JPS6071065U - イオン源 - Google Patents

イオン源

Info

Publication number
JPS6071065U
JPS6071065U JP16290083U JP16290083U JPS6071065U JP S6071065 U JPS6071065 U JP S6071065U JP 16290083 U JP16290083 U JP 16290083U JP 16290083 U JP16290083 U JP 16290083U JP S6071065 U JPS6071065 U JP S6071065U
Authority
JP
Japan
Prior art keywords
ion source
sample
target
sample reservoir
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16290083U
Other languages
English (en)
Other versions
JPH043386Y2 (ja
Inventor
哲夫 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP16290083U priority Critical patent/JPS6071065U/ja
Publication of JPS6071065U publication Critical patent/JPS6071065U/ja
Application granted granted Critical
Publication of JPH043386Y2 publication Critical patent/JPH043386Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本発明の一実施例を示す図、第２図はそのＡ−
Ａ断面図である。 １：金属製ターゲット、４：穴、５：試料溜、６：溜部
、７：試料移送部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 加速したイオン又は中性粒子をターゲット上に載置され
    た試料に衝突させるようにしたイオン源において、試料
    溜と、該試料溜から上記ターゲットへ試料を移送する樋
    状の通路とを設けたことを特徴とするイオン源。
JP16290083U 1983-10-21 1983-10-21 イオン源 Granted JPS6071065U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16290083U JPS6071065U (ja) 1983-10-21 1983-10-21 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16290083U JPS6071065U (ja) 1983-10-21 1983-10-21 イオン源

Publications (2)

Publication Number Publication Date
JPS6071065U true JPS6071065U (ja) 1985-05-20
JPH043386Y2 JPH043386Y2 (ja) 1992-02-03

Family

ID=30357592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16290083U Granted JPS6071065U (ja) 1983-10-21 1983-10-21 イオン源

Country Status (1)

Country Link
JP (1) JPS6071065U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897245A (ja) * 1981-12-04 1983-06-09 Jeol Ltd イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897245A (ja) * 1981-12-04 1983-06-09 Jeol Ltd イオン源

Also Published As

Publication number Publication date
JPH043386Y2 (ja) 1992-02-03

Similar Documents

Publication Publication Date Title
JPS6071065U (ja) イオン源
JPS58182350U (ja) カラ−ブラウン管
JPS5818944U (ja) 高炉炉体冷却用冷却盤
JPS58162867U (ja) 練習用ボ−ル
JPS5867455U (ja) 履物用磁気発生具
JPS60158654U (ja) イオン源装置
JPS5820005U (ja) プレキヤストパネル取付構造
JPS5853352U (ja) 電子銃
JPS583180U (ja) はりの穴
JPS5926859U (ja) 質量分析装置のイオン源装置
JPS5860811U (ja) 電子部品用リ−ド線
JPS58179972U (ja) 半田ゴテ
JPS59119013U (ja) 電磁石の吸着面
JPS6015835U (ja) 穴を開けた封筒
JPS58164678U (ja) すみ付け用尺竿
JPS60133691U (ja) 電子部品用基板
JPS5815805U (ja) ガスバ−ナ
JPS5845363U (ja) 蒸着装置
JPS5873421U (ja) 山芋掘具
JPS5899096U (ja) 三角定規
JPS598224U (ja) ケ−ブル吊線保持具
JPS60174166U (ja) イオン衝撃銃
JPS5853301U (ja) 照明器具
JPS58104413U (ja) タツピングビス取付孔
JPS60185316U (ja) 静止誘導機器