JPS605597A - Method of producing ceramic composite sintered unit - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention (a) Technical Field of the Invention The present invention relates to a method for manufacturing a ceramic composite fired body, and particularly a method for manufacturing an insulating paste used for forming an insulating layer between the eyebrows of a composite fired body, filling a ceramic substrate, etc. Regarding.

(bl) Prior Art and Problems Ceramic composite fired bodies having conductive wiring layers inside or on the surface of ceramic substrates, such as multilayer wiring packages or multilayer ceramic substrates, are often used to mount semiconductor elements such as LSIs.

As the scale of the semiconductor devices described above increases, requirements for the dimensions, shape, characteristics, and reliability of these composite fired bodies, as well as lower prices, are becoming increasingly severe.

When manufacturing the above-mentioned composite fired body, the insulating layer 1 formed on the unfired ceramic sheet can be used, for example, as an interlayer insulation layer of multilayer wiring or as a material for adhering between stacked unfired ceramic sheets, or to eliminate the need for an unfired ceramic sheet. As a material when filling through holes with the same type of ceramic nox,
Insulating paste is used.

This type of insulating paste is usually manufactured by mixing raw material powder with the same composition as the base ceramic, or by melting the base unfired ceramic sheet with a suitable solvent.

The former method is a method in which the same raw material powder as the base ceramic is prepared to have the same composition, and an organic component is further added and mixed and kneaded to form a paste. The insulating paste obtained by this method actually has a slightly different composition than the base ceramics, and the way the powder is pulverized during the pulverization, mixing, and kneading steps during the process is not exactly the same as the base ceramics. Not the same. Therefore, when such an insulating paste is used, it does not sinter at the same shrinkage rate as the matrix ceramic during firing, resulting in warpage, peeling, etc., and a high quality composite fired body cannot be obtained.

On the other hand, the latter method is a method in which an unfired ceramic sheet is dissolved in a solvent, and then a solvent that is easy to form into a paste is added, and the mixture is kneaded using a crusher or the like to form a paste.

Since the insulating paste obtained by this method uses a part of the base ceramic sheet used for manufacturing the composite fired body as a raw material, the component composition of the raw material powder matches that of the base ceramic. However, with this method, unnecessary solvents are added, it takes a long time to knead to form a paste, and furthermore, it is difficult to form a uniform paste because some lumps remain in the resulting insulation paste. There is a problem.

In this way, it is difficult to say that the insulating pastes conventionally used are sufficiently homogeneous with the base ceramics, and therefore have problems in terms of physical, electrical properties, and printability. It's hard to say that I gained a body.

(C) Object of the Invention An object of the present invention is to solve the above-mentioned problems and to provide a method for manufacturing a ceramic composite fired body in which an insulating paste of the same quality as the base material ceramic can be used.

(d+ Structure of the Invention A feature of the present invention is that when unfired ceramic sheets coated or filled with an insulating paste are laminated and fired in predetermined portions, an unfired ceramic sheet of the same type as the unfired ceramic sheet is used as the insulation paste. A calcined substrate is created by heating and removing the contained organic binder and organic solvent, and then the calcined substrate is crushed into powder, and then a predetermined organic binder and organic solvent are added and kneaded. The goal is to use what is obtained.

(el) Embodiments of the Invention Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 3.

First, a method for manufacturing an insulating paste used in carrying out the present invention will be explained using the flowchart shown in FIG.

The insulating paste used in carrying out the present invention is prepared from an unfired ceramic sheet of the same type as the base material of the fired ceramic composite body to be manufactured. That is, an insulating paste is prepared using a part of an unfired ceramic sheet as a base material for producing a composite fired body, or unfired ceramic sheets of the same size but from the same lot or different lofts.

FIG. 1 is a block diagram showing the manufacturing process of the above-mentioned insulating paste. First, as described above, the attached unfired ceramic sheet is cut or torn into small pieces to create small pieces of the unfired ceramic sheet.

Next, this small piece is placed in a porcelain crucible and heated at approximately 600 ('C) for about 1 hour in an oxidizing atmosphere, such as air, to remove the organic binder and organic solvent contained in the wood-fired ceramic sheet. to create a calcined substrate.

