductor 2 is provided on an alumina substrate 1 by means of heating and drying a printed paste likewise another conductor 4 on the backside. A printed substrate is forwarded into a tunnel furnace by means of net-type belt 5 with the surface and backside heated by infrared beams. A hole 3 is made for connecting both side conductors with each other. The substrate coming out of the furnace is cooled down to room temperature and reversed to place both ends upon the conductor 2 for printing paste on the formed surface of the conductor 2 further heating and drying the paste to produce resistors 6a, 6b for baking. The surface coming into contact with the belt 5 in case of baking the conductor does not come into contact with the belt 5 in case of baking the resistor 6 with any incompletely baked part baked completely at this time. Through these procedures, the electric properties of conductors may be stabilized producing both side thick film circuit at less baking frequency and manufacturing space.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はラジオ、テレビ、ビデオテープレコーダー等に
利用可能な厚膜回路の製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to a method of manufacturing thick film circuits that can be used in radios, televisions, video tape recorders, and the like.

従来例の構成とその問題点 第1図は厚膜回路の一例を示す。アルミテセラミック製
の基板100の上面および下面に印刷された厚膜ペース
トは乾燥および焼成されて第1の導体1o1 、第2の
導体1o2.抵抗体103a。
Conventional structure and problems thereof FIG. 1 shows an example of a thick film circuit. The thick film paste printed on the top and bottom surfaces of the Almite ceramic substrate 100 is dried and fired to form a first conductor 1o1, a second conductor 1o2, and so on. Resistor 103a.

1o3bを形成している。104は、スル叶−ル内に形
成された上面の導体101と下面の導体102を絡ぐ、
経絡導体であり、両面に厚膜回路を形成した回路基板を
なしている。
1o3b is formed. 104 connects the conductor 101 on the top surface and the conductor 102 on the bottom surface formed in the through hole,
It is a meridian conductor and is a circuit board with thick film circuits formed on both sides.

従来、第1図のような両面厚膜回路を形成する工程は、
第2図に示す工程が一般的であった。すなわち、まず表
面導体印刷工程biCでセラミック製の基板100の片
面に銀−パラジウム金属粉を含む導体ペーストをスクリ
ーン法により印刷する。
Conventionally, the process of forming a double-sided thick film circuit as shown in FIG.
The process shown in Figure 2 was common. That is, first, in the surface conductor printing step biC, a conductor paste containing silver-palladium metal powder is printed on one side of the ceramic substrate 100 by a screen method.

次に乾燥・焼成工程Cにて前記導体ペーストの加熱乾燥
を行ない、引き続き、セラミック製の基板を網状コンベ
アベルトにのせて、基板温度が約850℃となるように
赤外線ランプを備えたトンネル炉中を15分間通過させ
て焼成を行ない、第2の導体102を形成する。次いで
表裏反転工程dにてセラミック製の基板10αコ妨の面
が上になるように反転する。次に裏面導体印刷工程eに
て、表面導体印刷工程すと同様に導体ペーストをスクリ
ーン法により印刷する。この際、スルーポール内に導体
ペーストが入る様に、印刷時にスルーボールの下面側を
真空ポンプにより減圧する。次に乾燥・焼成工程f を
乾燥・焼成工程Cと同様に行ない、第1の導体101お
よび経絡導体104を形成する。次に裏面抵抗体印刷工
程qにて導体101にその両端が重なるように抵抗体ペ
ーストをスクリーン法により印刷する。しかるのちに前
記と同様に乾燥・焼成工程りにて焼成し、抵抗体103
a、103bを形成していた。
Next, in the drying/firing step C, the conductor paste is heated and dried, and then the ceramic substrate is placed on a mesh conveyor belt and placed in a tunnel furnace equipped with an infrared lamp so that the substrate temperature reaches about 850°C. The second conductor 102 is formed by passing through for 15 minutes and firing. Next, in a front-back reversing step d, the ceramic substrate 10α is reversed so that the surface of the ceramic substrate 10α faces upward. Next, in the back conductor printing step e, a conductor paste is printed by the screen method in the same manner as in the front surface conductor printing step. At this time, the lower surface of the through ball is depressurized by a vacuum pump during printing so that the conductive paste enters the through ball. Next, a drying/firing step f is performed in the same manner as the drying/firing step C to form the first conductor 101 and the meridian conductor 104. Next, in a backside resistor printing step q, a resistor paste is printed on the conductor 101 by a screen method so that both ends overlap. After that, the resistor 103 is fired in the same drying and firing process as described above.
a, 103b were formed.

