JPS6081067A - Manufacture of silicon nitride sintered body - Google Patents

Manufacture of silicon nitride sintered body

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Publication number
JPS6081067A
JPS6081067A JP58191204A JP19120483A JPS6081067A JP S6081067 A JPS6081067 A JP S6081067A JP 58191204 A JP58191204 A JP 58191204A JP 19120483 A JP19120483 A JP 19120483A JP S6081067 A JPS6081067 A JP S6081067A
Authority
JP
Japan
Prior art keywords
clay
drying
silicon nitride
molded
sintered body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58191204A
Other languages
Japanese (ja)
Other versions
JPS6128628B2 (en
Inventor
信彦 渡辺
高志 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to JP58191204A priority Critical patent/JPS6081067A/en
Publication of JPS6081067A publication Critical patent/JPS6081067A/en
Publication of JPS6128628B2 publication Critical patent/JPS6128628B2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は多孔質の窒化珪素質焼結体を安価に製造する方
法に関する。反応焼結窒化珪素は熱膨張係数が小さい、
耐熱衝撃性に優れている。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a porous silicon nitride sintered body at low cost. Reactive sintered silicon nitride has a small coefficient of thermal expansion,
Excellent thermal shock resistance.

溶融金属に対づる耐食性が良い、高温で強度低下がない
など優れた性質を持っているため、高温機械部品、金属
工業用耐火物をはじめとして多くの分野で使用されつつ
ある。本発明者らは複雑な形状を有する反応焼結窒化珪
素成形品を安価に製造づる方法について研究し、鋳込み
成形法において素地に粘土を10〜50重石%添加する
ことにより焼結体性質を損うことなく上記目的を満し得
ることを児出し本発明に至つ1こ。
Because it has excellent properties such as good corrosion resistance against molten metal and no loss of strength at high temperatures, it is being used in many fields including high-temperature mechanical parts and refractories for the metal industry. The present inventors have researched a method for manufacturing reactively sintered silicon nitride molded products having a complex shape at low cost, and have found that by adding 10 to 50% clay to the base material in the casting method, the properties of the sintered body are impaired. We have devised the present invention to be able to satisfy the above object without any problems.

即ち、本発明はSi 30〜75重量%、粘土10〜5
0重量%、残部がSi 3 N4より成る混合粉末を成
形し、成形体を非酸化性含む窒素雰囲気において焼成づ
ることを特徴とするものである。
That is, the present invention contains 30 to 75% by weight of Si and 10 to 5% by weight of clay.
This method is characterized by molding a mixed powder containing 0% by weight and the balance being Si 3 N4, and firing the molded body in a non-oxidizing nitrogen atmosphere.

以下水5を明を詳細に説明する。本発明にお(1て81
量は30〜75重量におさえることが必要である。Sl
は窒化して3i3N<ボンドを形成するため満足できる
強度を得るのに必要な最低必要量があり、その(1@は
30tllafn%である。
The water 5 will be explained in detail below. The present invention (1.81)
It is necessary to limit the amount to 30 to 75 weight. Sl
is nitrided to form a 3i3N<bond, so there is a minimum amount necessary to obtain satisfactory strength, and (1@ is 30tllafn%).

Sl吊が増すにつれてSi 3 N4ポンドσ) ff
l hi多くなり焼結体強度は増大覆るが、5iffi
が多くなるにつれて成形体内で均一な窒化反応を進行さ
せることが難しくなる。この理由は工1索の窒化が著し
い発熱反応のあることにあり、反応熱によって反応が急
激に進行し、成形体内部の温度が上昇するため、未反応
の珪素が溶融して気孔を閉塞し、それ以上の窒化を阻害
し1.:す、大きな気孔を生じ組織を不均一にしたりJ
る。
As the Sl suspension increases, Si 3 N4 pounds σ) ff
As l hi increases, the strength of the sintered body increases, but 5iffi
As the amount increases, it becomes difficult to proceed with a uniform nitriding reaction within the molded body. The reason for this is that the nitriding of the first wire involves a significant exothermic reaction, and the reaction proceeds rapidly due to the reaction heat, raising the temperature inside the compact, causing unreacted silicon to melt and block the pores. , inhibiting further nitriding; 1. : It causes large pores and makes the tissue uneven.
Ru.

このため5iffiの多いものでは炉の昇温速度や窒素
の供給速度に細心の注意を払う必要があり、窒化焼成に
長時間を要するようになり、安価な窒化珪素焼結体を製
造りる見地からは短時間で焼成できることが望ましく、
3i量は75重量%以下におさえる必要がある。
For this reason, in the case of products with a high 5iffi, it is necessary to pay close attention to the heating rate of the furnace and the nitrogen supply rate, and nitriding requires a long time, making it difficult to produce inexpensive silicon nitride sintered bodies. It is desirable to be able to bake in a short time,
The amount of 3i must be kept below 75% by weight.

本発明における粘土の添加には四つの効果がある。第1
の効果は原料コストが低下できることである。これは粘
土の価格がSi 、Si 3 N4に比べて1 / 1
0以下と安価なことによる。
Addition of clay in the present invention has four effects. 1st
The effect is that raw material costs can be reduced. This means that the price of clay is 1/1 compared to Si and Si3N4.
This is because it is less than 0 and inexpensive.

第2の効果は粉砕時間が短縮できることである。The second effect is that the grinding time can be shortened.

