JPS6046045A - Pellet chuck - Google Patents

Pellet chuck

Info

Publication number
JPS6046045A
JPS6046045A JP59152803A JP15280384A JPS6046045A JP S6046045 A JPS6046045 A JP S6046045A JP 59152803 A JP59152803 A JP 59152803A JP 15280384 A JP15280384 A JP 15280384A JP S6046045 A JPS6046045 A JP S6046045A
Authority
JP
Japan
Prior art keywords
pellet
chuck
notches
principle
bernoulli
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59152803A
Other languages
Japanese (ja)
Other versions
JPH0377664B2 (en
Inventor
Shuichi Ito
伊藤　秋一
Tsutomu Hanno
勉 半野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59152803A priority Critical patent/JPS6046045A/en
Publication of JPS6046045A publication Critical patent/JPS6046045A/en
Publication of JPH0377664B2 publication Critical patent/JPH0377664B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

PURPOSE:To enable to directly observe part of attracted pellet by providing notches at a pellet attracting unit, and blowing fluid by utilizing Bernoulli's principle in the attraction of the pellet. CONSTITUTION:Notches 11 are formed at a pellet chuck 10, and fluid is blown from a hole 12 by not vacuum attraction but Bernoulli's principle to attract a pellet 2. For example, the pattern on the pellet 2 is directly observed via the notches 11 through a microscope 4 by a television camera 5, an instruction of correcting amount is inputted from a pattern recognition unit 6 to a position correcting machine 8, and the chuck 10 is moved to position the pellet 2 accurately to a package 3.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は大形のベレットの組立工程において、移動精密
位置決め組立作業に用いられるペレットチャックに関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a pellet chuck used for movement precision positioning and assembly work in the assembly process of large pellets.

（発明の背景〕： 従来のペレットチャックを搏１図に示す。ペレットチャ
ックｌは真空吸着でベレット２を吸着しているが、ペレ
ットチャックｌがじゃまをしてベレット２を直接観察す
ることができなかった。そのため、ペレットチャックｌ
の精度を上げるだめペレット吸着部の寸法ａ、ｂなどの
精度をあけておかなければならない。(Background of the invention): A conventional pellet chuck is shown in Fig. 1. The pellet chuck l attracts the pellet 2 by vacuum suction, but the pellet chuck l gets in the way and makes it impossible to directly observe the pellet 2. There was no pellet chuck.
In order to increase the accuracy of the pellet adsorption part, dimensions a and b of the pellet adsorption part must be accurate.

すなわち、ペレットチャックｌが邪魔ヲしてベレット２
會直視しての作業はできないだめ、ペレットチャックｔ
’ｔ−移動させてもこれと同時に正確にベレット２が移
動しているかどうかがわからなかった。このため、従来
はペレットチャック１を精密に５製作する必要があ凱ま
た、ペレットチャックｌを作り変える時なども製作Ｍ度
のばらつき全考慮する必要があった。In other words, the pellet chuck l gets in the way and the pellet 2
Pellet chuck t cannot be worked while looking directly at the meeting.
Even if I moved it, I couldn't tell if the bellet 2 was moving accurately at the same time. For this reason, in the past, it was necessary to precisely manufacture the pellet chuck 1, and also when changing the pellet chuck 1, it was necessary to take into account all variations in manufacturing degree.

これらの理由のため、自動作業を行わせる場合、ペレッ
トチャックの製作精度が全体の作業の精度を決定すると
いうことになり組立精度の向上が達成出来ないという問
題があった。For these reasons, when automatic work is performed, there is a problem in that the manufacturing accuracy of the pellet chuck determines the accuracy of the entire work, making it impossible to improve assembly accuracy.

〔発明の目的〕[Purpose of the invention]

したがって本発明の目的は、前述した問題に鑑みてなさ
れたものであり、その目的とするところは、吸着された
ベレット１ｒ：直接観察出来るペレットチャックを提供
することにある。Therefore, the object of the present invention has been made in view of the above-mentioned problems, and the object thereof is to provide a pellet chuck in which the pellet 1r that is sucked can be directly observed.