この従来の両面厚膜回路の形成法は、乾燥焼成工程が多
く、乾燥・焼成に要する時間も長いため問題となってい
た。このため本発明者らは、Cの乾燥・焼成工程のうち
焼成工程の省略を試みたが、焼成時に導体102が下面
となり網状コンベアベルトに接するため、その接点では
焼成に必要な空気が十分に得られず不完全焼成となった
。その後、抵抗体ペーストを印刷し再び焼成を行なう場
合であっても、第2の導体102が下面となり網状コン
ベアベルトに接するため、前記の不完全焼成を完壁に防
止することはできなかった。このだめ従来のように印刷
・乾燥・焼成を3回も繰り返すことを余儀なくされてい
た。
This conventional method for forming double-sided thick film circuits has been problematic because it involves many drying and firing steps and the time required for drying and firing is long. For this reason, the present inventors attempted to omit the firing step in the drying and firing process of C, but since the conductor 102 becomes the lower surface and contacts the mesh conveyor belt during firing, the air necessary for firing is not sufficient at the contact point. This resulted in incomplete firing. Even if the resistor paste was then printed and fired again, the incomplete firing could not be completely prevented because the second conductor 102 became the lower surface and came into contact with the mesh conveyor belt. Unfortunately, the process of printing, drying, and firing had to be repeated three times as in the conventional method.

発明の目的 本発明は、前記従来の欠点を除き、両面厚膜回路を少な
い乾燥・焼成回数で製造でき、また少ないスペースで製
造できるようにするものである。
OBJECTS OF THE INVENTION The present invention eliminates the above-mentioned drawbacks of the conventional circuits, and makes it possible to manufacture double-sided thick film circuits with fewer drying and firing times and in a smaller space.

発明の構成 本発明者らは前記従来の欠点に鑑み、鋭意研究を重ねた
結果、本発明に至った。すなわち本発明によれば、基板
の両面に厚膜導体を形成し、かつその片面には厚膜抵抗
体を形成した厚膜回路の製造法において、基板の両面に
導体ペーストを印刷し、その両面の導体を1回の工程で
同時に焼成し、導体焼成工程を簡略化している。この時
、焼成炉内で基板の搬送コンベアと接触した面の不完全
焼成部を改良するため、前記搬送コンベアと接触した導
体側の基板面に他の厚膜ペーストを印刷し乾燥したのち
、次いで他の厚膜ペーストを印刷した側の基板面が搬送
コンベアに接触しないようにして、前記他の厚膜ペース
ト乾燥物を焼成するのと同時に、前記導体の不完全焼成
部をも再度焼成して、完全に焼成するものである。さら
にこれを詳しく説明すると、基板の第1の面に導体ペー
ストを印刷する工程と、この基板を反転する工程と、こ
の基板の第2の面に導体ペーストを印刷する工程と、こ
の基板を乾燥および焼成する工程と、この基板を再び反
転する工程と、この基板の第1の面に抵抗体ペースト、
導体ペースト、絶縁体ペーストのうちから選ばれる少な
くとも1種のペーストを印刷する工程と、この基板を再
び乾燥および焼成する工程とからなる厚膜回路の製造方
法である。
Structure of the Invention In view of the above-mentioned drawbacks of the conventional art, the present inventors have conducted intensive research and have arrived at the present invention. That is, according to the present invention, in a method for manufacturing a thick film circuit in which thick film conductors are formed on both sides of a substrate and a thick film resistor is formed on one side, a conductive paste is printed on both sides of the substrate, and The conductors are fired simultaneously in one process, simplifying the conductor firing process. At this time, in order to improve the incomplete firing part on the surface of the board that came into contact with the transport conveyor in the firing furnace, another thick film paste was printed on the conductor side of the board that came into contact with the transport conveyor, and after drying, At the same time as baking the other dried thick film paste, the incompletely baked portion of the conductor is baked again, making sure that the substrate surface on which the other thick film paste is printed does not come into contact with the conveyor. , which is completely fired. To explain this in more detail, there are a process of printing conductive paste on the first side of the board, a process of reversing this board, a process of printing conductive paste on the second side of this board, and a process of drying this board. and a step of baking, a step of inverting the substrate again, and a resistor paste on the first surface of the substrate.
This method of manufacturing a thick film circuit includes the steps of printing at least one paste selected from conductive paste and insulating paste, and drying and firing the substrate again.

実施例の説明 次に本発明の実施例を第3図により説明する。Description of examples Next, an embodiment of the present invention will be described with reference to FIG.

第3図aはアルミナ製の基板1上にスクリーン印刷され
た導体ペーストを加熱し、溶剤を乾燥することにより第
1の導体を形成したものを示す。
FIG. 3a shows a first conductor formed by heating a conductor paste screen printed on an alumina substrate 1 and drying the solvent.

