JPS6057302A - 埋め込み型光導波回路の製造方法 - Google Patents

埋め込み型光導波回路の製造方法

Info

Publication number
JPS6057302A
JPS6057302A JP58164228A JP16422883A JPS6057302A JP S6057302 A JPS6057302 A JP S6057302A JP 58164228 A JP58164228 A JP 58164228A JP 16422883 A JP16422883 A JP 16422883A JP S6057302 A JPS6057302 A JP S6057302A
Authority
JP
Japan
Prior art keywords
refractive index
substrate
ion exchange
glass
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58164228A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244041B2 (fr
Inventor
Eiji Okuda
奥田　栄次
Tetsuya Yamazaki
哲也 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58164228A priority Critical patent/JPS6057302A/ja
Publication of JPS6057302A publication Critical patent/JPS6057302A/ja
Publication of JPH0244041B2 publication Critical patent/JPH0244041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP58164228A 1983-09-08 1983-09-08 埋め込み型光導波回路の製造方法 Granted JPS6057302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58164228A JPS6057302A (ja) 1983-09-08 1983-09-08 埋め込み型光導波回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58164228A JPS6057302A (ja) 1983-09-08 1983-09-08 埋め込み型光導波回路の製造方法

Publications (2)

Publication Number Publication Date
JPS6057302A true JPS6057302A (ja) 1985-04-03
JPH0244041B2 JPH0244041B2 (fr) 1990-10-02

Family

ID=15789102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58164228A Granted JPS6057302A (ja) 1983-09-08 1983-09-08 埋め込み型光導波回路の製造方法

Country Status (1)

Country Link
JP (1) JPS6057302A (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119505A (ja) * 1985-11-20 1987-05-30 Fujitsu Ltd 光導波路デイバイスの形成方法
US6245239B1 (en) 1998-10-09 2001-06-12 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US6550747B2 (en) 1998-10-09 2003-04-22 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US6706189B2 (en) 1998-10-09 2004-03-16 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US7014173B2 (en) 1998-10-09 2006-03-21 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US7022236B2 (en) 2002-12-05 2006-04-04 Zenon Environmental Inc. Membrane bioreactor, process and aerator

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119505A (ja) * 1985-11-20 1987-05-30 Fujitsu Ltd 光導波路デイバイスの形成方法
US7347942B2 (en) 1998-10-09 2008-03-25 Zenon Technology Partnership Cyclic aeration system for submerged membrane modules
US6550747B2 (en) 1998-10-09 2003-04-22 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US6706189B2 (en) 1998-10-09 2004-03-16 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US6881343B2 (en) 1998-10-09 2005-04-19 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US7014173B2 (en) 1998-10-09 2006-03-21 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US7186343B2 (en) 1998-10-09 2007-03-06 Zenon Technology Partnership Cyclic aeration system for submerged membrane modules
US7198721B2 (en) 1998-10-09 2007-04-03 Zenon Technology Partnership Cyclic aeration system for submerged membrane modules
US6245239B1 (en) 1998-10-09 2001-06-12 Zenon Environmental Inc. Cyclic aeration system for submerged membrane modules
US7625491B2 (en) 1998-10-09 2009-12-01 Zenon Technology Partnership Cyclic aeration system for submerged membrane modules
US7820050B2 (en) 1998-10-09 2010-10-26 Zenon Technology Partnership Cyclic aeration system for submerged membrane modules
US7922910B2 (en) 1998-10-09 2011-04-12 Zenon Technology Partnership Cyclic aeration system for submerged membrane modules
US7022236B2 (en) 2002-12-05 2006-04-04 Zenon Environmental Inc. Membrane bioreactor, process and aerator

Also Published As

Publication number Publication date
JPH0244041B2 (fr) 1990-10-02

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