JPS6042A - Surface analyzing apparatus - Google Patents
Surface analyzing apparatusInfo
- Publication number
- JPS6042A JPS6042A JP58108430A JP10843083A JPS6042A JP S6042 A JPS6042 A JP S6042A JP 58108430 A JP58108430 A JP 58108430A JP 10843083 A JP10843083 A JP 10843083A JP S6042 A JPS6042 A JP S6042A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- measuring instrument
- entrance
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は表面分析装置に関し、特に、固体表面に電子、
イオン、光子（電磁波）等のプローブを衝突させ、それ
によって該表面から出てくるイオン、電子、けい光、Ｘ
線等の信号源を測定して表面状態を分析する装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a surface analysis device, and in particular, to a surface analysis device that uses electrons and
By colliding probes such as ions and photons (electromagnetic waves), ions, electrons, fluorescence, and
The present invention relates to a device that measures a signal source such as a line and analyzes surface conditions.
（ロ）従来技術
従来のこの種装置は、貞を雰囲俄において計測する装置
の場合、外部から試料を装脱する際、大気圧状態に戻さ
れる。践空室内が一旦大気圧になると、測定のため再び
汽空状態とするだめには排気のため長時間を要し、試料
設置から計測までの時間のうち、計測器１１ｉｎのだめ
の時間がその大半を占め、極めて非能率的であった。(B) Prior Art In the case of a conventional device of this type that measures pressure in an atmosphere, the pressure is returned to atmospheric pressure when a sample is loaded or unloaded from the outside. Once the pressure in the chamber reaches atmospheric pressure, it takes a long time to exhaust the chamber to bring it back to steam air for measurement, and most of the time from sample installation to measurement is spent in the 11-inch measuring instrument. It was extremely inefficient.
に） 目 的
本発明は上記欠点を除き、計測準備のための排気時間を
現状の排気ポンプのままで短縮ｐＪ能とし、しかも機構
も簡素化された表面分析装置を提供することを目的とす
る。Purpose The present invention aims to eliminate the above-mentioned drawbacks, reduce the evacuation time for measurement preparation using the current evacuation pump, and provide a surface analysis device with a simplified mechanism. .
（ト）構成
上記目的を達成するため本発明の構成は、内部に計測器
が設置されて試料出入口と真空排気口とを持つ計７刑器
室と、前記計測器室の試料出入口と同心で連通ずる第１
試料出入口と外部に対する第２試料出入口および賞空排
気口とを持つ試料室と、前記両室の試料出入口間に接続
されたゲート仕切弁と、該試料室内に設置されて前記第
２試料出入口より試料を受取って…Ｊ紀第１試料出入口
と前記計測器室の試料出入口とを頁°通して前記計測器
室内まで往復移動させるようにした試料移動部とを含む
。(g) Structure In order to achieve the above object, the structure of the present invention includes a total of seven chambers in which measuring instruments are installed and having a sample entrance and exit port and a vacuum exhaust port, and a chamber that is concentric with the sample entrance and exit port of the measuring instrument chamber. Communication Zuru 1st
a sample chamber having a sample inlet/outlet, a second sample inlet/outlet to the outside, and an air exhaust port; a gate gate valve connected between the sample inlet/outlet of both chambers; A sample moving unit is configured to receive the sample and reciprocate it into the measuring instrument chamber through the first sample entrance and exit port of the J period and the sample entrance of the measuring instrument room.
（へ）実施例
以下本発明の〜実施例を含む実施態様を内部転換亀子ス
ペクトル測定式（試料表面から出て来た２次電子の７ベ
クトルを測定する）の装置を例にとって図面にもとづい
て説明する。(To) Examples Hereinafter, embodiments of the present invention, including examples, will be explained based on the drawings, taking as an example an apparatus for internal conversion Kameko spectrum measurement method (measuring 7 vectors of secondary electrons emitted from the surface of a sample). explain.
図において、本装置は大略的に、内部に計測器２が設置
された計測器室１と、外部から試料Ａが出入される試料
室４と、これら計測器室１と試料室４とを区切るゲート
仕切弁８と、外部からの試料Ａが載置され、この試料Ａ
を前記計測器２と同一鉛直線上まで回動させるだめの回
転テーブル５１からなる試料台５と、該試料Ａを計測器
２まで接近させる昇降円筒６１を備えだ試料移動部６と
を有する。In the figure, this device is roughly divided into a measuring instrument chamber 1 in which a measuring instrument 2 is installed, a sample chamber 4 into which a sample A is taken in and out from the outside, and these measuring instrument chamber 1 and sample chamber 4. A gate partition valve 8 and a sample A from the outside are placed, and this sample A
The sample stage 5 includes a rotary table 51 that rotates the sample A to be on the same vertical line as the measuring instrument 2, and a sample moving section 6 that includes an elevating cylinder 61 that brings the sample A close to the measuring instrument 2.