第3図すは次の工程で、基板の上面と下面を反転し、未
だ導体が印刷されていない面に導体をスクリーン印刷法
により印刷し、加熱により溶剤を乾燥させ第2の導体4
を形成したのち、電動機により駆動される網状コンベア
ベルト6に載置された印刷基板を示す。印刷基板は網状
コンベアベルト5により、トンネル状焼成炉の中に送り
込まれる。トンネル状焼成炉は網状コンベアベルト6の
上方および下方に複数の近赤外線ランプが設けられてお
り、基板の上下両面より近赤外線により約850℃の温
度で15〜20分間加熱される。このとき第2の導体4
は上から近赤外線により十分に加熱され、かつ焼成炉内
には酸素を十分に含んだ空気が満たされているので、完
全に焼成されている。第1の導体2は網状コンベアベル
ト5により、ところどころに近赤外線が直接光らずに形
部ができるため温度が十分に上らず、焼成不完全とな′
る場合もあり、まだ網状コンベアベルト5と第1の導体
の接点は十分な酸素が行きわたらずに、焼成不完全の状
態になる場合もあるが、次の工程でこの点は解消される
。3は第1の導体と第2の導体を絡ぐだめの経絡孔であ
る。焼成されて炉を出てきだ基板は室温まで冷却され1
次の工程へ移る。第3図Cは次の工程で、基板の上面と
下面を再び反転し、第1の導体2の形成されている面上
に、その両端が第1の導体2に重なるように抵抗体ペー
ストをスクリーン印刷法により印刷し、加熱により溶剤
を乾燥させ抵抗体6a 、6bを形成したのち、前記導
体(第1の導体および第2の導体)の焼成と同様にして
抵抗体6a、6bを焼成する。ここで前記導体の焼成時
に網状コンベアベルト5に接触していた面は抵抗体6a
、6bを焼成する時には網状コンベアベルトに接触しな
いことになる。したがって前記導体焼成時の焼成、不完
全な状態の部分があっても、抵抗体6a 、6bの焼成
時には十分に焼成され、完全な焼成体となる。
Figure 3 shows that in the next step, the top and bottom surfaces of the substrate are reversed, a conductor is printed on the surface on which no conductor has been printed using the screen printing method, the solvent is dried by heating, and a second conductor 4 is formed.
The printed circuit board is shown placed on a reticular conveyor belt 6 driven by an electric motor after forming a printed circuit board. The printed circuit board is fed into a tunnel-shaped kiln by a reticulated conveyor belt 5. The tunnel-shaped firing furnace is equipped with a plurality of near-infrared lamps above and below the reticular conveyor belt 6, and the substrate is heated by near-infrared rays from both upper and lower surfaces at a temperature of about 850° C. for 15 to 20 minutes. At this time, the second conductor 4
is sufficiently heated from above by near-infrared rays, and the firing furnace is filled with air containing sufficient oxygen, so that it is completely fired. The first conductor 2 is shaped by the reticular conveyor belt 5, so that near-infrared rays are not directly emitted and the temperature does not rise sufficiently, resulting in incomplete firing.
In some cases, the contact between the reticular conveyor belt 5 and the first conductor is still not sufficiently oxygenated, resulting in incomplete firing, but this problem will be resolved in the next step. 3 is a meridian hole that connects the first conductor and the second conductor. After being fired and leaving the furnace, the substrate is cooled to room temperature.
Move on to the next process. In the next step, shown in FIG. 3C, the upper and lower surfaces of the board are turned over again, and the resistor paste is applied onto the surface where the first conductor 2 is formed so that both ends overlap the first conductor 2. After printing by the screen printing method and drying the solvent by heating to form the resistors 6a and 6b, the resistors 6a and 6b are fired in the same manner as the firing of the conductors (first conductor and second conductor). . Here, the surface that was in contact with the mesh conveyor belt 5 during firing of the conductor is the resistor 6a.
, 6b will not come into contact with the mesh conveyor belt. Therefore, even if there is a portion that is incomplete during firing of the conductor, it will be sufficiently fired during firing of the resistors 6a and 6b, resulting in a complete fired body.

本実施例では導体ペーストとしてパラジウム/銀粉末と
ガラスフリットと樹脂バインダーと有機溶剤とからなる
公知の導体ペーストを用いた。導体ペーストは前記パラ
ジウム/銀粉末の替りに金捷たけ銅またはニッケルであ
っても良い。抵抗体ペーストは酸化ルテニウム粉末とガ
ラスフリットと樹脂バインダーと有機溶剤とからなる公
知の抵抗体ペーストを用いた。
In this example, a known conductor paste consisting of palladium/silver powder, glass frit, a resin binder, and an organic solvent was used as the conductor paste. The conductive paste may be made of copper or nickel instead of the palladium/silver powder. A known resistor paste consisting of ruthenium oxide powder, glass frit, resin binder, and organic solvent was used as the resistor paste.

