JPS604367Y2 - Sample exchange device in electron microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample exchange device of the type that inserts a sample from the optical axis direction in an electron microscope.

A sample exchange device of the type that inserts the sample from the optical axis direction is equipped with a chuck at the tip of an exchange rod that is rotatably and movably penetrated and held in the side wall of the mirror body, and the sample tube is inserted with the chuck. A widely used structure is such that the sample cylinder is moved between the sample moving stage and the exchange chamber by operating the exchange rod while the sample tube is held in the sample tube.

However, in such conventional devices, there is no member to protect the sample tube in the part that holds the sample tube, so when moving the sample tube from the exchange chamber to the sample transfer stage, may come into contact with the mirror and cause scratches.

In particular, the fitting surface of the sample cylinder to the sample moving stage (this fitting surface is usually machined into a tapered shape).

) is scratched, the sample tube cannot be attached closely to the sample moving stage, which tends to cause vibrations, and the sample position changes, which has the drawback of adversely affecting resolution.

The present invention aims to solve such inconveniences, and will be explained in detail below with reference to the drawings.

Fig. 1 is a sectional view showing one embodiment of the present invention, and Fig. 2 is a cross-sectional view showing an embodiment of the present invention.
It is a sectional view taken along the line AA in the figure, and 1 is an objective lens of an electron microscope.

Reference numeral 2 denotes a sample chamber provided above the objective lens 1, in which a sample moving table 3 is provided so as to be horizontally movable.

The inside of the sample chamber 2 and the objective lens 1 are maintained at a high vacuum by a vacuum pump not shown.

In the center of the sample moving table, there is a hole 5 for mounting a sample cylinder 4 containing a sample (not shown).

Reference numeral 6 denotes an exchange chamber provided on the side wall of the sample chamber 2, one end of which communicates with the sample chamber 2, and a lid 7 removably attached to the other end (atmospheric side).

A replacement rod 9 is rotatably and movably penetrated through the lid body 7 via a spherical bearing 8 and is held therein.

A chuck 11 is rotatably attached to one end (vacuum side) of the exchange rod 9 via a rotating shaft 10.

The chuck 11 has a flange 1 provided at the top of the sample cylinder 4.
2 is provided with hooks 13a and 13b for holding the
Although not shown in the drawings, the sample tube 4 is attached to the hooking portions 13a and 13b.
A plate spring or the like is provided to prevent the sample cylinder from moving when the flange 12 is clamped.

On the other hand, a legitimate child 14 is provided on the atmosphere side of the exchange rod 9.

Reference numeral 15 denotes a protective blade for protecting the sample cylinder 4, and the protective blade is shaped like a strip having a length sufficient to cover at least the tapered part 4a of the sample cylinder 4. 15 is attached at its upper part to the rotating shaft 10 via two support rods 16at16b.

Each of the support rods 16a and 16b is fixed so as to pass through the rotation shaft 10, and one end of a torsion spring 17a and 17b wound around the rotation shaft 10 is engaged with each support rod, respectively. .

The other ends of the torsion springs 17a and 17b are connected to the chuck 1.
1, respectively.

Therefore, the protection blade 15 is given a rotational force in a counterclockwise direction in FIG. 1, that is, in a direction away from the sample tube 4, about the rotating shaft 10 by the torsion springs 17a and 17b.

Each of the stoppers 18a, 18b includes the support rod 16a,
16b, and serves to stop the rotation of the protection blade 15.

The protective blade 15 is attached to the rotating shaft 10 in such a way that it is placed below the sample tube 4 when it is placed horizontally in the exchange chamber 6, as shown by the solid line in FIG. Furthermore, a cutout 19 is provided at the top of the protective blade 15 to avoid collision with the replacement rod 9.

Reference numeral 20 denotes a guide body provided in the exchange chamber 6, which serves to keep the sample tube 4 in a horizontal state, and the guide body 20 has a semi-cylindrical shape.

Reference numeral 21 designates a dogleg-shaped plate spring for opening and closing the protection plate 15 installed on the sample chamber 2 side of the exchange chamber 6, and its lower end is fixed to the exchange chamber 6 with screws or the like, and its upper end 21a is It is bent into a circle and the shaft 22 is inserted inside it.

Both ends of the shaft 22 are in contact with the side walls of the exchange chamber 6, as shown in FIG.

This prevents the upper end 21a of the leaf spring 21 from moving toward the exchange chamber 6 side.

Further, when the leaf spring 21 is in its free length, its upper end 21a substantially coincides with the bottom of the inner wall of the guide 20.

The operation of such a device will be explained.

The state shown by the solid line in FIG. 1 is a state in which the chuck 11 holds the collar 12 of the sample tube 4 containing the observed sample, and the sample tube 4 is pulled out of the hole in the sample moving stage 3.

At this time, the protective blades 15 provided on the chuck 11 are rotated by the torsion springs 17a and 17b and separated from the sample cylinder 4.