鋳込み成形では素地中に1μ以下の粒子が20%以上あ
ることが優れた成形体を得るために必要であるが、粘土
は1μ以下の微粒子の凝集体であり、水中で撹拌すると
容易に分散するから、Si 、St 3 N4を微粉砕
りる必要がなくなり、粉砕工程の簡略化、短縮化が可能
である。
In casting molding, it is necessary to have at least 20% of particles of 1μ or less in the base material in order to obtain an excellent molded product, but clay is an aggregate of fine particles of 1μ or less and easily disperses when stirred in water. Therefore, there is no need to pulverize Si 2 and St 3 N4, and the pulverization process can be simplified and shortened.

粘土添加の第3の効果は素地に可塑性をイ]与する結果
、鋳込成形において脱型仕上げ・乾燥工程を容易化する
こと、複雑形状品の成形を可能にすることである。Si
 −8i 3N4のみから成る粘土を含まない素地を鋳
込成形した場合には脱型した成形体を均一に乾燥さぼる
ことが重要で、少しでも不均一乾燥が生じるとクラック
が発生する。この理由は素地が可塑性を殆ど有しないた
めで、たとえば成形体表面の水分減少量が内部よりも少
しでも大きくなると、表面が内部より大きく収縮づるた
め応ノコが生じクランクが発生ずる。したがってこのよ
うな素地では脱型した成形体を直ちに飽和湿度雰囲気中
に置いて表面乾燥をおさえ、先ず成形体内の水分を均一
化した後、徐々に湿度を低下させ、成形体の水分を均一
に低下させていくことが心髄である。このため乾燥に細
心の注意を要し、乾燥時間が長くなる欠点がある。さら
に粘土を含まない素地では可塑性が小さいために脱型時
にクラックが生じ易く、脱型が容易な単純形状のものし
か成形ができない問題もある。又成形体がもろいため、
その加工には細心のび意が必要である。
The third effect of adding clay is that as a result of imparting plasticity to the base material, it facilitates the finishing and drying steps in cast molding and enables the molding of products with complex shapes. Si
-8i When a clay-free base made only of 3N4 is cast and molded, it is important to dry the demolded molded body uniformly; even the slightest uneven drying will cause cracks to occur. The reason for this is that the base material has almost no plasticity; for example, if the amount of moisture loss on the surface of the molded product is even slightly greater than that on the inside, the surface will shrink more than the inside, causing cracking and cranking. Therefore, when using such a base material, the demolded molded body is immediately placed in a saturated humidity atmosphere to prevent surface drying, and the moisture inside the molded body is first homogenized, and then the humidity is gradually lowered to evenly distribute the moisture in the molded body. The essence of this is to lower it. For this reason, there is a drawback that careful attention is required for drying and the drying time is long. Furthermore, since clay-free base materials have low plasticity, they tend to crack when demolded, and there is also the problem that only simple shapes that can be easily demolded can be molded. Also, since the molded product is brittle,
The processing requires great care.

これらの問題はSl Si 3 N4素地に粘土を添加
することによって解決でき、その添加団の下限は10重
量%である。粘土量の増大につれて素地の可塑性は大き
くなる。このような素地では乾燥工程で成形体内に多少
の水分差が生じ収縮差による応力が発生しても、素地の
可塑変形によって応力が緩和されるため、クラックが発
生しにくい。したがって成形体を加熱空気中で′乾燥し
てもクラックの発生がなく、乾燥工程が簡略になるだけ
でなく時間の短縮が可能になる。又成形体がある程度の
変形に耐えるため、より複雑な形状のものでもクラック
を生じることなく脱型が可能で、鋳込成形相1118な
形状範囲が著しく拡大できる。しかし粘土量が増大しず
ぎると素地中の微粒子量が多くなるため着肉速痘の低下
や乾燥クラックの発生が生じ易くなるなどのマスナス効
果が大きくなり、粘土量は50重配%が上限である。
These problems can be solved by adding clay to the Sl Si 3 N4 matrix, the lower limit of which is 10% by weight. As the amount of clay increases, the plasticity of the matrix increases. In such a base material, even if some moisture difference occurs in the molded body during the drying process and stress is generated due to the difference in shrinkage, the stress is alleviated by plastic deformation of the base material, making it difficult for cracks to occur. Therefore, even if the molded product is dried in heated air, no cracks will occur, which not only simplifies the drying process but also shortens the time. Furthermore, since the molded product can withstand deformation to a certain extent, even products with more complicated shapes can be demolded without cracking, and the range of shapes that can be formed by casting can be significantly expanded. However, if the amount of clay increases too much, the amount of fine particles in the base material will increase, resulting in a large mass effect such as a decrease in the fastness of skin attachment and an increase in the occurrence of drying cracks. be.