乃、お、本発明において印刷はスクリーン印刷。No, oh, printing in this invention is screen printing.

オフセット印刷等が実用可能であるが、他に厚膜ペース
トを吐出するノズルをパターン配線テータ捷たは抵抗体
レイアウトデータに基づき移動させ基板上に直接厚膜ペ
ーストの配線回路または抵抗体を描画する方法であって
も良い。
Although offset printing is practical, another method is to move the nozzle that discharges thick film paste based on pattern wiring data or resistor layout data to draw thick film paste wiring circuits or resistors directly on the board. It may be a method.

発明の効果 以上のように本発明は基板の両面に形成された導体を同
時に焼成する際にできる導体と搬送コンベアの接触部の
悪影響を、搬送コンベアと接触した導体側の面に他の厚
膜ペースト乾燥物を形成し前記他の厚膜ペースト乾燥物
の形成面が搬送コンベアに接触しないように焼成するこ
とにより解決しているだめ、導体部の電気特性が安定し
、両面厚膜回路を少ない焼成回数で製造でき、寸だ少な
いスペースで製造できるようになった。
Effects of the Invention As described above, the present invention eliminates the adverse effects of the contact between the conductor and the conveyor when the conductors formed on both sides of the substrate are simultaneously fired, by adding another thick film to the surface of the conductor that is in contact with the conveyor. This problem is solved by forming a dried paste and baking it so that the surface on which the dried thick film paste is formed does not come into contact with the conveyor, which stabilizes the electrical properties of the conductor and reduces the need for double-sided thick film circuits. It can now be manufactured in just a few firings, and can be manufactured in a significantly smaller amount of space.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は厚膜回路の一例を示す断面図、第2図は従来の
両面厚膜回路の製造工程の一例を示すフローチャート図
、第3図a、第3図す、第3図Cは本発明の一実施例に
おける両面厚膜回路の製造方法の工程中における基板の
断面図である。 1.100・・・・・基板、2,101・・・・・第1
の導体、4,102・・・・・第2の導体、5・・・・
・網状コンベアベルト、6a 、6b 、103a 、
103b=−・・抵抗体。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図 @3図 2
Fig. 1 is a sectional view showing an example of a thick film circuit, Fig. 2 is a flowchart showing an example of the manufacturing process of a conventional double-sided thick film circuit, Figs. FIG. 3 is a cross-sectional view of a substrate during a process of a method for manufacturing a double-sided thick film circuit in an embodiment of the invention. 1.100...Substrate, 2,101...1st
conductor, 4,102... second conductor, 5...
・Mesh conveyor belt, 6a, 6b, 103a,
103b=--Resistor. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 @ 3 Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)基板の第1の面に導体ペーストを印刷する工程と
、前記基板を反転する工程と、前記基板の第2の面に導
体ペーストを印刷する工程と、前記基板を乾燥および焼
成する工程と、前記基板を再び反転する工程と、前記基
板の第1の面に抵抗体ペースト、導体ペースト、絶縁体
ペーストのうちから選ばれる少なくとも1種のペースト
を印刷する工程と、前記基板を再び乾燥および焼成する
工程とからなる厚膜回路の製造方法。
(1) A step of printing a conductive paste on the first side of the substrate, a step of reversing the substrate, a step of printing the conductive paste on the second side of the substrate, and a step of drying and firing the substrate. a step of inverting the substrate again; a step of printing at least one paste selected from resistor paste, conductor paste, and insulator paste on the first side of the substrate; and drying the substrate again. and a firing process.
(2)焼成の熱源が近赤外線ランプである特許請求の範
囲第1項に記載の厚膜回路の製造方法。
(2) The method for manufacturing a thick film circuit according to claim 1, wherein the heat source for firing is a near-infrared lamp.
JP58111231A 1983-06-20 1983-06-20 Manufacture of thick film circuit Pending JPS603149A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58111231A JPS603149A (en) 1983-06-20 1983-06-20 Manufacture of thick film circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58111231A JPS603149A (en) 1983-06-20 1983-06-20 Manufacture of thick film circuit

Publications (1)

Publication Number Publication Date
JPS603149A true JPS603149A (en) 1985-01-09

Family

ID=14555880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58111231A Pending JPS603149A (en) 1983-06-20 1983-06-20 Manufacture of thick film circuit

Country Status (1)

Country Link
JP (1) JPS603149A (en)

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