This is the protection blade 1 when inserting and removing the sample cylinder 4 from the sample moving stage 3.
This is to prevent the specimen 5 from colliding with the sample moving table 3 and the like.

In this state, if the replacement rod 9 is moved linearly to the right in the figure by operating the eldest child 14, the protection blade 15 will first come into contact with the upper end 21a of the leaf spring 21, as shown by the dashed line a. The blade 15 rotates clockwise about the rotating shaft 10 against the torsion springs 17a and 17b, and the sample tube 4
approach.

When the protection blade 15 approaches the sample tube 4 to a predetermined position due to the movement of the exchange rod 9, the sample tube 4 and the chuck 11 rotate clockwise around the rotating shaft 10 together with the protection blade 15. , this sample cylinder 4, chuck 11
And the protective blade 15 is lifted up on the leaf spring 21 as shown by the two-dot chain line in FIG.

In this state, by further moving the exchange rod 9 in the same direction, the sample cylinder 4, chuck 11, and protective blade 15 are lifted up on the guide body 20 and stored in the exchange chamber 6, as shown by the solid line in FIG. .

Thereafter, as shown by the three-dot chain line C in FIG. 3, the air lock valve is closed to shut off the sample chamber 2 and the exchange chamber 6, thereby making the inside of the exchange chamber atmospheric and replacing the sample with a new sample.

Next, by performing the operation in reverse to the above, the sample cylinder 4 containing a new sample can be placed on the optical axis 2 as shown by the solid line in FIG.

In this state, if the eldest child 14 is moved upward, the chuck 11 will be lowered, so that the sample cylinder 4 is mounted on the sample moving stage 3.

At this time, the leaf spring 21 is pushed down together with the shaft 22 due to the lowering of the replacement rod 9.

Further, a long groove 23 is formed at the bottom of the guide body 20 so as not to hinder the rotation of the exchange rod 9.

After mounting the sample tube 4, if the child 14 is rotated, the chuck 11 rotates about the exchange rod 9 in a direction perpendicular to the plane of the paper in FIG.
13b is removed from the flange 4a of the sample cylinder 4.

Thereafter, the chuck 11 is moved into the exchange chamber 6 by performing the above-described operation.

Although not shown in this embodiment, a guide means for regulating the movement of the exchange rod is provided on the atmosphere side of the exchange chamber 6.

With the above configuration, the present invention can prevent the sample tube from coming into direct contact with the leaf spring or guide body when transferring the sample tube from the exchange chamber side to the exchange chamber, or vice versa. , it is possible to prevent scratches on the tapered surface of the sample tube.

Therefore, the sample tube can be stably mounted on the sample moving stage, improving vibration resistance.Moreover, the sample is set at a predetermined position on the objective lens magnetic pole piece, so there is no reduction in resolution. .

In addition, when attaching the protective blades to the chuck, a torsion spring applies rotational force, which can alleviate the collision when the chuck placed on the leaf spring 21 falls into the sample chamber, and the sample cylinder It has great practical effects, such as being able to prevent objects from falling off the chuck.

In the above explanation, when the sample cylinder is held in the chuck, the flange provided on the sample cylinder is held by the two hooking parts of the chuck and a spring. It is also possible to attach two claws that can be rotated by a screwdriver, and to hold the sample tube between the two claws.

Further, although the chuck is configured to be moved back and forth between the sample chamber and the exchange chamber by operating the exchange rod, the present invention is not limited to this, and any known exchange means may be used.

[Brief explanation of the drawing]

Fig. 1 is a sectional view showing one embodiment of the present invention, and Fig. 2 is a cross-sectional view showing an embodiment of the present invention.
The AA sectional view in the figure and FIG. 3 are diagrams for explaining the operation of the present invention. 1: Objective lens, 2: Sample chamber, 3: Sample moving table, 4: Sample cylinder, 6: Exchange chamber, 7: Lid, 8: Spherical bearing, 9: Exchange rod, 10: Rotating shaft, 11: Chuck, 12:Tsubabe, 13
a and 13b: hanging part, 14: legitimate child, 15: protective feather,
16a and 16b: support rod, 17a and 17b: torsion spring, 18a and 18b = stopper, 19: cutout,
20 guide body, 21: plate spring, 22: shaft, 23: long groove.

Claims (1)

[Scope of utility model registration request] A sample moving stage placed in a sample chamber and removably attached with a sample tube holding a sample, an exchange chamber communicating with the sample chamber, a chuck for holding the sample tube, and the chuck rotatable. means for reciprocating the sample tube between the sample chamber and the exchange chamber, and a protective blade rotatably held on the chuck to protect the sample tube held in the chuck. , a means for applying a rotational force so as to keep the protective blade apart from the sample tube; A sample exchange device for an electron microscope, comprising means for rotating the sample tube toward the sample tube as it moves to the sample tube.