JPS6042533A - 恒温クリ−ン環境室の空気処理法および装置 - Google Patents

恒温クリ−ン環境室の空気処理法および装置

Info

Publication number
JPS6042533A
JPS6042533A JP58150507A JP15050783A JPS6042533A JP S6042533 A JPS6042533 A JP S6042533A JP 58150507 A JP58150507 A JP 58150507A JP 15050783 A JP15050783 A JP 15050783A JP S6042533 A JPS6042533 A JP S6042533A
Authority
JP
Japan
Prior art keywords
air
temperature
constant temperature
environment chamber
environmental chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58150507A
Other languages
English (en)
Japanese (ja)
Other versions
JPH039377B2 (da
Inventor
Takashi Shitsuin
執印　貴
Toshio Hayashi
利雄 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP58150507A priority Critical patent/JPS6042533A/ja
Publication of JPS6042533A publication Critical patent/JPS6042533A/ja
Publication of JPH039377B2 publication Critical patent/JPH039377B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Air-Conditioning Systems (AREA)
  • Ventilation (AREA)
  • Air-Conditioning Room Units, And Self-Contained Units In General (AREA)
  • Air Filters, Heat-Exchange Apparatuses, And Housings Of Air-Conditioning Units (AREA)
JP58150507A 1983-08-18 1983-08-18 恒温クリ−ン環境室の空気処理法および装置 Granted JPS6042533A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58150507A JPS6042533A (ja) 1983-08-18 1983-08-18 恒温クリ−ン環境室の空気処理法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58150507A JPS6042533A (ja) 1983-08-18 1983-08-18 恒温クリ−ン環境室の空気処理法および装置

Publications (2)

Publication Number Publication Date
JPS6042533A true JPS6042533A (ja) 1985-03-06
JPH039377B2 JPH039377B2 (da) 1991-02-08

Family

ID=15498373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58150507A Granted JPS6042533A (ja) 1983-08-18 1983-08-18 恒温クリ−ン環境室の空気処理法および装置

Country Status (1)

Country Link
JP (1) JPS6042533A (da)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000279741A (ja) * 1999-03-26 2000-10-10 Takasago Thermal Eng Co Ltd 空気浄化空調装置及び空気浄化空調方法
US6390755B1 (en) * 2000-04-06 2002-05-21 Motorola, Inc. Exhaust device for use in a clean room, cleanroom, and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000279741A (ja) * 1999-03-26 2000-10-10 Takasago Thermal Eng Co Ltd 空気浄化空調装置及び空気浄化空調方法
US6390755B1 (en) * 2000-04-06 2002-05-21 Motorola, Inc. Exhaust device for use in a clean room, cleanroom, and method

Also Published As

Publication number Publication date
JPH039377B2 (da) 1991-02-08

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