JPS6067360U - Electron beam evaporation device - Google Patents
Electron beam evaporation deviceInfo
- Publication number
- JPS6067360U JPS6067360U JP12736084U JP12736084U JPS6067360U JP S6067360 U JPS6067360 U JP S6067360U JP 12736084 U JP12736084 U JP 12736084U JP 12736084 U JP12736084 U JP 12736084U JP S6067360 U JPS6067360 U JP S6067360U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- hearth
- hopper
- beam evaporation
- evaporation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来例の電子ビーム蒸発装置の断面図、第２図
、第３図は本発明の実施例を示し、第２図はホッパ一部
の保護具の斜視図、第３図はホッパ一部及びハース部の
保護具を装填した部分の断面図である。
′−
符号、１・・・ホッパ一部、２・・・ハース部、３・・
・蒸発金属、４・・・切り欠き部、５・・・ホッパ一部
の保護具、６・・・ハース部の保護具。
−〇＼Fig. 1 is a sectional view of a conventional electron beam evaporation device, Figs. 2 and 3 show an embodiment of the present invention, Fig. 2 is a perspective view of a part of the hopper protector, and Fig. 3 is a hopper It is a sectional view of a part and a part loaded with a protective equipment of a hearth part.
'- Code, 1... Part of hopper, 2... Hearth part, 3...
・Evaporation metal, 4... Notch part, 5... Protective equipment for part of hopper, 6... Protective equipment for hearth part. −〇＼
Claims (1)
セラミックスから構成された保護具を装填してなる電子
ビーム蒸発装置において、前記保護具がホッパ一部のも
のとハース部のものに分割されたものからなり、しかも
ホッパ一部とハース部に密着するように形成され、かつ
ハース部の側面に電子ビームが通過する切り欠き部を設
けたものを装填してなることを特徴とする電子ビーム蒸
発装置。In an electron beam evaporator in which a part of the hopper and a hearth part are equipped with protective equipment made of ceramics that is resistant to corrosion against evaporated metal, the protective equipment is divided into a part of the hopper and a part of the hearth part. an electron beam, which is formed so as to be in close contact with a part of the hopper and a hearth part, and is loaded with a notch part through which the electron beam passes through the side surface of the hearth part. Evaporation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12736084U JPS6067360U (en) | 1984-08-22 | 1984-08-22 | Electron beam evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12736084U JPS6067360U (en) | 1984-08-22 | 1984-08-22 | Electron beam evaporation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6067360U true JPS6067360U (en) | 1985-05-13 |
| JPH0139713Y2 JPH0139713Y2 (en) | 1989-11-29 |
Family
ID=30289287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12736084U Granted JPS6067360U (en) | 1984-08-22 | 1984-08-22 | Electron beam evaporation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6067360U (en) |
-
1984
- 1984-08-22 JP JP12736084U patent/JPS6067360U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0139713Y2 (en) | 1989-11-29 |
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