JPS6061906A - Production of main magnetic pole for vertical magnetic recording head - Google Patents

Abstract

PURPOSE:To improve the reliability of a vertical head as well as the production yield of a main magnetic pole for vertical magnetic recording head, by forming parallel magnetic fields on the surface of a substrate and deciding as desired the direction of the magnetic anisotropy of an obtained magnetic thin film of high permeability. CONSTITUTION:A yoke plate (''Permalloy'') 8 made of a material of high permeability and magnets 9 and 9' are distributed to a substrate holder 6, and a substrate 7 is set at the center between both magnets. Here the polarities of both magnets 9, 9' are set opposite to each other to obtain a line of magnetic force 10 on the substrate 7 as shown by a figure (c), and parallel and intensive magnetic fields are generated on the surface of the substrate 7. Then a ''Permalloy'' film is formed on the substrate 7 by a sputtering process by means of the holder 6. A magnetization facilitating axis is set in the direction 11 of the parallel magnetic fields; while a magnetization unfacilitating axis is set in the direction 12 orthogonal to the direction 11. Thus it is possible to form a magnetic thin film of high permeability which has the magnetic anisotropy in the desired direction. In this way, the reliability of magnetic characteristics of a main magnetic pole is improved as well as the production yield of the magnetic pole.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a perpendicular magnetic recording head (hereinafter referred to as a perpendicular head), in which the direction of magnetic anisotropy of a high magnetic permeability thin film used for the main magnetic pole is set in a fixed direction during production. The purpose is to improve the axial reliability of the vertical head and improve the yield rate by controlling the vertical head.

In recent years, with the demand for higher density magnetic recording, magnetic recording is performed in the thickness direction of a magnetic recording medium. The so-called perpendicular magnetic recording method is attracting attention.

Various types of perpendicular heads have been proposed for use in perpendicular magnetic recording, but basically they consist of a main magnetic pole made of a material with high magnetic permeability, a relatively thick auxiliary magnetic pole made of ferrite, etc., and an excitation magnetic pole. It is made up of a coil.

One typical auxiliary pole excitation type perpendicular magnetic head among these perpendicular heads is shown in FIG.

Coil 2 during recording. A recording current is applied to the magnetic body 3 of the auxiliary magnetic pole. , and the main magnetic pole 1. is excited thereby.
High permeability thin film and perpendicular magnetic media5. Recording is done through interaction with 7. is the head support. Also, during playback, the coil 2. A reproduction current flows through the circuit, so this is detected and used. At this time, the higher density recording becomes, the faster the reversal speed of the magnetic flux passing through the main pole becomes, and the problem becomes that the response speed or effective magnetic permeability of the high magnetic permeability thin film of the main pole becomes lower. In other words, the magnetic property of the main magnetic pole with high magnetic permeability should be a hard axis with a fast magnetization reversal speed rather than an easy axis with a slow magnetization reversal speed. In other words, it is known that it is sufficient to orient the magnetic difficulty axis with respect to the perpendicular magnetic medium.

On the other hand, the high permeability thin film of this main pole is made by sputtering.

Although it is created by vapor deposition and plating methods, the thin film is created using a 9-layer high-temperature film that responds sensitively to the environment at the time of film creation, especially to the weak magnetic field that exists in the surroundings and determines the direction of magnetic anisotropy. The direction of magnetic anisotropy of a magnetically permeable thin film is not constant. Therefore, in the past, after forming a high magnetic permeability thin film, the magnetic anisotropy was measured using a B-H loop tracer, and etching treatment was performed so that the pattern was oriented in the direction of the hard magnetization axis.

However, with this method, the magnetic properties of the high permeability thin film vary considerably due to subtle changes in the environment during film formation.

In order to solve this problem, the present invention takes advantage of the fact that when magnetic lines of force are applied during the production of a high magnetic permeability thin film, the axis of easy magnetization is oriented in the direction of the lines of magnetic force on the substrate, that is, the head support. , yoke plate 8 made of a high magnetic permeability material during film formation.
and magnet 9. As shown in FIG. 2(a), a substrate 7. is used as a head support base. , thereby creating a parallel magnetic field on the substrate surface, thereby making it possible to determine the direction of magnetic anisotropy of the resulting high magnetic permeability thin film in a desired direction.