粘土添加の第4の効果は焼成工程において3iの窒素化
による発熱を吸収し、Slの溶融による焼成体組織の不
均一を抑制することである。乾燥した成形体はN2ガス
又はN2+l」2、NH3ガスなど非酸化性含窒素雰囲
気中1150〜1800℃域で徐々に昇温して窒化反応
を進行させ、ざらに反応を完結させるため最高1600
℃まで昇温さぼる。この過程で粘土はSiと反応してS
i3N4 、O’相、X相などを形成する。各温度でど
のような反応が生じているかは不明であるが、粘土はS
lが窒化づる際にフィラーとして反応熱を吸収するだけ
でなく、Sf 11 N4 、O’相、X相が生成する
際にも吸熱し、3i窒化による以上温度上昇を抑制づる
The fourth effect of adding clay is that it absorbs the heat generated by nitrogenization of 3i in the firing process and suppresses non-uniformity of the fired body structure due to melting of Sl. The dried compact is heated in a non-oxidizing nitrogen-containing atmosphere such as N2 gas or N2 + L2 or NH3 gas at a temperature of 1,150 to 1,800°C to proceed with the nitriding reaction.
The temperature rises to ℃. In this process, clay reacts with Si and S
i3N4, O' phase, X phase, etc. are formed. Although it is unclear what kind of reaction occurs at each temperature, clay
1 not only absorbs the reaction heat as a filler during nitriding, but also absorbs heat when Sf 11 N4, O' phase, and X phase are generated, suppressing the temperature increase caused by 3i nitriding.

粘土添加による以上の効果は鋳込成形品に限定されるも
のでなく、押出成形品、プレス成形品についても利用で
きる。
The above effects of adding clay are not limited to cast molded products, but can also be applied to extrusion molded products and press molded products.

焼結体性質に及ぼづ粘土添加の影響は本発明の組成の如
<Stが30重示%以上存在することにより小さくでき
る。これは焼成工程でSiが粘土AI 2 Sf 20
s (OH)4を還元して反応をO2進し、Sf 3 
N4 、O’相、X相を生成させるためと思われる。成
形体をN2中1500℃で焼成した場合、粘土添加素地
は反応焼結3i 3 N4素地とほぼ同じ気孔率・曲げ
強度を示し、耐熱衝撃性も大差なく、耐久酸化性につい
ては優れた性質をさえ示した。このような性質が得られ
る理由は焼結体が主として反応焼結晶と同じSi 3 
N4結晶から成ってJ3す、この仙にSt −AI−0
−N原子より成る0′相、X相が少量加わるにづぎない
/jめである。
The influence of clay addition on the properties of the sintered body can be reduced by the presence of 30% or more of St as in the composition of the present invention. This is done during the firing process, where Si becomes clay AI 2 Sf 20
Sf3
This seems to be to generate N4, O' phase, and X phase. When the molded body was fired at 1500°C in N2, the clay-added base showed almost the same porosity and bending strength as the reactive sintered 3i3N4 base, there was no significant difference in thermal shock resistance, and it had excellent properties in terms of durable oxidation resistance. even showed. The reason why such properties are obtained is that the sintered body mainly contains Si3, which is the same as the reaction sintered crystal.
Made of N4 crystal, J3 is St-AI-0.
This is due to the addition of a small amount of the 0' phase and the X phase consisting of -N atoms.

次に本発明の理解を深めるため実施例について説明づる
Next, examples will be described in order to better understand the present invention.

実施例1 市販の金属珪素(平均径6μ、純度98.5%)とSi
 3 Na (60m esh純度98.5%)を各々
ボールミルに入れ、エタノールを加えて4hrおよび4
Ql+r粉砕し平均径3μおよび1゜5μの粉体を得1
=、エタノールを除去した後空気中、150℃で乾燥し
た。Si 、Si 3N4および粘土(伊賀蛙目粘土)
を表1のように調合し、水およびアクリル産ソーダを加
えてボッ1−で16hrtj!痒し水分55%の泥漿を
調製した。
Example 1 Commercially available metal silicon (average diameter 6μ, purity 98.5%) and Si
3 Na (60 m esh purity 98.5%) was placed in a ball mill, ethanol was added, and the mixture was heated for 4 hours and 4 hours.
Pulverized with Ql+r to obtain powder with an average diameter of 3μ and 1°5μ.
= After removing ethanol, it was dried in air at 150°C. Si, Si3N4 and clay (Iga Frogme clay)
Mix as shown in Table 1, add water and acrylic soda, and boil for 16 hours! A slurry containing 55% moisture was prepared for itching.

1QX5X401nl11のテストピースを鋳込成形し
、その性質を調べたところ表1のような成形性質が得ら
れた。
A test piece of 1QX5X401nl11 was cast and its properties investigated, and the molding properties shown in Table 1 were obtained.

粘土量の増大につれて着肉速度が小さくなること、可塑
性係数、乾燥 表1 *** 2 42.3 52,7 5.0 0.95 1.70
 0 20.0強度が大きくなることが認められる。適
正な粘土量の範囲は可塑性より粘土10%以上、着肉速
度より50%以下である。
The rate of inking decreases as the amount of clay increases, plasticity coefficient, drying Table 1 *** 2 42.3 52,7 5.0 0.95 1.70
0 20.0 It is recognized that the strength increases. The appropriate range of clay amount is 10% or more of clay based on plasticity and 50% or less based on inking speed.

;1;着肉速度定数= 〔着肉厚さcm) / (着肉時間sec )4: =
l:可塑性係数:素地強度が5K(1/CIとなる藁地
水分での破壊までの変形■ 実施例2 実施例1の試料をアルミナルツボに入れ、5ンマン炉ぐ
焼成した。真空置換により炉内をN2雰囲気にした後、
1150℃までは400℃/llrで昇渇し、1150
〜1350℃間は100℃/1)「で昇温し窒素化反応
を進行させたさらに1500℃まで400℃/11「で
昇温し電流を切り放冷した。焼結体性質は次の通り。
;1; Thickening rate constant = [Thickness of thickening cm) / (Thickening time sec) 4: =
l: Plasticity coefficient: Deformation until fracture due to straw moisture with a base strength of 5K (1/CI) ■Example 2 The sample from Example 1 was placed in an aluminum crucible and fired in a 5-man furnace. After creating an N2 atmosphere inside,
Up to 1150℃, the temperature is raised at 400℃/llr.
The temperature was raised at 100°C/1) from ~1350°C to advance the nitrogenization reaction, and the temperature was further raised to 1500°C at 400°C/11", the current was turned off, and the material was allowed to cool. The properties of the sintered body are as follows. .

