JPS6049406U - grating interferometer - Google Patents
grating interferometerInfo
- Publication number
- JPS6049406U JPS6049406U JP14187783U JP14187783U JPS6049406U JP S6049406 U JPS6049406 U JP S6049406U JP 14187783 U JP14187783 U JP 14187783U JP 14187783 U JP14187783 U JP 14187783U JP S6049406 U JPS6049406 U JP S6049406U
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- reflecting mirror
- light source
- grating
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Transform (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来の格子干渉計の原理構成を示す線図、第
２図は、本考案に係る格子干渉計の実施例の構成を示す
、一部ブロック線図を含む断面図である。
１０・・・回折格子、１２・・・第１光路、１４・・・
光源、１６・・・第１平面鏡、１８・・・第２光路、２
０・・・第２平面鏡、２２・・・光検出器、２４．２６
・・・コリメータレンズ、３０・・・内側円筒部材、３
２・・・外側円筒部材。FIG. 1 is a diagram showing the principle configuration of a conventional grating interferometer, and FIG. 2 is a cross-sectional view, including a partial block diagram, showing the configuration of an embodiment of the grating interferometer according to the present invention. 10... Diffraction grating, 12... First optical path, 14...
Light source, 16... First plane mirror, 18... Second optical path, 2
0... Second plane mirror, 22... Photodetector, 24.26
... Collimator lens, 30 ... Inner cylindrical member, 3
2...Outer cylindrical member.
Claims (2)
動軸を辿る第１光路が、他方の円筒部材には回動軸を通
り且つ前記第１光路と交差する第２光路が形成された、
２つの回忌円筒部材と、該回忌円筒部材の回動軸を通り
、その直径方向に延在させて配設された回折格子と、前
記第１光路の一端から光を入射するための光源と、前記
第１光路の他端に設けられた第１反射鏡と、前記第２光
路の、回折格子に関して第１反射鏡と同一側端に設けら
れた第２反射鏡と、前記第２光路の、回折路格子に関し
て光源と同一側端に設けられた、回折格子による干渉の
発生状態を監視するための干渉監視手段とを備え、前記
第１反射鏡又は第２反射鏡の少なくともいずれか一方が
、その光路方向に進退勤可能とされていることを特徴と
する格子干渉計。(1) Fitted together for relative rotation, one cylindrical member has a first optical path that follows the rotation axis, and the other cylindrical member has a second optical path that passes through the rotation axis and intersects with the first optical path. was formed,
two reciprocal cylindrical members, a diffraction grating disposed extending in the diametrical direction of the reciprocating cylindrical members passing through their rotational axes, and a light source for inputting light from one end of the first optical path; a first reflecting mirror provided at the other end of the first optical path; a second reflecting mirror provided at the same end of the second optical path as the first reflecting mirror with respect to the diffraction grating; and an interference monitoring means for monitoring the state of occurrence of interference caused by the diffraction grating, which is provided at the same end of the diffraction path grating as the light source, and at least one of the first reflecting mirror and the second reflecting mirror, A grating interferometer characterized by being able to move forward and backward in the direction of its optical path.
メータレンズが設けられ、各コリメータレンズが各々の
光路方向に進退勤可能とされている実用新案登録請求の
範囲第１項記載の格子干渉計。(2) Collimator lenses are provided in front of the light source and the interference monitoring means, and each collimator lens can move forward and backward in each optical path direction. Total.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14187783U JPS6049406U (en) | 1983-09-13 | 1983-09-13 | grating interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14187783U JPS6049406U (en) | 1983-09-13 | 1983-09-13 | grating interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6049406U true JPS6049406U (en) | 1985-04-06 |
| JPH0230723Y2 JPH0230723Y2 (en) | 1990-08-20 |
Family
ID=30317185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14187783U Granted JPS6049406U (en) | 1983-09-13 | 1983-09-13 | grating interferometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049406U (en) |
-
1983
- 1983-09-13 JP JP14187783U patent/JPS6049406U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230723Y2 (en) | 1990-08-20 |
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