JPS6088537U - Liquid phase epitaxial growth equipment - Google Patents
Liquid phase epitaxial growth equipmentInfo
- Publication number
- JPS6088537U JPS6088537U JP18141683U JP18141683U JPS6088537U JP S6088537 U JPS6088537 U JP S6088537U JP 18141683 U JP18141683 U JP 18141683U JP 18141683 U JP18141683 U JP 18141683U JP S6088537 U JPS6088537 U JP S6088537U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- growth equipment
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来装置の断面図、第２図は本考案の一実施例
の断面図である。
１．１０・・・基板ホルダー、２・・・メトルホルダー
、３・・・半導体基板、４，５・・・半導体メルト、１
１・・・第１のメルト台、１２・・・第２のメルト台。FIG. 1 is a sectional view of a conventional device, and FIG. 2 is a sectional view of an embodiment of the present invention. 1.10... Substrate holder, 2... Meter holder, 3... Semiconductor substrate, 4, 5... Semiconductor melt, 1
1...First melt table, 12...Second melt table.
Claims (1)
ーの上面と略々同一高さの上面を有しかつ相互に入換え
可能に配設された第１、第２のメルト台を備えたことを
特徴とする液相エピタキシャル成長装置。A substrate holder, and first and second melting tables each having an upper surface substantially the same height as the upper surface of the substrate holder on both sides of the substrate holder and being arranged interchangeably. Features of liquid phase epitaxial growth equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18141683U JPS6088537U (en) | 1983-11-24 | 1983-11-24 | Liquid phase epitaxial growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18141683U JPS6088537U (en) | 1983-11-24 | 1983-11-24 | Liquid phase epitaxial growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6088537U true JPS6088537U (en) | 1985-06-18 |
Family
ID=30393123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18141683U Pending JPS6088537U (en) | 1983-11-24 | 1983-11-24 | Liquid phase epitaxial growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6088537U (en) |
-
1983
- 1983-11-24 JP JP18141683U patent/JPS6088537U/en active Pending
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