；〔発明の概要−〕 このような目的を達成するために本発明は、吸着された
ベレットの一部を直接観察出来るようにベレット吸着部
に切欠き全設け、ベレットの吸着はベルヌーイの原理を
利用し流体を吹き出すことによシ行うものである。[Summary of the Invention] In order to achieve the above object, the present invention provides a whole notch in the pellet adsorption part so that a part of the adsorbed pellet can be directly observed, and the adsorption of the pellet is based on Bernoulli's principle. This is done by blowing out fluid.

【発明の実施例〕[Embodiments of the invention]

次に本発明によるベレットチャックの一実施例＝ｉ、Ｉ
Ｃ組立工程におけるベレットボンダ一作業に用いた例で
説明する。Next, an embodiment of the pellet chuck according to the present invention = i, I
An example will be explained in which a bullet bonder is used for one operation in the C assembly process.

本発明のペレットチャックを用いることで、吸着された
状態のベレットを直接観察しながらパッケージにベレッ
トをボンディングできるため、目視、顕微鏡、カメラ、
モニタ、あるいは自動認識装置を用いて、ベレットのパ
ッケージに対するずれ針を検出し認識装置に入力させて
自動で位置修正をすることができる。By using the pellet chuck of the present invention, it is possible to bond the pellets to the package while directly observing the sucked pellets.
Using a monitor or an automatic recognition device, it is possible to detect the needle misalignment of the pellet with respect to the package, input the information to the recognition device, and automatically correct the position.

第２図は本発明によるペレットチャックを示すもので、
（ａ）は正面図、（ｂ）は側面図、（Ｃ）は斜視図であ
る。ベレット２　（＜ａ）、　ｔｂ＋には図示せず〕を
直接線察し作業ができるようペレット吸着部に切欠き１
１を設ける、またこのため真空吸着ではなくベルヌーイ
の原理によシ、穴Ｉ２から流体全欧き出しベレット２を
吸着する。つまシ切欠きＩＩと吹忽 き出し吸着とを合せたものである。FIG. 2 shows a pellet chuck according to the present invention.
(a) is a front view, (b) is a side view, and (C) is a perspective view. There is a notch 1 in the pellet suction part so that pellet 2 (<a), not shown in tb+] can be directly inspected and worked on.
1 is provided, and for this reason, the entire fluid is discharged from the hole I2 and the pellet 2 is sucked based on Bernoulli's principle rather than vacuum suction. This is a combination of the tab cutout II and the blow-out suction.

一般に、ベレットはパッケージに対し正確に位へ置決め
しボンディングする必要がある。従ってこの作業を自動
機で行なう場合、パッケージに対するベレットのずれ量
を知シその分のずれ量を修正する機構が必要となる。Generally, the pellet must be accurately positioned and bonded to the package. Therefore, when this work is performed by an automatic machine, a mechanism is required that knows the amount of deviation of the pellet from the package and corrects the amount of deviation.

そのための実施例を第３図で説明する。An embodiment for this purpose will be explained with reference to FIG.

ベレット２全ペレツトチヤツク１０によシ吸着し、パッ
ケージ３に正確に位置決めする場合、ペレットチャック
ｌＯの切欠きＩＩよシイレット２面上のパターンｆ、顕
微鏡４全通してテレビカメラうで直視し、パターン認識
装置６　ＶＣカメラ５からの情報を入れる。この場合位
置決めの目印はベレット２上のパターンを利用している
。When all of the pellet 2 is sucked by the pellet chuck 10 and accurately positioned in the package 3, the pattern is recognized by observing the pattern f on the pellet 2 surface from the notch II of the pellet chuck 10 through the microscope 4 with the TV camera arm. Device 6 Inputs information from the VC camera 5. In this case, the pattern on the pellet 2 is used as a positioning mark.

この情報をテレビモニタ７に写し出すと共に、パターン
認識装置６より修正量の指示ｆｔＸ　、　Ｙ　。This information is displayed on the television monitor 7, and the pattern recognition device 6 instructs the amount of correction ftX, Y.