表2 令 気孔率・強度・耐熱衝撃性は粘土量の0%の反応焼結素
地のバラツキ範囲内にあり、粘土添加による大差は認め
られなかった。又粘土添加によりα、βSi 3N4の
他にO°相、X相の生成が見られた。
Table 2 Porosity, strength, and thermal shock resistance were within the variation range of the reaction sintered base with 0% clay content, and no major difference was observed due to the addition of clay. Furthermore, addition of clay resulted in the formation of O° phase and X phase in addition to α and βSi 3N4.

施例3 実施例1のNo、1素地(粘土O%)、No。Example 3 No. 1 of Example 1, 1 base (clay 0%), No.

5素地(粘土40%)泥漿にて120φ高さ120mm
のルツボを鋳込成形した。粘土O%素也では乾燥時にク
ラックが生じるため、排水泥命直ちに成形体を脱型し、
プラスチック・フイノムに包んで乾燥をおさえ、成形体
内の水分を1−にした後、成形体内の水分が均一に減少
すように布で包んで室内で除乾燥する必要があたが、粘
土40%素地では排水泥後型ごと0℃で乾燥し、成形体
が収縮して型から離れ後に脱型し、さらに40℃で乾燥
をつづけて乾燥クラックの発生がなかった。乾燥時間は
10%素地では最低3日が必要であったのに1、粘土4
0%素地は1日でよく、乾燥工程も簡略化できた。又粘
土0%素地はかたくてもろいため成形体の取扱いに細心
の注意を必要としたが、粘土40%素地は可塑性を示す
水分領域以下でも多少のフレキシどリティがあり、強度
も大きいため取扱いが容易であった。
5 base (40% clay) slurry 120φ height 120mm
The crucible was cast. Since cracks occur when drying with O% Motoya clay, the molded body is immediately removed from the mold.
It was necessary to wrap the molded body in plastic to suppress drying and bring the moisture inside the molded body to 1-1, then wrap it in cloth and dry it indoors so that the moisture inside the molded body was reduced evenly. After draining the mud, the base material was dried at 0°C together with the mold, and the molded body was removed from the mold after shrinking and separated from the mold. Drying was continued at 40°C, and no drying cracks occurred. The drying time was at least 3 days for 10% base material, but for clay 4.
The drying process for the 0% base material could be simplified in one day. In addition, since the 0% clay base is hard and brittle, great care was required when handling the molded product, but the 40% clay base has some flexibility and strength even below the moisture range where it exhibits plasticity, so handling is difficult. It was easy.

以上の実施例の結果より明らかなように、Si −8!
 3 N4素地に粘土を加えることにより、焼結体性質
を損うことなしに原料コストの低下原料粉砕工程の簡略
化・成形乾燥工程の簡略化を図ることが可能であり、窒
化珪素質焼結体を安価に製造する目的を達成づることが
できる。
As is clear from the results of the above examples, Si -8!
3 By adding clay to the N4 base material, it is possible to reduce the cost of raw materials without impairing the properties of the sintered body. It is possible to simplify the raw material crushing process and the forming and drying process, making it possible to simplify the process of forming and drying silicon nitride. The purpose of manufacturing the body at low cost can be achieved.

特許出願人 東陶機器株式会社 手続補正書 昭和58年1り月/?日 特許庁長官 若 杉 和 夫 殿 (特狛庁審査官 殿) 1、事件の表示 昭和58年特許願第191204号 2、発明の名称 窒化珪素質焼結体の製造方法 3、補正をする者 事件どの関係 特許出願人 氏名(名称) (AO8)東V@機器株式会社4、代理
人 住 所 東京都文京区白山5丁目14番7号昭和 年 
月 日 6、補正の対象 明細書全文 7、補正の内容 別紙の通り 明 細 書 1、発明の名称 窒化珪素質焼結体の製造方法 2、特許請求の範囲 s; 30〜75重量%、粘土10〜50重量%、残部
がSl 3N4より成る混合粉末を成形し、成形体を非
酸化性含窒素雰囲気において焼成することを特徴とづる
窒化珪素質焼結体の製造方法。
Patent applicant: Toto Kiki Co., Ltd. Procedural amendment January 1982/? Mr. Kazuo Wakasugi, Commissioner of the Japanese Patent Office (Mr. Examiner of the Japan Patent Office) 1. Indication of the case Patent Application No. 191204 of 1982 2. Name of the invention Method for manufacturing silicon nitride sintered body 3. Person making the amendment Related to the case Patent applicant name (AO8) ToV @ Kiki Co., Ltd. 4, Agent address 5-14-7 Hakusan, Bunkyo-ku, Tokyo Showa year
Month/Date 6, Full text of the specification to be amended 7, Contents of the amendment as shown in attached document 1, Title of the invention: Process for manufacturing silicon nitride sintered body 2, Scope of claims s: 30-75% by weight, clay 1. A method for producing a silicon nitride sintered body, which comprises molding a mixed powder of 10 to 50% by weight and the balance being Sl 3 N 4 and firing the molded body in a non-oxidizing nitrogen-containing atmosphere.

