JPS6060582A - Minute moving method and device using impact force - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a device for moving an object by a small distance, and particularly to a method and device for moving an object by a high distance positioning mechanism such as a moving table.

(Prior Art) In order to perform high-a positioning using a precision positioning table, a microscope Q focusing mechanism, etc., a movement mechanism that can move a small distance (V) commensurate with the positioning accuracy is required.

Currently, it is common to configure the positioning mechanism using a so-called servo mechanism using an actuator such as a motor as a driving force, but as an obstacle to increasing the positioning concavity,
It is possible to eliminate the presence of friction in the guide of moving objects. This is because the stick-slip phenomenon limits the minimum distance that can be moved, making it difficult to move a small distance below a certain θ value.

For this reason, when it is necessary to determine the position of the cylinder sheath lfv and to move it over a minute distance, a method is adopted in which the guide mechanism 17) is made as small as possible. Unfortunately, if air bearings were used, the device would become expensive and large. 1, -v has the drawback of requiring other means, such as using some kind of control device, to maintain the determined position.

(Purpose of the Invention) This invention is based on an idea contrary to the conventional technology, and utilizes the existence of friction in a cumulative manner to produce a minute movement by applying a minute impact to an object that is stationary due to friction. Therefore, it is desirable to obtain a still more accurate positioning device which does not have the above-mentioned drawbacks.

(Structure of the Invention) As shown in Fig. 1, when an object with mass MO and an object with mass MO collide with each other at a velocity V, the force F1 acting at this time, acting time T, is FT=mV, as is well known. be.

On the other hand, if the gravitational force g1 friction coefficient is μ, a frictional force of Mgμ is acting on the object of trade mine M.

Among the above-mentioned impact force F, the portion exceeding the frictional force becomes the portion that moves the buying lot M. Therefore, as shown in Figure 2 with diagonal lines showing the effective portion, even though the impulse FT is the same, the action time T
The quality is better when the shock waveform is short, narrow, and sharp.
iI M can be moved effectively, and the distance traveled is improved by the influence of frictional force.

As for the impact force generation mechanism, it is desirable that it not only generate impact force with a sharp waveform as described above, but also be able to set the size of the impact force and, if possible, the waveform to a target value of 9.

Possible ways to generate impact force include a) a method that uses the impact force caused by a collision phenomenon between two objects, such as hitting with a hammer, and b) a method that directly applies electromagnetic impact force to the object. Conceivable.

The AV force method is the one shown in Figure 1. The impact force can be controlled by adjusting the velocity V or elastic force of the colliding body, and the impact force is controlled by adjusting the acceleration of the colliding body. are electromagnetic acceleration by solenoids, springs, air pressure,
It is possible to widely utilize various means of moderation, such as hydraulic pressure and gravity.

Method b is a well-known method used for electromagnetic positive forms of gold decoys, etc.
It is something. Meanwhile, as shown in FIG. 3, a conductor plate 1 is attached to the mass M to be moved, and a coil 2 is arranged close to it. When a reconnaissance current is passed through this coil 2, an overcurrent is generated in the conductor plate 1, and the interaction between the magnetic field caused by this eddy electric current and the low motion caused by the coil 2 causes a shocking repulsive force due to the river. occurs. As shown in the diagram, the shock absorber is a high pressure source 3.
It is too early to charge the capacitor 4 and discard the charged charge through the switch 5. The thickness and waveform of the impact force can be easily controlled by the inductance of the coil, capacitors, and pressure. Also, it goes without saying that you can use a switch to connect the Q-yakuryu from the tooth pressure source to @, without using the capacitor.

The following Fusugi formula can be considered for the movement '4 configuration according to Uememi's method.

C) As shown in FIG. 4, a device 7 for applying an impact force is placed outside the moving target mass. d) As shown in FIG. 5, an impact force generating device 7 is installed inside the moving target mass. Cv) The mechanism is a mechanism that applies an appropriate impact force from fixed supports 6 placed on both sides of the mass M to be moved, and its movement range is limited, and the mass M to be moved and the collision body accelerator are Alternatively, the impact force changes depending on the distance to the magnetic force generating Hj coil, making it difficult to control the moving distance. However, if the impact force generation mechanism tracks the mass to be moved by another mechanism, the limitations on the movement range will be relaxed.

In the df7) mechanism, there are no restrictions on #recommended distance. However, the acceleration/deceleration and impact force of the colliding body m all become internal forces. For this reason, the acceleration and deceleration of the collision body m is performed slowly,
It is desirable that the reaction force that the mass M to be moved receives is less than or equal to the frictional force M2. In the figure, it is a cushioning material such as an 8Fi spring.

Figure 6 shows the actual saturation using force to accelerate the collision object. A support 9 is installed on the mass M to be moved, and the colliding body m is rotatably supported on the upper end of the support 9 by an arm 10. It is swung up and held at the initial position shown in Fig. Ib1 (a) by an appropriate means such as a motor or an electrolyte.