Ｚ、θ方向位置修正機８に入れ、ペレットチャンク１０
を、ベレット２が正確にパッケージ３に対し位置決めさ
れるよう移動する。Place the pellet chunk 10 into the Z and θ direction position corrector 8.
are moved so that the pellet 2 is accurately positioned with respect to the package 3.

この動作を繰シ返し、最終的にはベレット２はパッケー
ジ３に対し正確に位置決めされる。By repeating this operation, the pellet 2 is finally positioned accurately with respect to the package 3.

このように本発明のペレットチャックによると次のよう
な効果がある。As described above, the pellet chuck of the present invention has the following effects.

１）ペレットチャック中のベレットのバター／を直接観
察できる。1) The pellet butter in the pellet chuck can be directly observed.

１１）目視及び自動認識によるベレットの位置修正作業
を行う場合、直接パターンを見ながら位置修正ができる
ため、従来ベレットチャックの吸着面加工１８度に頼っ
ていた作業がとの鞘殿のばらつきを考慮することなく、
高精度に位置決めし組立てができる。11) When correcting the position of the pellet by visual inspection and automatic recognition, the position can be corrected while directly looking at the pattern, so the work that conventionally relied on the suction surface machining of the pellet chuck at 18 degrees takes into account variations in the sheath. without doing,
Can be positioned and assembled with high precision.

ｌ１ｌ）自動化の場合、ベレットなどを常嚇認識しなが
ら自動作業ができる。l1l) In the case of automation, automatic work can be performed while constantly recognizing pellets and the like.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、吸着されたベレッ
トの一部を直接観察出来るようにペレット吸着部に切欠
きを設けたために、直接ペレットを観察しながらその位
置修正が出来るので高精度に位置決めし組立てが出来る
という極めて優れた効果が得られる。As explained above, according to the present invention, since a notch is provided in the pellet adsorption part so that a part of the adsorbed pellet can be directly observed, the position can be corrected while directly observing the pellet, resulting in high precision. Extremely excellent effects can be obtained in that positioning and assembly can be performed.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のペレットチャックの断面図、第２図は本
発明によるペレットチャックの一実施例の説明図、第３
図はこのペレットチャックを自動機に適用した例の構成
図を示す。 ２・・・・ベレット、１０曲ペレットチャック、１１第
１図 第２図 （ａ）　（ｂ） 第３図FIG. 1 is a sectional view of a conventional pellet chuck, FIG. 2 is an explanatory diagram of an embodiment of the pellet chuck according to the present invention, and FIG.
The figure shows a configuration diagram of an example in which this pellet chuck is applied to an automatic machine. 2...Bellet, 10 pieces pellet chuck, 11 Figure 1 Figure 2 (a) (b) Figure 3

Claims (1)

【特許請求の範囲】[Claims] ベレットを吸着するペレットチャックにおいて、吸着さ
れたベレットの一部が直接ｍｓ出来るようにペレットチ
ャックのベレット吸着部に切欠きを設け、ベレットの吸
着はベルヌーイの原理を利用し流体を吹き出して行うこ
とを特徴とするペレットチャック。In the pellet chuck that sucks the pellet, a notch is provided in the pellet suction part of the pellet chuck so that a part of the sucked pellet can be directly released, and the pellet is sucked by blowing out fluid using Bernoulli's principle. Characteristic pellet chuck.
JP59152803A 1984-07-25 1984-07-25 Pellet chuck Granted JPS6046045A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59152803A JPS6046045A (en) 1984-07-25 1984-07-25 Pellet chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59152803A JPS6046045A (en) 1984-07-25 1984-07-25 Pellet chuck

Publications (2)

Publication Number Publication Date
JPS6046045A true JPS6046045A (en) 1985-03-12
JPH0377664B2 JPH0377664B2 (en) 1991-12-11

Family

ID=15548494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59152803A Granted JPS6046045A (en) 1984-07-25 1984-07-25 Pellet chuck

Country Status (1)

Country Link
JP (1) JPS6046045A (en)

Also Published As

Publication number Publication date
JPH0377664B2 (en) 1991-12-11

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