3、発明の詳細な説明 本発明は多孔質の窒化珪素質焼結体を安価に製造する方
法に関する。反応焼結窒化珪素は熱膨張係数が小さい、
耐熱衝撃性に優れている。
3. Detailed Description of the Invention The present invention relates to a method for manufacturing a porous silicon nitride sintered body at low cost. Reactive sintered silicon nitride has a small coefficient of thermal expansion,
Excellent thermal shock resistance.

溶融金属に対する耐食性が良い、高温で強度低下がない
など優れた性質を持っているため、高温機械部品、金属
工業用耐火物をはじめとして多くの分野で使用されつつ
ある。本発明者らは複雑な形状を有する反応焼結窒化珪
素成形品を安価に製造する方法について研究し、鋳込み
成形法にd′3いて素地に粘土を10〜50重量%添加
することにより焼結体性質を損うことなく上記目的を満
し得ることを見出し本発明に至った。
Because it has excellent properties such as good corrosion resistance against molten metal and no loss of strength at high temperatures, it is being used in many fields including high-temperature mechanical parts and refractories for the metal industry. The present inventors have researched a method for inexpensively manufacturing reaction-sintered silicon nitride molded products with complex shapes, and have used the casting method to add 10 to 50% by weight of clay to the base material. The inventors have discovered that the above objects can be achieved without impairing physical properties, leading to the present invention.

即ち、本発明はs+ 30〜75重市%、粘土10〜5
0重量%、残部がSi 3 N4より成る混合粉末を成
形し、成形体を非酸化性含窒素雰囲気において焼成りる
ことを特徴とするものである。
That is, the present invention has s+ 30-75% Juichi, clay 10-5%
The method is characterized in that a mixed powder consisting of 0% by weight and the balance of Si 3 N4 is molded, and the molded body is fired in a non-oxidizing nitrogen-containing atmosphere.

以下本発明の詳細な説明する。本発明においてSilは
30〜75重量におさえることが必要である。Slは窒
化してSi 3 N4ボンドを形成するため満足できる
強度を得るのに必要な最低必要量があり、その値は30
重量%である。
The present invention will be explained in detail below. In the present invention, it is necessary to limit the weight of Sil to 30 to 75%. Since Sl is nitrided to form a Si 3 N 4 bond, there is a minimum amount necessary to obtain satisfactory strength, and the value is 30
Weight%.

5iffiが増すにつれてSi 3 N4ボンドの由が
多くなり焼結体強度は増大するが、81mが多くなるに
つれて成形体内で均一な窒化反応を進行させることが難
しくなる。この理由は珪素の窒化が著しい発熱反応であ
ることにあり、反応熱によって反応が急激に進行し、成
形体内部の温度が上昇するため、未反応の珪素が溶融し
て気孔を閉塞し、それ以上の窒化を阻害したり、大きな
気孔を生じ組織を不均一にしたりする。
As 5iffi increases, the number of Si 3 N4 bonds increases and the strength of the sintered body increases, but as 81m increases, it becomes difficult to proceed with a uniform nitriding reaction within the compact. The reason for this is that nitriding silicon is a significantly exothermic reaction, and as the reaction proceeds rapidly due to the reaction heat and the temperature inside the molded body rises, unreacted silicon melts and blocks the pores. This may inhibit further nitridation or cause large pores to occur, making the structure non-uniform.

このためSilの多いものでは炉の昇温速度や窒素の供
給速度に細心の注意を払う必要があり、窒化焼成に長時
間を要するようになる。安価な窒化珪素焼結体を製造す
る見地からは短時間で焼成できることが望ましく、Sl
墨は75重量%以ゴ・におさえる必要がある。
For this reason, in the case of materials containing a large amount of Sil, it is necessary to pay close attention to the heating rate of the furnace and the supply rate of nitrogen, and the nitriding firing takes a long time. From the standpoint of manufacturing inexpensive silicon nitride sintered bodies, it is desirable to be able to fire in a short time, and
It is necessary to keep the ink content to less than 75% by weight.

本発明における粘土の添加には四つの効果がある。第1
の効果は原料コストが低下できることである。これは粘
土の価格がSi 、Si 3N4に比べて1/10以下
と安価なことによる。
Addition of clay in the present invention has four effects. 1st
The effect is that raw material costs can be reduced. This is because the price of clay is less than 1/10 that of Si and Si 3N4.

第2の効果は粉砕時間が短縮できることである。The second effect is that the grinding time can be shortened.

鋳込み成形では素地中に1μ以下の粒子が20%以上あ
ることが優れた成形体を得るために必要であるが、粘土
は1μ以下の微粒子の凝集体であり、水中で撹拌すると
容易に分散するから、Sl 、Si 3N4を微粉砕す
る必要がなくなり、粉砕工程の簡略化、短縮化が可能で
ある。
In casting molding, it is necessary to have at least 20% of particles of 1μ or less in the base material in order to obtain an excellent molded product, but clay is an aggregate of fine particles of 1μ or less and easily disperses when stirred in water. Therefore, it is no longer necessary to pulverize Sl 2 and Si 3N4, and the pulverization process can be simplified and shortened.