When driving the moving target mass Δ(, the colliding body m is unlocked, rotated freely by gravity, and collided with the mass M.

(Io, Figure 1b) Due to this impact, the mass M is indicated by the arrow in the same figure.
It can be moved like this. At the same time, the collision body m receives a reaction force in the direction of Fim, and is rotated counterclockwise around the upper end of the support column 9 and swung up. (C in the same figure) During this time, the force that the purchaser M receives from the colliding body m is due to the centrifugal force C acting on the upper end shaft of the support column 9, excluding the time of impact and ignoring the friction of the rotating shaft.

Among them, the component force CH in the moving direction of ga IM is the frictional force IV1g because the angle O is small in the range where the speed of the colliding body m is large, and the speed 1i'2/- is small in the range where the angle θ is large.
It is easy to make it smaller than x. (Image d) One on the pendulum? By returning to the 71i9J state 1 and reversing this series of operations, it becomes possible to move the moving object M by minute distances. The energy required at this time should be supplemented with energy that compensates for the difference between the initial position of the pendulum and the position of the swinging force caused by the reaction force of the collision. Further, it goes without saying that the collision of the colliding body m may be performed using acceleration by the claw blade from the deflection position value, and a plurality of collisions may be allowed. However, the impact that the fine M receives from the moving object 5 gradually becomes smaller. Therefore, it is also possible to convert °c1 mass i mass 1M motion to J by setting the number of collisions.

Although the above-mentioned mechanical collision by the real saturation series IT pendulum is used, the above-mentioned collision electromagnetic force can also be used. In this case, one coil 2 may be supported by a buffer material 8 such as a spring, as shown in FIG. becomes.

FIG. 8 shows an example of controlling the position and attitude of an object placed on the meridional plane using the above-mentioned moving device.

Since the degree of freedom of motion of an object placed on a thousand planes is 3,
At least 611 requires a cl impact force generation mechanism. In the figure, C2 elevation is used for movement in the positive direction of the X axis, and V is used for movement in the direction.
Use iD. A and A' are used for movement in the Y-axis stopping direction, and B and B' are used for movement in the negative direction. Further, posture control can be performed by using A and B' for the rotation #r times, and A' and B-z for the counterclockwise rotation O.

By determining the relationship between the strength of the blow, the shock waveform, and the moving distance in advance, it is possible to control the position and attitude of the object in an open-loose system. By detecting the position and controlling the position so as to reduce the difference from the target position, it is possible to control the influence of changes in the frictional state of the ash to be covered.

In a good way, by installing a well-known displacement meter that calculates the displacement from the acceleration above the moving object, it is possible to eject the moving object, etc.
Using the well-known 6-stop projection device and control device, the scales can be
It is obvious without even thinking about it.

These impact force generating mechanisms can be configured as one unit and removably fixed in a moving object.

In this way, when it is necessary to move a heavy object, it is possible to move it in the necessary direction with just a small number of impact force generating mechanisms. , installation, and removal can also be performed by a robot or the like.

(Effects of the Invention) This invention does not have the above-mentioned configuration, but by using @impinging force for minute displacement υ, the drive mechanism is steep and academic, and it is low cost.
I can regret the small size. A device that uses frictional force to instantly distinguish moving objects.

I don't feel safe. It is easy to incorporate the drive mechanism into the object to be moved, and it can also be used for movement in a vacuum or in an isolated room. It has many effects such as:

[Brief explanation of drawings]

Fig. 1 and Fig. 2 are explanatory diagrams of the principle of the lead transfer method of this invention, Fig. 3 is a conceptual diagram of the cD transfer device υ1 embodiment of this invention,
Figures 4, 5, and 7 are conceptual diagrams of other implementation VIllO SEIKAI, Figure 6 is an explanatory diagram of the 00 operation of the song, and Figure 8 is a conceptual diagram of the configuration of the embodiment including all posture control. 1: Conductor plate 2: Coil 3: Power supply 4: Capacitor
5: Switch 6: Identification guide 8: Spring 9: Support pillar Patent applicant New Technology Development Corporation Applicant agent Patent attorney Fumi Sato No. 6 II t'al Fig. 7 Fig. 8

Claims (1)

[Claims] 1) To perform parallel movement or posture by applying a 9BI impact force that is greater than the frictional force to a moving object under the action of a frictional force. 2) An impact force that generates a controlled impact force that is larger than the above frictional force due to the interaction between the moving target mass under the action of a frictional force and the moving target mass. 3) A micro-movement device characterized by applying a minute parallel movement or rotational motion to the object to be moved by the impact force according to the chest structure of the generated force. At the same time, an impact is generated by the interaction between the body and the inertial body, which is fixed via a spring cushioning material, and a reaction force is generated by the cushioning material. Patented micro-movement device characterized by a force-reducing force-reducing mechanism, item 2