JPS6070810A - Longitudinal vibration type piezoelectric vibrator - Google Patents

Abstract

PURPOSE:To obtain an excellent vibrating characteristic by providing an external supporting frame so as to surround a longitudinal vibration type piezoelectric vibrator thereby preventing leaked vibration from being delivered directly. CONSTITUTION:A main vibration part 20 is supported with a support comprising a support connecting part 21, a supporting arm 22 and a supporting base 23 and constitutes the longitudinal vibration type piezoelectric vibrator 24. Moreover, the external supporting frame 25 is formed so as to surround the vibrator 24. Those parts above are formed incorporatedly by the photoetching processing. Through the constitution above, it is possible to prolong the distance from the main vibration part 20 to a fixed position to a fixed member 26. As a result, the leaked vibration of the main vibration part 20 is prevented from being delivered directly to the case and the excellent vibration characteristic is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a longitudinally vibrating piezoelectric vibrator in which a main vibrating part that vibrates longitudinally and a tuning fork-shaped support that supports the main vibrating part are integrally formed by 7n-etching process. Regarding.

An object of the present invention is to provide a longitudinally vibrating piezoelectric vibrator that has highly stable performance, is small in size, and is inexpensive.

The basic structure of the longitudinal vibration type piezoelectric vibrator of the present invention is shown in a perspective view in FIG. 1 as a conventional example disclosed in Japanese Patent Laid-Open No. 57-138212. In FIG. 1, this example includes a main vibrating part 1 that vibrates longitudinally from a crystal plate, and a support connection provided in the width direction of the main vibrating part 1 at a position where the vibration displacement of the main vibrating part 1 is the smallest. Support arm portions 5 extending from both ends of portions 2a and 2b
a, 3bz and support base 4 are integrally formed by photo-etching. The crystal plate is cut out almost perpendicularly to the optical axis 2, the main vibration part 1 is arranged along the mechanical axis Y, and the main vibration part 1 is arranged along the mechanical axis Y. 1r, pole 5'a, 5
'b is formed on the side surface of the main vibrating part 1, and is connected to the support connecting parts 2a, 2b and the support arms 3a, 3b,
Furthermore, it has a symmetrical structure that connects to the external connection electrodes 6'a, 6'b of the support base 4''.
'b is connected to the fixed part 7 by conductive adhesives 8a and 8b.

In the longitudinal vibration type piezoelectric vibrator of this example, the electric field due to the main electrodes 5'σ and 5'b is parallel to the electric axis X of the crystal,
Since it has a tuning fork-shaped support, it has the advantage of being able to obtain good vibration characteristics.0 By the way, in general, longitudinal vibration type piezoelectric vibrators are Since expansion and contraction occurs in the direction of the short side,
As in this example, a support body 6 composed of a support member 2, a support arm portion 3, and a support base portion 4 is connected to a rigid fixing member 7 made of ceramic or the like.
In a configuration in which the structure is directly fixed to the container, the vibration of the support body due to this short-side vibration is directly transmitted to the container (not shown), making it impossible to fully utilize the good vibration characteristics that are the advantage of the configuration of this example. It becomes difficult.

The present invention eliminates the conventional drawbacks described above, and an embodiment thereof is shown in FIG. In the same figure, the present invention is
A main vibrating part 20 that vibrates longitudinally, a support connecting part 21 provided in a symmetrical structure in the width direction of the main vibrating part 20 at a position (center of the turret) where the vibration displacement of the main vibrating part 20 is smallest, and the support. A support arm portion 22 extending from both ends of the connecting portion 21 in parallel with one of the main vibrating portions 20;
and a support base 23 that surrounds one side of the main vibrating section 20 to form a tuning fork shape; 24 and an external support frame 25 are integrally formed by 7-oto-etching process.

By using the longitudinal vibration type piezoelectric vibrator having the configuration in which the external support frame 25 according to the present invention is provided, it is possible to increase the distance from the main vibrating part 20 to the fixing position to the fixing member 26. Since the vibration leakage to the support body due to the vibration can be fixed to the fixing member at a further attenuated position, the vibration leakage can be prevented from being transmitted directly to the container, and good vibration characteristics can be obtained. Further, as shown in FIG. 6, an upper case 31 having a recessed filter 0 made of a transparent material such as crystal or glass, and a four-part filter 2 made of an opaque material such as ceramic or a transparent material such as crystal or glass are further provided. The longitudinal vibration type piezoelectric vibrator 6 of the present invention is disposed between the lower case filter 6 and the lower case filter 6.
4, the upper case 31, the vertical vibration type piezoelectric vibrator 34, and the lower case 53 are stacked in this order, and each is fixed with a low melting point metal, adhesive, etc., and the thickness is lower than that of conventional products. The size and thickness can be reduced to 1/2 to 1/2.

In this configuration, the upper case filter 1 is made of a transparent material for convenience of frequency adjustment after encapsulation, but even if it is made of an opaque material such as ceramic or metal, the effects of the invention will not be changed in any way.

Similarly, the lower case filter 3 may be made of a transparent material such as crystal glass, or may be made of an opaque material such as metal or ceramic.

An application example of the present invention is shown in a plan view in FIG. 40 is the main vibration part, 41a and 41b are support connecting parts, 42a and 42b are support arms, 43 is a support base, and 44 and 45 are double-structured external support frames, which are integrally formed by photo-etching. be. The present invention provides an advantage by increasing the distance from the support connection part to the joint part with the fixing member, so the more external support frames there are, the more the effect will be increased. applies. The first advantage of Esochink processing is the complexity of the shape.
(It does not inhibit ff1g.

[Brief explanation of drawings]

Figure 1 shows the vertical vibration type piezoelectric vibrator.
Parent diagram: FIG. 2 is a plan view showing an embodiment of the present invention. Figure 4 is a plan view showing an example of application of the present invention. 2o, 40...Main vibrating part 21, 4lbl, 4lb--Support thread Yoshirei≦22.42a, 42b=Support arm portion 23.43...Support base 25.35, 44. 45...External support replacement f26...Fixing member Filter 1/10 case 32--lower case 36.37...External extraction electrode>7 Figure 2

Claims (1)

[Claims] A longitudinally vibrating piezoelectric device in which a main vibrating part that vibrates vertically and a tuning fork-shaped support that supports the main vibrating part are integrally formed by photo-etching, and a main electrode is provided on the side surface of the main vibrating part. An outer frame supported by at least one connecting portion is formed on the outside of the vibrator, and the outer frame is formed integrally with the longitudinal vibration type piezoelectric vibrator by 7-oto-etching at the same time. Vertical vibration type piezoelectric vibrator 0