しかして、計測器室ｌには計測器２の鉛直線下方に軸前
記仕切弁８によシ開閉される連絡口１ａと、側壁に設け
られ排気パルプ１ｃを介して図示外の排気系へ接続され
た排気−口ｌｂとを有する。The measuring instrument chamber 1 has a communication port 1a located below the vertical line of the measuring instrument 2 that is opened and closed by the gate valve 8, and is connected to an exhaust system (not shown) through an exhaust pulp 1c provided on the side wall. It has an exhaust port lb.
試料室４は前記仕切弁８を介して計／ｌＪ’ｌ ｋＲ室
１の連絡口１ａに連通するようその鉛直下方に設けられ
た第１試料出入口４ａと、該口４ａに対し前記回転テー
プ／Ｌ’５１の軸部に関して対称位置の上方に設けられ
た第２試料出入口４ｂと、側壁に設けられ、排気パルプ
４ｄを介して図が外の排気糸へ接続ぢれた排気口４Ｃと
をゼする。The sample chamber 4 has a first sample inlet/outlet 4a provided vertically below the connecting port 1a of the meter/lJ'lkR chamber 1 so as to communicate with the connecting port 1a of the meter/lJ'lkR chamber 1 via the gate valve 8, and the rotating tape/ A second sample inlet/outlet 4b provided above a symmetrical position with respect to the shaft portion of L'51, and an exhaust port 4C provided in the side wall and connected to the exhaust thread outside the figure through an exhaust pulp 4d. do.
試料台５は水平円板からなる回転テーブル５１と、該回
転テーブルの中心で鉛直方向に垂下したテーブル支持脚
５２と、該回転テーブル支持脚５２を回転自在に支承す
る支持筒５８ａおよび＋１Ｑｆｆ受５８ｂからなる軸受
部５Ｂと、前記回１賦テーグ）ｖ５１を鉛直軸まわりに
回転させるだめの回転駆動部５４とを持つ。The sample stage 5 includes a rotary table 51 made of a horizontal disk, a table support leg 52 hanging vertically from the center of the rotary table, a support cylinder 58a and a +1Qff receiver 58b that rotatably support the rotary table support leg 52. It has a bearing part 5B consisting of a bearing part 5B, and a rotation drive part 54 that rotates the above-mentioned rotating shaft v51 around a vertical axis.
回転テープ）ｖ５１には＝ｉｌ記第１試料出入口４ａお
よび第２試料出入口４ｂに対向可能で同一円周上の複数
位置に、後記昇降棒６１が貝。(Rotating tape) V51 has lifting rods 61 (described later) located at a plurality of positions on the same circumference, which can face the first sample inlet/outlet 4a and the second sample inlet/outlet 4b.
刑可能、かつ、試料Ａ（７）貫通不可能な孔５１ａが設
けられる。また、回転Ｍ動部５４では、′ＦＪｉＩ記テ
ーブル支４１１ｊ４１５２の下部に装着された従動坐歯
車５４ａと、該華歯車５４ａに噛合う駆動傘歯車５４ｂ
をもつ駆動軸５４ｃとが組付けられる。A hole 51a is provided that allows the sample A (7) to be penetrated. In addition, in the rotation M moving part 54, a driven seat gear 54a mounted on the lower part of the 'FJiI table support 411j4152, and a driving bevel gear 54b meshing with the flower gear 54a.
A drive shaft 54c having a diameter is assembled.
試料移動部６は上端に試料Ａを載せ、下部に雌ねじが刻
設された昇降棒６１と、該昇降棒６１を鉛直方向に昇降
さぜるだめの奸呻駆動部６２とからなる。弁降！ＷＸ動
部６は、前記昇降棒６１に螺合するねじ棒Ｇ２ａと、そ
れを回転させるための駆動および従動傘歯車６２ｂ、６
２Ｃと、駆＃軸６２ｄとが組付けられたものである。The sample moving section 6 has the sample A placed on its upper end, and is composed of an elevating rod 61 having a female thread carved in its lower part, and a movable drive section 62 for vertically moving the elevating rod 61 up and down. Bento! The WX moving part 6 includes a threaded rod G2a that is screwed into the lifting rod 61, and driving and driven bevel gears 62b and 6 for rotating the threaded rod G2a.
2C and the drive shaft 62d are assembled.
なお、テーブル５１は、その孔５１ａが第１、第２０４
ａ、４ｂの直下で停止するように、円板５５ａ１ばね５
５ｂ、球５５ｃによる位置決め部５５によシ位置決めさ
れる。Note that the table 51 has the first hole 51a and the 204th hole 51a.