粘土添加の第3の効果は素地に可塑性を付与する結果、
鋳込成形において脱型・仕上げ・乾燥工程を容易化する
こと、複雑形状品の成形を可能にすることである。S:
 Si a N4のみから成る粘土を含まない素地を鋳
込成形した場合には脱型した成形体を均一に乾燥させる
ことが唄要で、少しでも不均一乾燥が生じるとクランク
が発生する。この理由は素地が可塑性を殆ど有しないた
めで、たとえば成形体表面の水分減少量が内部よりも少
しでも大きくなると、表面が内部より大きく収縮するた
め応力が生じクラックが発生する。したがってこのよう
な素地では脱型した成形体を直ちに飽和湿度雰囲気中に
置いて表面乾燥をおさえ、先ず成形体内の水分を均一化
した後、徐々に湿度を低Fさせ、成形体の水分を均一に
低下させていくことか必要である。このため乾燥に細心
の注意を要し、乾燥時間が長くなる欠点がある。さらに
粘土を含まない素地では可塑性が小さいために脱型時に
クラックが生じ易く、脱型が容易な単純形状のものしか
成形ができない問題もある。又成形体がもろいため、そ
の加工には細心の注意が必要である。
The third effect of adding clay is that it imparts plasticity to the base material.
The objective is to facilitate the demolding, finishing, and drying processes in cast molding, and to enable the molding of complex-shaped products. S:
When casting a clay-free base made only of Si a N4, it is important to dry the demolded molded body uniformly, and if even the slightest uneven drying occurs, a crank will occur. The reason for this is that the base material has almost no plasticity; for example, if the amount of moisture loss on the surface of the molded product is even slightly greater than that on the inside, the surface will shrink more than the inside, creating stress and causing cracks. Therefore, for such base materials, the demolded molded body is immediately placed in a saturated humidity atmosphere to prevent the surface from drying out, and after first equalizing the moisture inside the molded body, the humidity is gradually lowered to a low F to evenly distribute the moisture in the molded body. It is necessary to reduce the For this reason, there is a drawback that careful attention is required for drying and the drying time is long. Furthermore, since clay-free base materials have low plasticity, they tend to crack when demolded, and there is also the problem that only simple shapes that can be easily demolded can be molded. Furthermore, since the molded product is fragile, great care must be taken when processing it.

これらの問題はSt −st 2 N4素地に粘土を添
加することによって解決でき、その添加量の下限は10
重量%である。粘土量の増大につれC素地の可塑性は大
きくなる。このような素地では乾燥工程で成形体内に多
少の水分差が生じ収縮差にJ:る応力が発生しても、素
地の可塑変形によって応ツノが緩和されるため、クラッ
クが発生しにくい。したがって成形体を加熱空気中で乾
燥してもクラックの発生がなく、乾燥工程が簡略になる
だけでなく時間の短縮が可能になる。又成形体がある程
度の変形に耐えるため、にり複雑な形状のものでもクラ
ックを生じることなく脱型が可能で、鋳込成形可能な形
状範囲が著しく拡大できる。しかし粘土量が増大しすぎ
ると素地中の微粒子量が多くなるため着肉速度の低下や
乾燥クラックの発生が生じ易くなるなどのマスナス効果
が大きくなり、粘土量は50歌齢%が上限である。
These problems can be solved by adding clay to the St -st 2 N4 substrate, and the lower limit of the amount added is 10
Weight%. As the amount of clay increases, the plasticity of the C matrix increases. In such a base material, even if some moisture difference occurs in the molded body during the drying process and a stress equal to J: is generated due to the difference in shrinkage, the stress is relaxed by plastic deformation of the base material, so cracks are less likely to occur. Therefore, even if the molded body is dried in heated air, no cracks occur, which not only simplifies the drying process but also shortens the time. In addition, since the molded product can withstand a certain degree of deformation, even complex shapes can be removed from the mold without cracking, and the range of shapes that can be cast can be significantly expanded. However, if the amount of clay increases too much, the amount of fine particles in the base material will increase, resulting in a large mass effect such as a decrease in the deposition rate and the occurrence of dry cracks, so the upper limit for the amount of clay is 50% of the song age. .

粘土添加の第4の効果は焼成工程において3iの窒素化
による発熱を吸収し、3iの溶融による焼成体組織の不
均一化を抑制することである。乾燥した成形体はN2ガ
ス又はN2+H2ガス、N N3ガスなど非酸化性含窒
素雰囲気中1150〜1400℃域で徐々に昇温して窒
化反応を進行させ、さらに反応を完結させるため最高1
600℃まで昇温させる。この過程で粘土はSlと反応
してSf 3 N4 、O’相、X相などを形成する。
The fourth effect of adding clay is to absorb the heat generated by nitrogenization of 3i in the firing process, and to suppress non-uniformity of the structure of the fired body due to melting of 3i. The dried compact is heated gradually in a non-oxidizing nitrogen-containing atmosphere such as N2 gas, N2+H2 gas, N2 gas, etc. in the range of 1150 to 1400°C to proceed with the nitriding reaction, and then heated to a maximum of 1°C to complete the reaction.
Raise the temperature to 600°C. In this process, clay reacts with Sl to form Sf 3 N4, O' phase, X phase, etc.

各ifl1mでどのような反応が生じているかは不明で
あるが、粘土は3iが窒化する際にフィラーとして反応
熱を吸収するだけでなく、S: 3 N4 、O’相、
X相が生成する際にも吸熱し、3i窒化による異常温度
上昇を抑制する。
It is unclear what kind of reaction is occurring in each ifl1m, but clay not only absorbs the reaction heat as a filler when 3i nitrides, but also absorbs the S: 3 N4, O' phase,
It also absorbs heat when the X phase is generated, suppressing abnormal temperature rise due to 3i nitriding.