Note that when creating a high magnetic permeability thin film by high frequency sputtering, a magnet 9. is placed near the substrate. It has been found that the coercive force (HC) of a high magnetic permeability thin film can be significantly lowered by placing a scale on the scale, thereby increasing the electromagnetic conversion efficiency during recording and reproduction and reducing distortion.

The present invention will be described below with reference to nine examples.

FIG. 2 shows an embodiment of the present invention; 6. is a standard holder for high frequency sputtering.

For the substrate holder 6, a yoke plate made of high magnetic permeability material (permalloy) 8. and magnets 9.9' are placed in the center of the substrate 7.9'. Place.

If the magnets 9 and 9' are placed with their polarities opposite to each other, the lines of magnetic force 10. The substrate 7. becomes as shown in FIG. 2(C). generates a strong magnetic field parallel to the surface of the

Using this substrate holder 6, a substrate 7. The B-H loop obtained by forming a permalloy film on top and applying a B-H loop tracer is as shown in FIG. 3, with the axis of easy magnetization in the direction of the parallel magnetic field 11. facing
The hard magnetization axis is in the direction perpendicular to it12. It became.

On the other hand, the direction of the difficult magnetization axis 12. The coercive force (He) of is 0.2
8 (♂・), easy axis direction of magnetization 11. The coercive force (H·) was 0.36 (Oe), which was less than half of that of the case where no substrate holder was used, as in the first embodiment. I am not sure why the coercive force (He) decreased in this example, but the presence of a strong magnetic field near the substrate accelerated the impact of electrons on the substrate, increasing the temperature of the substrate surface. I think so too.

As described above, according to the present invention, it is possible to create a high permeability thin film having magnetic anisotropy in a desired direction, thereby increasing the reliability of the magnetic properties of the main pole and significantly improving the yield. be able to. In particular, when high frequency sputtering is used, the magnetic properties can be significantly improved.

Although this embodiment used permalloy as the yoke plate made of a high magnetic permeability material, the material of the seek plate is not limited as long as it is made of a high magnetic permeability material. Further, the shape and structure of the yoke plate are not limited to the nine embodiments, as long as they can generate a parallel magnetic field on the substrate. This is an industrially useful invention.

[Brief explanation of the drawing]

FIG. 1 is an example of a typical vertical head. FIG. 2 shows an embodiment of the present invention, and (a) is a front view. (b) is a cross-sectional view, and (C) is an example of a graph obtained by measuring a loop showing lines of magnetic force passing through the upper yoke plate. 1: Main magnetic pole 2: Auxiliary magnetic pole core 3: Coil 4: Pace film 5: Wi-resist layer 6: Substrate holder 7 Two substrates, that is, head support 8: Yoke plate 9: Magnet 1
0: Lines of magnetic force 11: Direction of lines of magnetic force on the board 12: Direction perpendicular to the direction of the lines of magnetic field on the board Patent applicant Nichiden Anelva Co., Ltd. FIG, 3 7- Procedural amendment c method) % formula % 1. Display of case 1982 Year: Patent Application No. 169017 2, Name of the invention: Method for manufacturing the main pole of a perpendicular magnetic recording head 3, Relationship with the case of the person making the amendment Patent applicant: Yoto Toso Address: 5-8-1 Yotsuya, Fuchu-shi, Tokyo 4. Date of amendment order January 11, 1980 5. Number of inventions increased by amendment 0 6. Insert the text of the amendment.

Claims (2)

[Claims] (1) When the main magnetic pole of a perpendicular magnetic recording head is formed into a thin film on the surface of the head support using sputtering, vapor deposition, plating, etc., a magnetic field parallel to the surface of the head support in a certain direction By arranging a magnetic circuit consisting of a combination of a nuclear head support surface, a yoke plate of high magnetic permeability material, and a magnet so that a magnetic field is formed. A method for producing a main pole of a perpendicular magnetic recording head, characterized in that the direction of magnetic anisotropy of the main pole is controlled in a fixed direction. (2) The method for producing a main pole of a perpendicular magnetic recording head according to item 1, wherein the main pole of a perpendicular magnetic recording head is produced using sputtering.