Disc 55a1 spring 5 so as to stop directly under a and 4b
5b and a positioning portion 55 formed by a ball 55c.
以上において、仕切弁８を閉じ試料室排気バルブ４ｄを
閉じ、第２試料出入口４ｂを開くと共に、テープ／ｖ５
１を回転停止させつつ孔５１ａを覆って上側に試料Ａを
載置する。In the above process, the gate valve 8 is closed, the sample chamber exhaust valve 4d is closed, the second sample inlet/outlet 4b is opened, and the tape/v5
Sample A is placed on the upper side covering hole 51a while rotation of sample A is stopped.
ここで回転テープ１ｖ５１は、位１ｄ決め部５５によっ
て、孔５１ａが第１．第２出入口４ａ、４ｂの直下に位
置するよう停止している。Here, the rotary tape 1v51 has the hole 51a set to the first position by the positioning part 55. It is stopped so as to be located directly below the second entrance/exit 4a, 4b.
次いで、計測器呈排気バルグＩＣを閉じ、前記排気バル
ブ４ｄを開いて試料室４内を計測器室１と同程度の無空
にしたのち、仕切弁８と排二或バルブＩＣを−いて両室
１，４を同−真空度に１−る。次いで、′ ゛ 昇
降駆動部６２がＶ、動されると、回転テーブル５１の孔
５１ａを貫通して上昇する昇降棒６１によシ試料Ａが押
し上け゛られ、第１試料出入口４ａ、仕切弁８、連絡口
１ａを経て計測器至１に連ばれ計測器２に接近し、計測
状態となる。Next, the measuring instrument exhaust valve IC is closed, and the exhaust valve 4d is opened to make the inside of the sample chamber 4 as empty as the measuring instrument chamber 1, and then the gate valve 8 and the exhaust valve IC are closed. Chambers 1 and 4 are brought to the same degree of vacuum. Next, when the lift drive unit 62 is moved by V, the sample A is pushed up by the lift rod 61 that passes through the hole 51a of the rotary table 51 and rises, and the sample A is pushed up by the first sample inlet/outlet 4a, the gate valve 8, It is brought to the measuring instrument 1 through the communication port 1a, approaches the measuring instrument 2, and enters the measuring state.
計測が終ると、拭材Ａは昇降駆動軸６２Ｃの逆回転によ
シ試料室４ｔ８で下降され回転テーブル５１上に戻され
、仕切弁３と排気パルプ４ｄが閉じられるとともに回転
テーブル５１が１ピッチｉｊｌｌＯｍＪＬ、次の試料人
が測定体制に入る。なお、デープルに複数個の試料を載
置した場合には、テープ／Ｌ’を１ピツチづつ回転停止
させて、１回の排気によって薩畝個の試料を計測するこ
とができる。When the measurement is completed, the wiping material A is lowered in the sample chamber 4t8 by reverse rotation of the elevating drive shaft 62C and returned onto the rotary table 51, the gate valve 3 and the exhaust pulp 4d are closed, and the rotary table 51 is rotated one pitch. ijllOmJL, the next sample person enters the measurement system. In addition, when a plurality of samples are placed on the double, rotation of the tape/L' is stopped one pitch at a time, and the number of samples can be measured by one evacuation.
なお、前記移動式試付台５を省Ｉｌ＋ｒ’ｔ Ｌ、試料
を昇降棒６１の上端に直接又は固定試料台を介して載せ
てもよい。この場合、第２出入口は試料室４の側面に設
けられる。ｌた、前記両室１．４は水平方向に隣接配置
されて水平方向に連通され、水平に長い試料移動棒がｚ
Ｋ平に往復動されてもよい。Note that the movable test stand 5 may be omitted and the sample may be placed on the upper end of the lifting rod 61 directly or via a fixed sample stand. In this case, the second entrance/exit is provided on the side of the sample chamber 4. In addition, the two chambers 1.4 are horizontally adjacent to each other and communicated with each other in the horizontal direction, and a horizontally long sample moving rod z
It may be reciprocated in K-flat.
更に、回転テーブル５１に代えてコンベアトロッコ等を
利用した直線往復移動方式も適用される。例えばべｐト
コンベアの場合、」１・降棒の貫通を許す細長窓をベル
トの長さ方向に沿って設け、この窓の上側に試料を１置
けばよい。Furthermore, a linear reciprocating method using a conveyor trolley or the like in place of the rotary table 51 may also be applied. For example, in the case of a plastic conveyor, it is sufficient to provide an elongated window along the length of the belt that allows the unloading rod to pass through, and place a sample above this window.
試料Ａの昇降駆動部６２として、フックと蜘−−ピニオ
ンとの組合せやその他の手段を用いてもよい。As the lifting/lowering drive unit 62 for the sample A, a combination of a hook and a spider-pinion or other means may be used.