粘土添加による以上の効果は鋳込成形品に限定されるも
のでなく、押出成形品、プレス成形品についても利用で
きる。
The above effects of adding clay are not limited to cast molded products, but can also be applied to extrusion molded products and press molded products.

焼結体性質に及ぼす粘土添加の影響は本発明の組成の如
<Siが30重量%以上存在することにより小さくでき
る。これは焼成工程でSiが粘土At 2 Si 20
S (OH)4を還元して反応を促進し、Si 3 N
4.0’相、X相を生成させるためと思われる。成形体
をN2中1500℃で焼成した場合、粘土添加素地は反
応焼結Si 3N4 木地とほぼ同じ気孔率・曲げ強度
を示し、耐熱衝撃性も大差なく、耐酸化性については優
れた性質をさえ示した。このような性質が得られる理由
は焼結体が主として反応焼結晶と同じSi 3 N4結
晶から成っており、この他にs; −AI−0−N原子
より成るO′相、X相が少鏝加わるにすぎないIこめで
ある。
The influence of clay addition on the properties of the sintered body can be reduced by the presence of 30% by weight or more of Si, as in the composition of the present invention. This is done during the firing process, where Si becomes clay At 2 Si 20
S(OH)4 is reduced to promote the reaction and Si3N
This seems to be to generate the 4.0' phase and the X phase. When the molded body was fired at 1500°C in N2, the clay-added base showed almost the same porosity and bending strength as the reactive sintered Si3N4 wood, there was no significant difference in thermal shock resistance, and it had excellent oxidation resistance. even showed. The reason why such properties are obtained is that the sintered body mainly consists of Si 3 N 4 crystals, which are the same as the reaction sintered crystals, and in addition, there are small amounts of O' phase and X phase consisting of s; -AI-0-N atoms. It is just a matter of adding an iron.

次に本発明の理解を深めるため実施例について説明づる
Next, examples will be described in order to better understand the present invention.

実施例1 市販の金属珪素(平均径6μ、純度98.5%)とSi
 3 N4 (60+11 esh @度98.5%)
を各々ボールミルに入れ、エタノールを加えて4;1r
および401+r粉砕し平均径3μおよび1.5μの粉
体を得た。エタノールを除去した後空気中、150℃で
乾燥した。St 、 S! 3N4および粘土(仲買蛙
目粘土)を表1のように調合し、水およびアクリル酸ソ
ーダを加えてポットで15hr撹拌し水分55%の泥漿
を調製した。1010X5X40のテストピースを鋳込
成形し、その性質を調べたところ表1のような成形性質
が得られた。
Example 1 Commercially available metal silicon (average diameter 6μ, purity 98.5%) and Si
3 N4 (60+11 esh @98.5% degree)
Place each in a ball mill, add ethanol and boil for 4:1r.
and 401+r grinding to obtain powders with average diameters of 3μ and 1.5μ. After removing ethanol, it was dried in air at 150°C. St, S! 3N4 and clay (Nakabaku Kajime clay) were mixed as shown in Table 1, water and sodium acrylate were added, and the mixture was stirred in a pot for 15 hours to prepare a slurry with a moisture content of 55%. A test piece measuring 1010 x 5 x 40 was cast and its properties investigated, and the molding properties shown in Table 1 were obtained.

粘土量の増大につれて着肉速度が小さくなること、可塑
性係数、乾燥強度が大きくなることが認められる。適正
な粘土量の範囲は可塑性より粘土10%以上、着肉速度
より50%以下である。
It is observed that as the amount of clay increases, the deposition rate decreases, and the plasticity coefficient and dry strength increase. The appropriate range of clay amount is 10% or more of clay based on plasticity and 50% or less based on inking speed.

表1 2 42.3 52,7 5,0 0.95 1,70
 0 20,03 42.3 47.7 10,0 0
,98 1,50 0.21 24,04 42.3 
37.7 20.0 1,00 1.13 0.40 
30,25 42.3 17.7 40,0 1,38
 0.99 .0.58 42.3*着肉速度定数− 〔名肉厚さC1n) 2/ (着肉時間sea )**
可塑性係数:素地強度が5Kg/cm’ となる素地水
分での破壊までの変形量 実施例2 実施例1の試料をアルミナルツボに入れ、タンマン類で
焼成した。真空置換により炉内をN2雰囲気にした後、
1150℃までは400℃/hrで昇温し、1150〜
1350℃間は100℃/hrで昇温し窒素化反応を進
行させた。
Table 1 2 42.3 52,7 5,0 0.95 1,70
0 20,03 42.3 47.7 10,0 0
,98 1,50 0.21 24,04 42.3
37.7 20.0 1,00 1.13 0.40
30,25 42.3 17.7 40,0 1,38
0.99. 0.58 42.3 * Thickening rate constant - [Nominal wall thickness C1n) 2/ (Thickening time sea)**
Plasticity coefficient: Amount of deformation until fracture due to moisture in the substrate so that the substrate strength is 5 Kg/cm' Example 2 The sample of Example 1 was placed in an alumina crucible and fired in a Tamman type. After creating a N2 atmosphere inside the furnace by vacuum displacement,
The temperature is raised at a rate of 400°C/hr up to 1150°C, and from 1150°C to
During the period of 1350°C, the temperature was raised at a rate of 100°C/hr to advance the nitrogenization reaction.