In this calcined substrate, since the heating temperature used in the above steps is selected to be lower than the sintering temperature, the organic solvent and the like have been removed from the substrate, and no sintering has been performed. Therefore, this calcined substrate is very brittle and can be easily returned to the original powder by crushing it in a conventional mortar or crusher. Therefore, the calcined substrate is crushed for several tens of minutes using the book crusher or the like to form a powder.

Next, an organic binder such as ethyl cellulose and an organic solvent such as chilpinol are added and kneaded. By doing this, the viscosity is approximately 50,000 to 200,000.
(c p s ) of insulation paste was obtained.

The insulating paste obtained in this way differs from insulating pastes made by conventional manufacturing methods in that the composition and particle size of the raw material components do not differ from the base material, and the types and types of organic binders and organic solvents added do not differ. The content can be selected as desired. Therefore, the unfired ceramic sheet of the base material,
Since it is possible to match the firing shrinkage rate and physical and electrical properties, when a ceramic composite fired body is manufactured using this, abnormal deformation 2 warpage that has been seen in the past can be avoided.

Alternatively, a high quality composite fired body can be obtained without peeling or the like.

FIGS. 2 and 3 are sectional views of essential parts showing an example of manufacturing a ceramic composite fired body using the above-mentioned insulating paste.

In Fig. 2, 1 and 1° are the first and second unfired ceramic sheets, 2 is the insulating paste N which functions as an adhesive formed by screen printing the above insulating paste, and 3 is the same conductive paste (screen printing method). This is a conductive pattern formed by a printing method.In this way, an insulating paste layer 2 and a conductive pattern 3 are formed on the back surface of the first unfired ceramic sheet 1 and the surface of the second unfired ceramic sheet 1, respectively, and then dried. After that, the first unfired ceramic sheet 1 was placed on top of the second unfired ceramic sheet 1°, and the ceramic sheet was heated at approximately 1500°C in a reducing atmosphere.
Firing is performed by heating at ~1600 C'C].

In this way, a composite sintered body as shown in FIG. 3(C) is obtained.

The composite fired body obtained in the above example not only suppresses leakage during lamination, but also does not suffer from abnormal deformation, warping, peeling, etc. as described above.

FIG. 3 shows an example of forming an insulating layer between the eyebrows using the above insulating paste.
This is an example in which a conductive pattern 3 is formed, a glabellar insulating layer 4 is formed by applying the insulating paste, and a second conductive pattern 5 is further formed thereon.

In the case of this example as well, since the glabellar insulating layer 4 was formed using the above-mentioned insulating paste, the firing shrinkage rate was the same as that of the base material.
Alternatively, a high quality composite fired body can be obtained without peeling or the like.

As described above, the insulating paste according to the present invention can be used to bond unfired ceramic sheets together, to flatten the surface by filling minute irregularities on the surface of unfired ceramic sheets, and to form insulation materials such as interlayer insulation layers. Layered materials can be formed. Furthermore, it is also possible to fill unnecessary recesses and through holes formed in an unfired ceramic sheet.

It should be noted that whether the raw materials for making the above-mentioned insulating paste are a part of the unfired ceramic sheet to be used, those with the same loft, or the same type regardless of the loft of the unfired ceramic sheet, It may be determined in consideration of the purpose, permissible accuracy, etc.

(fl) As described in detail, according to the present invention, an insulating paste having the same composition as the unfired ceramic sheet of the base material can be used, thereby producing a high quality ceramic composite fired body free from field deformation, warping, peeling, etc. It becomes possible to manufacture.

[Brief explanation of the drawing]

Figures 1 to 3 are diagrams showing embodiments of the present invention, Figure 1 is a flowchart showing a method for producing an insulating paste, which is the main part of the present invention, and Figures 2 and 13 are diagrams showing the above-mentioned insulating paste. FIG. 3 is a cross-sectional view of a main part showing one embodiment and another embodiment of the present invention using the above. In the figure, 1.1'' is an unfired ceramic sheet, 2 is an insulating paste layer, 3 and 5 are conductive patterns, and 4 is an insulating layer between the eyebrows. Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] When laminating and firing unfired ceramic sheets coated or filled with insulating paste on predetermined portions, heating an unfired ceramic sheet of the same type as the unfired ceramic sheet and containing an organic binder and an organic solvent as the insulating paste. is removed to create a calcined substrate, then the calcined substrate is crushed to form a powder, and a predetermined organic binder and organic solvent are added and kneaded to use the resulting product. A method for manufacturing a ceramic composite fired body.