（ト） 効 果
本発明は以上の如く、計測器室と試料室とを区別したこ
とによシ試、ｌ＋室のみを排気すればよく、排気に要す
る時間が大幅に短権されるほか、固短された計測器に対
して試料を移動する方式なので構造が簡単で安価に製造
できる。また、計測器、ゲート仕切弁、試料を同一軸上
に設定１７／こためコンパクト化され、しかもゲート仕
切弁を用いたので試料の移動距離が減少し、試料移動精
度が高くなり、か、Ｉ＼
つ、装匝全伴の容積が歩さくなることによっても排気時
ｔｔｌｌが短節される。(g) Effects As described above, the present invention distinguishes between the measuring instrument room and the sample chamber, so that only the l+ chamber needs to be evacuated, and the time required for evacuation is significantly shortened. Since the sample is moved relative to a fixed measuring instrument, the structure is simple and can be manufactured at low cost. In addition, the measuring instrument, gate gate valve, and sample are set on the same axis17/, making it more compact.Moreover, since the gate gate valve is used, the sample movement distance is reduced, and the sample movement accuracy is increased. ＼ Second, the exhaust time ttll is shortened due to the smaller volume of the entire load.
第２図は要部拡大１所面囚である。Figure 2 shows an enlarged view of the main part of the prisoner.
Ａ・・・試料、■・・・計測器室、１ａ・・・連絡口、
２・・・計測器、８・・・仕切弁、４・・・試料室、４
ａ・・・第１試料出入口、４ｂ・・・第２試料出入口、
５・・・試料台、５１・・・回転テープ＊、５１ａ・・
・孔、５２・・・テーブル支持脚、５３・・・４置ｍ受
部、５４・・・回転駆動部、５５・・・位置決め都、６
・・・試料移動部、６１・・・昇降棒、６２・・・昇降
！ｔｈ動部、６２ａ・・・ねじ棒代理人 弁理士犬刷新
平A...Sample, ■...Measuring instrument room, 1a...Communication port,
2...Measuring instrument, 8...Gate valve, 4...Sample chamber, 4
a...First sample entrance/exit, 4b...Second sample entrance/exit,
5... Sample stage, 51... Rotating tape*, 51a...
- Hole, 52... Table support leg, 53... 4 position m receiving part, 54... Rotation drive part, 55... Positioning capital, 6
...Sample moving part, 61...Elevating rod, 62...Elevating! th moving part, 62a...Screw rod agent Patent attorney Inushin Shinpei
Claims (1)
気口とを持つ計測器室と、前記計測器室の試料出入口と
同心で連通ずる第１試料出入口と外部に対する第２試料
出入口および真空排気口とを持つ試料室と、前記両室の
試料出入口間に接続されたゲート仕切弁と、該試料室内
に設置１′ｌされて前記第２試料出入口よシ試料を受取
って前記第１試料出入口と前記計測器室の試料出入口と
を貫通して前記計測器室内まで往復移動させるようにし
た試料移動部とを含む表面分析装置。 （２ン 前記計測器室と試料室とは上下に配置されてそ
れらを連通する前記出入口は上下に連通し、前記試料移
動部は上端に試料を載置した状態で前記出入口を通って
上下する昇降棒と該昇降棒を鉛直方向に上下させる昇降
駆動部とを含む特許請求の範囲第１項記載の表面分析装
置。[Scope of claims] a sample chamber having a second sample inlet/outlet and a vacuum exhaust port; a gate gate valve connected between the sample inlet/outlet of both chambers; A surface analysis device including a sample moving unit configured to receive and reciprocate the sample into the instrument chamber through the first sample entrance and the sample entrance of the instrument chamber. The entrances and exits that are arranged above and below the chamber communicate with each other, and the sample moving section has a lifting rod that moves up and down through the entrance with a sample placed on the upper end, and a lifting rod that moves the lifting rod in a vertical direction. 2. The surface analysis device according to claim 1, further comprising an elevating and lowering drive unit that moves the surface analysis device up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58108430A JPS6042A (en) | 1983-06-15 | 1983-06-15 | Surface analyzing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58108430A JPS6042A (en) | 1983-06-15 | 1983-06-15 | Surface analyzing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6042A true JPS6042A (en) | 1985-01-05 |
Family
ID=14484570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58108430A Pending JPS6042A (en) | 1983-06-15 | 1983-06-15 | Surface analyzing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5836343B2 (en) * | 1974-09-03 | 1983-08-09 | 日本電気株式会社 | computer hologram |
-
1983
- 1983-06-15 JP JP58108430A patent/JPS6042A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5836343B2 (en) * | 1974-09-03 | 1983-08-09 | 日本電気株式会社 | computer hologram |
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