さらに1500℃まで400℃/hrでWmし電流を切
り放冷した。焼結体性質は次の通り。
Further, Wm was applied at a rate of 400° C./hr to 1500° C., and the current was turned off and the sample was left to cool. The properties of the sintered body are as follows.

表2 晶相 jAIjL J脇、ρ′ 4at、ρ′ 5 42.3 17.7 30 30.8 12,7 
5oObLILi4−6’J気孔率・強度・耐熱衝撃性
は粘土量0%の反応焼結素地のバラツキ範囲内にあり、
粘土添加による大差は認められなかった。又粘土添加に
よりα、βSi 3N4の他にO′相、X相の生成が見
られた。
Table 2 Crystal phase jAIjL J side, ρ' 4at, ρ' 5 42.3 17.7 30 30.8 12,7
5oObLILi4-6'J porosity, strength, and thermal shock resistance are within the variation range of the reaction sintered base material with 0% clay content.
No major difference was observed due to the addition of clay. In addition, the addition of clay resulted in the formation of O' phase and X phase in addition to α and βSi 3N4.

史論例3 実施例1のNo、1素地(粘土O%) 、No。History example 3 No. 1 of Example 1, 1 base (clay 0%), No.

5素地(粘土40%)泥漿にて120φ高ざ120II
IImのルツボを鋳込成形した。粘土0%素地では乾燥
時にクラックが生じるため、排泥後直ちに成形体を脱型
し、プラスチック・フィルムに包lυで乾燥をおさえ、
成形体内の水分を均一にした後、成形体内の水分が均一
に減少するように布で包んで室内で徐乾燥する必要があ
ったが、粘土40%素地では排泥後型ごと40℃で乾燥
し、成形体が収縮しく型から離れた後に脱型し、さらに
40℃で乾燥をつづりでも乾燥クラックの発生がなかっ
た。乾燥時間は粘土0%素地では最低3日が必要であっ
たのに対し、粘土40%素地は1日でよく、乾燥工程も
簡略化できた。又粘土0%素地はかたくてもろいため成
形体の取扱いに細心の注意を必要としたが、粘土40%
素地は可塑性を示り水分領域以下でも多少のフレキシビ
リティがあり、強度も大きいため取扱いが容易ひあった
5 base material (40% clay) slurry 120φ height 120II
A IIm crucible was cast. Since cracks occur when drying with a 0% clay base, the molded body is removed from the mold immediately after removing mud, wrapped in plastic film to prevent drying, and
After equalizing the moisture inside the molded object, it was necessary to wrap it in cloth and slowly dry it indoors so that the moisture inside the molded object would be reduced evenly, but with the 40% clay base, the entire mold was dried at 40°C after removing the mud. However, even after the molded product shrunk and separated from the mold, it was removed from the mold and further dried at 40° C., but no drying cracks occurred. While a 0% clay base required at least 3 days to dry, a 40% clay base required only 1 day, simplifying the drying process. Also, since the 0% clay base is hard and brittle, great care was required when handling the molded body, but the 40% clay base
The base material showed plasticity, had some flexibility even below the moisture range, and was strong, making it easy to handle.

以上の実施例の結果より明らかなように、S! −8!
 3 N4 m地に粘土を加えることにより、焼結体性
質を損うことなしに原料コストの低下・原料粉砕工程の
簡略化・成形乾燥1稈の簡略化を図ることが可能であり
、窒化珪素質焼結体を安価に製造する目的を達成するこ
とができる。
As is clear from the results of the above examples, S! -8!
By adding clay to the 3N4m base, it is possible to reduce raw material costs, simplify the raw material crushing process, and simplify the molding and drying process without impairing the properties of the sintered body. The purpose of manufacturing quality sintered bodies at low cost can be achieved.

特許出願人 東陶機器株式会社Patent applicant: Totokiki Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] Si 30〜75重量%、粘土10〜50重1i1%、
残部が5i3N4J:り成る混合粉末を形成し、成形体
を非酸化性含窒素雰囲気において焼成づることを特徴と
づる窒化珪素質焼結体の製造方法。
Si 30-75% by weight, clay 10-50% by weight, 1i1%,
1. A method for producing a silicon nitride sintered body, which comprises forming a mixed powder whose remainder is 5i3N4J, and firing the compact in a non-oxidizing nitrogen-containing atmosphere.
JP58191204A 1983-10-12 1983-10-12 Manufacture of silicon nitride sintered body Granted JPS6081067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58191204A JPS6081067A (en) 1983-10-12 1983-10-12 Manufacture of silicon nitride sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58191204A JPS6081067A (en) 1983-10-12 1983-10-12 Manufacture of silicon nitride sintered body

Publications (2)

Publication Number Publication Date
JPS6081067A true JPS6081067A (en) 1985-05-09
JPS6128628B2 JPS6128628B2 (en) 1986-07-01

Family

ID=16270633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58191204A Granted JPS6081067A (en) 1983-10-12 1983-10-12 Manufacture of silicon nitride sintered body

Country Status (1)

Country Link
JP (1) JPS6081067A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005179176A (en) * 2003-08-26 2005-07-07 Kyocera Corp Fused metal member and method for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005179176A (en) * 2003-08-26 2005-07-07 Kyocera Corp Fused metal member and method for producing the same

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